JPS6239816B2 - - Google Patents
Info
- Publication number
- JPS6239816B2 JPS6239816B2 JP15899381A JP15899381A JPS6239816B2 JP S6239816 B2 JPS6239816 B2 JP S6239816B2 JP 15899381 A JP15899381 A JP 15899381A JP 15899381 A JP15899381 A JP 15899381A JP S6239816 B2 JPS6239816 B2 JP S6239816B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- patterns
- memory
- defect
- actual
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007547 defect Effects 0.000 claims description 27
- 238000007689 inspection Methods 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 21
- 230000002950 deficient Effects 0.000 claims description 12
- 230000015654 memory Effects 0.000 description 38
- 230000003287 optical effect Effects 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 3
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56158993A JPS5860538A (ja) | 1981-10-06 | 1981-10-06 | パタ−ン検査方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56158993A JPS5860538A (ja) | 1981-10-06 | 1981-10-06 | パタ−ン検査方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5860538A JPS5860538A (ja) | 1983-04-11 |
JPS6239816B2 true JPS6239816B2 (US20100268047A1-20101021-C00003.png) | 1987-08-25 |
Family
ID=15683872
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56158993A Granted JPS5860538A (ja) | 1981-10-06 | 1981-10-06 | パタ−ン検査方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5860538A (US20100268047A1-20101021-C00003.png) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59132129A (ja) * | 1983-01-19 | 1984-07-30 | Hitachi Ltd | 欠陥検査装置 |
JPS62113436A (ja) * | 1985-11-13 | 1987-05-25 | Toshiba Corp | 半導体ペレツトの外観検査方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50127574A (US20100268047A1-20101021-C00003.png) * | 1974-03-27 | 1975-10-07 | ||
JPS5225575A (en) * | 1975-08-22 | 1977-02-25 | Hitachi Ltd | Inspection method of the state of object |
-
1981
- 1981-10-06 JP JP56158993A patent/JPS5860538A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50127574A (US20100268047A1-20101021-C00003.png) * | 1974-03-27 | 1975-10-07 | ||
JPS5225575A (en) * | 1975-08-22 | 1977-02-25 | Hitachi Ltd | Inspection method of the state of object |
Also Published As
Publication number | Publication date |
---|---|
JPS5860538A (ja) | 1983-04-11 |