JPS6244123B2 - - Google Patents
Info
- Publication number
- JPS6244123B2 JPS6244123B2 JP52143613A JP14361377A JPS6244123B2 JP S6244123 B2 JPS6244123 B2 JP S6244123B2 JP 52143613 A JP52143613 A JP 52143613A JP 14361377 A JP14361377 A JP 14361377A JP S6244123 B2 JPS6244123 B2 JP S6244123B2
- Authority
- JP
- Japan
- Prior art keywords
- bellows
- bellows body
- inner bellows
- plate
- ventilation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Actuator (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14361377A JPS5476777A (en) | 1977-11-30 | 1977-11-30 | Bellows type double acting actuator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14361377A JPS5476777A (en) | 1977-11-30 | 1977-11-30 | Bellows type double acting actuator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5476777A JPS5476777A (en) | 1979-06-19 |
JPS6244123B2 true JPS6244123B2 (enrdf_load_stackoverflow) | 1987-09-18 |
Family
ID=15342801
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14361377A Granted JPS5476777A (en) | 1977-11-30 | 1977-11-30 | Bellows type double acting actuator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5476777A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014102913A1 (ja) * | 2012-12-25 | 2014-07-03 | 信越エンジニアリング株式会社 | アクチュエータ及び粘着チャック装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5083282A (en) * | 1988-03-31 | 1992-01-21 | Anritsu Corporation | Transition state detecting device and measuring device using the same |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2871827A (en) * | 1956-02-08 | 1959-02-03 | Arthur B Euga | Brake motor |
JPS518433B2 (enrdf_load_stackoverflow) * | 1972-04-11 | 1976-03-16 |
-
1977
- 1977-11-30 JP JP14361377A patent/JPS5476777A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014102913A1 (ja) * | 2012-12-25 | 2014-07-03 | 信越エンジニアリング株式会社 | アクチュエータ及び粘着チャック装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS5476777A (en) | 1979-06-19 |
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