JPS625109A - 光像間隔の測定装置 - Google Patents

光像間隔の測定装置

Info

Publication number
JPS625109A
JPS625109A JP14510485A JP14510485A JPS625109A JP S625109 A JPS625109 A JP S625109A JP 14510485 A JP14510485 A JP 14510485A JP 14510485 A JP14510485 A JP 14510485A JP S625109 A JPS625109 A JP S625109A
Authority
JP
Japan
Prior art keywords
light
photoelectric conversion
receiving surface
interval
chopper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14510485A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0566962B2 (enExample
Inventor
Toru Iwane
透 岩根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP14510485A priority Critical patent/JPS625109A/ja
Publication of JPS625109A publication Critical patent/JPS625109A/ja
Publication of JPH0566962B2 publication Critical patent/JPH0566962B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP14510485A 1985-07-02 1985-07-02 光像間隔の測定装置 Granted JPS625109A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14510485A JPS625109A (ja) 1985-07-02 1985-07-02 光像間隔の測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14510485A JPS625109A (ja) 1985-07-02 1985-07-02 光像間隔の測定装置

Publications (2)

Publication Number Publication Date
JPS625109A true JPS625109A (ja) 1987-01-12
JPH0566962B2 JPH0566962B2 (enExample) 1993-09-22

Family

ID=15377466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14510485A Granted JPS625109A (ja) 1985-07-02 1985-07-02 光像間隔の測定装置

Country Status (1)

Country Link
JP (1) JPS625109A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102366468B1 (ko) * 2021-06-28 2022-02-23 강구봉 리니어가이드 가공을 위한 롤링가공장치

Also Published As

Publication number Publication date
JPH0566962B2 (enExample) 1993-09-22

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