JPS6239755A - Production of small oxygen electrode - Google Patents

Abstract

PURPOSE:To make it possible to produce a small oxygen electrode safe and easy to produce and preventing from the cutting of a pattern such as a cathode, by forming a groove for an electrolyte to a photosensitive material and forming an anode and a cathode in a flat shape. CONSTITUTION:A chrominum membrane pattern is formed on a glass substrate 1 by vapor deposition and a silver membrane pattern is formed on a said pattern by the same method. Next, silver plating is applied to the silver membrane to form a silver membrane pattern. Subsequently, a photosensitive material 3 is formed on the substrate 1 by coating and a mask is arranged on the material 3. The material 3 is irradiated with ultraviolet rays through the mask and exposed thereto to be cured. In the next step, the mask is removed and the resin part is removed to form an electrolyte chamber 6a and an anode take-out part 6b having the exposed silver membrane patterns. Gold of a cathode is applied onto the resin by vapor deposition to form a thin gold membrane 7. Then, an oxygen permeable membrane 10 is placed on the membrane 7 and a lid 11 is applied and adhered. Then, an electrolyte is injected from an electrolyte injection port 8. Thereafter, injection part is closed and lead wires 12, 13 are respectively taken out from the anode and the cathode.

Description

[Detailed Description of the Invention] [Summary of the Invention] A groove for an electrolyte is formed in a photosensitive material, and an anode and a cathode are each formed flat to obtain a safe and small-sized oxygen electrode without disconnection.

[Industrial application field]

The present invention relates to a method for manufacturing a small-sized oxygen electrode, and more particularly, to a safe and easy method for manufacturing a small-sized oxygen electrode using a photosensitive material.

, [Prior Art and Problems] An oxygen electrode for measuring dissolved oxygen concentration in a solution is composed of a platinum film acting as a cathode or a silver film acting as an anode, and an electrolyte.

Conventionally, in the manufacture of such oxygen electrodes, particularly small-sized oxygen electrodes, anisotropic etching using hydrofluoric acid or alkali is well known in order to form grooves for storing the electrolyte in silicon wafers, for example.

However, this anisotropic etching process is sloppy, and there is a problem in that it uses hydrofluoric acid, which is dangerous to the human body as described above.

Furthermore, the anisotropic etching forms a trench with sidewalls tilted at 45°. The cathode pattern made of platinum or gold as a cathode formed in this groove is 45
Edges created by the angled sidewalls and flat surfaces often caused cutting problems.

An object of the present invention is to manufacture a small oxygen electrode safely and easily, and the pattern of the cathode, etc., will not be cut.

[Means for solving problems]

According to the present invention, in the method for manufacturing a small oxygen electrode consisting of an anode, a cathode, and an electrolyte for measuring dissolved oxygen in a solution, the anode is formed by patterning on a substrate, and then the anode is formed. A photosensitive material is disposed on a substrate, a mask having a light absorbing portion for forming an electrolyte compartment and an anode outlet in the photosensitive material is disposed above the photosensitive material, and a mask is disposed above the photosensitive material. A compact device characterized by comprising the steps of forming the electrolyte compartment and the anode outlet in the photosensitive material below the mask by irradiating light from the mask, and then patterning the cathode on the surface of the photosensitive material. The problem is solved by a method of manufacturing oxygen electrodes.

〔Example〕

Embodiments of the present invention will be described below based on the drawings.

1A to 1D are perspective views for explaining the steps of an embodiment of the present invention.

As shown in FIG. 1A, by vapor deposition on a glass substrate 1,
A chromium thin film pattern having a thickness of about 200 mm and a 11WI film pattern having a thickness of about 2000 mm are formed thereon as a base pattern. Next, root plating is performed on the 89 silver thin film to form a silver thin film pattern 2 having a thickness of about 1 to 100 μm. This silver thin film pattern 2 acts as an anode of a small oxygen electrode.

Next, as shown in FIG. 1B, a photosensitive material 3, such as FP-70 made by Asahi Kasei Co., Ltd., is applied to the glass substrate 1L on which the silver thin film pattern 2 is formed, with a uniform thickness of about 0.1 to 1. The film was coated using a doctor blade to a thickness of . Next, the photosensitive material 3 is coated with a mask 4 made of 4 black and white film negatives, for example Minicopy≠ manufactured by Fuji Photo Film Co., Ltd. A black pattern 5 is formed on the mask 4 by dyeing the mask 4 black in a region corresponding to a region in which a groove for storing an electrolytic solution is formed below the mask and an anode extraction region.

Ultraviolet rays are irradiated from above this mask 4. Ultraviolet rays are transmitted through the mask 4 other than the black pattern 5 of the mask, and the photosensitive material 3 is exposed and cured. On the other hand, the photosensitive material below the different color pattern 5 remains in its original soft state.

Next, as shown in FIG. 1C, the mask 4 is removed and the soft resin portion is removed to form an electrolyte compartment 6a and an anode extraction portion 6b with exposed silver thin patterns. Next, gold as a cathode is deposited on the cured resin to form a gold thin film 7.

Next, as shown in Figure 1D, for example, a 12 μm thick
Toyoflon F E P (Fluorinatec
lt! An oxygen permeable film 10 such as a thylene prop'ylene film is placed on the gold thin film, and a lid 11 having an opening is covered and bonded. iM, K as electrolyte
The cz solution is injected from the electrolyte injection port 8 (FIG. 1C) by a reduced pressure method. Next, after closing the injection port, lead wires 12 and 13 are taken out from each of the anode and cathode electrodes, completing a small oxygen electrode.

〔Effect of the invention〕

As explained above, according to the present invention, grooves for electrolyte can be easily and safely formed in photosensitive materials, and the anode and cathode electrodes can be formed flat, thereby preventing wire breakage. be able to.

[Brief explanation of drawings]

1A to 1D are perspective views for explaining the steps of an embodiment of the present invention. 1...Glass substrate, 2...Silver thin film pattern,
3... Photosensitive material, 4... Mask, 5... Black pattern, 6a... Compartment for electrolyte solution, 6b... Anode extraction part, 7... Gold thin film, 8... Electrolyte liquid inlet,
10... Oxygen permeable membrane, 11... Lid,
12.13 ...Lead wire.

Claims (1)

[Claims] In a method for manufacturing a small oxygen electrode consisting of an anode, a cathode, and an electrolyte for measuring dissolved oxygen in a solution, the anode is patterned on a substrate, and then the anode is placed on the substrate on which the anode is formed. A photosensitive material is disposed, and a mask having a light absorbing portion for creating an electrolyte compartment and the anode outlet in the photosensitive material is disposed above the photosensitive material, and light is emitted from above the mask. A small oxygen electrode comprising the steps of forming the electrolyte compartment and the anode outlet in the photosensitive material below the mask by irradiation, and then patterning the cathode on the surface of the photosensitive material. Manufacturing method.