JPS6244430B2 - - Google Patents
Info
- Publication number
- JPS6244430B2 JPS6244430B2 JP52052173A JP5217377A JPS6244430B2 JP S6244430 B2 JPS6244430 B2 JP S6244430B2 JP 52052173 A JP52052173 A JP 52052173A JP 5217377 A JP5217377 A JP 5217377A JP S6244430 B2 JPS6244430 B2 JP S6244430B2
- Authority
- JP
- Japan
- Prior art keywords
- mesa
- semiconductor layer
- type
- semiconductor substrate
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 56
- 239000000758 substrate Substances 0.000 claims description 16
- 239000012535 impurity Substances 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 description 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000470 constituent Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Light Receiving Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5217377A JPS53137688A (en) | 1977-05-07 | 1977-05-07 | Semiconductor device of mesa type |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5217377A JPS53137688A (en) | 1977-05-07 | 1977-05-07 | Semiconductor device of mesa type |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62095801A Division JPS62282470A (ja) | 1987-04-17 | 1987-04-17 | メサ形半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53137688A JPS53137688A (en) | 1978-12-01 |
| JPS6244430B2 true JPS6244430B2 (US06826419-20041130-M00005.png) | 1987-09-21 |
Family
ID=12907419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5217377A Granted JPS53137688A (en) | 1977-05-07 | 1977-05-07 | Semiconductor device of mesa type |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53137688A (US06826419-20041130-M00005.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020149272A1 (ja) * | 2019-01-16 | 2020-07-23 | 竹本油脂株式会社 | ポリオレフィン系不織布用処理剤及びポリオレフィン系不織布 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60231359A (ja) * | 1984-04-28 | 1985-11-16 | Oki Electric Ind Co Ltd | ホトダイオ−ドアレイ |
| AU2185499A (en) | 1998-01-30 | 1999-08-16 | Hamamatsu Photonics K.K. | Light-receiving semiconductor device with buit-in bicmos and avalanche photodiode |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5134617A (ja) * | 1974-09-19 | 1976-03-24 | Int Rectifier Corp | Mesagatahandotaisochi no seizohoho |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5036464Y2 (US06826419-20041130-M00005.png) * | 1971-03-12 | 1975-10-23 |
-
1977
- 1977-05-07 JP JP5217377A patent/JPS53137688A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5134617A (ja) * | 1974-09-19 | 1976-03-24 | Int Rectifier Corp | Mesagatahandotaisochi no seizohoho |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020149272A1 (ja) * | 2019-01-16 | 2020-07-23 | 竹本油脂株式会社 | ポリオレフィン系不織布用処理剤及びポリオレフィン系不織布 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53137688A (en) | 1978-12-01 |
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