JPS6249725B2 - - Google Patents
Info
- Publication number
- JPS6249725B2 JPS6249725B2 JP19714282A JP19714282A JPS6249725B2 JP S6249725 B2 JPS6249725 B2 JP S6249725B2 JP 19714282 A JP19714282 A JP 19714282A JP 19714282 A JP19714282 A JP 19714282A JP S6249725 B2 JPS6249725 B2 JP S6249725B2
- Authority
- JP
- Japan
- Prior art keywords
- iron
- ions
- magnetic
- thin film
- coercive force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 108
- 229910052742 iron Inorganic materials 0.000 claims description 61
- -1 nitrogen molecular ions Chemical class 0.000 claims description 29
- 239000010409 thin film Substances 0.000 claims description 23
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 14
- 229910052757 nitrogen Inorganic materials 0.000 claims description 11
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 8
- 229910001337 iron nitride Inorganic materials 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 230000005684 electric field Effects 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims 1
- 230000005415 magnetization Effects 0.000 description 19
- 239000010408 film Substances 0.000 description 8
- 150000002500 ions Chemical class 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 238000010894 electron beam technology Methods 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- ZGDWHDKHJKZZIQ-UHFFFAOYSA-N cobalt nickel Chemical compound [Co].[Ni].[Ni].[Ni] ZGDWHDKHJKZZIQ-UHFFFAOYSA-N 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen(.) Chemical compound [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19714282A JPS5987809A (ja) | 1982-11-10 | 1982-11-10 | 磁気記録媒体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19714282A JPS5987809A (ja) | 1982-11-10 | 1982-11-10 | 磁気記録媒体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5987809A JPS5987809A (ja) | 1984-05-21 |
| JPS6249725B2 true JPS6249725B2 (enrdf_load_stackoverflow) | 1987-10-21 |
Family
ID=16369452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19714282A Granted JPS5987809A (ja) | 1982-11-10 | 1982-11-10 | 磁気記録媒体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5987809A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH061551B2 (ja) * | 1984-08-24 | 1994-01-05 | 富士写真フイルム株式会社 | 磁気記録媒体の製造方法 |
| JPS6154023A (ja) * | 1984-08-24 | 1986-03-18 | Fuji Photo Film Co Ltd | 磁気記録媒体 |
-
1982
- 1982-11-10 JP JP19714282A patent/JPS5987809A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5987809A (ja) | 1984-05-21 |
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