JPS6237532B2 - - Google Patents
Info
- Publication number
- JPS6237532B2 JPS6237532B2 JP60152219A JP15221985A JPS6237532B2 JP S6237532 B2 JPS6237532 B2 JP S6237532B2 JP 60152219 A JP60152219 A JP 60152219A JP 15221985 A JP15221985 A JP 15221985A JP S6237532 B2 JPS6237532 B2 JP S6237532B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- sample
- photovoltage
- frequency
- light beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 28
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 22
- 230000003287 optical effect Effects 0.000 description 11
- 238000005452 bending Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 7
- 238000000691 measurement method Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000005041 Mylar™ Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003534 oscillatory effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60152219A JPS6144438A (ja) | 1985-07-12 | 1985-07-12 | 半導体特性測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60152219A JPS6144438A (ja) | 1985-07-12 | 1985-07-12 | 半導体特性測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6144438A JPS6144438A (ja) | 1986-03-04 |
| JPS6237532B2 true JPS6237532B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-08-13 |
Family
ID=15535682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60152219A Granted JPS6144438A (ja) | 1985-07-12 | 1985-07-12 | 半導体特性測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6144438A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3650917B2 (ja) * | 1997-08-29 | 2005-05-25 | 株式会社神戸製鋼所 | 表面光電圧による半導体表面評価方法及び装置 |
| JP7514215B2 (ja) * | 2021-09-10 | 2024-07-10 | 株式会社東芝 | 検査方法、半導体装置の製造方法、検査装置、検査システム、プログラム、及び記憶媒体 |
-
1985
- 1985-07-12 JP JP60152219A patent/JPS6144438A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6144438A (ja) | 1986-03-04 |
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