JPS6239234B2 - - Google Patents
Info
- Publication number
- JPS6239234B2 JPS6239234B2 JP14441983A JP14441983A JPS6239234B2 JP S6239234 B2 JPS6239234 B2 JP S6239234B2 JP 14441983 A JP14441983 A JP 14441983A JP 14441983 A JP14441983 A JP 14441983A JP S6239234 B2 JPS6239234 B2 JP S6239234B2
- Authority
- JP
- Japan
- Prior art keywords
- boron nitride
- stainless steel
- weight
- alloy
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052582 BN Inorganic materials 0.000 claims description 26
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 26
- 229910045601 alloy Inorganic materials 0.000 claims description 21
- 239000000956 alloy Substances 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 8
- 229910000963 austenitic stainless steel Inorganic materials 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 12
- 239000010935 stainless steel Substances 0.000 description 12
- 229910052796 boron Inorganic materials 0.000 description 5
- 239000002244 precipitate Substances 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 3
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 3
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 150000007513 acids Chemical class 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 229910052717 sulfur Inorganic materials 0.000 description 3
- 239000011593 sulfur Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- -1 nitric acid Chemical class 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910001257 Nb alloy Inorganic materials 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000012611 container material Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Other Surface Treatments For Metallic Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14441983A JPS6036648A (ja) | 1983-08-09 | 1983-08-09 | 高真空容器用材料及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14441983A JPS6036648A (ja) | 1983-08-09 | 1983-08-09 | 高真空容器用材料及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6036648A JPS6036648A (ja) | 1985-02-25 |
| JPS6239234B2 true JPS6239234B2 (ru) | 1987-08-21 |
Family
ID=15361734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14441983A Granted JPS6036648A (ja) | 1983-08-09 | 1983-08-09 | 高真空容器用材料及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6036648A (ru) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994029492A1 (fr) * | 1993-06-15 | 1994-12-22 | Tadahiro Ohmi | Element ou partie d'un systeme d'alimentation en gaz ultra-haute purete |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0711063B2 (ja) * | 1986-12-16 | 1995-02-08 | 日本鋼管株式会社 | オーステナイトステンレス鋼材の製造法 |
| US5192409A (en) * | 1990-03-09 | 1993-03-09 | National Research Institute For Metals | Method of sputtering a mixture of hexagonal boron nitride and stainless steel onto a steel vessel and heating the film so as to precipitate the boron nitride onto the film surface |
| US5478524A (en) * | 1992-08-24 | 1995-12-26 | Nissan Motor Co., Ltd. | Super high vacuum vessel |
-
1983
- 1983-08-09 JP JP14441983A patent/JPS6036648A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994029492A1 (fr) * | 1993-06-15 | 1994-12-22 | Tadahiro Ohmi | Element ou partie d'un systeme d'alimentation en gaz ultra-haute purete |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6036648A (ja) | 1985-02-25 |
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