JPS6247634B2 - - Google Patents

Info

Publication number
JPS6247634B2
JPS6247634B2 JP59081503A JP8150384A JPS6247634B2 JP S6247634 B2 JPS6247634 B2 JP S6247634B2 JP 59081503 A JP59081503 A JP 59081503A JP 8150384 A JP8150384 A JP 8150384A JP S6247634 B2 JPS6247634 B2 JP S6247634B2
Authority
JP
Japan
Prior art keywords
welding
laser beam
welding chamber
inert gas
welded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59081503A
Other languages
Japanese (ja)
Other versions
JPS60223694A (en
Inventor
Satoru Kurosawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON NUCLEAR FUELS
Original Assignee
NIPPON NUCLEAR FUELS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON NUCLEAR FUELS filed Critical NIPPON NUCLEAR FUELS
Priority to JP59081503A priority Critical patent/JPS60223694A/en
Publication of JPS60223694A publication Critical patent/JPS60223694A/en
Publication of JPS6247634B2 publication Critical patent/JPS6247634B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles
    • B23K26/1464Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • B23K26/147Features outside the nozzle for feeding the fluid stream towards the workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles
    • B23K26/1464Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • B23K26/1476Features inside the nozzle for feeding the fluid stream through the nozzle

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は、例えば核燃料棒或は燃料集合体用ス
ペーサ等の被溶接物の溶接をレーザ光によつて行
なうようにしたレーザ光による気密溶接装置に関
する。
[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to an airtight welding device using laser light, which welds objects to be welded, such as nuclear fuel rods or spacers for fuel assemblies, using laser light. Regarding.

〔発明の技術的背景およびその問題点〕[Technical background of the invention and its problems]

一般に、発電用原子炉等に使用される核燃料棒
は、第1図に示すように、ジルコニウム合金また
はステンレス鋼製の被覆管1の一端に端栓2を溶
接した後、その被覆管1内に二酸化ウランUO2
どの核燃料物質からなるペレツト3を装填し、上
記ペレツト3と被覆管1の開口端の間に形成され
る空間4にコイルスプリング5を装入し、さらに
被覆管1内に大気圧よりも高圧の不活性ガスを充
填し、開口端に端栓6を嵌合し、この端栓6を溶
接チヤンバー内に高圧雰囲気下のもとで密封溶接
することによつて製造されている。
In general, nuclear fuel rods used in power reactors, etc. are manufactured by welding an end plug 2 to one end of a zirconium alloy or stainless steel cladding tube 1, and then inserting the end plug into the cladding tube 1, as shown in Fig. 1. A pellet 3 made of nuclear fuel material such as uranium dioxide UO 2 is loaded, a coil spring 5 is inserted into the space 4 formed between the pellet 3 and the open end of the cladding tube 1, and a large It is manufactured by filling an inert gas with a pressure higher than atmospheric pressure, fitting an end plug 6 into the open end, and sealingly welding the end plug 6 into a welding chamber under a high pressure atmosphere. .

一方、上述のようにして製造された多数の核燃
料棒を組立てることにより構成された燃料集合体
における、各核燃料棒の間隔を保持するためのス
ペーサは、第2図および第3図に示すように、バ
ー7、デイバイダー8、スプリング9、バンド1
0等によつて構成され、バー7とデイバイダー8
との交点、或はバー7等とバンド10との交点等
が溶接されている。ところで、これらの溶接を行
なう場合には、溶接部の酸化、窒化を防止するた
めに被溶接物の一部または全部を気密状の溶接チ
ヤンバー内に挿入し、その溶接チヤンバー内を不
活性ガスの雰囲気とした状態で上記被溶接部の溶
接が行なわれている。
On the other hand, in a fuel assembly constructed by assembling a large number of nuclear fuel rods manufactured as described above, spacers for maintaining the spacing between each nuclear fuel rod are as shown in FIGS. 2 and 3. , bar 7, divider 8, spring 9, band 1
0 etc., bar 7 and divider 8
The intersection between the bar 7 and the band 10, or the intersection between the bar 7 and the band 10, etc., are welded. By the way, when performing these welds, in order to prevent oxidation and nitridation of the weld zone, part or all of the work to be welded is inserted into an airtight welding chamber, and the inside of the welding chamber is filled with inert gas. Welding of the above-mentioned parts to be welded is performed in an atmosphere.

第4図は、上述の如き核燃料棒或はスペーサ等
の溶接を行なう溶接装置の概略を示す一部断面側
面図であつて、密閉状の溶接チヤンバー11の一
側壁にはレーザ光導入窓12が設けられ、上記溶
接チヤンバー11の適宜個所には真空排気を行な
う排気管13および大気圧より高圧の不活性ガス
を溶接チヤンバー11内に送給する導管14が接
続されている。
FIG. 4 is a partially sectional side view schematically showing a welding apparatus for welding nuclear fuel rods or spacers as described above, in which a laser beam introduction window 12 is provided on one side wall of a sealed welding chamber 11. An exhaust pipe 13 for performing evacuation and a conduit 14 for supplying inert gas at a pressure higher than atmospheric pressure into the welding chamber 11 are connected to appropriate locations in the welding chamber 11.

一方、上記溶接チヤンバー11の外側部には、
上記レーザ光導入用窓12を経て被溶接物15の
溶接部にレーザ光を照射するレーザ光発生装置1
6が設けられており、そのレーザ光発生装置16
から照射されたレーザ光が集光レンズ17を介し
て上記溶接部に集光され、当該部の溶接を行なう
ようにしてある。
On the other hand, on the outside of the welding chamber 11,
A laser beam generator 1 that irradiates a welding part of a workpiece 15 with a laser beam through the laser beam introduction window 12
6 is provided, and its laser light generating device 16
The laser beam irradiated from the welding part is focused on the welding part through the condensing lens 17 to weld the part.

しかして、前記被溶接部15の溶接を行なう場
合には、その被溶接物15を溶接チヤンバー11
内に挿入し、排気管13を介して溶接チヤンバー
11内の空気を排出し、その後導管14を介して
不活性ガスを送り込んで大気圧よりも高い圧力雰
囲気にする。そして、レーザ光発生装置16から
のレーザ光を集光レンズ17を介してレーザ光導
入窓12を経て被溶接物の溶接部に集光させ、そ
の溶接部の溶接を行なう。
Therefore, when welding the part 15 to be welded, the part 15 to be welded is placed in the welding chamber 11.
The air in the welding chamber 11 is evacuated through the exhaust pipe 13, and then an inert gas is introduced through the conduit 14 to create a pressure atmosphere higher than atmospheric pressure. Then, the laser beam from the laser beam generator 16 is focused through the condensing lens 17 and the laser beam introducing window 12 onto the welding part of the object to be welded, thereby welding the welded part.

ところが、このような装置においては、レーザ
光導入窓は真空耐圧および不活性ガス加圧の要求
から、構造上強度的に窓材の板厚を大きくする必
要がある。したがつて、集光レンズと被溶接物と
の間に厚板の透過材が介在することになり、レー
ザ光の集光性が悪くなるとともに、エネルギ密度
が低下しレーザ溶接特有の深溶込みが得られない
等の問題がある。また、溶接チヤンバー内に不活
性ガスが封止されたまま溶接が行なわれるため、
金属蒸気によりプラズマが発生し、レーザ光のエ
ネルギが吸収され溶接溶込性が悪くなる等の問題
もある。
However, in such a device, the thickness of the window material needs to be increased for structural strength because the laser light introduction window is required to withstand vacuum pressure and pressurize inert gas. Therefore, a thick transparent material is interposed between the condensing lens and the workpiece, which deteriorates the focusing ability of the laser beam and reduces the energy density, resulting in the deep penetration characteristic of laser welding. There are problems such as not being able to obtain In addition, since welding is performed with inert gas sealed inside the welding chamber,
There are also problems such as plasma generated by the metal vapor, which absorbs the energy of the laser beam and impairs weld penetration.

〔発明の目的〕[Purpose of the invention]

本発明はこのような点に鑑み、良好な溶接溶込
性が得られるようにしたレーザ光による気密溶接
装置を得ることを目的とする。
In view of these points, it is an object of the present invention to provide an airtight welding device using a laser beam that allows good weld penetration.

〔発明の概要〕[Summary of the invention]

本発明は、気密状の溶接チヤンバー内に被溶接
物の一部または全部を挿入し、その溶接チヤンバ
ー内における高圧力の不活性ガス雰囲気中におい
て被溶接部の溶接を行なうレーザ光による気密溶
接装置において、上記溶接チヤンバー内に入射さ
れたレーザ光の焦点を被溶接部の表面またはその
近傍に結ばせるための集光光学系を、上記溶接チ
ヤンバー内に設けたことを特徴とする。
The present invention is an airtight welding device using a laser beam, which inserts a part or all of a workpiece into an airtight welding chamber and welds the workpiece in a high-pressure inert gas atmosphere inside the welding chamber. The welding chamber is characterized in that a condensing optical system is provided in the welding chamber to focus the laser beam incident on the welding chamber at or near the surface of the welded part.

〔発明の実施例〕[Embodiments of the invention]

以下、第5図を参照して本発明の一実施例につ
いて説明する。
An embodiment of the present invention will be described below with reference to FIG.

第5図は核燃料棒溶接用の溶接装置であつて、
溶接チヤンバー11の一側壁には核燃料棒の被覆
管1の端部を挿入自在とする開口部20が設けら
れており、その開口部20と対向する位置には、
端栓6を保持してこれを被覆管端に圧接自在とす
る端栓圧入機構21が設けられている。
Figure 5 shows a welding device for welding nuclear fuel rods,
An opening 20 is provided in one side wall of the welding chamber 11 into which the end of the cladding tube 1 of the nuclear fuel rod can be inserted, and at a position opposite to the opening 20,
An end plug press-fitting mechanism 21 is provided which holds the end plug 6 and allows it to be press-fitted to the end of the cladding tube.

一方、上記開口部20が設けられている側壁と
直交する側壁にはレーザ光導入用窓12が設けら
れており、さらに上記溶接チヤンバー11の外側
部には、上記レーザ光導入用窓12を経て被溶接
部にレーザ光を照射するレーザ光発生装置16が
設けられている。また、溶接チヤンバー11内に
は、レーザ光導入用窓12と同心状に案内筒22
が突設されており、その案内筒22内には集光光
学系23が軸線方向に摺動調節可能に装着されて
いる。
On the other hand, a laser beam introducing window 12 is provided on a side wall perpendicular to the side wall in which the opening 20 is provided, and furthermore, a laser beam introducing window 12 is provided on the outer side of the welding chamber 11 through the laser beam introducing window 12. A laser beam generator 16 is provided that irradiates the welded portion with a laser beam. In addition, a guide tube 22 is provided in the welding chamber 11 concentrically with the laser beam introduction window 12.
is provided in a protruding manner, and a condensing optical system 23 is mounted within the guide tube 22 so as to be slidable and adjustable in the axial direction.

すなわち、上記案内筒22内には、先端に切頭
円錐筒部を有するシールドキヤツプ24が上記案
内筒22の軸線方向に摺動可能に設けられてお
り、そのシールドキヤツプ24内にこれと同心状
に集光レンズ25が設けられている。また、上記
シールドキヤツプ24は光学系駆動装置26に連
結されており、その光学系駆動装置26の作動に
よつて、溶接チヤンバー11内に突設された案内
ロツド27に沿つて移動するようにしてあり、上
記集光レンズ25が被溶接部に対して進退するよ
うにしてある。
That is, inside the guide tube 22, a shield cap 24 having a truncated conical tube portion at the tip is provided so as to be slidable in the axial direction of the guide tube 22. A condensing lens 25 is provided at. Further, the shield cap 24 is connected to an optical system drive device 26, and is moved along a guide rod 27 protruding into the welding chamber 11 by the operation of the optical system drive device 26. The condenser lens 25 moves forward and backward relative to the welded portion.

また、前記溶接チヤンバー11の適宜個所に
は、電磁弁28およびリリーフバルブ29を有す
る真空排気管30、および大気圧より高圧の不活
性ガスを電磁弁31を介して溶接チヤンバー11
内に送給する不活性ガス供給管32がそれぞれ接
続されている。上記不活性ガス供給管32は、パ
イプ33を介して前記シールドキヤツプ24内に
接続されるとともに、溶接点近傍部に開口するガ
スノズル34に接続されている。
Further, a vacuum exhaust pipe 30 having a solenoid valve 28 and a relief valve 29 is provided at an appropriate location in the welding chamber 11, and an inert gas having a pressure higher than atmospheric pressure is supplied to the welding chamber 11 through the solenoid valve 31.
An inert gas supply pipe 32 is connected to each of the inert gas supply pipes 32 to feed the inside. The inert gas supply pipe 32 is connected to the inside of the shield cap 24 via a pipe 33 and to a gas nozzle 34 that opens near the welding point.

しかして、被覆管1の開口端部に端栓6を溶接
する場合には、被覆管1の開口端部を開口部20
を経て溶接チヤンバー11内に挿入し、電磁弁2
8を開いて真空排気管30を介して溶接チヤンバ
ー11内の空気を排出し、その後電磁弁31を開
いて溶接チヤンバー11内に不活性ガスを送り込
んで、リリーフバルブ29を介して溶接チヤンバ
ー11内を大気圧よりも高い圧力雰囲気にする。
それで端栓圧入機構21によつて端栓6を被覆管
1の開口端に圧入するとともに、光学系駆動装置
26によつてシールドキヤツプ24とともに集光
レンズ25を退進させ、レーザ光の焦点が溶接部
の表面またはその近傍の所望位置に来るように移
動させ、不活性ガスをシールドキヤツプ24内に
供給しつづけるとともにガスノズル34から溶接
部表面に不活性ガスを吹きつけながら、レーザ光
発生装置16からのレーザ光をレーザ光導入窓1
2および集光レンズ25を経て端栓と被覆管との
溶接部に集光させるとともに、被覆管1を回転さ
せることによつて上記溶接部の溶接を行なう。こ
のようにして、レーザ光を任意な微小径に集光し
エネルギ密度を溶接性上適性な状態として溶接を
行なうとともに、不活性ガスにより溶接によつて
発生した金属蒸気が除去され溶接中にプラズマが
発生することが防止される。
Therefore, when welding the end plug 6 to the open end of the cladding tube 1, the open end of the cladding tube 1 is welded to the opening 20.
into the welding chamber 11 through the solenoid valve 2.
8 to exhaust the air inside the welding chamber 11 through the vacuum exhaust pipe 30, and then open the solenoid valve 31 to send inert gas into the welding chamber 11 through the relief valve 29. to create a pressure atmosphere higher than atmospheric pressure.
Therefore, the end plug 6 is press-fitted into the open end of the cladding tube 1 by the end plug press-fitting mechanism 21, and the condensing lens 25 is retracted together with the shield cap 24 by the optical system drive device 26, so that the focus of the laser beam is The laser beam generator 16 is moved to a desired position on or near the surface of the welding part, and while continuing to supply inert gas into the shield cap 24 and blowing the inert gas from the gas nozzle 34 onto the surface of the welding part. Laser light introduction window 1
2 and condenser lens 25 to the welded portion between the end plug and the cladding tube, and the welded portion is welded by rotating the cladding tube 1. In this way, welding is carried out by concentrating the laser beam into an arbitrary minute diameter and setting the energy density to a state suitable for weldability, and at the same time, the metal vapor generated during welding is removed by the inert gas, and plasma is generated during welding. is prevented from occurring.

なお、スペーサの溶接に際しては、スペーサを
移動、転回させることにより各溶接部の位置決め
もそれぞれ行なうことができる。また、集光光学
系は集光レンズのみに限らず、例えば凹面鏡を使
用してもよい。
In addition, when welding the spacers, each welding part can be positioned by moving and rotating the spacers. Further, the condensing optical system is not limited to a condensing lens, and for example, a concave mirror may be used.

〔発明の効果〕〔Effect of the invention〕

以上説明したように、本発明においては溶接チ
ヤンバー内に入射されたレーザ光の焦点を被溶接
部の表面またはその近傍に結ばせるための集光光
学系を、上記溶接チヤンバー内に設けたので、集
光光学系と被溶接部間に厚板の透過材が介在する
ことなく、集光性の悪化およびエネルギ密度の低
下を防止でき、レーザ溶接特有の深溶込みを得る
ことができて健全な溶接品質を得ることができ
る。また、集光光学系を被溶接部に対して進退可
能とした場合には、より確実にレーザ光を十分に
小さなスポツト径に集光でき、エネルギ密度を十
分確保でき、さらに不活性ガスを被溶接部の表面
に吹きつけながら溶接する場合には、金属蒸気の
レーザ光径路中でのプラズマ化が防止され、プラ
ズマによる溶接溶込性の劣化を一層防止すること
ができる。
As explained above, in the present invention, a condensing optical system is provided in the welding chamber to focus the laser beam incident on the welding chamber at or near the surface of the welded part. There is no thick transparent material between the condensing optical system and the part to be welded, which prevents deterioration of light convergence and energy density, and enables deep penetration, which is unique to laser welding, to be achieved in a healthy manner. Welding quality can be obtained. Furthermore, if the condensing optical system is made to move forward and backward relative to the part to be welded, it is possible to more reliably condense the laser beam into a sufficiently small spot diameter, ensure sufficient energy density, and further improve the ability to cover the welded part with inert gas. When welding is performed while spraying onto the surface of the welding part, the metal vapor is prevented from turning into plasma in the laser beam path, and deterioration of weld penetration due to plasma can be further prevented.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は原子炉用核燃料棒の一例を示す縦断面
図、第2図はスペーサの平面図、第3図はスペー
サの側面図、第4図はすでに提案されたレーザ光
溶接装置の一部断面側面図、第5図は本発明の溶
接装置の一部断面側面図である。 1……被覆管、2,6……端栓、11……溶接
チヤンバー、12……レーザ光導入窓、16……
レーザ光発生装置、23……集光光学系、24…
…シールドキヤツプ、25……集光レンズ、30
……真空排気管、32……不活性ガス供給管、3
4……ガスノズル。
Figure 1 is a vertical cross-sectional view showing an example of a nuclear fuel rod for a nuclear reactor, Figure 2 is a plan view of a spacer, Figure 3 is a side view of a spacer, and Figure 4 is a part of a laser beam welding device that has already been proposed. FIG. 5 is a partially sectional side view of the welding apparatus of the present invention. 1... Cladding tube, 2, 6... End plug, 11... Welding chamber, 12... Laser light introduction window, 16...
Laser light generator, 23... Condensing optical system, 24...
...Shield cap, 25...Condensing lens, 30
...Evacuation pipe, 32...Inert gas supply pipe, 3
4...Gas nozzle.

Claims (1)

【特許請求の範囲】[Claims] 1 気密状の溶接チヤンバー内に被溶接物の一部
または全部を挿入し、その溶接チヤンバー内にお
ける高圧力の不活性ガス雰囲気中において被溶接
部の溶接を行なうレーザ光による気密溶接装置に
おいて、上記溶接チヤンバー内に入射されたレー
ザ光の焦点を被溶接部の表面またはその近傍に結
ばせるためのレーザ光焦点位置を変化させること
ができる集光光学系を、上記溶接チヤンバー内に
設け、かつ、不活性ガスを被溶接部の近傍に開口
するガスノズルから溶接チヤンバー内に供給する
ことを特徴とする、レーザ光による気密溶接装
置。
1. In an airtight welding device using laser light that inserts part or all of the workpiece into an airtight welding chamber and welds the workpiece in a high-pressure inert gas atmosphere inside the welding chamber, the above-mentioned A condensing optical system capable of changing a laser beam focal point position for focusing the laser beam incident into the welding chamber on or near the surface of the welded part is provided in the welding chamber, and An airtight welding device using a laser beam, characterized in that an inert gas is supplied into a welding chamber from a gas nozzle that opens near a welded part.
JP59081503A 1984-04-23 1984-04-23 Airtight welding device by laser light Granted JPS60223694A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59081503A JPS60223694A (en) 1984-04-23 1984-04-23 Airtight welding device by laser light

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59081503A JPS60223694A (en) 1984-04-23 1984-04-23 Airtight welding device by laser light

Publications (2)

Publication Number Publication Date
JPS60223694A JPS60223694A (en) 1985-11-08
JPS6247634B2 true JPS6247634B2 (en) 1987-10-08

Family

ID=13748160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59081503A Granted JPS60223694A (en) 1984-04-23 1984-04-23 Airtight welding device by laser light

Country Status (1)

Country Link
JP (1) JPS60223694A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0162425U (en) * 1987-10-15 1989-04-21

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Publication number Priority date Publication date Assignee Title
JP2803106B2 (en) * 1988-10-28 1998-09-24 日本電気株式会社 Optical equipment for laser processing
JP3119090B2 (en) * 1994-10-05 2000-12-18 株式会社日立製作所 Underwater laser processing device and underwater construction method using the device
TW569351B (en) * 2002-11-22 2004-01-01 Au Optronics Corp Excimer laser anneal apparatus and the application of the same
JP4844715B2 (en) 2005-08-25 2011-12-28 澁谷工業株式会社 Hybrid laser processing equipment
US8510925B2 (en) 2008-09-04 2013-08-20 Rolls-Royce Corporation System and method for sealing vacuum in hollow fan blades
DE102014210838A1 (en) * 2014-06-06 2015-12-17 Trumpf Laser Gmbh Einkoppeloptik, laser welding head and laser welding device with vacuum chamber
CN105728942B (en) * 2016-04-22 2018-07-06 哈尔滨工业大学 A kind of vacuum laser silk filling processing unit (plant) and vacuum laser silk filling method
RU170344U1 (en) * 2016-09-19 2017-04-21 Федеральное государственное бюджетное образовательное учреждение высшего образования "Казанский национальный исследовательский технический университет им. А.Н. Туполева - КАИ" (КНИТУ-КАИ) DEVICE FOR LASER PROCESSING OF THE PRODUCT

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59153089U (en) * 1983-03-31 1984-10-13 三菱電機株式会社 Laser beam processing equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0162425U (en) * 1987-10-15 1989-04-21

Also Published As

Publication number Publication date
JPS60223694A (en) 1985-11-08

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