JPH05269450A - Injection type ultrasonic cleaning apparatus - Google Patents

Abstract

PURPOSE:To improve cleaning efficiency by converging an ultrasonic vibrational energy to a cleaning liq. ejected from an ejecting hole of an ejecting type ultrasonic cleaning apparatus. CONSTITUTION:An acoustic lens barrier 12 separating a cooling water on an oscillator 2 side and a cleaning water on an ejecting hole 10 side is provided in a liq. storing tank 1 made of quartz glass. An ultrasonic wave face-radiated from an oscillator part 2 is converged by means of this acoustic lens barrier 12 so as to make an ejecting hole 10 to be a focus.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic cleaning device,
In particular, the present invention relates to a jet type ultrasonic cleaning device that performs cleaning by spraying a cleaning liquid to which ultrasonic vibration has been applied onto an object to be cleaned.

[0002]

2. Description of the Related Art Ultrasonic cleaning equipment of high frequency of about 1 MHz is used for precision cleaning of semiconductor-related silicon wafers, compound semiconductor wafers, glass masks, glass substrates for liquid crystals and the like. The size of the particles that must be removed during cleaning is on the order of 0.1 μm, and there should be no elution of metal ions in the cleaning liquid. It is the current trend of the electronics industry to increase the production efficiency by increasing the size of the surface treatment and processing steps such as the size of glass substrate is 300 x 400 mm or the size of semiconductor wafer is 8 inches. In such a case, it is difficult to put, for example, 25 wafers each in one carrier and to perform the processing in each step at the same time, the processing is performed one by one (this is called a single-wafer processing). In this single-wafer processing, a work (processing object) is usually transferred by a conveyor, and various necessary processing is performed in this process. As the form of this processing, there are a method performed in air including a vacuum and a method performed in a solution.

FIG. 9 is an explanatory view of the above-mentioned ultrasonic cleaning step, (A) shows a side view when an ultrasonic cleaning device 51 having a cleaning tank is used, and (B) sprays a cleaning liquid 54. The side view when the jet type ultrasonic cleaning device 53 is used is shown. In the case of (A), it is necessary to partially immerse the conveyor 52 in the cleaning tank, and since the movement of the conveyor has a vertical drop, the structure becomes complicated, and further, the dirt attached to the object to be cleaned. However, there is a problem that is accumulated in the cleaning tank. (B) is a method that eliminates such problems, and in order to constantly make the cleaning liquid new and free of contamination, the object to be cleaned is transferred in a horizontal state with respect to the traveling direction of the conveyor 55, and jet cleaning is performed. This is a method of cleaning with the device 53.

FIG. 8 is a perspective view (A) showing a structure of a conventional jet type ultrasonic cleaning apparatus and a sectional view (B) for explaining the principle. In FIG. 8, reference numeral 41 is a metal storage tank filled with the cleaning liquid, and the cleaning liquid supplied with a predetermined pressure is supplied from the cleaning liquid supply port 42. Reference numeral 44 denotes an injection port for the cleaning liquid, which injects and sprays the cleaning liquid onto the article 6 to be cleaned below. The object to be cleaned 6 horizontally moves in the direction of the arrow. Reference numeral 2 denotes a vibrator portion, which is fixed to the upper part of the liquid storage tank 41 via a packing 4. Reference numeral 3 is a code from an ultrasonic oscillator (not shown). An overflow port 43 controls the ejection speed from the ejection port 44 by adjusting the pressure of the cleaning liquid filled in the liquid storage tank 41 by adjusting the amount of the liquid flowing out from this overflow port. In this way, the ultrasonic vibration from the vibrator part 2 is transmitted to the jet cleaning liquid. Reference numeral 5 is a support for the liquid storage tank 41. In such a conventional jet type ultrasonic cleaning device, a metal such as stainless steel is used as a material for the diaphragm of the ultrasonic transducer portion and the liquid storage tank which are in contact with the cleaning liquid. This enhances the vibration efficiency of the ultrasonic vibrator, reduces the loss and attenuation due to the diaphragm, and cools the heat generated by the loss and attenuation with a cleaning liquid to suppress the temperature rise and softening that occurs when resin is used. This is to prevent damage.

However, in the case of an integrated circuit for which the memory capacity of the element to be cleaned is 16 megabits or 64 megabits, the pattern width of the wiring conductor is 0.2 μm or less and the size of the adhered fine particles is 0. No more than 0.05 μm is allowed and no metal ions should be eluted during washing. Therefore, in order to prevent elution of metal inons from the diaphragm and the liquid storage tank, the present inventor uses quartz glass as the material of the liquid storage tank, and has a partition wall separating the diaphragm side and the injection port side therein. First, we proposed an injection type ultrasonic cleaning device with a structure in which cooling water for suppressing heat generation by the vibrator is filled and circulated on the diaphragm side, and the cleaning liquid of ultrapure water is filled and sprayed on the injection port side ( See Japanese Patent Application No. 4-40720).

FIG. 4 is a perspective view showing the structure of the above proposal (A).
FIG. 3B is a sectional view (B) illustrating the principle. In the figure, 1
Is a liquid storage tank made of, for example, quartz glass, and any material other than quartz glass may be used as long as it is a material that hardly elutes impurities. 1
Reference numeral 1 is a partition wall, which is obliquely provided so as to have a predetermined angle with respect to a plane perpendicular to the ultrasonic wave propagation direction so that the ultrasonic wave traveling in the liquid is transmitted without being reflected. The cooling water of the vibrator part 2 is supplied from the cooling water supply port 7, fills the space between the vibrator part 2 and the partition wall 11, and flows out from the cooling water outlet port 8. The cleaning liquid of ultrapure water is supplied from the cleaning liquid supply port 9, fills the space between the partition wall 11 and the spray port 10, and is sprayed from the spray port 10 to the object 6 to be cleaned. In FIG. 4, the ejection port 10 has an elongated slit shape, and the cleaning liquid to be ejected is a linear ejection. For example, when cleaning a glass substrate of 400 × 300 mm, the slit of the injection port 10 has a length of 400 mm and a width of 2
The pressure applied to the cleaning liquid is set to about mm so that the cleaning liquid forms a continuous water flow and ultrasonic vibrations are transmitted to the object to be cleaned. FIG. 5 is a perspective view of the previously proposed second embodiment, in which the injection port 10 is in the shape of a small circular hole, and the cleaning liquid to be injected is a dot injection. 4 and 40 in FIG. 5 are packings for mounting the vibrator portion 2 on the liquid storage tank 1.

[0007]

In the structure of the liquid storage tank 1 proposed above, a part of the ultrasonic vibration radiated in the normal direction from the vibration plate of the vibrator portion 2 is injected from the injection port 10. The structure is transmitted to the cleaning liquid, and there is a problem that the transmission efficiency of ultrasonic vibration energy to the spray liquid is low. For example, in the linear jet cleaning apparatus of FIG. 4, when the slit width of the jet port 10 is 2 mm, the width of the vibrating surface of the vibrator unit 2 is 40 mm.
Since it is mm, the transmission efficiency is 2/40 =
It is 1/20. In addition, the strength of normal ultrasonic vibration per unit area is about 4 W / cm ² . Further, it is considered that the inner wall of the liquid storage tank 1 is narrowed like a horn from the partition wall 11 to the injection port 10 and the ultrasonic energy is focused. However, when the ultrasonic frequency is 10 kHz to 30 kHz, the length of the horn is long. Half-wavelength 50-100 mm
The focusing effect can be obtained with a certain degree, but at a high frequency near 1 MHz, the half wavelength is 2 to 3 mm, and the focusing effect by the horn cannot be practically used. The purpose of the present invention is to
An object of the present invention is to provide an injection type ultrasonic cleaning device that solves the above-mentioned problems and efficiently focuses the ultrasonic energy surface-emitted from the vibrator portion on the injection port.

[0008]

The jet type ultrasonic cleaning apparatus of the present invention is capable of concentrating ultrasonic energy surface-emitted from a vibration plate to which an ultrasonic vibrator is attached near an injection port by an acoustic lens, and strongly It is designed to perform ultrasonic cleaning without waste.The structure is such that the inside of a quartz glass storage tank is divided into upper and lower parts and a partition wall with a predetermined inclination angle is provided, and the upper space is To supply the cooling water for suppressing heat generation of the ultrasonic transducer provided in the upper part of the liquid storage tank and to inject the cleaning liquid into the lower space from the injection port provided in the lower end of the liquid storage tank In the injection type ultrasonic cleaning device, which is configured so as to be fully supplied with the cleaning liquid, and to apply ultrasonic vibration energy from the ultrasonic vibrator to the cleaning liquid ejected from the ejection port and to spray the cleaning target on the cleaning target. Is the ultrasonic vibration It is characterized in that a plane wave radiated is acoustic lens barrier ribs such as to focus on the ejection port portion is focused from.

Further, a partition wall having a predetermined inclination angle is provided by vertically dividing the inside of the liquid storage tank made of quartz glass, and the heat generated by the ultrasonic transducer provided above the liquid storage tank is provided in the upper space. Is supplied with cooling water to suppress the above, and a lower space is filled with a cleaning liquid for injecting the cleaning liquid from the injection port provided at the lower end of the liquid storage tank, and ultrasonic waves from the ultrasonic transducer are supplied. In an injection type ultrasonic cleaning device configured to spray vibration energy to a cleaning liquid in addition to the cleaning liquid ejected from the injection port, the vibration is fixed substantially parallel to the partition wall and radiated from the ultrasonic vibrator. It is characterized in that it is provided with an acoustic lens made of quartz glass which focuses the plane wave to be focused and focuses on the injection port portion.

Furthermore, a quartz glass liquid storage tank is vertically divided into upper and lower partition walls having a predetermined inclination angle, and an ultrasonic transducer provided above the liquid storage tank in the upper space generates heat. Is supplied with cooling water to suppress the above, and a lower space is filled with a cleaning liquid for injecting the cleaning liquid from the injection port provided at the lower end of the liquid storage tank, and ultrasonic waves from the ultrasonic transducer are supplied. In a jet type ultrasonic cleaning device configured to spray vibration energy to the cleaning liquid in addition to the cleaning liquid sprayed from the spray port, the vibration facing the inside of the liquid storage tank with the ultrasonic vibrator attached. The material of the plate is quartz glass, and instead of the partition wall, an acoustic lens made of quartz glass is provided which focuses the plane wave radiated from the ultrasonic transducer and focuses on the injection port portion. It is a thing.

That is, by using the partition wall in the liquid storage tank of the above-mentioned structure as an acoustic lens, the ultrasonic energy is focused on the slit-shaped or small circular hole-shaped injection port, which is powerful and is not wasted. Ultrasonic cleaning is performed. Here, the acoustic lens is a substance formed to refract a sound wave according to the principle of geometrical optics for light. To focus the speed of sound, a convex lens is used when the refractive index n of the structure is n> 1, and a concave lens is used when n <1. The acoustic lens may be made of any material as long as it has a sound velocity different from the sound velocity in the cleaning liquid, such as quartz glass, and has little elution of impurities and is thermally stable.

Further, the cubic or cylindrical storage tank is filled with the cleaning solution, and ultrasonic vibration energy from an ultrasonic transducer provided above the storage tank is applied to the cleaning solution to supply the cleaning tank. In an injection type ultrasonic cleaning device for cleaning an object to be cleaned by spraying the cleaning liquid onto the object to be cleaned from a slit-shaped or small-hole-shaped nozzle provided at the lower end of the liquid tank, The side wall has a predetermined inclination angle for transmitting the plane wave radiated from the ultrasonic transducer, and the plane wave is converged so that a linear or small circular focus is formed on the injection port portion. A transparent acoustic lens is fixed, and a supply port and a flow outlet for supplying and filling cooling water for suppressing a temperature rise of the ultrasonic transducer are provided in an upper space partitioned by the acoustic lens, and the lower space is provided with the above-mentioned From the jet It is characterized in that the cleaning liquid supply port for supplying charges for ejecting washing liquid is provided.

Generally, the ratio of the speed of light in air (C _A ) to the speed of light in optical glass (C _G ) is C _A / C _G = 1.5.
Is 1.7 and is called a refractive index, and a convex lens is used to focus parallel light. For the present invention, the ratio V _W / V of the velocity of the transverse wave of the quartz glass speed of sound in water _{(V W = 1500m / sec)} (V G = 3760m / sec)
_G ≈ 0.4 is the refractive index, which is less than 1, so
A concave lens will be used to focus the sound. Since other materials have different refractive indices depending on the speed of sound, the curvature of the lens is determined by the refractive index, and if the speed of sound is lower than that of water, a convex lens may be used.

[0014]

FIG. 1 is a perspective view (A) showing a first embodiment of the present invention, a sectional view (B) for explaining the principle, and a partial perspective view (C) showing the main part. In the figure, 1 is a storage tank, 2 is a vibrator part, 3 is a code from an oscillator (not shown), 4 is packing, 5 is a support tool for the storage tank 1, and 6 is horizontally moved in the arrow direction. An object to be cleaned, 7 is an ultrasonic medium liquid (cooling water) supply port, 8 is a cooling water outflow port, 9 is a cleaning liquid (for example, pure water) supply port, and 10 is a cleaning liquid jet port. 12
Is an acoustic lens partition, which completely separates the cleaning liquid and the cooling water, and is about 15 degrees away from the plane perpendicular to the ultrasonic wave propagation direction.
It has a tilt angle θ of 30 ° to 30 °, and further has a function of a concave lens having a focal distance of 50 to 100 mm to the ejection port 10. The shape of the acoustic lens 12 is, as shown in FIG.
The cross section parallel to the longitudinal direction of the slit of 0 has an elongated rectangular shape, and the cross section of the other side that is perpendicular to it is formed to be the cross sectional shape of the concave lens, and one direction of the plane wave radiated from the transducer part. Only the light is focused so that the vicinity of the slit of the ejection port 10 becomes a linear focus. The acoustic lens partition 12 having such a shape is provided inside the liquid storage tank 1 in an inclined state. The inclination angle θ is, for example, θ = 15 ° to 28 ° when the refractive index of sound is 0.4 and the focal length is 75 mm.
Therefore, the allowable range of angles is wide.

The flow rate of the cleaning liquid supplied from the cleaning liquid supply port 9 per unit time is determined so that the cleaning liquid fills the tank and the jet pressure of the cleaning liquid is controlled. For example, when the slit width of the injection port 10 is 2 mm, the slit length 1
The flow rate per 0 mm is 0.5 to 1 liter per minute, and is 20 to 40 liters per minute when the slit length is 400 mm. The cooling water is supplied so as to fill the space between the radiation surface of the vibrator unit 2 and the medium liquid of ultrasonic energy, and suppress the temperature rise of the vibrator unit 2. For example, when the size of the injection port and the electric input of the vibrator are 500 W,
City water having a water temperature of 10 ° C to 25 ° C is supplied at a flow rate of 2 to 4 liters per minute.

FIG. 2 is a sectional view showing a second embodiment of the present invention. The vibrating element is mounted on the same metal plate as that of the first embodiment shown in FIG. 1B, and the acoustic lens 13 made of quartz glass is mounted substantially parallel to the partition wall 11 at an angle θ that maximizes the ultrasonic transmittance. There is. The acoustic lens 13 and the partition wall 11 share different functions, the acoustic lens 13 focuses acoustic energy, and the partition wall 11 serves to separate the liquid storage tank into two. The acoustic lens 13 and the partition wall 11 are obliquely incident using a transverse wave to maximize the ultrasonic transmittance.

FIG. 3 is a sectional view showing a third embodiment of the present invention. The vibrating element is attached to the vibrating plate 14 made of a quartz glass plate with an adhesive to eliminate the elution of ions, and the acoustic lens 13 is fixed to the liquid storage tank 1 by a simple method such as spot welding. The acoustic lens 13 is provided to efficiently transmit and focus the ultrasonic energy, and the cleaning liquid and the medium liquid need not be completely isolated.

FIG. 5 is an elevation perspective view (A) showing a fourth embodiment of the present invention and a sectional view (B) of the internal lens. The acoustic lens inside is circular. The whole structure is cylindrical,
The internal structure is the same as in FIG. 1 (B), FIG. 2 or FIG.

FIG. 6 is a plan view (A) and a side view (B) showing an application example of the first embodiment of FIG. 1 (B), the second embodiment of FIG. 2 and the third embodiment of FIG. ). In the case where the article 6 to be cleaned is in the form of a plate such as a glass plate, the glass plate 6 is set vertically, and the upper and lower ends of the glass plate 6 are sandwiched between the rollers 56 for transporting.
Is rotated to move the glass plate 6 in the direction of the arrow, and the cleaning liquid 54 is obliquely sprayed from the linear spray ultrasonic cleaning device 53 having box-shaped liquid storage tanks arranged at predetermined positions on both side surfaces thereof for cleaning. Is done. By making the jet direction oblique, the peeled dirt does not reattach.

FIG. 7 is a perspective view showing an application example of the fourth embodiment of FIG. In the case where the object to be cleaned 59 is a disk shape like a semiconductor wafer, the wafer 59 is placed on a rotating table 60 and rotated, and a point jet type ultrasonic cleaning apparatus having a cylindrical liquid storage tank arranged above the wafer 59 is rotated. Cleaning is performed by injecting the cleaning liquid 58 obliquely from 57. In this case, the rotating wafer 5
9, the tip of the cleaning device 57 is shaken left and right to perform uniform cleaning. For the sake of explanation, FIGS. 7 and 8 only show the main part, and the other parts are omitted. In addition, although the jet outlet is located at the center of the point jet type and at the center of the line direction of the line jet type, in the case of a lens with an oblique incidence, the traveling direction of the sound is slightly refracted, so it is necessary to correct the lens curvature. is there. Instead of correcting the curvature of the lens, the position of the ejection port may be deviated by the amount of refraction in the sound traveling direction.

The above description has been made for the case of one acoustic lens. However, it goes without saying that the present invention is not limited to this and can be applied to the case where a plurality of acoustic lenses are provided. Further, it is naturally applied when a concave lens and a convex lens are used in combination as a plurality of acoustic lenses.
For example, it is of course applicable to a case where a concave lens and a convex lens are combined to form a beam-like sound field in which the intensity of vibration energy is kept substantially constant with respect to the distance from the vibrator.

The above-described first to fourth embodiments are used when cleaning a semiconductor wafer or the like with ultrapure water as a cleaning target. However, ICs of less than 1 Mbit, discrete (individual semiconductor) transistors, or diodes are used. When cleaning a wafer for use or a part of a glass substrate or the like, it is not necessary to strictly suppress the elution of metal ions, and therefore, a conventional cleaning tank made of metal can be used. However, in the conventional device, the ultrasonic vibration energy is not focused on the ejection port, so that the cleaning efficiency is low. Therefore, the acoustic lens of the present invention is mounted and mounted with a predetermined inclination angle in order to improve ultrasonic transmittance. FIG. 10 is a partial sectional view showing the fifth embodiment of the present invention. This fifth embodiment is shown in FIG.
A liquid storage tank 1 made of quartz glass in the line injection type ultrasonic cleaning apparatus shown in (A) is replaced with a metal storage tank 20. Figure 10
(A) is a cross-sectional view of the liquid storage tank 20, and (B) and (C) are enlarged partial cross-sectional views of a mounting portion of the acoustic lens 15 mounted inside the liquid storage tank 20. Reference numerals 2, 4, 6, 7, in FIG.
Reference numerals 8, 9, and 10 denote the same parts as in FIG. Reference numeral 15 denotes an acoustic lens, which has a predetermined inclination angle θ such that the transmittance of ultrasonic vibration is almost 100%, and the injection port 10
It is attached to the inner wall of the liquid storage tank 20 so that the vibration energy is concentrated on the inside. FIG. 10 (B) shows a mounting structure of the acoustic lens 15, 16 is a mounting tool spot welded to the inner wall of the liquid storage tank 20, and 17 is a packing. Reference numeral 18 denotes a screw, which penetrates a hole provided in the acoustic lens 15 and is fastened and fixed to a tap provided in the fixture 16. Reference numeral 19 in FIG. 10 (C) is a retainer, which does not have a hole in the acoustic lens 15 and is fixed with a screw 18 with the edge of the acoustic lens sandwiched. In the case of the present embodiment, the cleaning liquid and the cooling water may be the same, but are supplied from the respective supply ports 7 and 9 in order to fill the liquid inside. There may be some leakage from the mounting portion of the acoustic lens 15, and the amount of leakage can be used to adjust the water pressure. The material of the acoustic lens may be a relatively hard substance that is acoustically transparent and has a different sound velocity (refractive index) from the cooling water (cleaning liquid), and for example, general optical glass may be used instead of quartz glass. Be done. Although the fifth embodiment of FIG. 10 is shown for the linear jet ultrasonic cleaning apparatus, it goes without saying that it can be applied to the point jet cleaning apparatus shown in FIG.

[0023]

As described in detail above, by carrying out the present invention, there is no fear of elution of metal ions in the cleaning liquid, and ultrasonic energy is focused, so that cleaning efficiency is increased and semiconductor manufacturing related It is extremely effective in practical use as a cleaning device. Furthermore, in the case of general cleaning, the cleaning efficiency is significantly improved.

[Brief description of drawings]

FIG. 1 is a perspective view (A) showing a first embodiment of the present invention, a cross-sectional view (B) and a perspective view (C) of an acoustic lens which is a component of the present invention.

FIG. 2 is a sectional view of a second embodiment of the present invention.

FIG. 3 is a sectional view of a third embodiment of the present invention.

FIG. 4 is a perspective view (A) and a sectional view (B) showing an embodiment of the previously proposed invention.

FIG. 5 is a perspective view (A) showing a fourth embodiment of the present invention and a sectional view (B) of an acoustic lens which is a constituent element of the present invention.

FIG. 6 is a plan view (A) and a side view (B) showing an application example of FIGS.

FIG. 7 is a perspective view showing an application example of FIG.

FIG. 8 is a perspective view (A) and a sectional view (B) of a conventional structure.

FIG. 9 is a side view illustrating a cleaning process.

FIG. 10 is a sectional view showing a fifth embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Liquid storage tank 2 Transducer part 3 Code 4 Packing 5 Supporting tool 6 Cleaning object 7 Cooling water supply port 8 Cooling water outlet 9 Cleaning solution supply port 10 Jet port 11 Partition wall 12 Acoustic lens partition wall 13 Acoustic lens 14 Quartz glass diaphragm 15 Acoustic Lens 16 Mounting Tool 17 Packing 18 Screw 19 Holding Tool 20 Liquid Storage Tank 41 Liquid Storage Tank 42 Cleaning Liquid Supply Port 43 Overflow Port 44 Jet Port 51 Ultrasonic Cleaning Device with Cleaning Tank 52 Conveyor 53 Linear Jet Ultrasonic Wave Cleaning device 54 Cleaning liquid 55 Conveyor 56 Roller 57 Point jet cleaning device 58 Cleaning liquid 59 Semiconductor wafer 60 Rotating table

Claims (4)

[Claims] 1. A quartz glass liquid storage tank is vertically divided into partition walls having a predetermined inclination angle, and a heat generated by an ultrasonic transducer provided above the liquid storage tank in the upper space. Is supplied with cooling water to suppress the above, and a lower space is filled with a cleaning liquid for injecting the cleaning liquid from the injection port provided at the lower end of the liquid storage tank, and ultrasonic waves from the ultrasonic transducer are supplied. In an injection type ultrasonic cleaning device configured to spray vibration energy to a cleaning liquid in addition to the cleaning liquid sprayed from the spray port, the partition wall is a plane wave emitted from the ultrasonic transducer is focused. An injection-type ultrasonic cleaning device, characterized in that the injection-type ultrasonic cleaning device is an acoustic lens partition that focuses on the injection port portion. 2. A quartz glass liquid storage tank is vertically divided into upper and lower partition walls having a predetermined inclination angle, and an ultrasonic transducer provided above the liquid storage tank in the upper space generates heat. Is supplied with cooling water to suppress the above, and a lower space is filled with a cleaning liquid for injecting the cleaning liquid from the injection port provided at the lower end of the liquid storage tank, and ultrasonic waves from the ultrasonic transducer are supplied. In an injection type ultrasonic cleaning device configured to spray vibration energy to a cleaning liquid in addition to the cleaning liquid sprayed from the spray port, the vibration is fixed substantially parallel to the partition wall and radiated from the ultrasonic vibrator. An ultrasonic cleaning device of the jet type, comprising: an acoustic lens made of quartz glass that focuses the plane wave to be focused on the jet port portion. 3. A quartz glass liquid storage tank is divided into upper and lower portions with a partition wall having a predetermined inclination angle, and heat generated by an ultrasonic transducer provided above the liquid storage tank in the upper space. Is supplied with cooling water to suppress the above, and a lower space is filled with a cleaning liquid for injecting the cleaning liquid from the injection port provided at the lower end of the liquid storage tank, and ultrasonic waves from the ultrasonic transducer are supplied. In a jet-type ultrasonic cleaning device configured to spray vibration energy to a cleaning liquid in addition to the cleaning liquid sprayed from the spray port, the ultrasonic vibrator is attached, and vibrations facing the interior of the liquid storage tank are provided. The material of the plate is quartz glass, and in place of the partition wall, an acoustic lens made of quartz glass is provided which focuses the plane wave emitted from the ultrasonic transducer and focuses on the injection port portion. Jet type ultrasonic cleaning device. 4. A cubic or cylindrical liquid storage tank is filled with a cleaning liquid, and ultrasonic vibration energy from an ultrasonic transducer provided above the liquid storage tank is applied to the cleaning liquid to provide the liquid storage tank. In the injection type ultrasonic cleaning device for cleaning an object to be cleaned by spraying the cleaning liquid onto the object to be cleaned from a slit-shaped or small-hole-shaped nozzle provided at the lower end of the liquid tank, The side wall has a predetermined inclination angle for transmitting the plane wave radiated from the ultrasonic transducer, and the plane wave is converged so that a linear or small circular focus is formed on the injection port portion. A transparent acoustic lens is fixed, and a supply port and a flow outlet for supplying and filling cooling water for suppressing a temperature rise of the ultrasonic transducer are provided in an upper space partitioned by the acoustic lens, and the lower space is provided with Cleaning liquid from the jet Injection type ultrasonic washing apparatus, characterized in that the cleaning liquid supply port for supplying filled is provided for ejecting.