JPS6239315Y2 - - Google Patents

Info

Publication number
JPS6239315Y2
JPS6239315Y2 JP1982190264U JP19026482U JPS6239315Y2 JP S6239315 Y2 JPS6239315 Y2 JP S6239315Y2 JP 1982190264 U JP1982190264 U JP 1982190264U JP 19026482 U JP19026482 U JP 19026482U JP S6239315 Y2 JPS6239315 Y2 JP S6239315Y2
Authority
JP
Japan
Prior art keywords
piezoelectric diaphragm
humidity sensor
humidity
foil film
foil membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982190264U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5995249U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19026482U priority Critical patent/JPS5995249U/ja
Publication of JPS5995249U publication Critical patent/JPS5995249U/ja
Application granted granted Critical
Publication of JPS6239315Y2 publication Critical patent/JPS6239315Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
JP19026482U 1982-12-16 1982-12-16 湿度センサ Granted JPS5995249U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19026482U JPS5995249U (ja) 1982-12-16 1982-12-16 湿度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19026482U JPS5995249U (ja) 1982-12-16 1982-12-16 湿度センサ

Publications (2)

Publication Number Publication Date
JPS5995249U JPS5995249U (ja) 1984-06-28
JPS6239315Y2 true JPS6239315Y2 (cs) 1987-10-07

Family

ID=30409996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19026482U Granted JPS5995249U (ja) 1982-12-16 1982-12-16 湿度センサ

Country Status (1)

Country Link
JP (1) JPS5995249U (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057686A (cs) * 1973-09-20 1975-05-20

Also Published As

Publication number Publication date
JPS5995249U (ja) 1984-06-28

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