JPS6237919U - - Google Patents
Info
- Publication number
- JPS6237919U JPS6237919U JP12974785U JP12974785U JPS6237919U JP S6237919 U JPS6237919 U JP S6237919U JP 12974785 U JP12974785 U JP 12974785U JP 12974785 U JP12974785 U JP 12974785U JP S6237919 U JPS6237919 U JP S6237919U
- Authority
- JP
- Japan
- Prior art keywords
- opposing
- electrode
- chamber
- cvd apparatus
- convex
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 2
- 238000000354 decomposition reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Description
第１図はこの考案の一実施例を示す概略正面図
、第２図は膜厚分布特性図、第３図は変形例を示
す概略正面図、第４図は異なる変形例を示す概略
正面図、第５図は従来のプラズマＣＶＤ装置の概
略正面図、第６図はその膜厚分布特性図、第７図
は電極間距離―成膜速度特性図である。 １…チヤンバー、２…対向電極、９…対向電極
、９ａ…電極面。
、第２図は膜厚分布特性図、第３図は変形例を示
す概略正面図、第４図は異なる変形例を示す概略
正面図、第５図は従来のプラズマＣＶＤ装置の概
略正面図、第６図はその膜厚分布特性図、第７図
は電極間距離―成膜速度特性図である。 １…チヤンバー、２…対向電極、９…対向電極
、９ａ…電極面。
Claims (1)
- プラズマ分解を行なうためにチヤンバー内に設
けられた２枚の対向電極の内、高周波電力が供給
される対向電極の電極面を所定曲率により凹状、
凸状又は凹凸状に形成したことを特徴とするプラ
ズマＣＶＤ装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12974785U JPS6237919U (ja) | 1985-08-26 | 1985-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12974785U JPS6237919U (ja) | 1985-08-26 | 1985-08-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6237919U true JPS6237919U (ja) | 1987-03-06 |
Family
ID=31026596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12974785U Pending JPS6237919U (ja) | 1985-08-26 | 1985-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6237919U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006331740A (ja) * | 2005-05-24 | 2006-12-07 | Sharp Corp | プラズマプロセス装置 |
-
1985
- 1985-08-26 JP JP12974785U patent/JPS6237919U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006331740A (ja) * | 2005-05-24 | 2006-12-07 | Sharp Corp | プラズマプロセス装置 |