JPS6236601Y2 - - Google Patents

Description

[Detailed Description of the Invention] (1) Technical Field of the Invention The present invention relates to an oscillating polisher used for flat or spherical surface polishing, and in particular, the present invention relates to a gripper for an oscillating polisher used for polishing a flat or spherical surface. The present invention relates to an oscillating sanding machine in which a child is rotatable relative to a fixed shaft portion located above the child.

(2) Prior Art and Problems As shown in FIG. 1, the conventional oscillating polishing machine has a kanzashi 1 that cuts the central part of the lapping surface plate 2 from one side above the rotating lapping surface plate 2. It was fixed downward with a fixing screw 4 to the tip of a swinging arm 3 extending toward. A spherical tip 8 is provided at the lower end of the kanzashi 1 to press a concave dish-shaped pivot portion 7 provided on the upper surface of the work holder 6 that holds the work 5 placed on the upper surface of the lap surface plate 2.
A contact 9 having the following was formed. In order to polish a workpiece 5 with such an oscillating polisher, the workpiece 5 is placed on the upper surface of the lap surface plate 2, the workpiece holder 6 is set on the upper surface of the workpiece 5, and the workpiece 5 is polished. After pressing the contact 9 of the lever 1 against the pivot portion 7, the lap surface plate 2 is rotated, for example, in the direction of arrow A, and the swing arm 3 is moved in the direction of arrow B,
Perform by swinging in direction C. At this time, the work 5 rotates on its own axis as the lap surface plate 2 rotates in the direction of arrow A, and the work holder 6 on its upper surface also rotates.
It rotates in the A′ direction. Therefore, a frictional force acts between the spherical tip 8 of the contactor 9 and the pivot portion 7 of the rotating work holder 6. However, this frictional force acts in a direction that prevents the rotation of the work holder 6 and work 5.
The rotational speed of the workpiece 5 relative to the lap surface plate 2 was made unstable due to the pressing force of the spherical tip 8 on the pivot portion 7 and changes in the friction coefficient of the contact portion. In this way, the workpiece 5 wraps around the surface plate 2.
By rotating the workpiece 5 at an unstable rotational speed, the polishing speed of the workpiece 5 becomes partially different, and the flatness or sphericity of the polished surface sometimes deteriorates.

(3) Purpose of the invention The present invention was made to solve the above-mentioned problems, and when polishing a workpiece, the contactor that presses the pivot part on the top surface of the workpiece holder is moved against the fixed shaft part above it. An object of the present invention is to provide an oscillating polishing machine that can be rotated to uniform the polishing speed of a workpiece.

(4) Structure and operation of the device In order to reduce the friction between the kanzashi and the workpiece, the present invention provides a rotary connection between the spherical tip and the support supported by the arm, and this rotary connection is connected to the kanzashi. The spherical tip has a function of being rotatably connected to a fixed shaft supported by an arm of the present invention on the same axis.

Therefore, the needle can hold the work holder, that is, the work, in a predetermined position, reduce friction between the needle and the work holder, and stabilize the rotational speed of the work.

(5) Embodiments of the invention Hereinafter, embodiments of the invention will be described in detail based on the attached drawings.

FIG. 2 is a perspective view showing a state in which the kanzashi 11 according to the present invention is attached to the swing arm 3 of a swing type sander. The swinging arm 3 extends from one side above the lap surface plate 2 that rotates toward the center of the lap surface plate 2, and is moved against the upper surface of the lap surface plate 2 by an appropriate driving source. It is allowed to swing in the directions of arrows B and C within a substantially parallel plane. and,
A kanzashi 11 is fixed downwardly to the tip of the swing arm 3 with a fixing screw 4. This knife 11 is used to polish a workpiece 5 such as a glass plate, a crystal substrate, an IC (integrated circuit) wafer, etc. on the lap surface plate 2.
The work holder 6 is pressed against the upper surface of the work holder 6.

Here, in the present invention, the above Kanzaki 11
, the contact 12 at the lower end is connected to the fixed shaft 1 at the upper part.
3 and is connected to the fixed shaft portion 13 so as to be rotatable about the same axis on the same axis. That is, as shown in FIG.
3 and the contactor 12 are connected by a rotational coupling part 14. This rotational coupling part 14 is connected to the upper housing 15
The upper housing 15 is welded or screwed to the lower end of the fixed shaft portion 13, and the lower housing 16 is screwed to the upper housing 15.
A bearing 17 is interposed inside the bearing 17, and the contact 12 is rotatably fitted into the center hole of the bearing 17. How to install it is
A circumferential protrusion 18 provided at the intermediate portion of the contactor 12 is brought into contact with the lower surface of the bearing 17, and a nut 19 is screwed into a threaded groove formed at the upper end portion protruding from the upper surface of the bearing 17. I'm keeping an eye on it.

In order to polish the workpiece 5 with such an oscillating polisher, place the workpiece 5 on the upper surface of the lap surface plate 2,
A work holder 6 is set on the upper surface of this work 5, and a concave dish-shaped pivot portion 7 of this work holder 6 is set.
Rotatable contact 12 at the tip of Kanzashi 11
After pressing , move the lap surface plate 2 in the direction of arrow A, for example.
The swing arm 3 may be swung in the directions of arrows B and C by rotating the swing arm 3 in the directions of the arrows B and C. At this time, the work 5 rotates on its own axis as the lap surface plate 2 rotates in the direction of arrow A, and the work holder 6 on its upper surface also rotates in the direction of arrow A'. Here, a frictional force acts between the spherical tip 20 of the contactor 12 and the pivot portion 7 of the rotating work holder 6.
Since the contactor 12 is rotatable around its axis by the rotation coupling portion 14, the contactor 12 itself also rotates in the direction of arrow A'' due to the frictional force. The frictional force is absorbed as the rotational movement of the contactor 12, and does not prevent the rotation of the work holder 6 and the work 5. This makes it possible to stabilize the rotational speed of the work 5 relative to the lap surface plate 2. .In addition,
If the bearing 17 in the rotary joint 14 becomes defective over time, the bearing 17 can be replaced with a good one by removing the lower housing 16. In addition, in FIG. 3, the rotation coupling part 14 is shown as a combination of the upper housing 15 and the lower housing 16, but the present invention is not limited to this, and the contactor 12
If it is rotatable with respect to the fixed shaft portion 13, it may be formed as a one-piece upper and lower part, and its internal structure may be other than that shown. In addition, when the flatness of the lap surface plate 2 itself deteriorates due to the passage of usage time, this method can also be used when placing a lap plate (consisting of a grindstone) instead of the workpiece 5 to polish the lap surface plate 2. Ideas can be applied.

(6) Effects of the invention Since the present invention is constructed as described above, the contact 12 at the lower end of the hook 11 rotates with the rotational movement of the work holder 6.
The force that prevents the rotation of the work holder 6 and the work 5 no longer acts, and the rotational speed of the work 5 relative to the lap surface plate 2 can be stabilized. Therefore, the polishing speed of the workpiece 5 can be made uniform, and the flatness or sphericity of the polished surface can be improved.

[Brief explanation of the drawing]

Fig. 1 is a perspective view of a conventional oscillating sander, Fig. 2 is a perspective view of a oscillating sander according to the present invention, and Fig. 3 is a connection between a fixed shaft and a contact. It is a sectional view showing a part. 2... Lap surface plate, 3... Swinging arm, 4...
Fixing screw, 5... Workpiece, 6... Work holder, 7... Pivot part, 11... Kanzashi, 12
. . . Contact, 13 . . . Fixed shaft portion, 14 . . . Rotating coupling portion.

Claims (1)

[Claims for Utility Model Registration] A lap surface plate 2 that is rotated, a work holder 6 that holds a workpiece on the lap surface plate 2, an arm 3 that extends toward the center of rotation of the lap surface plate 2, and An oscillating polishing machine consisting of a kanzashi 1 supported by an arm 3, the tip of the kanzashi 1 is formed into a spherical shape, and the spherical tip 20 comes into contact with a pivot part 7 formed on the upper surface of the work holder 6. The kanzashi 1 is provided with a rotary joint part 14 between the spherical tip 20 and the support part by the arm 3, and the rotary joint part 14 is connected to the fixed shaft part 13 supported by the arm 3. The oscillating polishing machine is characterized in that the spherical tips 20 are rotatably connected on the same axis.