JPS6233753A - Control method for atmospheric gas - Google Patents
Control method for atmospheric gasInfo
- Publication number
- JPS6233753A JPS6233753A JP17219085A JP17219085A JPS6233753A JP S6233753 A JPS6233753 A JP S6233753A JP 17219085 A JP17219085 A JP 17219085A JP 17219085 A JP17219085 A JP 17219085A JP S6233753 A JPS6233753 A JP S6233753A
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- air
- oxygen
- material gas
- supplied
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Abstract
Description
【発明の詳細な説明】
〔卒業上の利用分野〕
° 本発明は変成炉を使用せず、原料ガスとエアーある
いは酸素等を直接炉内に供給して熱処理を行う場合に特
に有効な雰囲気ガスの制御方法に関するもので、扉開閉
時あるいは扉シール部からのエアーの侵入を完全に阻止
する必要がなく、したがってＳ部を完全シール１造とす
る必要がな（、経済的であり−さらに雰囲気の乱れを防
止できるものである。[Detailed Description of the Invention] [Graduation Field of Application] ° The present invention provides an atmospheric gas that is particularly effective when heat treatment is performed by supplying raw material gas and air or oxygen directly into the furnace without using a shift furnace. It is related to the control method of the door, and it is not necessary to completely prevent air from entering when opening/closing the door or from the door seal part, so there is no need to make the S section completely sealed (it is economical - and it also reduces the atmosphere). It is possible to prevent the disturbance of
近時、変成ｒを［・Ｊ！川することなく、原料ガスとエ
アーあるいは酸素等Ｃ以下単にエアーという。）を直接
炉内に供給して熱処理を行う方法が提供されている（例
えば特開昭５１−７０１３６号公報）。Recently, metamorphosis r [・J! The raw material gas and air or oxygen, etc. are simply referred to as air. ) is directly supplied into a furnace for heat treatment (for example, Japanese Patent Laid-Open No. 70136/1983).
上記方法は炉内に供給されたブタン（０４ＺＨ１０）。The above method uses butane (04ZH10) fed into the furnace.
メタン（ＯＨ，）等の原料ガス（炭化水素ガス）の熱分
解及びエアー中の酸素によりＣＯ、ａ−生成され。CO, a- is produced by thermal decomposition of raw material gas (hydrocarbon gas) such as methane (OH) and oxygen in the air.
該ＣＯにより浸炭が行われるものであるが、従来の一般
的方法、すなわち−い内雰囲気の乱れあるいは爆発等の
危険を防止するために炉内雰囲気が１時間あたり、５〜
ｌＯ回置換えられるようにエンドサーミツクガス（〉の
キャリアーガスを大量に供給して炉内圧を保ち、さらに
必要に応じてエンリッチガスを供給する關合と異り。Carburizing is carried out using the CO, but the conventional general method is that the atmosphere inside the furnace is heated at a rate of 5 to 50% per hour to prevent disturbances in the furnace atmosphere or dangers such as explosions.
This is different from the case where a large amount of endothermic gas (>) carrier gas is supplied to maintain the furnace pressure so that it can be replaced 10 times, and enrichment gas is further supplied as necessary.
炉内への供給ガス量が極端に少いため、被処理品の装入
、＠送等のため入口扉、中間扉、出口扉の開閉が行われ
ると、炉内が負圧となり、扉部及び扉シール部等からエ
アーが吸込まれる現象があった。Since the amount of gas supplied into the furnace is extremely small, when the inlet door, intermediate door, and outlet door are opened and closed for charging, transporting, etc. to be processed, the inside of the furnace becomes negative pressure, and the door and There was a phenomenon where air was sucked in from the door seal, etc.
その結果、炉内の酸素濃度が必要以上となり。As a result, the oxygen concentration in the furnace becomes higher than necessary.
雰囲気が乱されるものであった。The atmosphere was disturbed.
上記問題点を解決するためには炉構造を完全シール構造
とすること等が考えられるが、実際上は極めて困難で高
価となり、さらには扉開閉時のエアー侵入はさけがたい
ものであった。In order to solve the above-mentioned problems, it is conceivable to make the furnace structure completely sealed, but this would be extremely difficult and expensive in practice, and furthermore, air intrusion when opening and closing the door was unavoidable.
本発明は上記扉開閉時あるいは扉シール部等からのエア
ー侵入を予め見込んで炉内に供給するエアー量を減少１
５制御するものであり、雰囲気の乱れを防止できるもの
であり、さらに、上記扉シール部等は従来の炉と同程度
に比較的ラフな構成でよく、経済的であるものである、
〔問題点を解決するための手段〕
上記問題点を解決するため１本発明は炉内に定」の原料
ガスを供給し、炉内に配置した酸素センサーにより扉開
閉時あるいは扉シール部から浸入したエアー量を検出し
、該検出信号により炉内へのエアー供給量を減少制御す
る構成としたものである。The present invention reduces the amount of air supplied to the furnace in advance by anticipating the air entering when opening/closing the door or from the door seal part, etc.
5. It is possible to control the atmosphere and prevent disturbance of the atmosphere, and furthermore, the door seal part etc. need only have a relatively rough construction similar to that of conventional furnaces, and it is economical.
[Means for Solving the Problems] In order to solve the above problems, the present invention supplies a constant raw material gas into the furnace, and uses an oxygen sensor placed in the furnace to detect gas entering the furnace when the door is opened or closed or from the door seal. The amount of air supplied into the furnace is controlled to be reduced based on the detection signal.
本発明によれば、原料ガスの供給が常に定量とされる。 According to the present invention, the raw material gas is always supplied in a constant quantity.
したがって、炉内に入る時間当りのガス量が一定となり
、炉内雰囲気の安定化が図られる。Therefore, the amount of gas entering the furnace per hour becomes constant, and the atmosphere inside the furnace is stabilized.
すなわち、炉内雰囲気は上記原料ガスの供給量によって
も制御することも可能であるが、その場合には扉部等の
シールが悪い時にはガスの供給量を増し、上記シールが
良い時には原料ガスの供給量を減する等の操作が必要と
なり、炉内に入る時間当りのガス量が一定とならずした
がって、エアー供給量も制御しなければならず。In other words, the atmosphere inside the furnace can also be controlled by the amount of raw material gas supplied, but in that case, if the seal on the door etc. is poor, the gas supply amount is increased, and if the seal is good, the amount of raw material gas is increased. Operations such as reducing the supply amount are required, and the amount of gas entering the furnace per hour is not constant, so the air supply amount must also be controlled.
正確な雰囲気制御が困難である。Accurate atmosphere control is difficult.
しかし１本発明のごとく、炉内に常に定量の原料ガスを
供給することにすれば、侵入エアーを含めて原料ガス量
に見合うエアーのみを供給すればよ（制御が極めて容易
となるものである。However, if a fixed amount of raw material gas is always supplied into the furnace as in the present invention, only the air that matches the amount of raw material gas, including the intruding air, needs to be supplied (control is extremely easy). .
図中ｆｉｌは雰囲気熱処理炉、（２）は原料ガス源。 In the figure, fil is an atmospheric heat treatment furnace, and (2) is a raw material gas source.
（３）は原料ガスの供給配管、（４）はエアー源、（５
）はエアーの供給源管である。(3) is the raw material gas supply pipe, (4) is the air source, (5
) is the air supply source pipe.
また、（６）は炉内に配置された酸素センサーであり、
炉内の酸素分圧に応じて生じた起電力が炉外に信号とし
て引き出され、熱電対（７）による炉内温度信号ととも
に調節計（８）に導入される。In addition, (6) is an oxygen sensor placed in the furnace,
An electromotive force generated according to the oxygen partial pressure inside the furnace is extracted as a signal outside the furnace, and is introduced into a controller (8) together with an inside temperature signal from a thermocouple (7).
なお、（９）は調節計（８）により制御駆動される・エ
アー供給用のモータである。Note that (9) is an air supply motor that is controlled and driven by the controller (8).
本発明の方法では原料ガス源（２）から、その供給管路
（３）を介して定量の原料ガスが常に炉内に供給される
。In the method of the present invention, a fixed amount of raw material gas is always supplied into the furnace from a raw material gas source (2) through its supply pipe (3).
一方、酸素センサー（６）からの起電力と熱電対（７）
で測定された炉内温度により、炉内酸素分圧が求められ
る。On the other hand, the electromotive force from the oxygen sensor (6) and the thermocouple (7)
The oxygen partial pressure inside the furnace can be determined from the temperature inside the furnace measured at .
そして、調節計（８）内において、定量供給されている
原料ガスに対する必要エアー量と炉内酸素量が比較演算
され、不足分のみエアー供給用のモータ（９）が制御駆
動させられて炉内に必要量のエアーが供給されて雰囲気
の安定化が図られるものである。Then, in the controller (8), the amount of air required for the raw material gas that is being supplied at a constant rate is compared with the amount of oxygen in the furnace, and the air supply motor (9) is controlled and driven to compensate for the shortage. The required amount of air is supplied to stabilize the atmosphere.
上記本発明の方法によれば、炉内の酸素濃度が必要以上
となって雰囲気が乱されることもなＩ＋１゜
すなわち、通常の浸炭炉を使用した実験では必要酸素量
の略半分近くが扉開閉あるいは扉シール部から侵入して
おり、原料ガスに対する必要エアー量の半分を外部、す
なわち、エアー供給用のモータ（９）により供給するこ
とになるためである。According to the above-mentioned method of the present invention, the oxygen concentration in the furnace does not exceed the necessary level and the atmosphere is not disturbed. This is because the air enters through the opening/closing or door seal portion, and half of the amount of air required for the raw material gas is supplied externally, that is, by the air supply motor (9).
本発明によれば、変成炉を使用せず、直接炉内に原料ガ
スとエアー等を供給して行う熱処理において炉内が負圧
になってエアー等が侵入しても、それを有効に利用して
雰囲気の乱れを防止できるとともに、炉構造を完全シー
ル構造等とする必要がな（、従来炉を使用して上記熱処
理を行うことができ、経済的であるものである。According to the present invention, even if the inside of the furnace becomes negative pressure and air etc. enters during heat treatment performed by supplying raw material gas and air directly into the furnace without using a shift furnace, it can be effectively utilized. It is possible to prevent disturbance of the atmosphere, and there is no need for the furnace structure to have a completely sealed structure (the above heat treatment can be performed using a conventional furnace, which is economical).
図面は本発明の一実施例を示すもので、その回路図であ
る。
（１）・・・雰囲気熱処理炉、（２）・・・原料ガス源
。
（４）・・・エアー源、（６）・・・酸素センサー、（
９）・・・エアー供給用のモータ。The drawing shows one embodiment of the present invention and is a circuit diagram thereof. (1)... Atmosphere heat treatment furnace, (2)... Raw material gas source. (4)...Air source, (6)...Oxygen sensor, (
9)...Air supply motor.
Claims (1)
ンサーにより扉開閉時あるいは扉シール部から侵入する
酸素濃度を検出し、該検出信号により炉内へのエアー供
給量を減少制御することを特徴とする雰囲気ガスの制御
方法。A fixed amount of raw material gas is supplied into the furnace, and an oxygen sensor placed inside the furnace detects the oxygen concentration when the door is opened/closed or enters from the door seal, and the amount of air supplied to the furnace is controlled to be reduced based on the detection signal. A method for controlling atmospheric gas, characterized in that:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17219085A JPS6233753A (en) | 1985-08-05 | 1985-08-05 | Control method for atmospheric gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17219085A JPS6233753A (en) | 1985-08-05 | 1985-08-05 | Control method for atmospheric gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6233753A true JPS6233753A (en) | 1987-02-13 |
Family
ID=15937242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17219085A Pending JPS6233753A (en) | 1985-08-05 | 1985-08-05 | Control method for atmospheric gas |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6233753A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1992005295A1 (en) * | 1986-08-12 | 1992-04-02 | Nobuo Nishioka | Gas carburizing process and apparatus |
| US5596214A (en) * | 1994-05-30 | 1997-01-21 | Nec Corporation | Non-volatile semiconductor memory device having a metal-insulator-semiconductor gate structure and method for fabricating the same |
| JP2009231844A (en) * | 2009-04-27 | 2009-10-08 | Toshiba Corp | Nonvolatile semiconductor storage device, and manufacturing method thereof |
| US8253183B2 (en) | 2001-06-28 | 2012-08-28 | Samsung Electronics Co., Ltd. | Charge trapping nonvolatile memory devices with a high-K blocking insulation layer |
| US9761314B2 (en) | 2001-06-28 | 2017-09-12 | Samsung Electronics Co., Ltd. | Non-volatile memory devices and methods of operating the same |
-
1985
- 1985-08-05 JP JP17219085A patent/JPS6233753A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1992005295A1 (en) * | 1986-08-12 | 1992-04-02 | Nobuo Nishioka | Gas carburizing process and apparatus |
| US5596214A (en) * | 1994-05-30 | 1997-01-21 | Nec Corporation | Non-volatile semiconductor memory device having a metal-insulator-semiconductor gate structure and method for fabricating the same |
| US8253183B2 (en) | 2001-06-28 | 2012-08-28 | Samsung Electronics Co., Ltd. | Charge trapping nonvolatile memory devices with a high-K blocking insulation layer |
| US9761314B2 (en) | 2001-06-28 | 2017-09-12 | Samsung Electronics Co., Ltd. | Non-volatile memory devices and methods of operating the same |
| JP2009231844A (en) * | 2009-04-27 | 2009-10-08 | Toshiba Corp | Nonvolatile semiconductor storage device, and manufacturing method thereof |
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