JPS6237705U - - Google Patents
Info
- Publication number
- JPS6237705U JPS6237705U JP13069185U JP13069185U JPS6237705U JP S6237705 U JPS6237705 U JP S6237705U JP 13069185 U JP13069185 U JP 13069185U JP 13069185 U JP13069185 U JP 13069185U JP S6237705 U JPS6237705 U JP S6237705U
- Authority
- JP
- Japan
- Prior art keywords
- light
- light beam
- shielding plate
- receiver
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 9
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Description
第１図はこの考案による光変位検出器の一例を
示す構成図、第２図はその細い光ビーム３１の光
強度分布を示す図、第３図は拡大された光ビーム
３３の光強度分布を示す図、第４図は矩形状光ビ
ームと被測定物の変位方向及び光遮断状態を示す
図、第５図Ａ，Ｂ，Ｃは被測定物１３と光ビーム
３８の変位との関係を示す図、第６図Ａ，Ｂ，Ｃ
はそれぞれ第５図Ａ，Ｂ，Ｃと対応した受光器３
９の出力を示す図、第７図は変位に対する受光器
の出力を示す図、第８図はこの考案の光変位検出
器と信号発生器、高速フーリエ変換解析器とを組
合わせた振動解析装置を示すブロツク図、第９図
はその変位量と空間周波数との関係を示す対応し
た測定例を示す図、第１０図は従来の光変位検出
器を示す構成図、第１１図は従来の光変位検出器
の出力―変位特性図である。
１３：被測定物、１５：光源、３１：光源より
の細い光ビーム、３２：ビーム拡大器、３３：拡
大された光ビーム、３４：遮光板、３５：スリツ
ト、３８：矩形状光ビーム、３９：受光器。
FIG. 1 is a block diagram showing an example of the optical displacement detector according to this invention, FIG. 2 is a diagram showing the light intensity distribution of the thin light beam 31, and FIG. 3 is a diagram showing the light intensity distribution of the expanded light beam 33. FIG. 4 is a diagram showing the displacement direction and light blocking state of the rectangular light beam and the object to be measured, and FIGS. 5A, B, and C show the relationship between the object to be measured 13 and the displacement of the light beam 38. Figure, Figure 6 A, B, C
are the photodetectors 3 corresponding to Fig. 5 A, B, and C, respectively.
Figure 7 is a diagram showing the output of the optical receiver with respect to displacement, and Figure 8 is a vibration analysis device that combines the optical displacement detector of this invention, a signal generator, and a fast Fourier transform analyzer. Fig. 9 is a diagram showing a corresponding measurement example showing the relationship between the amount of displacement and spatial frequency, Fig. 10 is a block diagram showing a conventional optical displacement detector, and Fig. 11 is a diagram showing a conventional optical displacement detector. It is an output-displacement characteristic diagram of a displacement detector. 13: Object to be measured, 15: Light source, 31: Narrow light beam from the light source, 32: Beam expander, 33: Expanded light beam, 34: Light shielding plate, 35: Slit, 38: Rectangular light beam, 39 : Light receiver.
Claims (1)
と、 その光ビームの径を拡大する拡大手段と、 その拡大されれ光ビームの中心部を通過させる
スリツトを持つ遮光板と、 その遮光板から出射された断面矩形字状の光ビ
ームを受光する受光器とを備え、 上記遮光板及び受光器間においてその矩形状光
ビームに対しこれと接触してその幅方向に変位す
る被測定物を配してその変位を検出するようにし
てなる光変位検出器。[Claims for Utility Model Registration] A light source that emits a light beam with good spatial coherence, an enlarging means for enlarging the diameter of the light beam, and a light shielding plate having a slit that allows the enlarged light beam to pass through the center. , and a light receiver that receives the light beam having a rectangular cross section emitted from the light shielding plate, and the light receiver is in contact with the rectangular light beam between the light shielding plate and the light receiver and is displaced in the width direction thereof. An optical displacement detector that detects the displacement of an object to be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13069185U JPS6237705U (en) | 1985-08-26 | 1985-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13069185U JPS6237705U (en) | 1985-08-26 | 1985-08-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6237705U true JPS6237705U (en) | 1987-03-06 |
Family
ID=31028432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13069185U Pending JPS6237705U (en) | 1985-08-26 | 1985-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6237705U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59225307A (en) * | 1983-06-07 | 1984-12-18 | Shinkawa Ltd | Ball diameter measuring apparatus in wire bonding |
-
1985
- 1985-08-26 JP JP13069185U patent/JPS6237705U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59225307A (en) * | 1983-06-07 | 1984-12-18 | Shinkawa Ltd | Ball diameter measuring apparatus in wire bonding |
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