JPS6236974Y2 - - Google Patents

Info

Publication number
JPS6236974Y2
JPS6236974Y2 JP1560080U JP1560080U JPS6236974Y2 JP S6236974 Y2 JPS6236974 Y2 JP S6236974Y2 JP 1560080 U JP1560080 U JP 1560080U JP 1560080 U JP1560080 U JP 1560080U JP S6236974 Y2 JPS6236974 Y2 JP S6236974Y2
Authority
JP
Japan
Prior art keywords
bearing box
bearing
rotating shaft
shaft
rain cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1560080U
Other languages
English (en)
Japanese (ja)
Other versions
JPS56117119U (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1560080U priority Critical patent/JPS6236974Y2/ja
Publication of JPS56117119U publication Critical patent/JPS56117119U/ja
Application granted granted Critical
Publication of JPS6236974Y2 publication Critical patent/JPS6236974Y2/ja
Expired legal-status Critical Current

Links

JP1560080U 1980-02-08 1980-02-08 Expired JPS6236974Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1560080U JPS6236974Y2 (enrdf_load_html_response) 1980-02-08 1980-02-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1560080U JPS6236974Y2 (enrdf_load_html_response) 1980-02-08 1980-02-08

Publications (2)

Publication Number Publication Date
JPS56117119U JPS56117119U (enrdf_load_html_response) 1981-09-08
JPS6236974Y2 true JPS6236974Y2 (enrdf_load_html_response) 1987-09-21

Family

ID=29612050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1560080U Expired JPS6236974Y2 (enrdf_load_html_response) 1980-02-08 1980-02-08

Country Status (1)

Country Link
JP (1) JPS6236974Y2 (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7094291B2 (en) 1990-05-18 2006-08-22 Semitool, Inc. Semiconductor processing apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7094291B2 (en) 1990-05-18 2006-08-22 Semitool, Inc. Semiconductor processing apparatus
US7138016B2 (en) 1990-05-18 2006-11-21 Semitool, Inc. Semiconductor processing apparatus

Also Published As

Publication number Publication date
JPS56117119U (enrdf_load_html_response) 1981-09-08

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