JPS6246802B2 - - Google Patents

Info

Publication number
JPS6246802B2
JPS6246802B2 JP10128180A JP10128180A JPS6246802B2 JP S6246802 B2 JPS6246802 B2 JP S6246802B2 JP 10128180 A JP10128180 A JP 10128180A JP 10128180 A JP10128180 A JP 10128180A JP S6246802 B2 JPS6246802 B2 JP S6246802B2
Authority
JP
Japan
Prior art keywords
light
detection means
dimensional shape
measuring device
aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10128180A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5726704A (en
Inventor
Yoshisada Oshida
Yoichi Kawada
Shinobu Watanabe
Noboru Umehara
Kenichi Isoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10128180A priority Critical patent/JPS5726704A/ja
Priority to US06/286,512 priority patent/US4473750A/en
Publication of JPS5726704A publication Critical patent/JPS5726704A/ja
Publication of JPS6246802B2 publication Critical patent/JPS6246802B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Optical Distance (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP10128180A 1980-07-25 1980-07-25 Measuring instrument for three-dimensional shape Granted JPS5726704A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10128180A JPS5726704A (en) 1980-07-25 1980-07-25 Measuring instrument for three-dimensional shape
US06/286,512 US4473750A (en) 1980-07-25 1981-07-24 Three-dimensional shape measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10128180A JPS5726704A (en) 1980-07-25 1980-07-25 Measuring instrument for three-dimensional shape

Publications (2)

Publication Number Publication Date
JPS5726704A JPS5726704A (en) 1982-02-12
JPS6246802B2 true JPS6246802B2 (US20030204162A1-20031030-M00001.png) 1987-10-05

Family

ID=14296475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10128180A Granted JPS5726704A (en) 1980-07-25 1980-07-25 Measuring instrument for three-dimensional shape

Country Status (1)

Country Link
JP (1) JPS5726704A (US20030204162A1-20031030-M00001.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01156253U (US20030204162A1-20031030-M00001.png) * 1988-04-13 1989-10-26
JPH0384402U (US20030204162A1-20031030-M00001.png) * 1989-12-19 1991-08-27
CN100400260C (zh) * 2003-03-27 2008-07-09 株式会社日本制钢所 直列螺杆式可塑化射出装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58142210A (ja) * 1982-02-18 1983-08-24 Hitachi Ltd 三次元曲面を有する被測定物体の形状測定方法
US5030008A (en) * 1988-10-11 1991-07-09 Kla Instruments, Corporation Method and apparatus for the automated analysis of three-dimensional objects

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01156253U (US20030204162A1-20031030-M00001.png) * 1988-04-13 1989-10-26
JPH0384402U (US20030204162A1-20031030-M00001.png) * 1989-12-19 1991-08-27
CN100400260C (zh) * 2003-03-27 2008-07-09 株式会社日本制钢所 直列螺杆式可塑化射出装置

Also Published As

Publication number Publication date
JPS5726704A (en) 1982-02-12

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