JPS6236283Y2 - - Google Patents

Info

Publication number
JPS6236283Y2
JPS6236283Y2 JP1981085338U JP8533881U JPS6236283Y2 JP S6236283 Y2 JPS6236283 Y2 JP S6236283Y2 JP 1981085338 U JP1981085338 U JP 1981085338U JP 8533881 U JP8533881 U JP 8533881U JP S6236283 Y2 JPS6236283 Y2 JP S6236283Y2
Authority
JP
Japan
Prior art keywords
wafer carrier
hanger jig
wafer
flanges
hanger
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981085338U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57197638U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981085338U priority Critical patent/JPS6236283Y2/ja
Publication of JPS57197638U publication Critical patent/JPS57197638U/ja
Application granted granted Critical
Publication of JPS6236283Y2 publication Critical patent/JPS6236283Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Packaging For Recording Disks (AREA)
  • Packaging Frangible Articles (AREA)
  • Weting (AREA)
JP1981085338U 1981-06-10 1981-06-10 Expired JPS6236283Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981085338U JPS6236283Y2 (en:Method) 1981-06-10 1981-06-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981085338U JPS6236283Y2 (en:Method) 1981-06-10 1981-06-10

Publications (2)

Publication Number Publication Date
JPS57197638U JPS57197638U (en:Method) 1982-12-15
JPS6236283Y2 true JPS6236283Y2 (en:Method) 1987-09-16

Family

ID=29880629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981085338U Expired JPS6236283Y2 (en:Method) 1981-06-10 1981-06-10

Country Status (1)

Country Link
JP (1) JPS6236283Y2 (en:Method)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5152577Y2 (en:Method) * 1972-05-16 1976-12-16

Also Published As

Publication number Publication date
JPS57197638U (en:Method) 1982-12-15

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