JPS6251172U - - Google Patents
Info
- Publication number
- JPS6251172U JPS6251172U JP14205685U JP14205685U JPS6251172U JP S6251172 U JPS6251172 U JP S6251172U JP 14205685 U JP14205685 U JP 14205685U JP 14205685 U JP14205685 U JP 14205685U JP S6251172 U JPS6251172 U JP S6251172U
- Authority
- JP
- Japan
- Prior art keywords
- film unwinding
- chamber
- film
- section
- roll coater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985142056U JPH0220211Y2 (en, 2012) | 1985-09-19 | 1985-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985142056U JPH0220211Y2 (en, 2012) | 1985-09-19 | 1985-09-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6251172U true JPS6251172U (en, 2012) | 1987-03-30 |
| JPH0220211Y2 JPH0220211Y2 (en, 2012) | 1990-06-01 |
Family
ID=31050422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985142056U Expired JPH0220211Y2 (en, 2012) | 1985-09-19 | 1985-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220211Y2 (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0182376U (en, 2012) * | 1987-11-24 | 1989-06-01 | ||
| JP2010018828A (ja) * | 2008-07-09 | 2010-01-28 | Asahi Kasei E-Materials Corp | 真空蒸着装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59173267A (ja) * | 1983-03-23 | 1984-10-01 | Fuji Photo Film Co Ltd | 薄膜形成装置 |
| JPS59173266A (ja) * | 1983-03-23 | 1984-10-01 | Fuji Photo Film Co Ltd | 薄膜形成装置 |
| JPS6067671A (ja) * | 1983-09-24 | 1985-04-18 | Anelva Corp | 薄膜作成装置 |
-
1985
- 1985-09-19 JP JP1985142056U patent/JPH0220211Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59173267A (ja) * | 1983-03-23 | 1984-10-01 | Fuji Photo Film Co Ltd | 薄膜形成装置 |
| JPS59173266A (ja) * | 1983-03-23 | 1984-10-01 | Fuji Photo Film Co Ltd | 薄膜形成装置 |
| JPS6067671A (ja) * | 1983-09-24 | 1985-04-18 | Anelva Corp | 薄膜作成装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0182376U (en, 2012) * | 1987-11-24 | 1989-06-01 | ||
| JP2010018828A (ja) * | 2008-07-09 | 2010-01-28 | Asahi Kasei E-Materials Corp | 真空蒸着装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0220211Y2 (en, 2012) | 1990-06-01 |