JPS6244426B2 - - Google Patents

Info

Publication number
JPS6244426B2
JPS6244426B2 JP57113137A JP11313782A JPS6244426B2 JP S6244426 B2 JPS6244426 B2 JP S6244426B2 JP 57113137 A JP57113137 A JP 57113137A JP 11313782 A JP11313782 A JP 11313782A JP S6244426 B2 JPS6244426 B2 JP S6244426B2
Authority
JP
Japan
Prior art keywords
region
integrated circuit
transistor
diode
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57113137A
Other languages
Japanese (ja)
Other versions
JPS594068A (en
Inventor
Kunihiko Goto
Tadahiro Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP57113137A priority Critical patent/JPS594068A/en
Publication of JPS594068A publication Critical patent/JPS594068A/en
Publication of JPS6244426B2 publication Critical patent/JPS6244426B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/08Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/085Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
    • H01L27/088Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
    • H01L27/092Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
    • H01L27/0921Means for preventing a bipolar, e.g. thyristor, action between the different transistor regions, e.g. Latchup prevention

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

Description

【発明の詳細な説明】 (1) 発明の技術分野 本発明は集積回路がサイリスタ構造を有する場
合に生ずるラツチアツプ現象を起しにくくするよ
うにした集積回路に関する。
DETAILED DESCRIPTION OF THE INVENTION (1) Technical Field of the Invention The present invention relates to an integrated circuit which is made less likely to cause the latch-up phenomenon that occurs when the integrated circuit has a thyristor structure.

(2) 技術の背景 近時、アナログ−デジタル変換回路やデジタル
−アナログ変換回路を集積回路化したものが多く
作られるようになつてきている。
(2) Background of technology Recently, many analog-to-digital conversion circuits and digital-to-analog conversion circuits have been integrated into integrated circuits.

このようなアナログ回路ではアナログ回路動作
用の二つの電源の外に比較用グランド電源等を必
要とする。また、デジタル−アナログ変換回路等
では基準電源も必要とする。このように複数の電
源を必要とするアナログ回路を集積化し、例えば
相補型の金属酸化物半導体(以下C−MOSと記
す)構成の集積回路を作製した場合には複数の電
源間でサイリスタ構造を生じてラツチアツプ現象
(即ち、PチヤネルMOSトランジスタとNチヤネ
ルMOSトランジスタを備えた相補型集積回路に
おいて、各不純物領域と基板とによつて構成され
るPNPN構造が外部のノイズによつてオン状態と
なり、電流が流れ続ける現象)が生ずることがあ
つた。
Such an analog circuit requires a ground power source for comparison in addition to the two power sources for operating the analog circuit. Furthermore, a reference power source is also required for digital-to-analog conversion circuits and the like. In this way, when analog circuits that require multiple power supplies are integrated to create an integrated circuit with a complementary metal oxide semiconductor (hereinafter referred to as C-MOS) configuration, it is necessary to create a thyristor structure between the multiple power supplies. This causes a latch-up phenomenon (i.e., in a complementary integrated circuit comprising a P-channel MOS transistor and an N-channel MOS transistor, the PNPN structure constituted by each impurity region and the substrate is turned on due to external noise, (a phenomenon in which current continues to flow) may occur.

(3) 従来技術と問題点 第1図は従来のC−MOS構成の集積回路の一
部側断面図、第2図は第1図の等価回路であり、
第1図において1は例えばN型のシリコン基板で
トランジスタTr1はPチヤネル構造でソースSと
ドレインD用のP+不純物ドーピング領域2,3
が作られさらにゲートGも形成されている。
(3) Prior art and problems Figure 1 is a partial side sectional view of an integrated circuit with a conventional C-MOS configuration, and Figure 2 is an equivalent circuit of Figure 1.
In FIG. 1, 1 is an N-type silicon substrate, for example, and a transistor Tr 1 has a P channel structure, with P + impurity doped regions 2 and 3 for source S and drain D.
is made, and a gate G is also formed.

N+領域4は基板コンタクト用のものである。
さらにNチヤンネル構造のトランジスタTr2を構
成するためにN-基板1にP型物質の島5を形成
し、該島内にN+不純物ドーピング領域6,7が
ソースS及びドレインD用に形成される。P+
域8は島5内の電位を保持させるためのコンタク
トである。
N + region 4 is for substrate contact.
Further, in order to configure a transistor Tr 2 having an N-channel structure, an island 5 of P type material is formed on the N - substrate 1, and N + impurity doped regions 6 and 7 are formed for the source S and drain D in the island. . P + region 8 is a contact for maintaining the potential within island 5.

上記構成において、N+領域4に電圧V1を、P
チヤンネルトランジスタTr1のソースSに電圧V2
を、NチヤンネルトランジスタTr2のソースSに
電圧V3を、P+領域8に電圧V4を加えるものと
し、各電源の電圧がV1>V2>V3>V4の関係にあ
り、いま、電圧V1とV4がオープン状態でV2及び
V3に電圧が加えられたとすると、電圧V2とV3
では第2図に示すような等価回路のようにトラン
ジスタTr1ソースのP+領域2→基板のN-領域1→
島のP-領域5→トランジスタTr2ソースのN+領域
6によつてPNPN接合のサイリスタ構成を生ず
る。ここでN-領域1及びP-領域5の電圧は不定
であるため、例えば基板のN-領域1とトランジ
スタTr1のソースSのP+領域2とが順方向になる
場合もあり得る。するとP+領域2→N-領域1
(基板)→P-領域5(島)のトランジスタは「オ
ン」状態となる。この状態では電圧V2に引つ張
られるためN-領域1→P-領域5→N+領域(トラ
ンジスタTr2のソースS)で構成するNPN領域も
「オン」状態となり、P+領域2→N-領域1→P-
域5→N+領域6間、すなわち電圧V2とV3間では
大電流が流れる。このときの電圧条件はV2−V1
>VBEまたはV4−V3>VBEを満足した場合であ
る。
In the above configuration, voltage V 1 is applied to N + region 4, P
A voltage V 2 is applied to the source S of the channel transistor Tr 1 .
Assume that voltage V 3 is applied to the source S of N-channel transistor Tr 2 and voltage V 4 is applied to P + region 8, and the voltages of each power supply have a relationship of V 1 > V 2 > V 3 > V 4 , Now, voltages V 1 and V 4 are open and V 2 and
Assuming that a voltage is applied to V 3 , between the voltages V 2 and V 3 , the equivalent circuit shown in Figure 2 is as follows: P + region 2 of the transistor Tr 1 source → N - region 1 of the substrate →
The P - region 5 of the island→the N + region 6 of the transistor Tr 2 source produces a PNPN junction thyristor configuration. Here, since the voltages of the N - region 1 and the P - region 5 are unstable, for example, the N - region 1 of the substrate and the P + region 2 of the source S of the transistor Tr 1 may be in the forward direction. Then P + area 2 → N - area 1
(substrate)→P The transistor in region 5 (island) is in the “on” state. In this state, since it is pulled to the voltage V 2 , the NPN region consisting of N - region 1 → P - region 5 → N + region (source S of transistor Tr 2 ) also becomes "on" state, and P + region 2 → A large current flows between N - region 1 → P - region 5 → N + region 6, that is, between voltages V 2 and V 3 . The voltage condition at this time is V 2 −V 1
>V BE or V 4 −V 3 >V BE .

上記説明ではV1,V4を加えずV2,V3の電圧を
先に印加した場合であるがその後電圧V1,V4
加えてると上記した現象をトリガとしてラツチア
ツプ現象が生じ易くなる欠点を有していた。
In the above explanation, the voltages V 2 and V 3 are applied first without adding V 1 and V 4, but if the voltages V 1 and V 4 are applied afterwards, the latch-up phenomenon is likely to occur with the above phenomenon as a trigger. It had drawbacks.

(4) 発明の目的 本発明は上記した従来の欠点に鑑み、4個以上
の電源を必要とするC−MOSの如き集積回路に
いて、電源投入順序によらずラツチアツプ現象を
生じ難くした集積回路を提供することを目的とす
るものである。
(4) Purpose of the Invention In view of the above-mentioned drawbacks of the conventional technology, the present invention provides an integrated circuit that is less likely to cause a latch-up phenomenon regardless of the power-on order in an integrated circuit such as a C-MOS that requires four or more power supplies. The purpose is to provide the following.

(5) 発明の構成 この目的は本発明によれば、少なくとも複数の
PN接合部を有する集積回路において、上記複数
のPN接合部に4個以上の電源が接続されたサイ
リスタ構造のPN接合部の通常高電位電源が接続
される側から低電位電源が接続される側に順方向
のダイオードを接続してラツチアツプ現象を防止
するようにしたことを特徴とする集積回路によつ
て達成される。
(5) Structure of the invention According to the present invention, this object is achieved by at least a plurality of
In an integrated circuit having a PN junction, the side of the PN junction of a thyristor structure in which four or more power supplies are connected to the plurality of PN junctions, from the side to which a high potential power supply is normally connected to the side to which a low potential power supply is connected. This is achieved by an integrated circuit characterized in that a forward diode is connected to the terminal to prevent the latch-up phenomenon.

(6) 発明の実施例 以下、本発明の一実施例を第3図及び第4図に
ついて説明する。
(6) Embodiment of the Invention An embodiment of the present invention will be described below with reference to FIGS. 3 and 4.

第3図は本発明の集積回路の側断面図、第4図
は第3図の等価回路を示すものであり、第1図乃
び第2図と同一部分には同一符号を付して重複説
明を省略する。電圧V1が加えられるN+領域4
(シリコン基板1のコンタクト用で−N領域)と
トランジスタTr1のソースSであるP+領域間に基
板1を順方向とするダイオードD1を構成する。
該ダイオードはN-のシリコン基板1にP+領域の
島11aを作り、該島11a内にN+領域9a,
及びP+領域10aよりなるアノードとカソード
を形成すると共に上記したP+領域2とダイオー
ドD1内のP+領域10aを接続し、電圧V1の与え
られるN+領域4とダイオードD1内のN+領域とを
接続する。
FIG. 3 is a side sectional view of the integrated circuit of the present invention, and FIG. 4 shows an equivalent circuit of FIG. 3. The same parts as in FIGS. The explanation will be omitted. N + region 4 where voltage V 1 is applied
A diode D1 whose forward direction is the substrate 1 is formed between the -N region for contact of the silicon substrate 1 and the P + region which is the source S of the transistor Tr1.
The diode has an island 11a of a P + region formed on an N- silicon substrate 1, and an N + region 9a, a
and a P + region 10a, and connect the P + region 2 and the P+ region 10a in the diode D1 , and connect the N + region 4 to which the voltage V1 is applied and the P + region 10a in the diode D1. Connect with N + area.

同様に電圧V3の加えられるトランジスタTr2
ソースS、すなわちN+領域6と電圧V4の加えら
れる島5とコンタクトを取るP+領域8間にダイ
オードD2をN+領域6を順方向として形成する。
Similarly, a diode D 2 is connected between the source S of the transistor Tr 2 to which the voltage V 3 is applied, i.e. the N + region 6 and the P + region 8 which makes contact with the island 5 to which the voltage V 4 is applied . form as.

すなわち、基板1に島となるP+領域11bを
形成し、該島内にアノード及びカソードとなる
N+領域9bとP+領域10を形成し、上記したN+
領域6とダイオードD2内のN+領域9b間を接続
し、電圧V4の加えられるP+領域8とダイオード
D2内のP+領域10bを接続させる。かくすれ
ば、第4図の等価回路で示すような集積回路が得
られる。この回路によれば、電圧V2,V3が先
に投入され、電圧V1,V4が投入されていない
状態で基板1又はn型領域6にノイズが加わつて
電位が変化しても、各領域の電位はダイオードD
1,D2によりクランプされ、P型領域2と基板
1およびP型領域5とN型領域6によつてそれぞ
れ形成されるPN接合はオン状態となるのを阻止
される。従つて、PNPN構造のサイリスタは導通
せず、ラツチアツプ現象の発生を防ぐことができ
る。
That is, a P + region 11b serving as an island is formed on the substrate 1, and an anode and a cathode are formed within the island.
N + region 9b and P + region 10 are formed, and the above N + region 9b and P + region 10 are formed.
Connect between region 6 and N + region 9b in diode D 2 and P + region 8 to which voltage V 4 is applied and diode
Connect the P + region 10b in D2 . In this way, an integrated circuit as shown in the equivalent circuit of FIG. 4 can be obtained. According to this circuit, even if the voltages V2 and V3 are applied first and the voltages V1 and V4 are not applied, and the potential changes due to noise being applied to the substrate 1 or the n-type region 6, the potential of each region is diode D
1 and D2, and the PN junctions formed by P-type region 2 and substrate 1 and P-type region 5 and N-type region 6, respectively, are prevented from turning on. Therefore, the thyristor with the PNPN structure is not conductive, and the latch-up phenomenon can be prevented from occurring.

このようなC−MOS構成の半導体装置では上
記したダイオードをC−MOS半導体と同一プロ
セス内で同時に形成できることは明らかである。
上記実施例ではN型シリコン基板上にC−MOS
を構成した場合について述べたがP型シリコン基
板上にC−MOSを構成させた場合にもダイオー
ドを同時形成させてラツチアツプ現象を生じない
ようにすることが可能である。さらにC−MOS
構成に限らず例えばPN接合部で構成される抵抗
器容量等を集積化した場合でも、その構成におい
てサイリスタ構成を形成するものに本発明を適用
し得ることは明らかである。
It is clear that in a semiconductor device having such a C-MOS configuration, the above-mentioned diode and the C-MOS semiconductor can be formed simultaneously in the same process.
In the above embodiment, a C-MOS is placed on an N-type silicon substrate.
Although we have described the case in which a C-MOS is constructed on a P-type silicon substrate, it is possible to prevent the latch-up phenomenon by forming diodes at the same time. Furthermore, C-MOS
It is clear that the present invention can be applied not only to the configuration but also to those forming a thyristor configuration, for example, even when a resistor capacitor or the like constituted by a PN junction is integrated.

上述の如き構成によればV2−V1≦VBE,V3
V4≦VBEの条件が満足されればPNPNのサイリス
タ構成でも電圧V2とV3の加える領域間にダイオ
ードD1とD2の作用で大電流が流れることはな
い。
According to the above configuration, V 2 −V 1 ≦V BE , V 3
If the condition of V 4 ≦V BE is satisfied, no large current will flow between the regions to which voltages V 2 and V 3 are applied due to the action of diodes D 1 and D 2 even in the PNPN thyristor configuration.

(7) 発明の効果 以上、詳細に説明したように本発明の集積回路
によればラツチアツプ現象を生じない集積回路を
提供しうる特徴を有する。
(7) Effects of the Invention As described above in detail, the integrated circuit of the present invention has the feature of providing an integrated circuit that does not cause the latch-up phenomenon.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の集積回路の側断面図、第2図は
第1図の等価回路、第3図は本発明の集積回路の
側断面図、第4図は第3図の等価回路である。 1……シリコン基板、2,3……P+不純物ド
ーピング領域、4……N+領域、5……島、6,
7……N+不純物ドーピング領域、8……P+
域、9a,9b……N+領域、11a,11b…
…島。
FIG. 1 is a side sectional view of a conventional integrated circuit, FIG. 2 is an equivalent circuit of FIG. 1, FIG. 3 is a side sectional view of an integrated circuit of the present invention, and FIG. 4 is an equivalent circuit of FIG. 3. . 1... Silicon substrate, 2, 3... P + impurity doped region, 4... N + region, 5... Island, 6,
7...N + impurity doped region, 8...P + region, 9a, 9b...N + region, 11a, 11b...
…island.

Claims (1)

【特許請求の範囲】[Claims] 1 PチヤネルトランジスタとNチヤネルトラン
ジスタを備えた相補型の集積回路において、一導
電型領域と、これとPN接合を形成する反対導電
型領域との間に、両領域の電位差をクランプして
該PN接合がオン状態となることを防止するため
のダイオードを設けたことを特徴とする集積回
路。
1 In a complementary integrated circuit comprising a P-channel transistor and an N-channel transistor, a region of one conductivity type and a region of the opposite conductivity type forming a PN junction are clamped to clamp the potential difference between the two regions. An integrated circuit characterized in that a diode is provided to prevent a junction from being turned on.
JP57113137A 1982-06-30 1982-06-30 Integrated circuit Granted JPS594068A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57113137A JPS594068A (en) 1982-06-30 1982-06-30 Integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57113137A JPS594068A (en) 1982-06-30 1982-06-30 Integrated circuit

Publications (2)

Publication Number Publication Date
JPS594068A JPS594068A (en) 1984-01-10
JPS6244426B2 true JPS6244426B2 (en) 1987-09-21

Family

ID=14604490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57113137A Granted JPS594068A (en) 1982-06-30 1982-06-30 Integrated circuit

Country Status (1)

Country Link
JP (1) JPS594068A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6509585B2 (en) * 2000-03-20 2003-01-21 Winbond Electronics Corp. Electrostatic discharge protective device incorporating silicon controlled rectifier devices

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5211880A (en) * 1975-07-18 1977-01-29 Toshiba Corp Semiconductor integrated circuit device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5211880A (en) * 1975-07-18 1977-01-29 Toshiba Corp Semiconductor integrated circuit device

Also Published As

Publication number Publication date
JPS594068A (en) 1984-01-10

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