JPS6240192Y2 - - Google Patents
Info
- Publication number
- JPS6240192Y2 JPS6240192Y2 JP881283U JP881283U JPS6240192Y2 JP S6240192 Y2 JPS6240192 Y2 JP S6240192Y2 JP 881283 U JP881283 U JP 881283U JP 881283 U JP881283 U JP 881283U JP S6240192 Y2 JPS6240192 Y2 JP S6240192Y2
- Authority
- JP
- Japan
- Prior art keywords
- mounting plate
- support device
- spring support
- air spring
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 11
- 238000013016 damping Methods 0.000 claims description 10
- 238000002955 isolation Methods 0.000 description 10
- 239000000523 sample Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 3
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
Description
【考案の詳細な説明】
技術分野
本考案は、一般的には、精密測定器或いは精密
加工機等の精密機器を載置するための防振台に係
り、より詳細には、該防振台の水平方向振動を効
果的に減衰するための水平方向振動減衰装置に関
する。[Detailed Description of the Invention] Technical Field The present invention generally relates to a vibration isolation table for mounting precision instruments such as precision measuring instruments or precision processing machines, and more specifically relates to the vibration isolation table. The present invention relates to a horizontal vibration damping device for effectively damping horizontal vibration of.
従来技術
第１図は、従来の防振台の一例を説明するため
の要部概略構成図で、図中、１は精密測定器或い
は精密加工機等が搭載される搭載板、２は該搭載
板１を空気圧にて弾性支持している空気ばね支持
装置、３はダイヤフラム、４ま弾性支持部材、５
は補助空気槽、６は前記空気ばね支持装置２と補
助空気槽５とを連通するパイプ、７は圧縮空気供
給パイプ、８は搭載板１に固定されたプローブ、
９は制御弁、１０は該制御弁９と前記補助空気槽
５とを連通するパイプで、周知のように、搭載板
１の上の精密機器を搭載して使用するが、その
際、該精密機器に外部からの振動が伝達されない
ようにするために搭載板１を空気ばね支持装置２
にて弾性支持している。而して、上述のごとき防
振台においては、搭載板１に搭載する精密機器の
重量によつて該搭載板１のレベルが変動してしま
うという問題がある。プローブ８及び制御弁９
は、このような問題を解決するために設けられた
もので、例えば、精密機器の重量が重い場合に
は、搭載板１のレベルが下がり、それに従つて、
プローブ８のレベルも下がるが、プローブ８が下
がると制御弁９の給入弁が動作して図示しない圧
縮空気源からの圧縮空気がパイプ７、制御弁９、
パイプ１０を通して補助空気槽５に供給され、空
気ばね支持装置２内の圧力を上昇させる。斯様に
して、空気ばね支持装置２内の圧力が上昇する
と、搭載板１が上昇し、それに従つてプローブ８
も上昇し、該プローブ８が所定レベルになると制
御弁９の給入弁が動作して空気ばね支持装置２内
への空気の給入が停止され、搭載板１従つて精密
機器はその所定レベるに維持される。一方、搭載
板１に搭載される精密機器の重量が軽い場合に
は、搭載板１及びプローブ８が上昇し、制御弁９
の排気弁が開口し、補助空気槽５内の空気がパイ
プ１０、制御弁９の排気弁を通して大気中に排出
され、空気ばね支持装置内の空気圧が低下され
る。斯様にして、空気ばね支持装置２内の空気圧
が低下すると、搭載板１が下降し、それに従つて
プローブ８も下降し、該プローブ８が所定レベル
になると制御弁９の排気弁が閉塞して空気の排出
が停止し、搭載板１従つて精密機器はその所定レ
ベルに維持される。PRIOR ART FIG. 1 is a schematic configuration diagram of main parts for explaining an example of a conventional anti-vibration table. In the figure, 1 is a mounting plate on which a precision measuring instrument or a precision processing machine is mounted, and 2 is the mounting plate. An air spring support device that elastically supports the plate 1 using air pressure; 3 is a diaphragm; 4 is an elastic support member; 5
is an auxiliary air tank; 6 is a pipe communicating the air spring support device 2 and the auxiliary air tank 5; 7 is a compressed air supply pipe; 8 is a probe fixed to the mounting plate 1;
9 is a control valve, and 10 is a pipe that communicates the control valve 9 with the auxiliary air tank 5.As is well known, when used with precision equipment mounted on the mounting plate 1, the precision In order to prevent external vibrations from being transmitted to the equipment, the mounting plate 1 is supported by an air spring support device 2.
It is elastically supported. However, in the above-mentioned vibration isolation table, there is a problem in that the level of the mounting plate 1 varies depending on the weight of the precision equipment mounted on the mounting plate 1. Probe 8 and control valve 9
was provided to solve such a problem. For example, when the weight of precision equipment is heavy, the level of the mounting plate 1 is lowered, and accordingly,
The level of the probe 8 also decreases, but when the probe 8 decreases, the supply valve of the control valve 9 operates and compressed air from a compressed air source (not shown) is supplied to the pipe 7, the control valve 9,
It is supplied to the auxiliary air tank 5 through the pipe 10 and increases the pressure in the air spring support device 2. In this way, when the pressure in the air spring support device 2 increases, the mounting plate 1 rises and the probe 8 accordingly rises.
When the probe 8 rises and the probe 8 reaches a predetermined level, the supply valve of the control valve 9 operates to stop the supply of air into the air spring support device 2, and the mounting plate 1 and therefore the precision equipment are brought to the predetermined level. Maintained on a regular basis. On the other hand, if the weight of the precision equipment mounted on the mounting plate 1 is light, the mounting plate 1 and the probe 8 will rise and the control valve 9 will rise.
The exhaust valve opens, the air in the auxiliary air tank 5 is exhausted to the atmosphere through the pipe 10 and the exhaust valve of the control valve 9, and the air pressure in the air spring support device is reduced. In this way, when the air pressure inside the air spring support device 2 decreases, the mounting plate 1 descends, and the probe 8 also descends accordingly, and when the probe 8 reaches a predetermined level, the exhaust valve of the control valve 9 is closed. The air exhaust is then stopped and the mounting plate 1 and therefore the precision equipment are maintained at their predetermined level.
また、上記防振台においては、搭載板１上に搭
載された機器を操作したり、機器の部品が水平方
向に移動停止を繰り返するような場合、或いは、
床に防振台水平方向の固有振動数に近い大きな振
動があつたような場合、搭載板１が水平方向に大
きく揺り動かされる。 In addition, in the above-mentioned vibration isolation table, when the equipment mounted on the mounting plate 1 is operated, when the parts of the equipment repeatedly move and stop in the horizontal direction, or when
When the floor experiences a large vibration close to the natural frequency of the vibration isolation table in the horizontal direction, the mounting plate 1 is shaken significantly in the horizontal direction.
第２図は、上述のごとき防振台に水平方向の振
動が加わつた場合の様子を示す要部概略構成図
で、前述のようにして搭載板１が水平方向に動か
されると、ダイヤフラム３が球面座のような動き
をし、弾性支持部材（例えば防振ゴム）４は、図
示のように、一方の側が圧縮され、他方の側が引
張られるような動きをするが、この動きに対して
減衰作用として働くものは、主として、圧縮、引
張りを繰り返す弾性支持部材４の内部摩擦であ
る。而して、防振台上での機器の操作や部品の移
動のないものについては、上記弾性支持部材４に
よる減衰作用で、上述のごとき水平方向の振動を
十分に減衰させることができたが、防振台上で機
器の操作、移動等が行われるものについは、減衰
作用が小さいため、揺動振幅が大きくなつたり、
振動がいつまでも止まらないといつた欠点があつ
た。なお、このような問題を解決するために、従
来、固定部分にダンパーを設け、揺動時、該ダン
パーに搭載板を直接当てるようにしているが、こ
のようにすると、床の振動が該ダンバーを通して
搭載板に伝達されてしまい、防振性能が低下され
てしまうという問題があつた。 FIG. 2 is a schematic diagram of the main parts showing the situation when horizontal vibration is applied to the vibration isolation table as described above. When the mounting plate 1 is moved in the horizontal direction as described above, the diaphragm 3 It moves like a spherical seat, and the elastic support member (e.g. vibration isolating rubber) 4 moves as if one side is compressed and the other side is pulled, as shown in the figure, but it is damped against this movement. What acts as an action is mainly internal friction of the elastic support member 4, which repeats compression and tension. However, for devices that do not involve operating equipment or moving parts on a vibration isolating table, the above-mentioned horizontal vibrations could be sufficiently damped by the damping effect of the elastic support member 4. For equipment that is operated or moved on a vibration-isolating table, the damping effect is small, so the vibration amplitude may become large.
One drawback was that the vibrations never stopped. In order to solve this problem, conventionally, a damper is installed on a fixed part, and the mounting plate is brought into direct contact with the damper during rocking. There was a problem in that the vibration was transmitted through the vibration to the mounting plate, reducing the vibration isolation performance.
目 的
本考案は、上述のごとき従来技術の欠点を解決
するためになされたもので、特に、防振台の水平
方向の大きな揺動をできるだけ小さく抑え、か
つ、該揺動をできるだけ早く止めることを目的と
してなされたものである。Purpose The present invention was made in order to solve the above-mentioned drawbacks of the conventional technology, and in particular, to suppress large horizontal swings of the vibration isolating table as small as possible, and to stop the swings as soon as possible. It was made for the purpose of
構 成
第３図は、本考案の一実施例を説明するための
要部構成図で、図中、第１図と同様の作用をする
部分には、第１図の場合と同一の参照番号が付し
てある。而して、本考案においては、例えば、補
助空気槽５内に液（油）槽１１を設け、該液槽１
１内に空気ばね支持装置２の底部より吊下した制
動翼１２を浸漬するようにしている。従つて、本
考案において、搭載板１が水平方向に動かされる
と、第２図に関連して説明したように、弾性支持
部材４が変形して空気ばね支持装置２が傾斜し、
これに伴なつて制動翼１２も傾斜し、その際、該
制動翼１２は液槽１１内の液体の摩擦抵抗を受け
る。その場合、制動翼１２の動きの支点は、高さ
方向において防振ゴム４の略中間点Ｐにあるの
で、搭載板１の動きに対する制動翼１２の先端部
の動きは、該支点Ｐからダイヤフラム３までの距
離l1と、該支点Ｐから制動翼１２の先端部までの
距離l2との比に比例する。従つて、搭載板１の動
きに対して制動翼１２の先端部の動きは数倍大き
くなり、大きな減衰作用を受けることができる。Configuration Figure 3 is a diagram showing the configuration of the main parts for explaining one embodiment of the present invention. is attached. Therefore, in the present invention, for example, a liquid (oil) tank 11 is provided in the auxiliary air tank 5, and the liquid tank 1
A brake blade 12 suspended from the bottom of the air spring support device 2 is immersed in the air spring support device 1. Therefore, in the present invention, when the mounting plate 1 is moved in the horizontal direction, the elastic support member 4 is deformed and the air spring support device 2 is tilted, as explained in connection with FIG.
Along with this, the brake blades 12 are also tilted, and at this time, the brake blades 12 are subjected to frictional resistance of the liquid in the liquid tank 11. In that case, since the fulcrum of the movement of the brake blade 12 is located at approximately the midpoint P of the vibration isolating rubber 4 in the height direction, the movement of the tip of the brake blade 12 relative to the movement of the mounting plate 1 is from the fulcrum P to the diaphragm. 3 and the distance l 2 from the fulcrum P to the tip of the brake blade 12. Therefore, the movement of the tip of the brake blade 12 is several times greater than the movement of the mounting plate 1, and can receive a large damping effect.
なお、第３図には、液槽１１を補助空気槽５内
に配設する例を示したが、本考案は、上記実施例
に限定されるものではなく、例えば、弾性支持部
材４を液槽１１で支持するようにし、補助空気槽
は任意所望の箇所例えば防振台の梁１３内に設け
るようにしてもよい。 Although FIG. 3 shows an example in which the liquid tank 11 is disposed within the auxiliary air tank 5, the present invention is not limited to the above embodiment. The auxiliary air tank may be provided at any desired location, for example, within the beam 13 of the vibration isolator.
効 果
以上の説明から明らかなように、本考案による
と、搭載板１の水平方向の動きに対して制動翼１
２を数倍大きく動かすことができるので、大きな
減衰作用を受けることができ、しかも、制動液
（油）の量、粘度等を変えることにより、減衰量
を変えることができる。また、床振動は、液槽、
該液槽内の液体を経て制動翼に伝達されるが、こ
の制動翼の振動は、空気ばね支持装置（ダイヤフ
ラム）によつて防振されるので、床振動が搭載板
１に伝達される割合は小さく、従つて、減衰装置
を付加することによつて防振性能が大きく損なわ
れるようなことはない等の利点がある。Effects As is clear from the above explanation, according to the present invention, the braking blade 1 responds to the horizontal movement of the mounting plate 1.
2 can be moved several times larger, so a large damping effect can be obtained, and the amount of damping can be changed by changing the amount, viscosity, etc. of the brake fluid (oil). In addition, floor vibration is caused by liquid tank,
The vibrations of the brake blades are transmitted to the brake blades via the liquid in the liquid tank, but since the vibrations of the brake blades are damped by the air spring support device (diaphragm), the rate at which floor vibrations are transmitted to the mounting plate 1 is reduced. is small, so there are advantages such as the addition of a damping device does not significantly impair vibration isolation performance.
第１図は、従来の防振台の一例を説明するため
の要部概略構成図、第２図は、第１図に示した防
振台において水平方向の振動が加わつた場合の様
子を示す要部概略構成図、第３図は、本考案の一
実施例を説明するための要部構成図である。
１……搭載板、２……空気ばね支持装置、３…
…ダイヤフラム、４……弾性支持部材、５……補
助空気槽、１１……液槽、１２……制動翼、１３
……梁。
Fig. 1 is a schematic configuration diagram of the main parts to explain an example of a conventional vibration isolation table, and Fig. 2 shows the situation when horizontal vibration is applied to the vibration isolation table shown in Fig. 1. FIG. 3 is a schematic diagram of the main part for explaining an embodiment of the present invention. 1... Mounting plate, 2... Air spring support device, 3...
... diaphragm, 4 ... elastic support member, 5 ... auxiliary air tank, 11 ... liquid tank, 12 ... brake blade, 13
...beam.
Claims (1)
載板を支持する空気ばね支持装置と、該空気ばね
支持装置を支持する弾性部材と、前記空気ばね支
持装置に連通している補助空気槽とを有する防振
台において、前記弾性部材を支持する液槽を有
し、該液槽内に前記空気ばね支持装置の底部より
垂下された制動翼が浸漬されていることを特徴と
する防振台の水平方向振動減衰装置。 A mounting plate for placing objects such as equipment, an air spring support device for supporting the mounting plate, an elastic member for supporting the air spring support device, and auxiliary air communicating with the air spring support device. The anti-vibration table has a liquid tank for supporting the elastic member, and a damping blade hanging from the bottom of the air spring support device is immersed in the liquid tank. Horizontal vibration damping device for shaking table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP881283U JPS59115138U (en) | 1983-01-25 | 1983-01-25 | Horizontal vibration damping device for anti-vibration table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP881283U JPS59115138U (en) | 1983-01-25 | 1983-01-25 | Horizontal vibration damping device for anti-vibration table |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59115138U JPS59115138U (en) | 1984-08-03 |
| JPS6240192Y2 true JPS6240192Y2 (en) | 1987-10-14 |
Family
ID=30140291
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP881283U Granted JPS59115138U (en) | 1983-01-25 | 1983-01-25 | Horizontal vibration damping device for anti-vibration table |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59115138U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111022567A (en) * | 2019-12-23 | 2020-04-17 | 哈尔滨恒信精密气浮科技有限公司 | High-precision self-leveling air spring vibration isolation table |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6021049U (en) * | 1983-07-21 | 1985-02-13 | 昭和電線電纜株式会社 | air spring device |
| JP2001271878A (en) * | 2000-03-24 | 2001-10-05 | Fujikura Rubber Ltd | Positioning device for vibration control base |
-
1983
- 1983-01-25 JP JP881283U patent/JPS59115138U/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111022567A (en) * | 2019-12-23 | 2020-04-17 | 哈尔滨恒信精密气浮科技有限公司 | High-precision self-leveling air spring vibration isolation table |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59115138U (en) | 1984-08-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5285995A (en) | Optical table active leveling and vibration cancellation system | |
| US4360184A (en) | Pneumatic device for attenuation of vertical, horizontal and rotational dynamic forces | |
| US4595166A (en) | Vibration isolating table device | |
| JPS6240192Y2 (en) | ||
| JP4117524B2 (en) | Level adjuster | |
| KR101266831B1 (en) | Tuned Mass Damper Using Metal Plate Spring and Vibration Isolation Base Using the Tuned Mass Damper | |
| CN216895520U (en) | Air bag type vibration reduction platform device | |
| JPS58116Y2 (en) | scales | |
| CS247736B1 (en) | Elastic seating of centrifuge's frame on subsoil | |
| JP2002206597A (en) | Earthquake resistant and vibration control device | |
| JPH08170689A (en) | Vibration resistant device | |
| JPH0874930A (en) | Vibration control device | |
| JPS6060344A (en) | Vibration-control device | |
| JP3975283B2 (en) | Bidirectional vibration damper and vibration isolation mount | |
| JPH0226334A (en) | Precision damping method | |
| JPH0735192A (en) | Active vibration isolator | |
| JPS6243152Y2 (en) | ||
| JPH0313643Y2 (en) | ||
| JPH0886329A (en) | Vibration damping device | |
| JPH08135733A (en) | Vibration isolation device | |
| JPS62270843A (en) | Mounting device for power unit | |
| JPS599335A (en) | Suspension device of compressor | |
| SU1441027A1 (en) | Vibration-insulated foundation | |
| JPS5832038Y2 (en) | Combination vibration absorber | |
| KR20230105880A (en) | Device for Ground Vibration Test with Soft Suspension Vibration Isolator Apparatus |