JPS6250768U - - Google Patents
Info
- Publication number
- JPS6250768U JPS6250768U JP14161285U JP14161285U JPS6250768U JP S6250768 U JPS6250768 U JP S6250768U JP 14161285 U JP14161285 U JP 14161285U JP 14161285 U JP14161285 U JP 14161285U JP S6250768 U JPS6250768 U JP S6250768U
- Authority
- JP
- Japan
- Prior art keywords
- spinner
- workpiece
- ring member
- suction chamber
- case
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案に係る塗布装置の縦断面図、第
２図は同塗布装置の平面図、第３図はスピンナー
の斜視図である。
尚、図面中１はケース、２は上板、３は壁板、
４は底板、９はスピンナー、１５は吸引室、１７
はリング部材、１７ａはスカート部、Ｗは被処理
部材である。
FIG. 1 is a longitudinal sectional view of a coating device according to the present invention, FIG. 2 is a plan view of the coating device, and FIG. 3 is a perspective view of a spinner. In addition, in the drawing, 1 is the case, 2 is the upper plate, 3 is the wall plate,
4 is the bottom plate, 9 is the spinner, 15 is the suction chamber, 17
17a is a ring member, 17a is a skirt portion, and W is a member to be processed.
Claims (1)
物を載置し、スピンナーにて被処理物を回転せし
めることで被処理物表面にノズルから滴下した塗
布液を遠心力で被処理物表面に均一に広げるよう
にした塗布装置において、前記ケース内には吸引
室が形成され、また前記スピンナー上方にはリン
グ部材が取付けられ、このリング部材の下部に形
成されるスカート部は前記吸引室内に垂下してい
ることを特徴とする塗布装置。 The workpiece is placed on a spinner facing from below inside the case, and by rotating the workpiece with the spinner, the coating liquid dripped from the nozzle onto the workpiece surface is uniformly distributed over the workpiece surface using centrifugal force. In the spreadable coating device, a suction chamber is formed in the case, a ring member is attached above the spinner, and a skirt portion formed at a lower part of the ring member hangs down into the suction chamber. A coating device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985141612U JPH0441975Y2 (en) | 1985-09-17 | 1985-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985141612U JPH0441975Y2 (en) | 1985-09-17 | 1985-09-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6250768U true JPS6250768U (en) | 1987-03-30 |
| JPH0441975Y2 JPH0441975Y2 (en) | 1992-10-02 |
Family
ID=31049559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985141612U Expired JPH0441975Y2 (en) | 1985-09-17 | 1985-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0441975Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55155572U (en) * | 1979-04-20 | 1980-11-08 |
-
1985
- 1985-09-17 JP JP1985141612U patent/JPH0441975Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55155572U (en) * | 1979-04-20 | 1980-11-08 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0441975Y2 (en) | 1992-10-02 |