JPS6251170U - - Google Patents

Info

Publication number
JPS6251170U
JPS6251170U JP14338685U JP14338685U JPS6251170U JP S6251170 U JPS6251170 U JP S6251170U JP 14338685 U JP14338685 U JP 14338685U JP 14338685 U JP14338685 U JP 14338685U JP S6251170 U JPS6251170 U JP S6251170U
Authority
JP
Japan
Prior art keywords
vacuum
planetarium
annular holder
revolves
attaching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14338685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14338685U priority Critical patent/JPS6251170U/ja
Publication of JPS6251170U publication Critical patent/JPS6251170U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP14338685U 1985-09-19 1985-09-19 Pending JPS6251170U (US06312121-20011106-C00033.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14338685U JPS6251170U (US06312121-20011106-C00033.png) 1985-09-19 1985-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14338685U JPS6251170U (US06312121-20011106-C00033.png) 1985-09-19 1985-09-19

Publications (1)

Publication Number Publication Date
JPS6251170U true JPS6251170U (US06312121-20011106-C00033.png) 1987-03-30

Family

ID=31053022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14338685U Pending JPS6251170U (US06312121-20011106-C00033.png) 1985-09-19 1985-09-19

Country Status (1)

Country Link
JP (1) JPS6251170U (US06312121-20011106-C00033.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0297035A (ja) * 1988-05-24 1990-04-09 Balzers Ag 真空処理装置及びそれによるワーク処理方法
JP2006339181A (ja) * 2005-05-31 2006-12-14 Nec Electronics Corp ウエハ保持治具
JP2013032574A (ja) * 2011-08-03 2013-02-14 Nippon Electric Glass Co Ltd スパッタリング成膜装置のカルーセル及びスパッタリング成膜装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010235A (US06312121-20011106-C00033.png) * 1973-06-01 1975-02-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010235A (US06312121-20011106-C00033.png) * 1973-06-01 1975-02-01

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0297035A (ja) * 1988-05-24 1990-04-09 Balzers Ag 真空処理装置及びそれによるワーク処理方法
JP2006339181A (ja) * 2005-05-31 2006-12-14 Nec Electronics Corp ウエハ保持治具
JP4658692B2 (ja) * 2005-05-31 2011-03-23 ルネサスエレクトロニクス株式会社 ウエハ保持治具
JP2013032574A (ja) * 2011-08-03 2013-02-14 Nippon Electric Glass Co Ltd スパッタリング成膜装置のカルーセル及びスパッタリング成膜装置

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