JPS6245141A - Wafer prober - Google Patents

Abstract

PURPOSE:To avoid an adverse effect by noises from an electromagnetic coil by constituting a rod pushing a proper quantity of ink from a tank so as to be moved by using a fluid pressure device in an ink marker for a wafer. CONSTITUTION:When a wafer 1 is set onto a table 4, a performance board 5 holding a probe card 6 is aligned while lowering, and probe needles 7 are each brought into contact with respective electrode pad 3 for No.1 pellet 2 in the wafer 1. An electrical characteristic test is executed under the state. When A defective is discovered, a solenoid 28 is conducted by a command from a tester, and a solenoid valve 27 in an ink marker 8 is operated, thus supplying a cylinder 17 for a cylinder device 16 with air. Consequently, a piston 18 is lowered, a rod 15 integrally connected to the piston 18 is pushed down in a tank 12, and ink 11 is attached onto the pellet 2. The table 4 is moved in the XY directions, and characteristic tests are executed in succession regarding each pellet.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to wafer prober technology, particularly to technology for displaying ink marks on defective pellets found in wafers, and particularly to 1i! of semiconductor devices. ! This paper relates to techniques that are effective for use in screening inspections using electrical property tests in manufacturing.

[Background technology]

In the manufacturing of semiconductor devices, as a wafer prober that conducts selection inspections using electrical property tests, the probe needle on the performance pod side contacts the electrode pad of the pellet on the wafer, and communication is established between the tester and the pellet via the probe needle. However, if a defective pellet is found, the N magnetic plunger device installed in the ink marker is activated by a command signal from the tester, thereby depositing ink on the defective pellet. There is.

However, in such wafer probes, the electromagnetic plunger device is placed close to the performance port, so noise from the electromagnetic coil in the electromagnetic plunger device can be transmitted to electronic components such as relays mounted on the performance port. The inventor of the present invention has revealed that there is a problem in that it has an adverse effect on the electronic device and the electronic equipment, resulting in poor measurement and the like.

Examples of wafer prober technology that describe wafer prober technology include "Electronic Materials November 1983 Special Edition" published by Kogyo Research Association Co., Ltd., November 15, 1983, pages 195 to 198;
There is.

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to provide a wafer blobber technique that can prevent adverse effects of ink markers on measurements.

The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

[Summary of the invention]

A brief overview of typical inventions disclosed in this application is as follows.

In an ink marker that attaches an ink mark to a pellet portion of a wafer, by configuring a rod that pushes out an appropriate amount of ink from a tank to move forward and backward using a fluid pressure cylinder device, the adverse effects of noise from the electromagnetic coil are avoided. It is now possible to obtain stable measurements using a wafer prober.

〔Example〕

FIG. 1 is a partial longitudinal sectional view showing a wafer prober which is an embodiment of the present invention, and FIG. 2 is a longitudinal sectional view showing an ink marker thereof.

In this embodiment, this wafer prober is configured to sequentially perform a selection inspection using an electrical characteristic test on each pellet 2 of a wafer l, and each pellet 2 is connected to an integrated circuit (not shown). electrode pad 3
A plurality of are arranged in a ring shape around the periphery.

The wafer prober has a table 4 for holding the wafer 1.
The table 4 is configured to be able to move the wafer 1 in the XY and θ directions. A performance board 5 is supported directly above the table 4, and a large window hole 5a is formed approximately at the center of the performance board 5.

The performance pod 5 holds a probe card 6 having a window hole 6a, and the probe card 6 has a plurality of probe needles 7 around the window hole 6a, and a plurality of probe needles 7 that are inclined downward and centered in the window hole 6a. The probe needles 7 are electrically connected to a tester (not shown) of a wafer prober.

An ink marker 8 is provided above the performance pod 5 so as to be inserted through the window hole 5a.

The ink marker 8 has a frame 9 formed in a substantially hook shape.
The frame 9 is supported relative to the performance pod 5 by an arm 10. frame 9
A tank 12 for storing ink 11 is fixedly suspended at the lower end of the tank 12, and the tank 12 has a hopper part 13 formed in the shape of an inverted conical cylinder with an open top, and a cylindrical cylinder with open top and bottom ends. It is composed of a cylinder part 14 formed in a shape. A rod 15 is slidably fitted into the cylinder portion 14 of the tank 12, and the rod 15 is configured to push out the ink 11 from the tank 12 and deposit it on the pellets when the rod 15 moves downward.

An air cylinder device 16 as a fluid pressure cylinder device is installed in the upper part of the frame 9 and is arranged facing downward in the vertical direction, and the cylinder 17 in this cylinder device 16 is aligned with the axis of the rod 15 directly above the tank 12. It is installed.

A piston 18 is fitted into the cylinder 17 so as to be slidable in the vertical direction, and the upper end of the rod 15 is connected to the piston 18. Rod 15 inside cylinder 17
A return spring 19 is mounted on the exterior of the cylinder 17 so as to always urge the piston 18 upward, and an air vent hole 20 is formed in the lower part of the cylinder 17 so as to communicate between the inside and the outside.

The upper and lower end walls of the cylinder 17 have a position r1! Adjustment screws 21.22 are screwed in with springs 21a and 22a interposed so that they can move forward and backward, and both screws 21.22
Stoppers 23 and 24 are attached to the piston 18 so as to restrict the upper limit position and the lower floor position by respectively coming into contact with the piston 18.

The air cylinder device 16 includes an air supply/discharge circuit 25 as a driving fluid circuit, and this circuit 25 communicates with the pressure chamber on the opposite side of the rod 15 partitioned by the piston I8.
It is connected to the cylinder 17. The supply/discharge circuit 25 is an air t
A26 and solenoid valve 2 that switches air supply and discharge
7. The solenoid valve 27 is arranged at a magnetically distant position so that the solenoid 28 does not have a magnetic influence on the electronic components, electronic equipment group 29, etc. mounted on the performance pod 5. Note that the air source 26 is desirably configured to be used in common as an air source for driving the table.

Next, the action will be explained.

When the wafer 1 is set on the table 4, the performance pod 5 holding the probe card 6 is lowered and aligned, and each probe needle 7 of the probe card 6 touches each of the first pellets 2 on the wafer 1. The electrode pads 3 are respectively contacted.

In this state, when the prober tester operates, communication is exchanged between the tester and the pellet 2 that the probe needle 7 is in contact with via the performance port 5, probe card 6, probe needle 7, and electrode pad 3. , electrical characteristic tests are conducted.

When a defect is discovered, the solenoid 28 is powered based on a command signal from the tester, and the solenoid valve 27 in the ink marker 8 is activated, so that air is supplied to the cylinder 17 of the cylinder device 16. Ru. As a result, the piston 18 is lowered, so that the loft 15, which is integrally connected to the piston 18, is moved into the tank 1.
2 is pressed down, and the ink 11 is deposited on the pellet 2.

Thereafter, the table 4 is pinch-fed in the X and Y directions, and the second, third, etc. pellets 2 are sequentially subjected to a characteristic test and a defect mark attachment operation.

By the way, if the rod is configured to be depressed by an electromagnetic plunger device instead of an air cylinder device, the electromagnetic coil of the electromagnetic plunger device may be in close proximity to electronic components or equipment mounted on the performance port. Therefore, there is a risk that the electromagnetic waves generated by the electromagnetic coil will have a negative effect on electronic components and equipment, resulting in poor or unstable measurements.

On the other hand, when the rod 15 is configured to be pushed down by the air cylinder device 16 as in this embodiment, the solenoid 28 of the solenoid valve 27 moves away from the performance port 5, so that the solenoid 28 generates This prevents the electromagnetic waves generated from affecting the electronic components and electronic equipment group 29 mounted on the performance board 5. Therefore, it is possible to prevent problems such as measurement defects or measurement instability caused by this.

Although the invention made by the present inventor has been specifically explained above based on Examples, it goes without saying that the present invention is not limited to the Examples and can be modified in various ways without departing from the gist thereof. For example, the fluid pressure cylinder device is not limited to an air cylinder device, but a hydraulic cylinder device such as a hydraulic cylinder device may be used.

Since the solenoid valve can be installed spatially separate from the cylinder device, it can be installed not only spatially away from the Performance Pod, but also within an electromagnetic shielding structure, making it easy to connect to the Performance Pod and tester. It can be configured to be electromagnetically isolated from the electronic components and electronic devices being used.

〔effect〕

++1 In an ink marker that attaches an ink mark to the pellet part of a wafer, by configuring a rod that pushes out an appropriate amount of ink from a tank to advance and retreat using a fluid pressure cylinder device, it is possible to avoid the negative effects of noise from the electromagnetic coil. Therefore, it is possible to prevent measurement defects in the wafer prober and obtain stable measurements.

(2) By using an air cylinder device as a fluid pressure cylinder device, it is possible to share the air source and piping used to drive the table in the wafer probe, which increases equipment costs, operating costs, etc. can be suppressed.

(3) By simply moving the solenoid valve spatially away from the ink tank, it is possible to electromagnetically isolate it from the electronic components and equipment mounted on the performance board, so there is no need for an electromagnetic shielding structure, etc. The negative effects of this can be avoided.

[Brief explanation of the drawing]

FIG. 1 is a partial vertical cross-sectional view showing a wafer probe according to an embodiment of the present invention, and FIG. 2 is a vertical cross-sectional view showing an ink marker thereof. l...Wafer, 2...Bellet, 3...Electrode hat, 4...Table, 5...Performance port, 5a...Window hole, 6...7". - Book card, 6a ...Window hole, 7...Probe needle, 8
...Ink marker, 9...Frame, IO...Arm, tt...Ink, 12...Tank, 13...
・Hopper part, 14... Cylinder part, 15... Rod, 16... Air cylinder device (fluid pressure cylinder device i
17...Cylinder, 18...Piston, 19.
...Return spring, 20...Air vent hole, 21
122... Position adjustment screw, 23.24... Stopper, 25... Air supply/discharge circuit (driving fluid pressure circuit), 26...
...Air m<fluid pressure source), 27...Solenoid valve, 28...
-Solenoid, 29...Electronic parts and electronic equipment group.

Claims (1)

[Claims] 1. An ink marker is provided to attach an ink mark to the pellet portion of the wafer, and the ink marker includes a tank for storing ink, a rod for pushing out an appropriate amount of ink from the tank, and a rod for moving the rod forward and backward. A wafer prober comprising a fluid pressure cylinder device. 2. The wafer prober according to claim 1, wherein an air cylinder device is used as the fluid pressure cylinder device. 3. The wafer according to claim 1, wherein the fluid pressure cylinder device is equipped with a solenoid valve in its driving fluid pressure circuit, and the solenoid valve is disposed at a position away from the tank. Prober.