JPS6246231B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a solution coating device, which is a quick-drying solution in which the solvent evaporates relatively quickly. Protective liquids are applied to protect surfaces and maintain good quality, resists are applied to write semiconductor integrated circuit patterns onto mask substrates, and resists are applied to wafers. The present invention relates to a solution coating device that can automatically coat a material to be coated in a short time and economically by maintaining a uniform coating thickness arbitrarily set in advance.

Of course, since the manufacture of semiconductor integrated circuits requires ultra-fine processing technology, the materials to be coated, such as mask substrates and wafers, used in the manufacturing process must be of high quality and free from damage and dust. The protective liquid as a solution is applied based on these requirements, and in order to fulfill the functions of a cushion and a film with as little amount of solution as possible, it is necessary to reduce the unevenness of the application. It was necessary to form a coating layer with a uniform thickness without any cracks.
Moreover, such technical issues are not only related to electronic components, such as when applying resist to mask substrates and wafers, but also apply solutions to all kinds of materials, such as building materials and film materials. It also exists in the field of industrial technology, and its solution is required in a wide range of industrial technology fields.

In response to these demands, there are hand coating methods, roll coater methods, spinner coating methods, etc. that have been developed in the past. Since the disk on which the material to be coated is fixedly mounted rotates at high speed, the solution dropped onto the surface of the material to be coated is sequentially diffused from the drop point to the peripheral edge at a time lag, resulting in a uniform thickness over the entire surface. It was believed that applying the solution in a vacuum required a high level of skill. In order to solve such technical problems, the "Spinner Coating Method and Apparatus" disclosed in Japanese Patent Application No. 14311/1983 (Japanese Unexamined Patent Publication No. 130570/1983) has already been proposed. Even if this method and apparatus are used, it is not only unsuitable for efficient mass production because it takes time to apply the solution and there is no flexibility in setting the coating thickness of the solution, but also it is not suitable for efficient mass production. Since most of the solution is scattered to the surrounding area by centrifugal force, the loss of the solution is extremely large, which is disadvantageous in terms of economic efficiency.

After several experiments conducted to solve these conventional technical problems, it was discovered that a coating method using a roller or coating blade is suitable.
Even with this, since the solution dries quickly,
Since residual liquid adheres to the roller or coating blade and solidifies after each coating process, it must be removed, which has the disadvantage of complicating the work.

This invention was created in view of the above-mentioned technical problems and through intensive research to solve them.

In other words, the solution is applied to the material to be coated via an applicator such as a roller or blade made of metal, etc., and the removal of residual liquid adhering to the applicator after applying the solution is also completely automated. By achieving this, we will mechanize the coating process so that it can be performed automatically through a consistent process, and not only will the coating thickness of the solution be highly accurate, but the coating thickness itself can be set arbitrarily from thin to thick. It was developed to provide a coating device that is highly efficient and economical, with less wastage of the solution, and its main purpose is to place and fix the material to be coated with the solution. A mechanism for placing and fixing a material to be coated is formed by making a movable mounting table for applying a coating material, and a coating body for applying a solution that can move toward and away from the material to be coated that is placed and fixed on the mounting table. A solution application mechanism that is movably disposed and is attached with a discharge body that discharges a solution appropriately to apply the required solution to a material to be coated according to the movement of the application body; The present invention consists in that a solution removal mechanism provided to contact and remove the solution adhering to the application body is disposed at an appropriate position on the base.

The present invention will be described below based on embodiments shown in the drawings.

Reference numeral A in the figure is a material mounting and fixing mechanism for mounting and fixing a material P to be coated, such as a mask substrate to which a solution is to be applied.
It consists of a rotating shaft 2 protruding above 00, and a mounting table 3 provided to place and fix the material P to be coated.
This mounting table 3 is fitted and supported on the rotating shaft 2,
The rotating shaft 2 itself can be forcibly rotated by a drive device (not shown) such as a pre-controlled motor. Of course, the specific coating material mounting and fixing mechanism A is not limited to this, but may be configured to be movable in the same direction as the moving direction in which the solution coating mechanism B, which will be described later, advances and retreats.

Reference numeral B in the figure is a solution application mechanism that applies a solution to the surface of the material P to be coated, and is composed of a solution application section 5, a solution discharge section 6, and a drive section 7 that drives both 5 and 6 so as to move forward and backward. Become. Of these, the solution applicator 5 includes a lower support frame 8 and a roller-shaped applicator 10 attached to the support frame 8 such that it can be freely attached to and detached from the support frame 8 and can be forcibly rotated via a controlled drive device 9. Consisting of The solution discharge part 6 is connected to the upper support frame 1
1, a threaded horizontal shaft 13 which is suspended horizontally on the support frame 11 and is capable of forcible rotation via a controlled drive device 12; A discharge body 1 is attached so as to be able to reciprocate along the length direction of the application body 10.
The upper support frame 11 itself is vertically movable via a vertical shaft 17 which is threaded and can be forcibly rotated by a controlled drive device 16. This is a support rod that supports the support frame 11. Further, the upper support frame 11 and the lower support frame 8 are connected to a support plate 20 attached to the upper support frame 11.
The lower support frame 8 is connected so as to be able to move up and down freely through a threaded vertical shaft 22 that can be forcibly rotated by a controlled drive device 21 provided in the lower support frame 8. This is a support rod loosely fitted to support the lower support frame 8. On the other hand, a drive unit 7 allows the mutually connected solution applicator 5 and solution discharge unit 6 to move forward and backward toward the material placement and fixing mechanism A.
, a controlled drive device 25, a belt 26 interlocked therewith, a connecting plate 27 that connects this belt 26 and the solution discharge part 6, and a pair of support rods 28 and 29 arranged above and below. The upper support rod 28 is held between guide rollers 30 attached to the upper support frame 11 at an appropriate position, and the lower support rod 29 is loosely fitted into the upper support frame 11 at an appropriate position. In addition, regarding the specific shape of the coating body 10,
It is not limited to a roller-shaped one as shown in the illustration, but a blade-shaped one horizontally fixed to the lower support frame 8 may also be used. It is controlled and supplied from a solution tank 32, and 33 is a liquid feed pipe;
4 is a nozzle.

Reference numeral C shown in the figure is a solution removal mechanism that removes the solution adhering to the application body 10, and is composed of a first removal section 35 and a second removal section 36 arranged in a row. The first removal section 35 includes a first removal box 37 formed in a box shape.
and a solution removal blade 38 attached thereto,
It is composed of a waste liquid pipe 40 that communicates with the bottom plate 39 of the first removal box 37 at an appropriate position and sends a removal solution and the like to the waste liquid tank N. Second removing section 3
6 is for completely removing the adhering solution that still remains on the application body P even after passing through the first removal section 35, and is controlled from the solvent tank 42 via the liquid feed pipe 43 via the solenoid valve 41. It is composed of a second removal box 44 in which the supplied solvent L is stored and a solution removal blade 45 attached thereto, and the second removal box 44 and the first removal box 37 are installed at appropriate positions. They communicate with each other via a communicating pipe 46. In addition, when the application body 10 in the solution application mechanism B is replaced with a roller-like one and a blade-like one, the solution removing blades 38 and 45 in the first removing part 35 and the second removing part 36 are Coated body 1 was also brought in.
By using a structure (not shown) that moves along the length direction of the coating member 10, the adhering solution may be removed while being brought into contact with the coating member 10. Also,
According to the illustrated example, the solution removal mechanism C is the first removal section 35
and a second removing section 36; however, the present invention is not limited thereto, and may include only either the first removing section 35 or the second removing section 36 as needed.

In addition, in the figure, D is a container M loaded with the material P to be coated.
E is a container transport mechanism that sequentially transports
F is a material positioning mechanism for positioning a loaded material P by raising and lowering a container M that has been transported to a predetermined position via the container transport mechanism D; G is a material delivery mechanism that sends the material P positioned through E onto the mounting table 3 in the material mounting and fixing mechanism A; Each shows a mechanism for returning the material to be coated to a predetermined position in the container M,
A specific example thereof will be explained as follows.

That is, the container transport mechanism D includes a transport rod 51 to which the transport claw 50 is attached, and a container M on the transport rod 51.
A drive rod 5 that is provided to perform controlled reciprocating motion in the conveying direction and moves back and forth within the cylinder 52.
3, and the conveying rod 51 can be rotated via a sprocket 55 in conjunction with a controlled drive 54. Reference numeral 56 indicates a guide plate erected on the base 100 to guide the container M being transported. Of course, the conveyance means is not limited to this, and any suitable means such as a belt conveyor or roller conveyor may be used.

The material positioning mechanism E is controlled with respect to a threaded vertical shaft 57, a pedestal 58 that is screwed onto the vertical shaft 57 and is movable up and down on the base 100, and the vertical shaft 57. Drive device 59 that provides rotational force
, 60 is the belt that is stretched around, 6
1 indicates a reinforcing plate, and 62 indicates a supporting plate.

The material to be coated delivery mechanism F includes a delivery arm 63 that makes contact with the material to be coated P and sends it out, and this delivery arm 63
It consists of a support rod 64 that supports and guides the delivery arm 63, and a drive device 66 that causes the delivery arm 63 to perform controlled reciprocating motion via a belt 65 connected to the delivery arm 63. In addition, the material to be coated P in the delivery arm 63
By interposing a buffer material 69 such as a coil spring between the abutting part 67 and the support arm part 68, the impact on the material P to be coated can be alleviated.

The material return mechanism G is connected to a return arm 70 that contacts the material P after applying the solution and returns it, a support rod 71 that supports and guides the return arm 70, and the return arm 70. 74 is a guide roller, and 78 is a support rod. Additionally, a shock absorber 77 such as a coil spring may be interposed between the contact portion 75 of the return arm 70 that contacts the material P and the support arm 76 to reduce the impact on the material P. can.

In the figure, 101 is a support plate that supports the waste liquid pipe 40, 102 is an upper machine frame, and 103 is a lower machine frame.

Next, to explain the operation, the container M loaded with the material to be coated P is automatically transported via the container transport mechanism D to the material to be coated positioning mechanism E near the material to be coated mounting and fixing mechanism A. Ru. The transported container M is automatically positioned at an appropriate position by moving up and down together with the pedestal 58 of the positioning mechanism E. For the positioned material P, the delivery arm 6 in the material delivery mechanism F
The contact portion 67 of No. 3 is brought into contact with the material to be coated, and the material to be coated is sent onto the mounting table 3 of the mounting and fixing mechanism A. When the material P to be coated is mounted and fixed on the mounting table 3, the solution application mechanism B automatically approaches the mounting table 3 by the driving force of the drive unit 7 and enters the solution application state.

That is, the belt 26 moving via the drive device 25, the solution discharge section 6, and the solution application section 5 are interlocked via the connecting plate 27, and the guide roller 30 that clamps the support rod 28 and the support rod loosely fitted 29, the solution coating mechanism C is smoothly moved to the mounting table 3 in the coating material mounting and fixing mechanism A, and the coating preparation is completed.

Next, the solution discharge section 6 and the solution application section 5, which are integrated, are connected to a vertical shaft 17 that is linked to a drive device 16.
It is lowered in the direction of the material to be coated P as the material rotates. The distance between the coating body 10 and the material to be coated P can be freely set by rotating the vertical shaft 22 interlocked with the drive device 21 to move the lower support frame 8 slightly up and down as necessary. be able to. Application body 1
After setting the distance between 0 and the material P to be coated to a predetermined value, the required solution is applied from the discharge body 15 to the surface of the material P to be coated through the nozzle 34, or to the surface of the material P to be coated.
Discharge to 0. At this time, the discharge body 15 is connected to the application body 10 via the horizontal shaft 13 which is interlocked with the drive device 12.
By moving the solution along its length, the solution can be discharged over a wide area, and since the discharge amount of the solution can be arbitrarily set via the solenoid valve 31, the coating thickness of the solution can be adjusted to the desired thickness. The solution is applied to the material to be coated P, which can be coated with a liquid, by performing the series of operations described above and moving the entire solution coating mechanism B forward via the drive unit 7. After applying the solution, the coated body 10 is pulled upward to separate it from the material P to be coated, and then rotated by half a rotation via the drive device 9 to remove any residue adhering to the coated body 10. This prevents liquid from dripping.

On the other hand, if the material to be coated P has a circular shape and it is necessary, the mounting table 3 itself on which the material to be coated P is placed and fixed is moved to the rotating shaft 2 that interlocks with the mounting table 3 itself.
The solution can also be applied by spreading the solution through the applicator 10 which is stationary while rotating at a predetermined number of rotations, and then gradually pulling the applicator 10 away from the material P to be coated.

Thus, after applying the solution, the application body 10 is separated from the material P to a required distance by forcibly rotating the vertical shaft 17, and then the solution is applied via the return arm 70 of the material return mechanism G. The subsequent material P to be coated is sent back into the waiting container M.

On the other hand, solution application mechanism B has completed the solution application work.
Then, via the drive section 7, the movement moves back toward the original position. During this retreating process, the application body 10 is carried into the solution removal mechanism C.

That is, the coated body 10 on which the solution has been applied and the residual liquid is attached is first guided to the first removal section 35 in the solution removal mechanism C, and is removed from the first removal box 3.
The solution removing blade 38 attached to the first removal box 37 is brought into contact with the solution removal blade 38 and forcedly rotated to remove the adhering solution. Next, the application body 10 is transferred to the second removal section 36 as shown in FIG.
Descend to within 4. A solvent tank 4 is provided in the second removal box 44 via a solenoid valve 41.
A solvent L supplied from 2 is stored, and the adhering solution is completely removed by immersing the coating body 10 in this solvent L, bringing it into contact with the attached solution removal blade 45, and forcing it to rotate. can do. After wiping out the solution adhering to the coating body 10 in this manner, the solution coating mechanism B returns to the solution coating state for a new material P to be coated, and completes one cycle of the solution coating operation.

Since the present invention is configured and operates as described above, the distance between the object P to be applied and the object 10 to be applied can be set to an appropriate value that allows them to freely approach and separate, and furthermore, the solenoid valve 31 Since the amount of solution discharged by the discharge body 15 can be controlled to an arbitrary value, the thickness of the solution applied to the material P to be coated can be automatically formed as thick or thin as desired without waste. be.

That is, there is a solution application mechanism B having a coating body 10 formed to be able to move toward and away from the material P to be coated, and a discharge body 15 in which the amount of solution discharged is controlled; By providing the positioning and fixing mechanism A, it is possible to apply the solution to the required coating thickness regardless of the shape of the material P to be coated, which may be rectangular or circular.

Moreover, regarding the coated body 10 after applying the solution,
Solution removal blade 3 in first removal box 37
8 and forced rotation, and then immersed in the solvent L in the second removal box 44, brought into contact with the solution removal blade 45 again, and forced rotation, so that the adhering solution can be completely wiped out. Therefore, the outer circumferential surface of the coating body 10 can always be maintained in a smooth state, so that the coated material P
There is no occurrence of uneven coating.

Note that since the first removal box 37 and the second removal box 44 are in communication with each other through a communication pipe 46, the liquid level of the solvent L is always kept constant and the concentration of the solvent L itself is always kept constant. It is possible,
The excess solvent L can be allowed to flow down to the waste tank N via the waste pipe 40 of the first removal box 37.

Furthermore, by adding a container conveyance mechanism D, a material positioning mechanism E, a material delivery mechanism F, and a material return mechanism G, it is possible to completely automate the solution application work on the material P. , and its contribution to efficiency can be made extremely large.

As explained above, according to the present invention, all types of quick-drying solutions to be applied to form a film can be applied to a material to be coated automatically and in a short time without waste and with a uniform coating thickness. It is possible to provide a versatile solution coating apparatus suitable for mass production, in which not only the work can be carried out, but also the setting of the coating thickness of the solution itself can be arbitrarily selected.

[Brief explanation of the drawing]

The drawings show an embodiment of the present invention, and FIG. 1 is a partially omitted overall plan view, FIG. 2 is a front view of the same, and FIG. 3 is a partially omitted overall plan view.
4 and 5 are enlarged views of main parts showing the operating states of the material placement and fixing mechanism and the solution application mechanism, and FIG. 4 is a partially cutaway rear view of the same, and Fig. 5 is a side view thereof, Fig. 6 is an enlarged side sectional view of main parts showing the operating state of the solution removal mechanism, Fig. 7 is a plan view showing the container conveyance mechanism, and Fig. 8 is a plan view showing the material delivery mechanism. 9 are plan views showing the material return mechanism. A...Mechanism for placing and fixing the material to be coated, B...Mechanism for applying the solution, C...Mechanism for removing the solution, D...Mechanism for conveying the container, E...Mechanism for positioning the material to be coated, F...Mechanism for delivering the material to be coated. G... Material return mechanism to be coated, 1... Bearing, 2... Rotating shaft, 3... Mounting table, 5... Solution application section, 6... Solution discharge section, 7... Drive section, 8...
lower support frame, 9... drive device, 10... application body,
11... Upper support frame, 12... Drive device, 13...
...Horizontal axis, 14... Support rod, 15... Discharge body, 16...
... Drive device, 17... Vertical axis, 18, 19... Support rod, 20... Support plate, 21... Drive device, 22...
... Vertical shaft, 23, 24 ... Support rod, 25 ... Drive device, 26 ... Belt, 28 ... Connection plate, 28, 2
9... Support rod, 30... Guide roller, 31... Solenoid valve, 32... Solution tank, 33...
Liquid feed pipe, 34... nozzle, 35... first removal section,
36... Second removal section, 37... First removal box, 38... Solution removal blade, 39... Bottom plate,
40...Waste liquid pipe, 41...Solenoid valve, 42...Solvent tank, 43...Liquid feed pipe, 44
...Second removal box, 45...Solution removal blade, 46...Communication pipe, L...Solvent, M...Container,
N... Waste liquid tank, P... Material to be coated.

Claims (1)

[Claims] 1. A material mounting and fixing mechanism formed by making a movable mounting table for mounting and fixing the material to be coated on which a solution is applied, and a mechanism for mounting and fixing the material to be coated that is placed and fixed on the mounting table. A removable coating body for applying a solution is disposed in a movable manner, and
A solution application mechanism is provided with a discharge body that discharges the appropriate solution in order to apply the required solution to the material to be coated as the coating movement of the coating body, and a solution application mechanism that contacts and removes the solution attached to the coating body after the solution has been applied. What is claimed is: 1. A solution application device, characterized in that a solution removal mechanism is provided at an appropriate position on a base.