JPS6237368A - Iron loss decreasing device for grain oriented silicon steel sheet - Google Patents

Iron loss decreasing device for grain oriented silicon steel sheet

Info

Publication number
JPS6237368A
JPS6237368A JP60176816A JP17681685A JPS6237368A JP S6237368 A JPS6237368 A JP S6237368A JP 60176816 A JP60176816 A JP 60176816A JP 17681685 A JP17681685 A JP 17681685A JP S6237368 A JPS6237368 A JP S6237368A
Authority
JP
Japan
Prior art keywords
silicon steel
steel sheet
oriented silicon
coil
iron loss
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60176816A
Other languages
Japanese (ja)
Inventor
Masao Iguchi
征夫 井口
Isao Ito
伊藤 庸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Steel Corp filed Critical Kawasaki Steel Corp
Priority to JP60176816A priority Critical patent/JPS6237368A/en
Publication of JPS6237368A publication Critical patent/JPS6237368A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Soft Magnetic Materials (AREA)

Abstract

PURPOSE:To considerably decrease the iron loss of a grain oriented silicon steel sheet by subjecting both surfaces of the grain oriented silicon steel sheet from which the oxide on the surfaces is removed after finish annealing and which is further subjected to mirror finishing to vapor deposition of the nitride, carbide and oxide of specific metals by an ion plating method. CONSTITUTION:A coil 7 of the grain oriented silicon steel sheet from which the oxide on the surfaces is removed after finish annealing and of which the surfaces are further subjected to mirror finishing is put through a preliminary low vacuum vessel 2 into a high vacuum ion plating treatment device 1. The coil 8 is un-coiled therein and is repeatedly passed by guide rolls 13 in said device. Two vapor deposition sources 11, 12 and two ionization electrodes 12, 12 are used and gas such as N2, CH4, O2 or NH3 is introduced into the device. The nitride or carbide of Ti, Zr, V and other metals evaporated from both sources 11, 11 is deposited by evaporation on the steel sheet and further the oxide of Al, Ni, Cu and other metals is deposited thereon by evaporation. The sheet is coiled 9 and the coil is taken out through a preliminary low vacuum vessel 3, by which the coil 10 of the grain oriented silicon steel sheet having the low iron loss is obtd.

Description

【発明の詳細な説明】 (産業上の利用分野) この発明は超低鉄損方向性珪素鋼板を、その板面にイオ
ンプレーティング処理による極薄張力被膜を形成させる
ことによって得るための方向性珪素鋼板の鉄損低減装置
を提案しようとするものである。
Detailed Description of the Invention (Industrial Field of Application) This invention provides a method for obtaining an ultra-low iron loss grain-oriented silicon steel plate by forming an ultra-thin tensile coating on the plate surface by ion plating. This paper attempts to propose an iron loss reduction device for silicon steel sheets.

一方向性珪素鋼板の電気・磁気的特性の改善、なかでも
鉄損の低減に係わる極限的な要請を満たそうとして近年
来目覚ましい開発努力が傾けられているが実効を挙げつ
つあるものにあってもその実施に伴う重大な弊害として
、一方向性珪素鋼板の使用に当たっての加工1組立てを
経たのち、いわゆるひずみ取り焼鈍が施こされた場合に
、特性劣化の随伴を不可避に生じて、使途についての制
限を受ける不利が指摘される。
Remarkable development efforts have been made in recent years to improve the electrical and magnetic properties of unidirectional silicon steel sheets, particularly in order to meet the extreme demands of reducing iron loss, and these efforts are beginning to bear fruit. However, a serious problem associated with the implementation of this method is that when so-called strain relief annealing is performed after processing and assembly when using unidirectional silicon steel sheets, characteristic deterioration inevitably occurs, making it difficult to use the unidirectional silicon steel sheets. It is pointed out that the disadvantage is that it is subject to restrictions.

この明細書では、ひずみ取り焼鈍のような高温熱履歴を
経ると否とに拘わらず、上記要請を有利に充足しうる新
たな方向性珪素鋼板の鉄損低減装置の開発に関連して述
べる。
This specification describes the development of a new iron loss reduction device for grain-oriented silicon steel sheets that can advantageously satisfy the above requirements regardless of whether or not the steel sheet undergoes a high-temperature thermal history such as strain relief annealing.

ところで一方向性珪素鋼板はよく知られているとおり、
製品の2次再結晶粒を、(110) I:001)すな
わちゴス(Goss)方位に、集積させたもので、主と
して変圧器その他の電気機器の鉄心として使用され電気
・磁気的特性として製品の磁束密度(Boo値で代表さ
れる)が高く、鉄損(L77so値で代表される)の低
いことが要求される。
By the way, as is well known, unidirectional silicon steel sheets
The product's secondary recrystallized grains are accumulated in the (110) I:001), or Goss, orientation.It is mainly used as the iron core of transformers and other electrical equipment, and has the electrical and magnetic characteristics of the product. It is required to have a high magnetic flux density (represented by the Boo value) and a low iron loss (represented by the L77so value).

この一方向性珪素鋼板は複雑多岐にわたる工程を経て製
造されるが、今までにおびただしい発明。
This unidirectional silicon steel plate is manufactured through a wide variety of complicated processes, and has resulted in numerous inventions to date.

改善が加えられ、今日では板厚0.30ff1mの製品
の磁気特性がB、o 1.90T以上、WB7so 1
.05w/Kg以下、また板厚0.23mmの製品の磁
気特性がB、o L、89T以上、Jtzso 0.9
0W/Kg以下程度の低鉄損一方向性珪素鋼板の製造が
ほぼ一般化して来ている。
Improvements have been made, and today the magnetic properties of products with a plate thickness of 0.30ff1m are B, o 1.90T or more, WB7so 1
.. 05w/Kg or less, and the magnetic properties of products with a plate thickness of 0.23mm are B, o L, 89T or more, Jtzso 0.9
The production of unidirectional silicon steel sheets with low core loss of about 0 W/Kg or less has become almost common.

特に最近では省エネの見地から電力損失の低減を特徴と
する請が著しく強まり、欧米では損失の少ない変圧器を
作る場合に鉄損の減少分を金額に換算して変圧器価格に
上積みする「ロス・エバリユエーション」 (鉄損評価
)制度が普及し、これかはじ必に触れた極限的な超低鉄
損化の要請に外ならない。
Particularly recently, there has been a marked increase in demand for power loss reduction features from an energy-saving perspective, and in Europe and the United States, when creating a transformer with low loss, the reduction in iron loss is converted into a monetary value and added to the transformer price.・The "evaluation" (iron loss evaluation) system has become widespread, and this is nothing but a demand for ultra-low iron loss that has already been mentioned.

(従来の技術) 一方向性珪素鋼板の仕上焼鈍後の鋼板表面に圧延方向に
ほぼ直角方向でのレーザー照射により局部微少ひずみを
導入して磁区を細分化し、もって鉄損を低下させること
が提案(特公昭57−2252号。
(Prior art) It has been proposed that after final annealing of a unidirectional silicon steel sheet, laser irradiation is applied to the surface of the steel sheet in a direction approximately perpendicular to the rolling direction to introduce local minute strain to subdivide the magnetic domains, thereby reducing iron loss. (Special Publication No. 57-2252.

特公昭57−53419号、特公昭58−26405号
及び特公昭58−26406号各公報参照)されたがこ
の磁区細分化技術はひずみ取り焼鈍を施さない積鉄心向
トランス材料として効果的であるが、ひずみ取り焼鈍を
施す、主として巻鉄トランス材料にあってはレーザー照
射によって折角導入された局部微少ひずみが焼鈍処理に
より解放されて磁区幅が広くなるため、レーザー照射効
果が失われるという欠点がある。
(Refer to Japanese Patent Publication No. 57-53419, Japanese Patent Publication No. 58-26405, and Japanese Patent Publication No. 58-26406) However, this magnetic domain refining technology is effective as a core-oriented transformer material without strain relief annealing. In the case of wound iron transformer materials, which are subjected to strain relief annealing, the local minute strain introduced by laser irradiation is released by annealing and the magnetic domain width becomes wider, so the laser irradiation effect is lost. .

これに反してイオンプレーティングによる極薄張力被膜
を形成させることによる鉄損低域にあっては、ひずみ取
り焼鈍の如き高温熱履歴の影響を受けない。
On the other hand, in the low core loss range due to the formation of an ultra-thin tension coating by ion plating, it is not affected by high temperature thermal history such as strain relief annealing.

このような極薄張力被膜を形成することによる方向性珪
素鋼板の鉄損低減装置の開発はこの発明に独自であって
、従来の技術文献は参照することができない。
The development of an apparatus for reducing iron loss of grain-oriented silicon steel sheets by forming such an ultra-thin tension coating is unique to this invention, and no conventional technical literature can be referred to.

(発明が解決しようとする問題点) 最近発明者らは上記の高温処理での特性劣化を伴うこと
のない超低鉄損一方向性珪素鋼板の製造に成功した。す
なわちこの製造方法では仕上焼鈍済みの方向性珪素鋼板
表面上の酸化物を除去した後に研磨を施して鏡面状態に
した後、イオンプレーティングによりT i、 Zr、
 V、 Nb、 Ta、 Cr、 !Jo、 W、 M
n、 Co。
(Problems to be Solved by the Invention) Recently, the inventors have succeeded in manufacturing an ultra-low iron loss unidirectional silicon steel sheet that does not suffer from the deterioration of characteristics due to the above-mentioned high-temperature treatment. That is, in this manufacturing method, after removing oxides on the surface of a grain-oriented silicon steel sheet that has been finish annealed, it is polished to a mirror-like state, and then Ti, Zr,
V, Nb, Ta, Cr, ! Jo, W, M
n, Co.

Ni、 A n、B、Siの窒化物及び/又は炭化物並
び゛にA F、Ni、Cu、W、Si及びZnの酸化物
のうちから選んだ少なくとも1種からなる極薄張力被膜
を形成させるのでありこれにより一方向性珪素鋼板の鉄
損低減が可能であることを発見した。
Forming an ultra-thin tensile coating consisting of at least one selected from nitrides and/or carbides of Ni, An, B, Si, and oxides of AF, Ni, Cu, W, Si, and Zn. We discovered that this makes it possible to reduce iron loss in unidirectional silicon steel sheets.

この発明は上記の方法を実施するため、仕上焼鈍済みの
方向性珪素鋼板表面上の酸化物を除去した後に化学研磨
あるいは電解研磨等を施して鏡面状態にしたコイル状鋼
板両面に、イオンプレーティングにより上記した炭化物
及び又は、窒化物ないしは酸化物の極薄張力被膜を連続
して形成させる方向性珪素鋼板の鉄損低減装置を与える
ことを巨的とする。(問題点を解決するための手段)こ
の発明は方向性珪素鋼板の常法に従う最終焼鈍工程を経
て板表面に酸化物除去および鏡面研磨処理を施して巻取
ったコイルを、高真空イオンプレーティング用処理槽内
で巻解し、再巻取りする間にコイル両面に極薄張力被膜
を形成する装置であって、 上記処理槽に、その槽内真空度近くまでの真空減圧可能
な、予備真空槽からなる上記コイルの搬入、搬出室を付
設し、この搬入室から処理槽内に装入したコイルの、表
裏反転する通板の誘導を司る通板ガイドロールを配設し
、各通板経路の下面と向い合う蒸発源及びイオン化電極
を2組配設して成ることを特徴とする、方向性珪素鋼板
の鉄損低減装置である。
In order to carry out the above method, this invention applies ion plating to both sides of a coiled steel sheet that has been subjected to chemical polishing or electrolytic polishing to a mirror-like state after removing oxides on the surface of a grain-oriented silicon steel sheet that has been finish annealed. It is an important object to provide an iron loss reduction device for grain-oriented silicon steel sheets in which the ultra-thin tensile coating of carbides and/or nitrides or oxides described above is continuously formed. (Means for Solving the Problems) This invention involves high-vacuum ion plating of a coil that has been wound after undergoing a final annealing process according to the conventional method for grain-oriented silicon steel sheets, removing oxides from the surface of the sheet, and polishing it to a mirror finish. This is a device that forms an ultra-thin tension coating on both sides of the coil during unwinding and rewinding in a processing tank, and the processing tank is equipped with a preliminary vacuum that can reduce the pressure to near the internal vacuum level of the tank. A loading and unloading chamber for the above-mentioned coils, which consists of a tank, is attached, and a sheet passing guide roll is provided to guide the coils, which are loaded from this loading chamber into the processing tank, to turn them upside down. This is an iron loss reduction device for a grain-oriented silicon steel plate, which is characterized by having two sets of evaporation sources and ionization electrodes facing the bottom surface of the grain-oriented silicon steel plate.

第1図は鏡面仕上した方向性珪素鋼板コイルの鉄損低減
装置の例を模式図で示す。図中1は高真空イオンプレー
ティング処理装置、2は鏡面仕上したコイルの予備低真
空槽、3はイオンプレーティングを施した後のコイルの
予備低真空槽、4は予備低真空排気口、5は高真空排気
口、6はガス導入口であり、7は鏡面仕上済みのコイノ
ベ8はイオンプレーティング前のコイル、9はイオンプ
レーティング済みのコイノベ10はイオンプレーティン
グ済みの予備低真空槽を示し、11は蒸発源。
FIG. 1 schematically shows an example of an iron loss reduction device for a mirror-finished grain-oriented silicon steel coil. In the figure, 1 is a high vacuum ion plating processing device, 2 is a preliminary low vacuum chamber for mirror-finished coils, 3 is a preliminary low vacuum chamber for coils after ion plating, 4 is a preliminary low vacuum exhaust port, 5 is a high vacuum exhaust port, 6 is a gas inlet port, 7 is a mirror-finished Koinobe 8 is a coil before ion plating, 9 is an ion plated Koinobe 10 is a preliminary low vacuum chamber that has been ion plated. 11 is the evaporation source.

12はイオン化電極を示す。12 indicates an ionization electrode.

(作 用) 次に鏡面仕上したコイル7には、連続的イオンプレーテ
ィングが次の順序で行なわれる。
(Function) Next, the mirror-finished coil 7 is subjected to continuous ion plating in the following order.

まず仕上焼鈍した一方向性珪素鋼板の表面酸化物を除去
後、化学研…あるいは電解研丑により鏡面状態に仕上げ
たコイル7を矢印で示すように、第1図の予備低真空槽
2に入れる。
First, after removing surface oxides from the finish-annealed unidirectional silicon steel sheet, the coil 7, which has been finished to a mirror-like state by chemical polishing or electrolytic polishing, is placed in the preliminary low vacuum tank 2 shown in Fig. 1 as indicated by the arrow. .

この予備低真空槽2にて予備真空排気口4を通して真空
ポンプにより10−2〜1O−3)−ルの真空度にまで
真空排気した後、矢印で示すようにコイルを高真空イオ
ンプレーティング処理装置内へ移動させ、イオンプレー
ティング前のコイル8を巻解して高真空イオンプレーテ
ィング処理装置1内の通板ガイドロール13に巻かけ通
板する。この高真空イオンプレーティング処理装置1内
は10−4〜10−6トールの高真空にまで高真空排気
口5につないだ真空ポンプにより真空排気する。
After evacuating the preliminary low vacuum tank 2 to a vacuum level of 10-2 to 10-3) by using a vacuum pump through the preliminary vacuum exhaust port 4, the coil is subjected to high-vacuum ion plating as shown by the arrow. The coil 8 before ion plating is unwound and wound around the threading guide roll 13 in the high vacuum ion plating processing equipment 1 for threading. The inside of this high-vacuum ion plating processing apparatus 1 is evacuated to a high vacuum of 10-4 to 10-6 torr by a vacuum pump connected to a high-vacuum exhaust port 5.

その後鏡面鋼板を矢印の方へ通板し、その間にイオンプ
レーティング処理を施す。
After that, the mirror-finished steel plate is passed in the direction of the arrow, and ion plating is applied during that time.

イオンプレーティングは蒸発源11中の溶解金属を蒸発
させたらガス導入口6から微皇のガスを導入し、イオン
化電極によりイオン化させて鋼板の表面両面に薄膜を被
着形成させる。
In ion plating, after evaporating the molten metal in the evaporation source 11, a small amount of gas is introduced from the gas inlet 6 and ionized by the ionization electrode to form a thin film on both surfaces of the steel plate.

連続的なイオンプレーティング処理を鋼板の表裏両面に
施して薄膜コーティングするためには、第り図に見られ
るように通板用ロール群13による平行な水平方向の通
板を行って2段にイオンプレーティング処理を行なうが
、2組の蒸発源およびイオン電極は上、下2段に限定さ
れるものではない。
In order to apply continuous ion plating treatment to both the front and back surfaces of a steel plate to form a thin film coating, as shown in the diagram, the plate is threaded in a parallel horizontal direction by a group of threading rolls 13 in two stages. Although the ion plating process is performed, the two sets of evaporation sources and ion electrodes are not limited to the upper and lower two stages.

蒸発源11での金属の溶解には電子ビーム、ホーローカ
ソード、電極加熱など従来公知のいずれの方法を用いて
もよく、また短時間に被膜形成させるため通板中の鋼板
面直下に磁界をかけてイオンを加速させる二・グネトロ
ン装置を併用してもよい。
Any conventionally known method such as electron beam, hollow cathode, or electrode heating may be used to melt the metal in the evaporation source 11, and in order to form a film in a short time, a magnetic field may be applied directly below the surface of the steel sheet being threaded. A two-gnetron device that accelerates ions may also be used.

イオンプレーティングを終了した鋼板はコイル9に巻取
った後、矢印で示すように予備低真空槽10に移動させ
、しかるのち系外に取出す。
The steel plate that has been subjected to ion plating is wound into a coil 9, then moved to a preliminary low vacuum tank 10 as shown by the arrow, and then taken out of the system.

(発明の効果) このような連続的なイオンプレーティングにより鋼板表
面上に炭化物及び/又は、窒化物ないしは酸化物等の極
薄張力被膜を効果的に形成させることが可能となり、一
方向性珪素鋼板の鉄損低減ができる。
(Effect of the invention) Such continuous ion plating makes it possible to effectively form an ultra-thin tensile film of carbides and/or nitrides or oxides on the surface of the steel sheet. It is possible to reduce iron loss in steel plates.

この装置は低炭素冷延鋼板、ステンレス鋼板等その他の
一般鋼板に対して鋼板両表面にセラミックの薄膜コーテ
ィングを行うように利用可能である。
This device can be used to apply a ceramic thin film coating to both surfaces of low-carbon cold-rolled steel sheets, stainless steel sheets, and other general steel sheets.

(実施例) 一方向珪素鋼板(0,23mm厚〉の仕上焼鈍機酸洗に
より鋼板表面上の酸化物を除去後、電解研暦により鋼板
表面を鏡面状態にした。その後第1図のイオンプレーテ
ィング装置を用いて約7tonの鏡面状態にした鋼板コ
イルの鋼板両表面に15m/minのスピードで0.5
〜0.6μm厚のTiN張力被膜を連続的に形成させた
。そのときの製品の磁気特性は次のようであった。
(Example) After removing oxides on the surface of a unidirectional silicon steel plate (0.23 mm thick) using a finishing annealing machine and pickling, the surface of the steel plate was made into a mirror-like state by electrolytic polishing. 0.5 m/min at a speed of 15 m/min on both surfaces of the steel plate coil, which was made into a mirror-like state of approximately 7 tons using a heating device.
A ˜0.6 μm thick TiN tension coating was continuously formed. The magnetic properties of the product at that time were as follows.

B+o=1.92T、 W+7zso=0.72W/K
B+o=1.92T, W+7zso=0.72W/K
g

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明による連続イオンプレーティング装置
の模式図である。 1・・・高真空イオンプレーティング処理装置2.3・
・・予備真空槽(搬入室、搬出室)11・・・蒸発源 
     12・・・イオン化電極13・・・通板ガイ
ドロール
FIG. 1 is a schematic diagram of a continuous ion plating apparatus according to the present invention. 1... High vacuum ion plating processing equipment 2.3.
・・Preliminary vacuum chamber (loading chamber, loading chamber) 11 ・・Evaporation source
12... Ionization electrode 13... Threading guide roll

Claims (1)

【特許請求の範囲】 1、方向性珪素鋼板の常法に従う最終焼鈍工程を経た板
表面に酸化物除去および鏡面研磨処理を施して巻取った
コイルを、高真空イオンプレーティング用処理槽内で巻
解し、再巻取りする間にコイル両面に極薄張力被膜を形
成する装置であって、 上記処理槽に、その槽内真空度近くまでの真空減圧可能
な、予備真空槽からなる上記コイルの搬入、搬出室を付
設し、この搬入室から処理槽内に装入したコイルの、表
裏反転する通板の誘導を司る通板ガイドロールを配設し
、各通板経路の下面と向い合う蒸発源及びイオン化電極
を2組配設して成ることを特徴とする、方向性珪素鋼板
の鉄損低減装置。
[Claims] 1. A coil that has undergone a final annealing process according to the conventional method for grain-oriented silicon steel sheets, has been subjected to oxide removal and mirror polishing treatment on the plate surface, and is wound up in a high-vacuum ion plating treatment tank. An apparatus for forming an ultra-thin tension coating on both sides of the coil during unwinding and rewinding, the coil comprising a preliminary vacuum tank in the processing tank that can reduce the pressure to near the internal vacuum level of the tank. A loading/unloading room is attached, and a threading guide roll is provided to guide the coils loaded into the treatment tank from this loading room, so that the coils are reversed inside out. A device for reducing iron loss of grain-oriented silicon steel plate, characterized by comprising two sets of evaporation sources and ionization electrodes.
JP60176816A 1985-08-13 1985-08-13 Iron loss decreasing device for grain oriented silicon steel sheet Pending JPS6237368A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60176816A JPS6237368A (en) 1985-08-13 1985-08-13 Iron loss decreasing device for grain oriented silicon steel sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60176816A JPS6237368A (en) 1985-08-13 1985-08-13 Iron loss decreasing device for grain oriented silicon steel sheet

Publications (1)

Publication Number Publication Date
JPS6237368A true JPS6237368A (en) 1987-02-18

Family

ID=16020345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60176816A Pending JPS6237368A (en) 1985-08-13 1985-08-13 Iron loss decreasing device for grain oriented silicon steel sheet

Country Status (1)

Country Link
JP (1) JPS6237368A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101353703B1 (en) * 2010-12-27 2014-01-20 주식회사 포스코 Oriented electrical steel sheet and method for manufacturing thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101353703B1 (en) * 2010-12-27 2014-01-20 주식회사 포스코 Oriented electrical steel sheet and method for manufacturing thereof

Similar Documents

Publication Publication Date Title
JPH0672266B2 (en) Method for manufacturing ultra low iron loss unidirectional silicon steel sheet
JPH0248622B2 (en)
JPS6237368A (en) Iron loss decreasing device for grain oriented silicon steel sheet
US3868280A (en) Method of forming electric insulating films oriented silicon steel
JPS6237367A (en) Iron loss decreasing device for grain oriented silicon steel sheet
JPS621821A (en) Production of ultra-low iron loss grain oriented silicon steel sheet free from deterioration in characteristic even after stress relief annealing
JPS6240367A (en) Continuous treatment installation for decreasing iron loss of grain oriented silicons steel sheet
JPH04232212A (en) Manufacture of low iron loss grain-oriented silicon steel plate
JPH01298118A (en) Continuous iron loss reducing treatment apparatus for grain-oriented silicon steel sheet
JPS63250419A (en) Manufacture of grain-oriented silicon steel sheet minimal in iron loss
JPH10245667A (en) Production of grain oriented extremely thin silicon steel sheet having ultralow core loss
JPS6318075A (en) Equipment for iron loss decreasing treatment for grain oriented silicon steel sheet
JPH024963A (en) Ion plating apparatus
JPH0325508B2 (en)
JPH02301571A (en) Production of grain-oriented electrical steel sheet having uniform glassy coating film
JPS61246321A (en) Manufacture of grain-oriented silicon steel sheet with extremely small iron loss
JPS6269506A (en) Equipment for improving magnetic characteristics of grain oriented silicon steel plate
JPH01119622A (en) Production of grain oriented electrical steel sheet having excellent magnetic characteristic and glass film characteristic
JPS6318605A (en) Unidirectional silicon steel plate of extremely low iron loss
JPH0678585B2 (en) High silicon steel strip manufacturing method
JPH067527B2 (en) Ultra-low iron loss grain-oriented silicon steel sheet and method for producing the same
JPS62284068A (en) (be+rf) system ion plating apparatus
JPH0730410B2 (en) Method of manufacturing low iron loss unidirectional silicon steel sheet
JPH11335839A (en) Dry plating apparatus
JPS6217132A (en) Manufacture of iron nitride magnetic material having superior corrosion resistance and high saturation magnetization