JPS6247542U - - Google Patents
Info
- Publication number
- JPS6247542U JPS6247542U JP13846585U JP13846585U JPS6247542U JP S6247542 U JPS6247542 U JP S6247542U JP 13846585 U JP13846585 U JP 13846585U JP 13846585 U JP13846585 U JP 13846585U JP S6247542 U JPS6247542 U JP S6247542U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- gripper
- wafer
- holding part
- spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985138465U JPH0318435Y2 (US07922777-20110412-C00004.png) | 1985-09-10 | 1985-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985138465U JPH0318435Y2 (US07922777-20110412-C00004.png) | 1985-09-10 | 1985-09-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6247542U true JPS6247542U (US07922777-20110412-C00004.png) | 1987-03-24 |
| JPH0318435Y2 JPH0318435Y2 (US07922777-20110412-C00004.png) | 1991-04-18 |
Family
ID=31043472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985138465U Expired JPH0318435Y2 (US07922777-20110412-C00004.png) | 1985-09-10 | 1985-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0318435Y2 (US07922777-20110412-C00004.png) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63241948A (ja) * | 1987-03-30 | 1988-10-07 | Hitachi Ltd | ウエハ搬送方法 |
| JP2007021691A (ja) * | 2005-07-20 | 2007-02-01 | Yaskawa Electric Corp | リング搬送用ハンドとそれを用いた搬送装置 |
| CN103009385A (zh) * | 2011-09-26 | 2013-04-03 | 株式会社安川电机 | 机器人手和机器人 |
| JP2022091676A (ja) * | 2020-12-09 | 2022-06-21 | 田中精密工業株式会社 | 積層鉄心の加熱装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003024673A1 (fr) * | 2001-09-12 | 2003-03-27 | Takehide Hayashi | Main de robot a fonction de positionnement pour tranche en semiconducteur et substrat de verre a cristaux liquides |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4938345A (US07922777-20110412-C00004.png) * | 1972-08-25 | 1974-04-10 | ||
| JPS59201782A (ja) * | 1983-04-23 | 1984-11-15 | 大日本スクリ−ン製造株式会社 | ウエハ等の薄板物搬送装置 |
| JPS6079742U (ja) * | 1983-11-09 | 1985-06-03 | 日立電子エンジニアリング株式会社 | 角マスクチヤツク機構 |
| JPS61142450U (US07922777-20110412-C00004.png) * | 1985-02-25 | 1986-09-03 | ||
| JPS61267622A (ja) * | 1985-05-20 | 1986-11-27 | Canon Inc | ウエハ搬送装置 |
| JPS61199049U (US07922777-20110412-C00004.png) * | 1985-06-04 | 1986-12-12 |
-
1985
- 1985-09-10 JP JP1985138465U patent/JPH0318435Y2/ja not_active Expired
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4938345A (US07922777-20110412-C00004.png) * | 1972-08-25 | 1974-04-10 | ||
| JPS59201782A (ja) * | 1983-04-23 | 1984-11-15 | 大日本スクリ−ン製造株式会社 | ウエハ等の薄板物搬送装置 |
| JPS6079742U (ja) * | 1983-11-09 | 1985-06-03 | 日立電子エンジニアリング株式会社 | 角マスクチヤツク機構 |
| JPS61142450U (US07922777-20110412-C00004.png) * | 1985-02-25 | 1986-09-03 | ||
| JPS61267622A (ja) * | 1985-05-20 | 1986-11-27 | Canon Inc | ウエハ搬送装置 |
| JPS61199049U (US07922777-20110412-C00004.png) * | 1985-06-04 | 1986-12-12 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63241948A (ja) * | 1987-03-30 | 1988-10-07 | Hitachi Ltd | ウエハ搬送方法 |
| JP2007021691A (ja) * | 2005-07-20 | 2007-02-01 | Yaskawa Electric Corp | リング搬送用ハンドとそれを用いた搬送装置 |
| JP4600193B2 (ja) * | 2005-07-20 | 2010-12-15 | 株式会社安川電機 | リング搬送システム |
| CN103009385A (zh) * | 2011-09-26 | 2013-04-03 | 株式会社安川电机 | 机器人手和机器人 |
| JP2013071186A (ja) * | 2011-09-26 | 2013-04-22 | Yaskawa Electric Corp | ハンドおよびロボット |
| JP2022091676A (ja) * | 2020-12-09 | 2022-06-21 | 田中精密工業株式会社 | 積層鉄心の加熱装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0318435Y2 (US07922777-20110412-C00004.png) | 1991-04-18 |
