JPS6234964B2 - - Google Patents
Info
- Publication number
- JPS6234964B2 JPS6234964B2 JP55104573A JP10457380A JPS6234964B2 JP S6234964 B2 JPS6234964 B2 JP S6234964B2 JP 55104573 A JP55104573 A JP 55104573A JP 10457380 A JP10457380 A JP 10457380A JP S6234964 B2 JPS6234964 B2 JP S6234964B2
- Authority
- JP
- Japan
- Prior art keywords
- hole
- thin plate
- sample
- disk
- embedding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 14
- 238000004026 adhesive bonding Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 18
- 238000003780 insertion Methods 0.000 description 9
- 230000037431 insertion Effects 0.000 description 9
- 239000011521 glass Substances 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920001651 Cyanoacrylate Polymers 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000004830 Super Glue Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Landscapes
- Non-Reversible Transmitting Devices (AREA)
Description
【発明の詳細な説明】
本発明は、微小な部品の製造・組立て等に際し
て、微小な薄板を該薄板と同一形状の穴にしつく
りとかつ容易に挿入・埋設する方法に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing and assembling minute parts by forming a minute thin plate into a hole having the same shape as the thin plate and easily inserting and burying the hole.
従来、この種の方法は、例えば第1図のように
円盤状の微小薄板(厚さ0.1mm位〜2mm位)1
を、基板2の穴201に挿入もしくは埋め込む場
合、微小薄板1と穴201の断面形状を矩形、即
ち、微小薄板1の表面1a側と裏面1b側の径を
同一寸法としている。しかしながらこの方法にお
いては、微小薄板1の穴201への挿入が手作業
あるいは機械ロボツトでさえ難しく、微小薄板1
や穴201の端がキズついたり欠けたりして歩留
りが悪かつた。 Conventionally, this type of method has been used, for example, as shown in FIG.
When inserting or embedding into the hole 201 of the substrate 2, the cross-sectional shapes of the micro thin plate 1 and the hole 201 are rectangular, that is, the diameters of the front surface 1a side and the back surface 1b side of the micro thin plate 1 are made to be the same size. However, in this method, it is difficult to insert the thin thin plate 1 into the hole 201 manually or even by a mechanical robot.
The edges of the hole 201 were scratched or chipped, resulting in poor yield.
この改善策の一つとして、従来微小薄板1の裏
面1b側のエツヂ(端)部あるいは基板2の表面
側のエツヂ部に面取りを施す方法をとつていた。
しかし、この方法においては、挿入が容易になつ
ても挿入(埋め込み)された基板表面が面取りの
ため溝となつて残り、部品機能、特性向上の点で
致命的欠陥として指摘される場合があつた。ま
た、製品の美観を妨げる原因にもなつていた。さ
らに、微小薄板1が基板2から脱落しやすい欠点
があり、部品としての信頼性が悪かつた。そのた
め、やむを得ず微小薄板1と基板2の側面を接着
剤によつて接着する場合もあつたが、工程が煩雑
になるという欠点があつた。 As one of the measures to improve this, a conventional method has been to chamfer the edge on the back side 1b of the thin microplate 1 or the edge on the front side of the substrate 2.
However, with this method, even though insertion is easier, the surface of the inserted (embedded) board remains in the form of a groove due to chamfering, which may be pointed out as a fatal flaw in terms of improving component function and characteristics. Ta. Moreover, it was also a cause of disturbing the aesthetic appearance of the product. Furthermore, there was a drawback that the micro thin plate 1 easily fell off from the substrate 2, resulting in poor reliability as a component. For this reason, there were cases where it was unavoidable to bond the side surfaces of the micro thin plate 1 and the substrate 2 with an adhesive, but this had the disadvantage of complicating the process.
本発明は上記の事情に鑑みてなされたもので、
所定の形状の微小薄板を他の微小薄板に形成した
前記微小薄板と同一形状の穴に埋め込む場合に、
面取りを施したり接着剤を用いることなく微小薄
板を他の薄板に形成した穴内に容易に、かつしつ
くりと挿入・埋設し得る方法を提供するものであ
る。そして、この発明の特徴は、穴の断面形状を
テーパ状に加工し、微小薄板の表面および裏面に
それぞれダミー用薄板を接着してロツド状の試料
を形成するとともに、その試料をテーパ状に加工
することによつてその試料中の前記微小薄板を前
記穴と同一形状、同一寸法になし、その試料を前
記穴に挿入して試料中の前記微小薄板と前記穴と
を略合致させた後、前記微小薄板から前記ダミー
用薄板を取り外すようにしたものである。 The present invention was made in view of the above circumstances, and
When embedding a microthin plate of a predetermined shape into a hole of the same shape as the microthin plate formed in another microthin plate,
To provide a method for easily inserting and burying a minute thin plate into a hole formed in another thin plate without chamfering or using adhesive. The feature of this invention is that the cross-sectional shape of the hole is processed into a tapered shape, and dummy thin plates are bonded to the front and back surfaces of the micro thin plate to form a rod-shaped sample, and the sample is processed into a tapered shape. By doing so, the thin thin plate in the sample is made to have the same shape and the same size as the hole, and the sample is inserted into the hole to substantially match the thin thin plate in the sample and the hole, and then The dummy thin plate is removed from the micro thin plate.
以下、本発明の実施例を説明するが、それに先
立ちまず本発明の基本となる微小薄板の埋め込み
方法について第2図を参照して説明する。第2図
において、1は挿入・埋め込み用の微小薄板であ
るガラス円盤、2はガラス円盤1と同一形状の穴
201をもつガラス基板である。ガラス円盤1と
ガラス基板2の厚さは、両者とも0.3mmであり、
円盤1ならびに穴201の表面側の直径d1は5.0
mmで、円盤1の側面および穴201の内面をテー
パ状に加工してある。円盤1の加工は外周研削盤
を用いて、穴201の加工はテーパ状の治具によ
りラツピング形式でそれぞれ加工した。 Embodiments of the present invention will be described below, but first, a method of embedding a micro thin plate, which is the basis of the present invention, will be described with reference to FIG. In FIG. 2, reference numeral 1 indicates a glass disk which is a micro thin plate for insertion and embedding, and reference numeral 2 indicates a glass substrate having a hole 201 of the same shape as the glass disk 1. The thickness of the glass disk 1 and the glass substrate 2 are both 0.3 mm,
The diameter d 1 on the surface side of disk 1 and hole 201 is 5.0
mm, and the side surface of the disk 1 and the inner surface of the hole 201 are machined into a tapered shape. The disk 1 was machined using a peripheral grinder, and the hole 201 was machined in a wrapping manner using a tapered jig.
実体顕微鏡下でみながら、円盤1を穴201に
挿入したところ、スムースに挿入され、そして弾
性体(例えばシリコンゴム)を介して円盤1を注
意深く押しつけ光学顕微鏡で埋め込み状況を観察
したところ、円盤1がしつくりと埋め込まれ、表
面側、裏面側の円盤1と穴201のスキマは高々
6μm以内であつた。 When I inserted the disk 1 into the hole 201 while viewing it under a stereomicroscope, it was inserted smoothly, and when I carefully pressed the disk 1 through an elastic body (for example, silicone rubber) and observed the embedding situation with an optical microscope, I found that the disk 1 was inserted smoothly. It was embedded tightly, and the gap between the disk 1 and the hole 201 on the front and back sides was 6 μm or less at most.
本発明は以上の基本となる埋め込み方法をふま
え、さらに容易にかつ高精度に微小薄板を穴に埋
め込み・固定できるようにしたものであり、以
下、第3図を参照して本発明の実施例を説明す
る。 The present invention is based on the above-mentioned basic embedding method, and has made it possible to embed and fix a micro thin plate in a hole even more easily and with high precision. Explain.
この実施例の方法では、円盤1の表面(第3図
において上面)にダミー用の円盤d(ダミー用薄
板)を、また円盤1の裏面(第3図において下
面)には同じくダミー用の2枚の円盤a,bをそ
れぞれ接着して、予めロツド状の試料302を形
成する。そして、この試料302を接着用治具3
01に取り付け、試料302中の円盤1が基板2
のテーパ状の穴201と同一形状、同一寸法とな
るように試料302全体をテーパ加工する。しか
る後に、第3図に示すように、試料302をその
先端から穴201に挿入する。この場合、薄い基
板2の穴201に基板2のの厚さよりも数倍以上
の厚さの試料302を挿入することになるので、
挿入は極めて容易となり、かつ円盤1を破損する
ことなく、きつく挿入できるのである。試料30
2を円盤1が穴201に略合致する位置まで挿入
し、顕微鏡で円盤1の表面または裏面が基板2の
表面または裏面に一致したことを確認した後、円
盤1を接着した接着剤(例えばセラツク、瞬間接
着剤)の溶剤(例えば、アセトン、アルコール)
の中に浸漬して、試料302の円盤1a,b,d
と治具301をそれぞれはくりした。続いて、穴
201に残された円盤1の挿入・埋め込み具合い
を検鏡観察したところ、円盤1と穴201の隙間
は3μm以下であり、表面における円盤1と基板
2の段差は5μmであつた。第3図の方法で埋め
込んだガラス円盤1の表・裏面には、埋め込みに
際して全く触れてないので、無キズであることは
言うまでもない。 In the method of this embodiment, a dummy disk d (dummy thin plate) is placed on the front surface of the disk 1 (top surface in FIG. 3), and a dummy disk d (dummy thin plate) is placed on the back surface of the disk 1 (bottom surface in FIG. 3). A rod-shaped sample 302 is formed in advance by bonding disks a and b, respectively. Then, this sample 302 is attached to the bonding jig 3.
01, and disk 1 in sample 302 is attached to substrate 2.
The entire sample 302 is tapered so that it has the same shape and dimensions as the tapered hole 201. Thereafter, as shown in FIG. 3, a sample 302 is inserted into the hole 201 from its tip. In this case, a sample 302 whose thickness is several times or more than the thickness of the substrate 2 is inserted into the hole 201 of the thin substrate 2.
Insertion becomes extremely easy, and the disc 1 can be inserted tightly without being damaged. Sample 30
2 until the disk 1 approximately matches the hole 201, and after confirming with a microscope that the front or back surface of the disk 1 matches the front or back surface of the substrate 2, insert the adhesive (for example, ceramics) that adhered the disk 1. , superglue) solvents (e.g. acetone, alcohol)
The disks 1a, b, d of the sample 302 are immersed in
and the jig 301 were peeled off. Subsequently, when the state of insertion and embedding of the disk 1 left in the hole 201 was observed using a microscope, the gap between the disk 1 and the hole 201 was 3 μm or less, and the level difference between the disk 1 and the substrate 2 on the surface was 5 μm. . Needless to say, the front and back surfaces of the glass disk 1 embedded by the method shown in FIG. 3 are free of scratches because they are not touched at all during the embedding process.
第2図、第3図で埋め込んだ円盤1は、超音波
をかけた水中でも基板2の表面側に抜けず基板2
にとどまつていた。もちろん円盤1は基板2の裏
面側には抜けない。 The disk 1 embedded in FIGS. 2 and 3 does not come off to the surface side of the substrate 2 even under ultrasonic waves.
It stayed there. Of course, the disk 1 cannot escape to the back side of the substrate 2.
同様に本発明を、基板2の厚さ0.05〜5.00mm、
埋め込み円盤1の直径0.1〜10.0mmの各種組合せ
で適用したところ、本発明の効果は充分に有効で
あつた。原理的に考えても、より厚い基板に大き
い形状のものを埋め込むことは可能であり、また
多角形状のものでもよい。 Similarly, in the present invention, the thickness of the substrate 2 is 0.05 to 5.00 mm,
When applied to various combinations of embedded disks 1 with diameters of 0.1 to 10.0 mm, the effects of the present invention were sufficiently effective. In principle, it is possible to embed a large shape in a thicker substrate, and a polygonal shape is also possible.
さらに、本発明は、ガラス等の硬脆材料のみな
らず、金属などの固体、あるいは異種材料の埋め
込みに有効であることは言うまでもない。 Furthermore, it goes without saying that the present invention is effective for embedding not only hard and brittle materials such as glass, but also solid materials such as metals, or dissimilar materials.
以上、説明したように、本発明によれば挿入穴
と挿入部品(微小薄板)の断面をテーパ状にして
挿入・埋め込みするのであるから、挿入部品の挿
入・埋め込み作業が容易かつ確実でかり、挿入部
品を確実に挿入穴にとどめることができ、挿入部
品をしつくりときつく埋め込むことができる利点
がある。また、本発明によれば、挿入部品である
円盤の表面および裏面にダミー用薄板を接着して
ロツド状の試料を形成し、この試料全体をテーパ
加工するようにしたので、円盤を単独でテーパ加
工する場合に比して加工が極めて容易になり、さ
らに、この試料を穴に挿入した後にダミー用薄板
を取り外すようにしたので、円盤の穴への挿入が
極めて容易となり、かつ充分にきつく挿入でき、
しかも円盤の表面、裏面にキズがつくこともない
という効果を奏する。 As explained above, according to the present invention, since the insertion hole and the insertion part (microthin plate) are inserted and embedded with a tapered cross section, the insertion and embedding work of the insertion part is easy and reliable. This has the advantage that the inserted part can be reliably held in the insertion hole, and the inserted part can be firmly and tightly embedded. Furthermore, according to the present invention, a rod-shaped sample is formed by bonding dummy thin plates to the front and back surfaces of the disk, which is an inserted part, and the entire sample is tapered. Machining is much easier than when machining the sample, and since the dummy thin plate is removed after inserting the sample into the hole, it is extremely easy to insert the disk into the hole, and it can be inserted firmly enough. I can do it,
Moreover, it has the effect of preventing scratches on the front and back surfaces of the disc.
本発明の応用分野としては、機械部品の組立て
をはじめとして、電子部品の素子埋め込み、例え
ば、誘電体基板に磁性体を埋め込む形のサーキユ
レータの製造等に適用し得る。 The present invention can be applied to assembling mechanical parts, embedding elements in electronic parts, and manufacturing circulators in which a magnetic material is embedded in a dielectric substrate, for example.
第1図は従来の微小薄板の埋め込み方法を示す
図、第2図は本発明の基本となる埋め込み方法を
示す図、第3図は本発明の埋め込み・固定方法の
実施例を示す図である。
1……微小薄板(円盤)、2……薄板(基板)、
201……基板内の埋め込み用穴、301……接
着用治具、302……ロツド状の試料、a,b,
d……ダミー用薄板(円盤)。
FIG. 1 is a diagram showing a conventional method of embedding a micro thin plate, FIG. 2 is a diagram showing an embedding method which is the basis of the present invention, and FIG. 3 is a diagram showing an embodiment of the embedding/fixing method of the present invention. . 1... Micro thin plate (disk), 2... Thin plate (substrate),
201... Hole for embedding in the substrate, 301... Adhesive jig, 302... Rod-shaped sample, a, b,
d...Dummy thin plate (disk).
Claims (1)
同一形状の微小薄板を埋め込んで固定する場合に
おいて、前記穴の断面形状をテーパ状に加工し、
前記微小薄板の表面および裏面にそれぞれダミー
用薄板を接着してロツド状の試料を形成するとと
もに、その試料をテーパ状に加工することによつ
てその試料中の前記微小薄板を前記穴と同一形
状、同一寸法になし、その試料を前記穴に挿入し
て試料中の前記微小薄板と前記穴とを略合致させ
た後、前記微小薄板から前記ダミー用薄板を取り
外すことを特徴とする微小薄板の埋め込み・固定
方法。1. When a micro thin plate having the same shape as the hole is embedded and fixed in a hole of a predetermined shape formed in a thin plate, the cross-sectional shape of the hole is processed into a tapered shape,
A rod-shaped sample is formed by gluing dummy thin plates to the front and back sides of the thin thin plate, respectively, and the sample is processed into a tapered shape so that the thin thin plate in the sample has the same shape as the hole. , having the same dimensions, and inserting the sample into the hole to substantially match the micro thin plate in the sample with the hole, and then removing the dummy thin plate from the micro thin plate. Embedding/fixing method.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10457380A JPS5730306A (en) | 1980-07-30 | 1980-07-30 | Burying method of minute thin plate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10457380A JPS5730306A (en) | 1980-07-30 | 1980-07-30 | Burying method of minute thin plate |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5730306A JPS5730306A (en) | 1982-02-18 |
JPS6234964B2 true JPS6234964B2 (en) | 1987-07-30 |
Family
ID=14384174
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10457380A Granted JPS5730306A (en) | 1980-07-30 | 1980-07-30 | Burying method of minute thin plate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5730306A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4122324Y1 (en) * | 1964-02-22 | 1966-11-08 |
-
1980
- 1980-07-30 JP JP10457380A patent/JPS5730306A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4122324Y1 (en) * | 1964-02-22 | 1966-11-08 |
Also Published As
Publication number | Publication date |
---|---|
JPS5730306A (en) | 1982-02-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH09263500A (en) | Jig for stripping stuck soi wafer | |
JPS6234964B2 (en) | ||
EP0951015A3 (en) | An optical or magneto-optic head and method of making the same | |
US20020159027A1 (en) | Device for manufacturing of square edge memory lens | |
JP4741280B2 (en) | Manufacturing method of optical low-pass filter | |
JP2575950B2 (en) | Method for manufacturing semiconductor device | |
JP2633273B2 (en) | Polishing method and polishing jig | |
JPS63191309A (en) | Manufacture of magnetic head | |
JP5278851B2 (en) | Method for forming silicon carbide film on carbon substrate surface | |
JPS58194164A (en) | Manufacture of magnetic head | |
JPS59138436A (en) | Manufacture of assembling member | |
JPS5897143A (en) | Recording and reproducing disc | |
JPS63142300A (en) | Method of machining beam-condensing mirror | |
JP2504117B2 (en) | Optical disc bonding method | |
JP3126164B2 (en) | Processing method of magnetic head slider | |
JPH07110996A (en) | Information disk | |
JP2000137133A (en) | Optical fiber array | |
JPS62143218A (en) | Working method for magnetic head core | |
JPH02199640A (en) | Apparatus for producing optical disk | |
JPH04328372A (en) | Production of composite type floating magnetic head | |
JPH0156446B2 (en) | ||
JPS6357851B2 (en) | ||
JP2010129097A (en) | Disk actuator | |
JPH02218009A (en) | Magnetic head and manufacture of magnetic head | |
JPH029011A (en) | Manufacture of thin film combination head |