JPS6235590A - Laser mirror device - Google Patents

Abstract

PURPOSE:To blow off dust which tends to be bonded to the surface of a laser mirror by providing an air guide through an air gap from the mirror surface on the top of the mirror surface, and feeding under pressure compressed air supplied from the exterior to an air gap between the mirror surface and the guide. CONSTITUTION:A laser mirror is suppressed to raise its temperature through a partition wall of a laser mirror holder 12 by coolant circulated in a cooling chamber 13, compressed air 20 fed from an air source from an inlet 31 provided in an air guide 18 is fed under pressure into a body 19, reflected on the inner wall of the guide 18 to be injected to the mirror surace of the mirror 11 to blow off dusts which affects defects such as decrease in the reflectivity when floated in the environment and adhered to the mirror surface.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a laser mirror device for refracting and propagating laser light emitted from a laser oscillator in a laser device to, for example, a laser head.

[Conventional technology]

In order to efficiently propagate the laser light output of the laser oscillator, the laser optical path is bent using a fiber scope, laser mirror, etc. In particular, for medium-capacity laser devices of 1000 W or more, in order to completely suppress the temperature rise due to the heat absorbed by the mirror when refracting the laser beam, a cooling chamber is installed in contact with the mirror and cooling water is circulated to enable forced cooling. is being carried out. In addition to suppressing this temperature rise, it is important to minimize the effects of dust and dust that adhere to the laser mirror surface during use of the laser device in order to prevent the decrease in relative weight when the laser beam is refracted. It is to be.

FIG. 3 is a configuration diagram showing an example of a normal device for refracting a laser optical path, in which (1) is a laser mirror device, αυ is a laser mirror, αQ is a cooling chamber, αzh is a laser mirror holder, and (2) is an air Nozzle, (3) is duct, (4
) is the laser optical path.

Next, the operation of the device as described above will be explained. Duct (3)
Clean air containing nitrogen gas, etc. is constantly supplied inside the interior, and the air is forcibly blown by the wind force blown out from the air nozzle (2) to remove dust and dirt that enters from the laser equipment room etc. into the laser mirror ( This is to blow away the particles that try to adhere to the surface of the laser mirror (1a) and prevent a decrease in reflectance due to diffuse reflection due to (=J kimono) and deterioration of transparency on the surface of the laser mirror (1a).

[Problem that the invention seeks to solve]

In the conventional laser mirror device configured as described above, a large amount of air containing nitrogen gas etc. must be supplied in order to prevent dust from adhering to the surface of the laser mirror (1a). ) due to the blowing force of the duct (
3) Due to the weak wind speed inside the mirror, under normal laser device usage conditions, the reflectance will drop by 2-3% in a few months due to the adhesion of dust etc. on the laser mirror (1a) surface. was there.

This invention was made to solve the problems mentioned above, and it is possible to maintain the laser mirror surface clean for a long period of time without having to supply a large amount of air and forcefully blow it inside the duct. The object of the present invention is to obtain a laser mirror device that can prevent a decrease in reflectance.

[Failure to solve the problem]

In the laser mirror device according to the present invention, an air guide is provided above the mirror surface of the laser mirror with a gap between the mirror surface and the air guide, and compressed air supplied from the outside is forced into the gap between the mirror surface and the air guide. It is something.

[For production]

In this invention, compressed air supplied from the outside is reflected by the air guide provided at the top of the mirror surface and is injected onto the mirror surface of the laser mirror, so this jetting force blows off dust and other particles that tend to adhere to the mirror surface. pay.

〔Example〕

1 and 2 are configuration diagrams of a laser mirror device according to an embodiment of the present invention. In the figure, ←υ is the laser mirror, 0■ is the laser mirror holder, the 0th floor is the cooling room, and I
and α are the inlet and outlet of the cooling water, respectively, ae is the mounting screw that fixes the laser mirror holder (1z) to the base αη, and (arrogance is the air guide between the mirror surface of the laser mirror αυ and the laser mirror holder α2) An inlet pipe (21) for compressed air (A) from the outside is provided in the cavity (I!J), and an O-ring (22) seals between the laser mirror holder α2 and the cavity 01. ) is fixed to the laser holder α2.

In the laser mirror device as described above, the temperature rise of the laser mirror is suppressed by the cooling water circulating in the cooling chamber a3 through the partition wall of the laser mirror holder (13), while the air guide (1υ) has an inlet ( From 21),
Compressed air (A) supplied from the illustrated air source is forced into the cavity α1, reflected on the inner wall of the air guide OgJ, and injected onto the mirror surface of the laser mirror αυ, thereby causing air to float around. It is designed to blow away dust that can cause harmful effects such as a decrease in reflectance if it adheres to the mirror surface.

〔Effect of the invention〕

As explained above, this invention has a simple structure in which an air guide is provided above the mirror surface side of the laser mirror, and compressed air is blown onto the mirror surface of the laser mirror from the cavity in the stopper guide. It has the effect of preventing the adhesion of

[Brief explanation of drawings]

FIG. 1 is a sectional view showing the configuration of a laser mirror device according to an embodiment of the present invention, FIG. 2 is a top view of FIG. 1, and FIG. 3 is a configuration diagram showing an example of a conventional device for refracting a laser optical path. It is. In the figure, αυ is a laser mirror, α barrel is an air guide, 0 is a cavity, and (a) is compressed air. Note that the same reference numerals in the figures indicate the same or corresponding parts. Agent: Patent Attorney Tadashi Sato Year 20: Pressure Ia Sora 2nd Country 3rd @

Claims (1)

[Claims] Welding by focusing laser light emitted from a laser oscillator,
In a laser device that performs cutting, etc., air is pumped into an air guide provided at the upper part of the mirror surface side of the laser mirror that refracts the laser beam path from the laser oscillator, with a gap between the mirror surface and the air guide. A laser mirror device characterized in that the laser mirror device is configured to spray the laser beam onto the mirror surface of the laser mirror.