JPS6244613A - 膜厚測定装置 - Google Patents

膜厚測定装置

Info

Publication number
JPS6244613A
JPS6244613A JP18494885A JP18494885A JPS6244613A JP S6244613 A JPS6244613 A JP S6244613A JP 18494885 A JP18494885 A JP 18494885A JP 18494885 A JP18494885 A JP 18494885A JP S6244613 A JPS6244613 A JP S6244613A
Authority
JP
Japan
Prior art keywords
light
film thickness
film
conversion circuit
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18494885A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0381083B2 (enExample
Inventor
Akira Tsumura
明 津村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP18494885A priority Critical patent/JPS6244613A/ja
Publication of JPS6244613A publication Critical patent/JPS6244613A/ja
Publication of JPH0381083B2 publication Critical patent/JPH0381083B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP18494885A 1985-08-22 1985-08-22 膜厚測定装置 Granted JPS6244613A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18494885A JPS6244613A (ja) 1985-08-22 1985-08-22 膜厚測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18494885A JPS6244613A (ja) 1985-08-22 1985-08-22 膜厚測定装置

Publications (2)

Publication Number Publication Date
JPS6244613A true JPS6244613A (ja) 1987-02-26
JPH0381083B2 JPH0381083B2 (enExample) 1991-12-27

Family

ID=16162154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18494885A Granted JPS6244613A (ja) 1985-08-22 1985-08-22 膜厚測定装置

Country Status (1)

Country Link
JP (1) JPS6244613A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2692120C1 (ru) * 2018-11-01 2019-06-21 федеральное государственное бюджетное образовательное учреждение высшего образования "Уфимский государственный авиационный технический университет" Способ определения толщины покрытия в ходе процесса плазменно-электролитического оксидирования

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2692120C1 (ru) * 2018-11-01 2019-06-21 федеральное государственное бюджетное образовательное учреждение высшего образования "Уфимский государственный авиационный технический университет" Способ определения толщины покрытия в ходе процесса плазменно-электролитического оксидирования

Also Published As

Publication number Publication date
JPH0381083B2 (enExample) 1991-12-27

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