JPS623417A - Magnetic recording medium - Google Patents

Magnetic recording medium

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Publication number
JPS623417A
JPS623417A JP14111485A JP14111485A JPS623417A JP S623417 A JPS623417 A JP S623417A JP 14111485 A JP14111485 A JP 14111485A JP 14111485 A JP14111485 A JP 14111485A JP S623417 A JPS623417 A JP S623417A
Authority
JP
Japan
Prior art keywords
thin film
film
ferromagnetic
plasma
magnetic recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14111485A
Other languages
Japanese (ja)
Inventor
Ryuji Shirahata
龍司 白幡
Akio Yanai
矢内 明郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP14111485A priority Critical patent/JPS623417A/en
Publication of JPS623417A publication Critical patent/JPS623417A/en
Pending legal-status Critical Current

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  • Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To improve the lubricity and electromagnetic transducing characteristic of the titled medium by providing minute protrusions having heights in a speci fied range and in limited number per unit area on the surface of a ferromagnetic metallic thin film furnished on a nonmagnetic carrier and forming a plasma- polymerized film thereon. CONSTITUTION:The minute protrusion 3 is provided on the surface of the ferro magnetic metallic thin film 2 furnished on the nonmagnetic carrier 1. The plasma-polymerized film 4 is further provided on the ferromagnetic metallic thin film 2. The height of the fine protrusion 3 is preferably regulated to 50-400Angstrom and the number of minute protrusions per unit area is preferably controlled to 1X10<7>-8X10<7> unit/mm<2>. Moreover, the two-dimensional size (d) of the minute protrusion is favorably adjusted to 500-2,000Angstrom . Iron, cobalt, nickel and other ferromagnetic metals or a ferromagnetic alloy of Fe-Co, Fe-Ni, etc., are used as the ferromagnetic metallic thin film. The plasma-polymerized film is formed by polymerizing an org. gaseous monomer in plasma resulting from electric discharge induced by DC, AC, high frequency, microwave, etc., on the ferromagnetic metallic thin film. The lubricity and electromagnetic charac teristic are thus improved.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は非磁性基体上に磁気記録層として強磁性金属薄
膜およびその上にプラズマ重合膜を設けてなる磁気記録
媒体に関し、特に潤滑性および電磁変換特性にすぐれる
磁気記録媒体に関する。
Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a magnetic recording medium comprising a ferromagnetic metal thin film as a magnetic recording layer on a non-magnetic substrate and a plasma polymerized film thereon. This invention relates to a magnetic recording medium with excellent electromagnetic conversion characteristics.

〔従来技術〕[Prior art]

従来より磁気記録媒体としては、非磁性支持体上にr−
pe 203、coをドープしたγ−Fe2O3、Fe
3O4、CoをドープしたFe3O4、r−Fe 20
3とFe50.のベルトライド化合物、CrO2等の破
性粉末あるいは強磁性合金粉末等を粉末磁性材料を塩化
ビニル−酢酸ビニル共重合体ζスチレン−ブタジェン共
重合体、エポキシ樹脂、ポリウレタン樹脂等の有機バイ
ンダー中に分散せしめたものを塗布し乾燥させる塗布型
のものが広く使用されてきている。近年高密度記録への
要求の高まシと共に真空蒸着、スパッタリング、イオン
ブレーティング等のペーパーデポジション法あるいは[
気メッキ、無電解メッキ等のメッキ法により形成される
強磁性金属薄膜を磁気記録層とする、バインダーを使用
しない、いわゆる金属薄膜型磁気記録媒体が注目を浴び
ており実用化への努力が種種行なわれている。
Conventionally, as a magnetic recording medium, r-
γ-Fe2O3, Fe doped with pe 203, co
3O4, Co-doped Fe3O4, r-Fe 20
3 and Fe50. Powdered magnetic materials such as Bertolide compound, CrO2, etc. breakable powder or ferromagnetic alloy powder are dispersed in organic binders such as vinyl chloride-vinyl acetate copolymer, ζ styrene-butadiene copolymer, epoxy resin, polyurethane resin, etc. Coating type products have been widely used, in which a predetermined amount is applied and dried. In recent years, with the increasing demand for high-density recording, paper deposition methods such as vacuum evaporation, sputtering, ion blating, etc.
So-called metal thin film magnetic recording media, which do not use a binder and use a ferromagnetic metal thin film formed by plating methods such as atmospheric plating or electroless plating as a magnetic recording layer, are attracting attention, and various efforts are being made to put them into practical use. It is being done.

従来の塗布型の磁気記録媒体では主として強磁性金属よ
り飽和磁化の小さい金属酸化物を磁性材料として使用し
ているため、高密度記録に必要な薄形化が信号出力の低
下をもたらすため限界にきており、かつその製造工程も
複雑で、溶剤回収あるいは公害防止のための大きな附帯
設備を要するという欠点を有している。金属薄膜型の磁
気記録媒体では上記酸化物よシ大きな飽和磁化を有する
強磁性金属をバインダーの如き非磁性物質を含有しない
状態で薄膜として形成せしめるため、高密度記録化のた
めに超薄形にできるという利点を有し、しかもその製造
工程は簡単である。
Conventional coating-type magnetic recording media mainly use metal oxides, which have lower saturation magnetization than ferromagnetic metals, as magnetic materials, so the thinning required for high-density recording leads to a reduction in signal output, which has reached its limit. Moreover, the manufacturing process is complicated, and it has the drawback of requiring large auxiliary equipment for solvent recovery and pollution prevention. In metal thin film magnetic recording media, a ferromagnetic metal with a higher saturation magnetization than the above-mentioned oxides is formed as a thin film without containing a nonmagnetic substance such as a binder. Moreover, the manufacturing process is simple.

高密度記録用の磁気記録媒体に要求される条件の一つと
して、高抗磁力化、薄形化が理論的にも実験的にも提唱
されており、塗布型の磁気記録媒体よシも一桁小さい薄
型化が容易で、飽和磁束密度も大きい金属薄膜型磁気記
録媒体への期待は大きい。
As one of the conditions required for magnetic recording media for high-density recording, high coercive force and thinness have been proposed both theoretically and experimentally, and coating-type magnetic recording media are also required. There are great expectations for metal thin film magnetic recording media, which can be easily made thinner by an order of magnitude and have a high saturation magnetic flux density.

さらに強磁性金属薄膜から成る磁気記録媒体にかかわる
大きな問題として腐蝕及び摩耗に対する強度、走行安定
性がある。磁気記録媒体は磁気信号の記録、再生及び消
去の過程において磁気ヘッドと高速相対運動のもとにお
かれるが、その際走行がスムーズにしかも安定に行なわ
れねばならぬし、同時にヘッドとの接触による摩耗もし
くは破壊が起ってはならない。
Furthermore, major problems concerning magnetic recording media made of ferromagnetic metal thin films include strength against corrosion and abrasion, and running stability. During the process of recording, reproducing, and erasing magnetic signals, the magnetic recording medium is subjected to high-speed relative motion with the magnetic head, but at this time, the movement must be smooth and stable, and at the same time, contact with the head must be maintained. There shall be no wear or damage due to

上記の問題の改良のために強磁性金属薄膜にプラズマ重
合膜を保護層として設けることが提案されており、例え
ば特開昭j≠−2/2弘り号、同jターフ 2 A j
J’号、同!ター1r4At、弘/号、同よ?−/j弘
6≠3号、同19−/601コを号、同j?−1710
21号、同!ター/7/。
In order to improve the above problem, it has been proposed to provide a plasma polymerized film as a protective layer on a ferromagnetic metal thin film.
Same as J'! Tar1r4At, Hiro/No., same? -/j hiro 6≠3 issue, same 19-/601 issue, same j? -1710
No. 21, same! Tar/7/.

2り号、同60−λ27JO号、同1.0−J!!30
号、同t 0−3j j J 7号、同40−3172
7号、同4O−31721r号、同40−!7j33号
、同60−17136号、同6O−J−7!37号、同
40−637λ参号、同AO−J9rJj号、同6O−
62t−26号等に開示されている。しかしながらプラ
ズマ重合膜を保護層として設けた従来の金属薄膜型磁気
記録媒体では潤滑性、特に繰返し摩擦における潤滑性が
不十分で、繰返し摩擦特性を向上させるにはプラズマ重
合膜の膜厚を厚くする方法が取り得るがこの場合には電
磁変換特性が劣化し金属薄膜型磁気記録媒体の特徴が生
かせないという問題があシ改良が強く望まれていた。
No. 2, No. 60-λ27JO, No. 1.0-J! ! 30
No., t 0-3j j J No. 7, 40-3172
No. 7, No. 4O-31721r, No. 40-! 7j33, 60-17136, 6O-J-7!37, 40-637λ, AO-J9rJj, 6O-
62t-26, etc. However, conventional metal thin film magnetic recording media with a plasma polymerized film as a protective layer have insufficient lubricity, especially in repeated friction, and in order to improve the repeated friction characteristics, the thickness of the plasma polymerized film must be increased. However, in this case, there is a problem that the electromagnetic conversion characteristics deteriorate and the characteristics of the metal thin film magnetic recording medium cannot be utilized, and an improvement has been strongly desired.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、上記の欠点の改良された磁気記録媒体
、すなわち潤滑性、特に繰返し摩擦特性にすぐれると共
に電磁変換特性にすぐれる磁気記録媒体を提供すること
Kある。
An object of the present invention is to provide a magnetic recording medium that has improved the above-mentioned drawbacks, that is, a magnetic recording medium that has excellent lubricity, particularly excellent repeated friction characteristics, and excellent electromagnetic conversion characteristics.

〔発明の構成〕[Structure of the invention]

本発明は、非磁性支持体上に強磁性金属薄膜を磁性層と
して有し、さらにその上にプラズマ重合膜を設けてなる
磁気記録媒体において、該強磁性金属薄膜表面に高さ!
0〜≠00^の突起が1000万〜rooo万個/罷2
存在していることを特徴とする磁気記録媒体に関する。
The present invention provides a magnetic recording medium having a ferromagnetic metal thin film as a magnetic layer on a nonmagnetic support, and further provided with a plasma polymerized film thereon.
10 million to rooo million protrusions from 0 to ≠00^/stain 2
The present invention relates to a magnetic recording medium characterized in that it exists.

本発明者等はプラズマ重合保護膜を設けてなる金属薄膜
型磁気記録媒体の潤滑性改良について鋭意研究の結果、
上記微小突起を設けてなる強磁性金属薄膜表面上にプラ
ズマ重合膜を設けることにより繰返し摩擦におけるfr
4滑性が改良されることを見出し、本発明を達成した。
As a result of intensive research into improving the lubricity of metal thin film magnetic recording media provided with a plasma polymerized protective film, the present inventors found that
By providing a plasma polymerized film on the surface of the ferromagnetic metal thin film provided with the above-mentioned microprotrusions, fr
The present invention has been achieved based on the discovery that 4 lubricity is improved.

第1図は本発明による磁気記録媒体の構成を示している
。本発明による磁気記録媒体は適当な支持体l上に設け
られた強磁性金属薄膜λの表面に微小突起3が設けられ
ている。さらに強磁性金属薄膜コの上にはプラズマ重合
膜≠が設けられているものである。強磁性薄膜λ上に微
小突起3を形成させる方法としては金属合金、金属酸化
物、有機物等の微粒子あるいは微粒子状物あるいは島状
構造物を支持体上に、塗布、蒸着、スパッター、メッキ
、イオンプレーテング法、あるいはこれらとエツチング
、逆スノtツター1逆メッキ等との組合せの方法によっ
て形成せしめ、しかる後その上にメッキ、蒸着、ス/ぐ
ツタ−等の方法により強磁性金属薄膜を形成させて微小
突起を得る方法がある。さらに強磁性金属薄膜そのもの
の形成の際、形成条件の選択によシ直接微小突起を得る
方法あるいは強磁性金属薄膜の形成後イオンビームによ
る選択エッチ等により微小突起を得る方法等いずれでも
いい。本発明において微小突起の寸法は、種々検討の結
果高さくh)は10〜≠00^が好ましく、微小突起の
単位面積あたりの数p((In/−2)は/ 000万
〜rooo万個/n2が好ましい。
FIG. 1 shows the structure of a magnetic recording medium according to the present invention. The magnetic recording medium according to the present invention has minute protrusions 3 on the surface of a ferromagnetic metal thin film λ provided on a suitable support l. Further, a plasma polymerized film≠ is provided on the ferromagnetic metal thin film. Methods for forming microprotrusions 3 on the ferromagnetic thin film λ include coating, vapor deposition, sputtering, plating, ionization, and coating, vapor deposition, sputtering, plating, and ionization of fine particles, fine particulate matter, or island-like structures of metal alloys, metal oxides, organic substances, etc. onto a support. It is formed by a plating method, or a combination of these methods with etching, reverse snotter 1 reverse plating, etc., and then a ferromagnetic metal thin film is formed thereon by a method such as plating, vapor deposition, or sputtering. There is a method to obtain microprotrusions. Furthermore, when forming the ferromagnetic metal thin film itself, it is possible to obtain microprotrusions directly by selecting formation conditions, or by selectively etching with an ion beam after forming the ferromagnetic metal thin film. In the present invention, as a result of various studies, the dimensions of the microprotrusions are preferably 10 to ≠00^, and the number p ((In/-2) of microprotrusions per unit area is /0 million to rooo million). /n2 is preferred.

さらに微小突起の2次元的大きさくa)は!00〜コo
oo^が好ましい。
Furthermore, the two-dimensional size of the microprotrusion is a)! 00~koo
oo^ is preferable.

本発明における強磁性金属薄膜としては、鉄、コバルト
、ニッケルその他の強磁性金属、あるいはFe−Co5
 pe−Nis Co−Ni、 Fe−C□ −Ni、
Fe−Rh、Co−P、Co−BXCo−Cu。
The ferromagnetic metal thin film in the present invention may be made of iron, cobalt, nickel or other ferromagnetic metals, or Fe-Co5
pe-Nis Co-Ni, Fe-C□ -Ni,
Fe-Rh, Co-P, Co-BXCo-Cu.

Co−Zn、Co−Y、Co−La、Co−Ce、C。Co-Zn, Co-Y, Co-La, Co-Ce, C.

PrXCo  Gd、Co−8m、Co−Pi、Co−
MnXFe−Gd、 Fe−Tb、Fe−Cr、Co−
c、Ni−Cr、l;’e−co−Cr、Ni  Co
  Cr。
PrXCo Gd, Co-8m, Co-Pi, Co-
MnXFe-Gd, Fe-Tb, Fe-Cr, Co-
c, Ni-Cr, l;'e-co-Cr, Ni Co
Cr.

Fe−N1−CrXpe−co−Ni  c、co  
NiNdXCo  Ni  Ce、co−Ni−ZnX
c、−Ni  cu、co−Ni−wXCo  Ni 
 Re等の強磁性合金を電気メッキ、無電解メッキ、ペ
ーパーデポジション法等の方法によって薄膜状に形成し
たもので、その膜厚としては磁気記録媒体として使用す
る場合0.02〜λμmの範囲であり、特に0.0!〜
0.参μ専の範囲が望ましい。上記の強磁性金属薄膜は
他に0% Nz C% Ga)As)Sr、Zr、Nb
、Mo、Sn、Sb、Te、0ssIr% Au、 A
g、PbXB1  等を含有しても良い。ペーパーデポ
ジション法とは気体あるいは真空空間中において物質を
蒸気あるいはイオン化した蒸気とし、これを基体上に付
着形成させる方法をいい、真空蒸着法、スパッタリング
法、イオンプレーテング法、イオンビームデポジション
法、化学気相メッキ法などがある。
Fe-N1-CrXpe-co-Nic,co
NiNdXCo NiCe, co-Ni-ZnX
c, -Ni cu, co-Ni-wXCo Ni
A ferromagnetic alloy such as Re is formed into a thin film by electroplating, electroless plating, paper deposition method, etc. The film thickness is in the range of 0.02 to λμm when used as a magnetic recording medium. Yes, especially 0.0! ~
0. Reference μ-specialized range is preferable. The above ferromagnetic metal thin film also contains 0% Nz C% Ga) As) Sr, Zr, Nb
, Mo, Sn, Sb, Te, 0ssIr% Au, A
g, PbXB1, etc. may be contained. Paper deposition method refers to a method in which a substance is turned into vapor or ionized vapor in a gas or vacuum space and is deposited on a substrate, and includes vacuum evaporation method, sputtering method, ion plating method, and ion beam deposition method. , chemical vapor phase plating, etc.

本発明に用いられる非磁性支持体としては、ポリエチレ
ンテレフタレート、ポリイミド、ポリアミド、ポリ塩化
ビニル、三酢酸セルロース、ポリカーボネート、ポリエ
チレンナフタレート、ポリフェニレンサルファイド等の
プラスチックベース、またはAJ、Ti、およびこれら
の合金、ステンレス鋼等である。
Non-magnetic supports used in the present invention include plastic bases such as polyethylene terephthalate, polyimide, polyamide, polyvinyl chloride, cellulose triacetate, polycarbonate, polyethylene naphthalate, and polyphenylene sulfide, or AJ, Ti, and alloys thereof; Stainless steel etc.

本発明におけるプラズマ重合膜とは、有機モノマーガス
をDC,AC,高周波、マイクロ波等で誘起された放電
によるプラズマ中で強磁性金属薄膜上に重合形成させた
有機高分子材料の膜をいう。
The plasma polymerized film in the present invention refers to a film of an organic polymer material formed by polymerizing an organic monomer gas on a ferromagnetic metal thin film in plasma caused by discharge induced by DC, AC, high frequency, microwave, or the like.

この際、有機モノマーガスを直接イオン化してもいいし
、Ars He% 02、N2、N2等のガス放電中に
有機上ツマーガスを導入させてもいい。
At this time, the organic monomer gas may be directly ionized, or an organic monomer gas such as Ars He% 02, N2, N2, etc. may be introduced during gas discharge.

プラズマ重合時系の圧力は/〜10  Torrが好ま
しい。本発明におけるプラズマ重合膜の厚さは20〜参
〇〇又の範囲が好ましく特に20−コθ0^が好ましい
。有機モノマーガスとしては、テトラフロロメタン、テ
トラフロロエチレン、ヘキサフロロエタン、ノに一70
ロプロパン、オクタフロロシクロブタン、メタン、エチ
レン、プロピレン、スチレン、ビニルクロライド、スチ
レン、クロロベンゼン、ジメチルシロキサン、ヘキサメ
チルジシラザン、ジエチルアミノトリメチル7ラン等が
単独もしくは混合で使用される。
The pressure during plasma polymerization is preferably 10 Torr. The thickness of the plasma polymerized film in the present invention is preferably in the range of 20 to 300 mm, particularly preferably 20 mm. Organic monomer gases include tetrafluoromethane, tetrafluoroethylene, hexafluoroethane, and
Ropropane, octafluorocyclobutane, methane, ethylene, propylene, styrene, vinyl chloride, styrene, chlorobenzene, dimethylsiloxane, hexamethyldisilazane, diethylaminotrimethyl 7rane, etc. are used alone or in combination.

さらに本発明においては、強磁性金属薄膜は単層あるい
は2層以上の多層構成としてもよい。
Further, in the present invention, the ferromagnetic metal thin film may have a single layer or a multilayer structure of two or more layers.

強磁性薄膜を積層して設ける場合には間に非磁性層を介
在させても良い。非磁性中間層として好ましいのはcr
XS i、ACMn、 Bi、’ri。
When ferromagnetic thin films are laminated, a nonmagnetic layer may be interposed between them. Preferred as the non-magnetic intermediate layer is cr.
XS i, ACMn, Bi,'ri.

5nXPb、In、ZnXCuあるいはこれらの酸化物
、窒化物より構成される層である。また上記非磁性層を
強磁性薄膜の下地層として基体上に設けても良い。
This layer is made of 5nXPb, In, ZnXCu, or their oxides or nitrides. Further, the nonmagnetic layer may be provided on the substrate as an underlayer of a ferromagnetic thin film.

非磁性支持体の両面に磁性膜を設けてもよく、また非磁
性支持体の裏側にいわゆるパック層を設けるようにして
もよい。
A magnetic film may be provided on both sides of the non-magnetic support, or a so-called pack layer may be provided on the back side of the non-magnetic support.

〔実施例〕〔Example〕

次に実施例をもって本発明を具体的に説明するが本発明
はこれらに限定されるものではない。
EXAMPLES Next, the present invention will be specifically explained with reference to Examples, but the present invention is not limited thereto.

実施例L ?、jμm厚のポリエチレンテレフタレートフィルムの
表面に、各種サイズの炭酸カルシウム微粒子を下記結合
剤組成に分散せしめた液を塗布し喪。
Example L? A liquid containing calcium carbonate fine particles of various sizes dispersed in the following binder composition was applied to the surface of a polyethylene terephthalate film with a thickness of jμm.

溶剤としてはメチルエチルケトンを使用し、炭酸カルシ
ウム粉末の塗布密度を変えるため種々の希釈度にて塗布
を実施した。こうして得られた下塗りフィルム上に連続
蒸着機を用いてCoNi強磁性強磁性薄膜CN1量0 を斜め蒸着法により膜厚/100^として形成させ数種
の磁気テープ原反を作成した。得られた磁気テープの強
磁性金属薄膜の表面には微小突起が形成されておシ、そ
の高さくh)は下m9層から突出した炭酸カルシウム微
粒子の突出高さにほぼ等しく、その2次元寸法(a)は
下塗υ層からの突出炭酸カルシウム微粒子のλ次元寸法
の略コ。
Methyl ethyl ketone was used as the solvent, and coating was performed at various dilutions to vary the coating density of the calcium carbonate powder. On the undercoat film obtained in this manner, a CoNi ferromagnetic thin film of CN10 was formed by an oblique vapor deposition method using a continuous vapor deposition machine to a film thickness of /100^ to prepare several kinds of magnetic tape original fabrics. Microscopic protrusions are formed on the surface of the ferromagnetic metal thin film of the obtained magnetic tape, and their height h) is approximately equal to the protruding height of the calcium carbonate fine particles protruding from the lower m9 layer, and their two-dimensional dimension is (a) is an abbreviation of the λ-dimensional dimension of calcium carbonate fine particles protruding from the undercoat υ layer.

コ倍になっていみ。次に連続プラズマ重合装置を用い上
記CoNi強磁性薄膜の上に膜厚コoogとなるようプ
ラズマ重合膜を設けて磁気記録媒体を作製した。プラズ
マ重合膜の形成はメタンおよびテト,770ロメタンの
l:lの混合ガスを圧力!xlO  Torr 中コo
oWの高周波放電によりプラズマ重合させて行なった。
Try becoming twice as big. Next, using a continuous plasma polymerization apparatus, a plasma polymerized film was provided on the CoNi ferromagnetic thin film so as to have a film thickness of 000 g to produce a magnetic recording medium. To form a plasma polymerized film, pressurize a 1:1 mixed gas of methane, tet, and 770 romethane! xlO Torr
Plasma polymerization was performed using oW high frequency discharge.

こうして得られた磁気記録媒体の表面には高さくh)、
密度(p)が磁性膜表面と同じ微小突起が保たれていた
The surface of the magnetic recording medium thus obtained has a height h),
Microprotrusions with the same density (p) as the magnetic film surface were maintained.

比較例り 実施例1においてポリエチレンテレフタレートフィルム
に下塗り層を設けず直接強磁性金属薄膜を形成させ、そ
の表面に微小突起を設けずに、プラズマ重合膜を厚み2
00大、!00^形成させたサンプルを゛作製した。
Comparative Example In Example 1, a ferromagnetic metal thin film was directly formed on a polyethylene terephthalate film without providing an undercoat layer, and a plasma polymerized film was formed to a thickness of 2 without providing microprotrusions on the surface.
00 big! A sample of 00^ was prepared.

こうして得られ九原反をrwx.幅にスリットし次の方
法にて繰返し摩擦特性および電磁変換特性を測定した。
The thus obtained Kuhara fabric is rwx. A widthwise slit was made and the repeated friction characteristics and electromagnetic conversion characteristics were measured using the following method.

l,繰返し摩擦特性 SUS 4!λOJのステンレス棒に対する走行速度1
4AWm/3ecでの1回目走行および2QQ回走行さ
せた時の摩擦係数μを調べた。
l, Repeated friction characteristics SUS 4! Traveling speed 1 for λOJ stainless steel rod
The friction coefficient μ was investigated during the first run at 4AWm/3ec and after running 2QQ times.

2、電磁変換特性 ImVTR(富士写真フィルム■製FUJIX−rm7
 )を用いてjMHzのビデオ信号の再生出力信号を上
記1回走行後お,よび200回走行後の場合について測
定した。
2. Electromagnetic conversion characteristics ImVTR (FUJIX-rm7 manufactured by Fuji Photo Film)
) was used to measure the playback output signal of the jMHz video signal after one run and after 200 runs.

結果は表7およびλに示すごとくであった。The results were as shown in Table 7 and λ.

このように高さto−4too^、密度1000万〜r
ooo万コ/細2の微小突起を設けてなるCoNi蒸着
磁性膜上にメタンおよびテトラフロロメタン混合ガスの
プラズマ重合膜を有する磁気記録媒体は繰返し摩擦にす
ぐれ、ビデオ信号再生出力特性にもすぐれるものである
In this way, the height is to-4too^, the density is 10 million to r
A magnetic recording medium having a plasma-polymerized film of methane and tetrafluoromethane mixed gas on a CoNi vapor-deposited magnetic film with minute protrusions of 2 mm/thin size has excellent resistance to repeated friction and excellent video signal reproduction output characteristics. It is something.

実施例2 12、jμm厚のポリイミドフィルム上に各種サイズの
酸化ケイ素微粒子を実施例1と同様の結合剤組成に分散
せしめた液を塗布した。溶剤としてはメチルエチルケト
/を使用し酸化ケイ素粉末の塗布密度をかえるため種々
の希釈度にて塗布を実施した。こうして得られた下塗ク
フイルム上に連続蒸着機を用いてCoCr合金(C:7
10重量%)よυ成る膜厚/100^の強磁性薄膜を形
成させ種々の磁気テープ原反を作成した。次に連続プラ
ズマ重合装置を用い上記C0Cr強磁性薄膜上に膜厚/
50^となるようプラズマ重合膜を形成させ磁気記録媒
体を作製した。プラズマ重合膜としてはスチレンをプラ
ズマ重合させたものを実施例1と同条件で形成した。実
施例!とrfiJ様にして繰返し摩擦での潤滑性、およ
び電磁変換%性を測定したところ表3に示すごとくてら
った。
Example 2 A liquid in which silicon oxide fine particles of various sizes were dispersed in the same binder composition as in Example 1 was applied onto a polyimide film with a thickness of 12 μm. Methyl ethyl keto/ was used as the solvent, and coating was carried out at various dilutions in order to change the coating density of the silicon oxide powder. CoCr alloy (C:7
A ferromagnetic thin film having a film thickness of 10% by weight/100^ was formed to prepare various magnetic tape materials. Next, using a continuous plasma polymerization device, the film thickness /
A magnetic recording medium was fabricated by forming a plasma polymerized film so that the magnetic flux was 50^. The plasma polymerized film was formed by plasma polymerizing styrene under the same conditions as in Example 1. Example! The lubricity under repeated friction and the electromagnetic conversion ratio were measured using RFIJ, and the results were as shown in Table 3.

このように高さ!O〜4tool、密度1000万〜r
ooo万個/、2の微小突起を有するCoCr蒸着fi
i性膜表面上にスチレンのプラズマ重合膜を形成してな
る磁気記録媒体は繰返し摩擦潤滑性にすぐれ、ビデオ信
号再生出力特性にもすぐれるものである。
Like this height! O~4tool, density 10 million~r
CoCr vapor deposited fi with oooo million pieces/2 microprotrusions
A magnetic recording medium formed by forming a plasma-polymerized styrene film on the surface of an i-based film has excellent repeated friction lubricity and excellent video signal reproduction output characteristics.

〔発明の効果〕〔Effect of the invention〕

本発明の磁気記録媒体は、繰返し摩擦における潤滑性お
よび電磁変換特性にすぐれるもので、従来より改良され
た金属薄膜型磁気記録媒体が得られるものである。
The magnetic recording medium of the present invention has excellent lubricity in repeated friction and electromagnetic conversion characteristics, and provides a metal thin film type magnetic recording medium that is improved over conventional magnetic recording media.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明による磁気記録媒体の基本的構成を示し
ている。 /・・・・・・支持体 コ・・・・・・強磁性金属薄膜 3・・・・・・微小突起 ≠・・−・・・プラズマ重合膜 特許請求人 富士写真フィルム株式会社第1 図
FIG. 1 shows the basic structure of a magnetic recording medium according to the present invention. /...Support...Ferromagnetic metal thin film 3...Minute protrusions≠...Plasma polymerized film Patent claimant Fuji Photo Film Co., Ltd. Figure 1

Claims (1)

【特許請求の範囲】[Claims] 非磁性支持体上に強磁性金属薄膜およびその上にプラズ
マ重合膜を設けてなる磁気記録媒体において、該強磁性
金属薄膜表面に高さ50〜400Åの突起が1,000
万〜8,000万個/mm^2存在していることを特徴
とする磁気記録媒体。
In a magnetic recording medium comprising a ferromagnetic metal thin film on a non-magnetic support and a plasma polymerized film thereon, 1,000 protrusions with a height of 50 to 400 Å are formed on the surface of the ferromagnetic metal thin film.
A magnetic recording medium characterized in that there are 10,000 to 80 million pieces/mm^2.
JP14111485A 1985-06-27 1985-06-27 Magnetic recording medium Pending JPS623417A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14111485A JPS623417A (en) 1985-06-27 1985-06-27 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14111485A JPS623417A (en) 1985-06-27 1985-06-27 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS623417A true JPS623417A (en) 1987-01-09

Family

ID=15284484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14111485A Pending JPS623417A (en) 1985-06-27 1985-06-27 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS623417A (en)

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