JPS623885Y2 - - Google Patents
Info
- Publication number
- JPS623885Y2 JPS623885Y2 JP1979044862U JP4486279U JPS623885Y2 JP S623885 Y2 JPS623885 Y2 JP S623885Y2 JP 1979044862 U JP1979044862 U JP 1979044862U JP 4486279 U JP4486279 U JP 4486279U JP S623885 Y2 JPS623885 Y2 JP S623885Y2
- Authority
- JP
- Japan
- Prior art keywords
- heat
- conductive member
- conductive
- cathode
- generating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 238000003825 pressing Methods 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 239000012212 insulator Substances 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
【考案の詳細な説明】
（産業上の利用分野）
本考案は熱電子陰極構造体、特に熱電子放射性
能を有する陰極を発熱性保持体によつて保持する
とともに、一対の導電性部材によつて挾持する装
置において、導電性部材と電極とを結合部材で固
定することによつて、発熱性保持体からの熱を電
極に伝わりにくいものとし、かつ、各種の電子銃
に合せて組立できるように構成した熱電子陰極構
造体に関する。[Detailed description of the invention] (Industrial application field) The present invention holds a thermionic cathode structure, particularly a cathode having thermionic emission performance, by a heat generating holder and by a pair of conductive members. By fixing the conductive member and the electrode with a connecting member, the device is able to make it difficult for heat from the heat-generating holder to be transferred to the electrode, and it can be assembled to fit various types of electron guns. The present invention relates to a thermionic cathode structure constructed as follows.
（従来の技術ならびに考案が解決しようとする問
題点）
熱電子放射性能を持つ陰極において、特に六ホ
ウ化ランタンは優れた熱電子放射特性のゆえに注
目されている。これらの熱電子陰極は、走査形電
子顕微鏡、Ｘ線マイクロアナライザー、オージエ
電子分析器等の電子線分析機器のみならず、電子
ビーム露光装置、加速器、電子ビーム溶接機など
の産業機器にも使用されているが、各装置によつ
て電子銃、特にマウントの形状、大きさが異なる
ために、同一形状の熱電子陰極構造体を前記の各
装置に共通には使用できなかつた。しかも、ヒー
ター（発熱性保持体）の熱が電極に伝わりやすい
ので、外部電源導入端子の選定にあたつては、熱
的劣化の小さいものにする配慮が必要であつた。(Problems to be solved by conventional techniques and inventions) Among cathodes with thermionic emission performance, lanthanum hexaboride has attracted particular attention because of its excellent thermionic emission properties. These thermionic cathodes are used not only in electron beam analysis equipment such as scanning electron microscopes, X-ray microanalyzers, and Auger electron analyzers, but also in industrial equipment such as electron beam exposure equipment, accelerators, and electron beam welding machines. However, since the shape and size of the electron gun, especially the mount, differs depending on each device, the thermionic cathode structure of the same shape cannot be used in common for each of the above devices. Moreover, since the heat of the heater (heat-generating holder) is easily transferred to the electrodes, consideration must be given to selecting an external power supply introduction terminal that is resistant to thermal deterioration.
これに対して、実願昭48−129589号（実開昭50
−74266号）の願書に添付した明細書及び図面の
内容を撮影したマイクロフイルムには冷却のため
に絶縁油を用いることが示されている。しかしな
がら、絶縁油のような液体を用いることは煩雑で
保守に手数がかかるという欠点がある。また、実
開昭49−107258号公報には発熱性グラフアイト部
材を支持する支持体に凹部を設けることによつて
該グラフアイト部材と支持体との接触面積を小さ
くし、前者から後者への伝導熱量を減少させるこ
とが示されている。しかしながら支持体に凹部を
設けるような製作は手数がかかる上に、このよう
な発熱性グラフアイトの支持方法は不安定であ
り、使用中に発熱体の固定がずれる恐れがある。
本考案者らはこのような欠点がない熱電子陰極構
造体について種々検討を行なつた結果、本考案に
想到した。 In contrast, Utility Application No. 129589 (1973)
The microfilm photographing the contents of the specification and drawings attached to the application (No. 74266) indicates that insulating oil is used for cooling. However, using a liquid such as insulating oil has the disadvantage that it is complicated and requires a lot of maintenance. Furthermore, in Japanese Utility Model Application Publication No. 49-107258, the contact area between the graphite member and the support is reduced by providing a concave portion in the support that supports the exothermic graphite member, and the contact area between the graphite member and the support is reduced. It has been shown to reduce the amount of heat conducted. However, manufacturing the support by providing a recessed portion is time-consuming, and this method of supporting heat-generating graphite is unstable, and there is a risk that the heat-generating element may become unfixed during use.
The present inventors conducted various studies on a thermionic cathode structure that does not have such drawbacks, and as a result, they came up with the present invention.
（問題点を解決するための手段）
本考案は簡単な手段によつてこれらの欠点を解
決した熱電子陰極構造体を提供するものである。
すなわち本考案は熱電子放射性能を有する陰極を
発熱性保持体によつて保持する一方、これら発熱
性保持体を一対の導電性部材によつて挾持し、更
に、導電性部材の外側から前記陰極及び発熱性保
持体をバネにより押圧する押圧手段を設けてな
り、しかも、導電性部材と電極とを帯状金属板か
らなる結合部材により固定したことを特徴とす
る。本考案において結合部材を用いて導電性部材
の脚部の長さや結合部材の帯状金属板の長さを調
節し、電極と導電性部材を固定すれば、同一の導
電性部材及び押圧手段を用い、絶縁基板からの陰
極の高さや、マウントの絶縁基盤に固定されてい
る電極の間隔にかかわらず、各種の電子ビーム応
用機器の電子銃に合わせ、調節自在に組立てるこ
とができる。また、帯状金属板からなる結合部材
の形状はリング状にすることが好ましい、なお結
合部材は導電性の高い金属が好ましいが必ずしも
これに限られるものではなく、他の手段により電
極と導電性部材を導通させればよい。(Means for Solving the Problems) The present invention provides a thermionic cathode structure that solves these drawbacks by simple means.
That is, in the present invention, a cathode having thermionic emission performance is held by a heat-generating holder, and these heat-generating holders are sandwiched between a pair of conductive members, and the cathode is further held from the outside of the conductive member. A pressing means for pressing the exothermic holder with a spring is provided, and the conductive member and the electrode are fixed by a connecting member made of a band-shaped metal plate. In the present invention, if the length of the leg of the conductive member and the length of the band-shaped metal plate of the joint member are adjusted using the connecting member and the electrode and the conductive member are fixed, the same conductive member and pressing means can be used. Regardless of the height of the cathode from the insulating substrate or the spacing between the electrodes fixed to the insulating base of the mount, it can be assembled in a freely adjustable manner to match the electron guns of various electron beam application devices. Further, it is preferable that the shape of the connecting member made of a band-shaped metal plate is a ring shape. Although the connecting member is preferably made of a highly conductive metal, it is not necessarily limited to this. All you have to do is make it conductive.
（実施例）
以下、本考案の一実施例を図面に従つて詳細に
説明する。An embodiment of the present invention will now be described in detail with reference to the drawings.
第１図は本考案の熱電子陰極構造体の正面半断
面図であり、第２図はＡ−Ａ面における平面断面
図である。 FIG. 1 is a front half sectional view of the thermionic cathode structure of the present invention, and FIG. 2 is a plan sectional view taken along the line A-A.
結合部材は、リング状とした帯状金属板４ａ，
４ｂの端部に断面が半円の柱状の導電性部材用支
柱２ａ，２ｂを１ないし数個所スポツト溶接した
ものである。導電性部材５ａ，５ｂの脚部３ａ，
３ｂは予め長めに作つておき、陰極の必要な高さ
に合せて切断し、結合部材の導電性部材用支柱２
ａ，２ｂにスポツト溶接する。帯状金属板４ａ，
４ｂの他端は、電極１ａ，１ｂとスポツト溶接す
る。帯状金属板４ａ，４ｂの長さは、電極１ａ，
１ｂと導電性部材５ａ，５ｂとの必要とする間隔
になるよう調節しておく。該導電性部材用支柱
は、断面が半円形であるので、帯状金属板をスポ
ツト溶接してから折曲げる時に、両者の間に隙間
なく密着できる効果がある。従つて導電性部材５
ａ，５ｂの脚部が帯状金属板と密着できる形状で
あれば、必らずしも導電性部材用支柱２ａ，２ｂ
を用いなくとも良い。 The coupling member includes a ring-shaped band-shaped metal plate 4a,
Conductive member supports 2a, 2b each having a semicircular cross section are spot-welded to the end of the conductive member 4b at one or several locations. Leg portions 3a of conductive members 5a, 5b,
3b is made long in advance and cut to match the required height of the cathode, and is used as the conductive member support 2 of the connecting member.
Spot weld to a and 2b. Band-shaped metal plate 4a,
The other end of 4b is spot welded to electrodes 1a and 1b. The lengths of the strip metal plates 4a, 4b are the electrodes 1a,
The distance between the conductive members 1b and the conductive members 5a and 5b is adjusted as required. Since the conductive member support column has a semicircular cross section, it has the effect that when the band-shaped metal plate is spot-welded and then bent, it can be brought into close contact with the two without any gaps. Therefore, the conductive member 5
If the leg portions of a and 5b have a shape that allows them to come into close contact with the band-shaped metal plate, the conductive member supports 2a and 2b are not necessarily supported.
It is not necessary to use .
導電性部材５ａ，５ｂに設けられた押圧手段に
より陰極９は発熱性保持体１０ａ，１０ｂを介し
て押圧挾持する。押圧手段は、導電性部材５ａ，
５ｂの途中に一対に孔が設けられ、支柱１２が貫
通した絶縁体６ａ，６ｂが該孔に嵌め込まれてお
り、更に支柱１２に同軸に配された耐熱金属から
なるバネ７ａ，７ｂを介して、ナツト８ａ，８ｂ
を支柱１２の端部にネジに螺合することにより導
電性部材５ａ，５ｂに押圧力を加える。導電部材
５ａ，５ｂと支柱１２は絶縁体６ａ，６ｂにより
電気的及び熱的に絶縁されており、更に、この押
圧手段は電子銃の形状や大きさが異なつても共通
に使用することが可能である。 The cathode 9 is pressed and clamped via the heat generating holders 10a, 10b by the pressing means provided on the conductive members 5a, 5b. The pressing means includes a conductive member 5a,
A pair of holes are provided in the middle of the support 5b, and insulators 6a and 6b through which the support 12 passes are fitted into the holes. , Natsuto 8a, 8b
A pressing force is applied to the conductive members 5a and 5b by screwing them into the ends of the support columns 12. The conductive members 5a, 5b and the column 12 are electrically and thermally insulated by the insulators 6a, 6b, and furthermore, this pressing means can be used in common even if the shape and size of the electron gun is different. It is.
熱電子陰極構造体は、絶縁基盤１１に固定され
た電極１ａ，１ｂを電子銃室に設けられた外部電
源導入端子（図示してなし）にさし込むことによ
り、電極と外部電源が接続され、電流は電極１
ａ，１ｂから帯状金属板４ａ，４ｂ、導電性部材
用支柱２ａ，２ｂを通り、更に導電性部材５ａ，
５ｂを介して発熱性保持体１０ａ，１０ｂ及び陰
極９に供給される。 In the thermionic cathode structure, the electrodes and an external power source are connected by inserting the electrodes 1a and 1b fixed to the insulating base 11 into an external power supply introduction terminal (not shown) provided in the electron gun chamber. , the current is at electrode 1
a, 1b, pass through the band-shaped metal plates 4a, 4b, conductive member supports 2a, 2b, and then conductive members 5a,
It is supplied to the exothermic holders 10a, 10b and the cathode 9 via 5b.
（効 果）
本考案の熱電子陰極構造体では、帯状金属板か
らなる結合部材を用いることにより、帯状金属板
は表面積が比較的大きいものであるため熱の放散
が大きい。このため発熱性保持体からの伝熱で高
温になつている導電性部材の熱を電極に伝達する
のを防止することになり、外部電源導入端子のバ
ネ弾性が熱的に劣化する等の欠点がなくなるとい
う効果がある。あわせて、本願考案のような熱電
子陰極構造体とする際に、導電性部材に取り付け
固定される電極の構造を変えるだけで異なる使用
対象に応えることができ、ストツク上において
も、また、生産管理上からも極めて好都合になる
という効果を奏する。例えば、現在用いられてい
る異なつた数種類のタングステンヘアピン用マウ
ントを用いて本考案の熱電子陰極構造体を組立て
ることが可能であつた。(Effects) In the thermionic cathode structure of the present invention, by using a coupling member made of a band-shaped metal plate, heat dissipation is large because the band-shaped metal plate has a relatively large surface area. This prevents the heat of the conductive member, which has become high due to heat transfer from the heat-generating holder, from being transferred to the electrode, resulting in drawbacks such as thermal deterioration of the spring elasticity of the external power supply terminal. This has the effect of eliminating In addition, when creating a thermionic cathode structure like the one invented in this application, it is possible to respond to different uses by simply changing the structure of the electrode attached and fixed to the conductive member. This has the effect of being extremely convenient from a management standpoint. For example, it was possible to assemble the thermionic cathode structure of the present invention using several different types of tungsten hairpin mounts currently in use.
第１図は本考案の熱電子陰極構造体の実施例を
示す正面図、第２図はその平面図である。
図中の付号は、１……電極、２……導電性部材
用支柱、３……導電性部材の脚部、４……帯状金
属板、５……導電性部材、６……絶縁体、７……
バネ、８…ナツト、９……陰極、１０……発熱性
保持体、１１……絶縁基盤、１２……支柱を示
す。
FIG. 1 is a front view showing an embodiment of the thermionic cathode structure of the present invention, and FIG. 2 is a plan view thereof. Numbers in the diagram are 1... Electrode, 2... Support for conductive member, 3... Leg of conductive member, 4... Band-shaped metal plate, 5... Conductive member, 6... Insulator. ,7...
Spring, 8...Nut, 9...Cathode, 10...Exothermic holder, 11...Insulating base, 12...Strut.
Claims (1)
よつて保持する一方、これら発熱性保持体を一対
の導電性部材によつて挾持し、更に、導電性部材
の外側から前記陰極及び発熱性保持体をバネによ
り押圧する押圧手段を設けてなり、しかも、導電
性部材と電極とを帯状金属板からなる結合部材に
より固定してなることを特徴とする熱電子陰極構
造体。 While a cathode having thermionic emission performance is held by a heat-generating holder, these heat-generating holders are sandwiched between a pair of conductive members, and the cathode and heat-generating holder are held from the outside of the conductive member. 1. A thermionic cathode structure, characterized in that it is provided with a pressing means for pressing the body with a spring, and furthermore, the conductive member and the electrode are fixed by a connecting member made of a band-shaped metal plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979044862U JPS623885Y2 (en) | 1979-04-05 | 1979-04-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979044862U JPS623885Y2 (en) | 1979-04-05 | 1979-04-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55144748U JPS55144748U (en) | 1980-10-17 |
| JPS623885Y2 true JPS623885Y2 (en) | 1987-01-28 |
Family
ID=28922005
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979044862U Expired JPS623885Y2 (en) | 1979-04-05 | 1979-04-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS623885Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5382152A (en) * | 1976-12-27 | 1978-07-20 | Nippon Telegr & Teleph Corp <Ntt> | Sampling circuit |
-
1979
- 1979-04-05 JP JP1979044862U patent/JPS623885Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5382152A (en) * | 1976-12-27 | 1978-07-20 | Nippon Telegr & Teleph Corp <Ntt> | Sampling circuit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55144748U (en) | 1980-10-17 |
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