JPS6242240U - - Google Patents

Info

Publication number
JPS6242240U
JPS6242240U JP13363885U JP13363885U JPS6242240U JP S6242240 U JPS6242240 U JP S6242240U JP 13363885 U JP13363885 U JP 13363885U JP 13363885 U JP13363885 U JP 13363885U JP S6242240 U JPS6242240 U JP S6242240U
Authority
JP
Japan
Prior art keywords
container
chemical solution
amount
pressure
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13363885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0311885Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985133638U priority Critical patent/JPH0311885Y2/ja
Publication of JPS6242240U publication Critical patent/JPS6242240U/ja
Application granted granted Critical
Publication of JPH0311885Y2 publication Critical patent/JPH0311885Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Weting (AREA)
JP1985133638U 1985-08-30 1985-08-30 Expired JPH0311885Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985133638U JPH0311885Y2 (enExample) 1985-08-30 1985-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985133638U JPH0311885Y2 (enExample) 1985-08-30 1985-08-30

Publications (2)

Publication Number Publication Date
JPS6242240U true JPS6242240U (enExample) 1987-03-13
JPH0311885Y2 JPH0311885Y2 (enExample) 1991-03-20

Family

ID=31034130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985133638U Expired JPH0311885Y2 (enExample) 1985-08-30 1985-08-30

Country Status (1)

Country Link
JP (1) JPH0311885Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01220827A (ja) * 1988-02-29 1989-09-04 Tokyo Electron Ltd 塗布装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4935436A (enExample) * 1972-08-09 1974-04-02
JPS5050871A (enExample) * 1973-09-05 1975-05-07
JPS5835952U (ja) * 1981-09-03 1983-03-09 三菱電機株式会社 液体噴霧装置
JPS61147257A (ja) * 1984-12-20 1986-07-04 Fujitsu Ltd 現像装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4935436A (enExample) * 1972-08-09 1974-04-02
JPS5050871A (enExample) * 1973-09-05 1975-05-07
JPS5835952U (ja) * 1981-09-03 1983-03-09 三菱電機株式会社 液体噴霧装置
JPS61147257A (ja) * 1984-12-20 1986-07-04 Fujitsu Ltd 現像装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01220827A (ja) * 1988-02-29 1989-09-04 Tokyo Electron Ltd 塗布装置

Also Published As

Publication number Publication date
JPH0311885Y2 (enExample) 1991-03-20

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