JPH0417626A - Method for controlling atmosphere gas for batch annealing furnace - Google Patents

Method for controlling atmosphere gas for batch annealing furnace

Info

Publication number
JPH0417626A
JPH0417626A JP12232890A JP12232890A JPH0417626A JP H0417626 A JPH0417626 A JP H0417626A JP 12232890 A JP12232890 A JP 12232890A JP 12232890 A JP12232890 A JP 12232890A JP H0417626 A JPH0417626 A JP H0417626A
Authority
JP
Japan
Prior art keywords
gas
atmosphere gas
annealing
atmospheric gas
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12232890A
Other languages
Japanese (ja)
Inventor
Tsutomu Kitamura
北村 務
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP12232890A priority Critical patent/JPH0417626A/en
Publication of JPH0417626A publication Critical patent/JPH0417626A/en
Pending legal-status Critical Current

Links

Landscapes

  • Heat Treatment Of Strip Materials And Filament Materials (AREA)

Abstract

PURPOSE:To reduce the amt. of the atmosphere gas to be used in batch annealing furnaces for adjusting the atmosphere by detecting the impurity concn, in the atmosphere gas of the furnaces and the dew point thereof in a discharge line for the atmosphere gas and returning a part of the atmosphere gas to the annealing furnaces by the results thereof. CONSTITUTION:The high-purity atmosphere gas is supplied by a supply line 30 having a check valve 20 to the plural batch annealing furnaces 10 and is then discharged into the atm. by the discharge line 40 via diffusion valves 70 after annealing treatments. The atmosphere gas contains a large amt. of impurities therein at the beginning of the annealing in this case but the amt. of the impurities decreases on progression of the annealing and attains the purity and quality to permit reuse; therefore, the concn. and dew point of O2, N2, etc., as the impurities in the discharged atmosphere gas are measured by meters 60 provided in branches of the discharge line 40 for the atmosphere gas of the respective annealing furnaces. The possibility for the reuse of the discharge gas from the measured values is decided and recovery valves 80 of the discharge line are opened by controllers 100 to supply the gas again to the atmosphere supplying line 30 by a recovering line 50 from the point of the time the discharge gas becomes reusable. The discharge gas is thus reused as the atmosphere gas in the batch annealing furnaces 10. The consumption unit of the high-purity atmosphere gas is thus reduced.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、雰囲気ガスの再利用を図るバッチ式焼鈍炉に
おける雰囲気ガス制御方法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an atmospheric gas control method in a batch annealing furnace that aims to reuse atmospheric gas.

〔従来の技術] 従来より、材料表面のi化、窒化、脱炭等が許されない
焼鈍を行う場合(−は、N、、AX (アンモニア分解
ガス)、H25,へr等を雰囲気ガスとし7て用いる間
接加熱方式すた(す電気加熱方−り・・′ッチ式焼鈍炉
が多用されている。この方式の焼鈍炉では、炉内または
マンフル内に雰囲気ガスを導入しながら所定の加熱冷却
が行われる。導入された雰囲気ガスは、炉内またはマン
フル内の圧力を一定に保ちながら放散管を通して逐一大
気放散される。
[Prior art] Conventionally, when performing annealing that does not allow i-hardening, nitriding, decarburization, etc. of the material surface (- means N, AX (ammonia decomposition gas), H25, Herr, etc. as the atmospheric gas7). An indirect heating method (electric heating method) is often used.In this type of annealing furnace, the specified heating is performed while introducing atmospheric gas into the furnace or manifold. Cooling is performed.The introduced atmospheric gas is gradually released into the atmosphere through a diffusion tube while keeping the pressure in the furnace or mantle constant.

〔発明が解決しようとする課題] ここで使用される雰囲気ガスは、最近は、焼鈍材の高級
化、表面清浄度の向上に対する要望に伴い、高純度なも
のに切り替わっている。そのため、高純度な雰囲気ガス
の大気放散に伴う焼鈍コストの上昇が大きな問題になっ
てきている。
[Problems to be Solved by the Invention] Recently, the atmospheric gas used here has been switched to a high-purity gas due to the demand for higher quality annealing materials and improved surface cleanliness. Therefore, an increase in annealing cost due to the release of high-purity atmospheric gas into the atmosphere has become a major problem.

高純度ガスを雰囲気ガスとして使用する間接加熱方式ま
たは電気加熱方式のバッチ式焼鈍炉でのガス節減対策と
しては、雰囲気ガスが可燃性ガスの場合にそのガスの一
部を炉内に直接またはバーナを介して吹き込んで燃焼放
散させることが行われている。しかしながら、この対策
は、雰囲気ガスが不燃性ガスの場合には採用できないだ
けでなく、採用が可能な場合にあっても回収できる熱量
はわずかであり、放散雰囲気ガスの単価ムこ見合う効果
を挙げるには至っていない。
As a measure to save gas in an indirect heating type or electric heating type batch type annealing furnace that uses high-purity gas as the atmosphere gas, if the atmosphere gas is a flammable gas, some of the gas can be pumped directly into the furnace or through a burner. This is done by blowing it in through the air to burn and dissipate it. However, this measure cannot be adopted when the atmospheric gas is nonflammable, and even if it is possible, the amount of heat that can be recovered is small, and the effect is not worth the unit price of the diffused atmospheric gas. This has not yet been achieved.

また、雰囲気ガスが発熱型ガスと吸熱型ガスとの混合ガ
スの場合に、炉内から排出される雰囲気ガスに炭化水素
系燃料と空気とを添加し、燃焼により雰囲気ガスを再生
して炉内に再供給する方法が、特開昭58−11782
2号公報に開示されているが、雰囲気ガスとして高純度
の単一ガスを使用する間接加熱方式または電気加熱方式
のバッチ式焼鈍炉にこの方法が採用できないことは言う
までもない。
In addition, when the atmospheric gas is a mixture of exothermic gas and endothermic gas, hydrocarbon fuel and air are added to the atmospheric gas discharged from the furnace, and the atmospheric gas is regenerated by combustion. A method of resupplying the
Although this method is disclosed in Publication No. 2, it goes without saying that this method cannot be applied to an indirect heating type or electric heating type batch type annealing furnace that uses a single high-purity gas as an atmosphere gas.

本発明の目的は、可燃性、不燃性を問わず、高純度の雰
囲気ガスが使用される場合に顕著なガス節減効果が得ら
れ、しかも品質低下の懸念がないバッチ焼鈍炉における
雰囲気ガス制御方法を提供することにある。
An object of the present invention is to provide a method for controlling atmospheric gas in a batch annealing furnace, which achieves a remarkable gas saving effect when a high-purity atmospheric gas is used, regardless of whether it is flammable or non-flammable, and which eliminates the risk of quality deterioration. Our goal is to provide the following.

〔課題を解決するための手段〕[Means to solve the problem]

本発明の雰囲気ガス制御方法は、雰囲気調整を行うバッ
チ焼鈍炉において、雰囲気ガスの排出系路で雰囲気ガス
の不純物濃度および露点を検出し、これらの検出値が予
め設定した基準値以下になった時点で、雰囲気ガスの排
出系路から供給系路へ雰囲気ガスの一部を還流させるこ
とを特徴としてなる。
The atmospheric gas control method of the present invention detects the impurity concentration and dew point of the atmospheric gas in the atmospheric gas exhaust system in a batch annealing furnace that performs atmosphere adjustment, and detects the impurity concentration and dew point of the atmospheric gas when these detected values become below a preset reference value. At this point, a part of the atmospheric gas is recirculated from the atmospheric gas exhaust line to the supply line.

(作  用〕 高純度の雰囲気ガスを使用してバッチ焼鈍を行う場合、
炉から排出される雰囲気ガスは、焼鈍当初は多量の不純
物を含むが、焼鈍の進行につれて不純物量が減少し、再
使用可能な純度、品質に達する0本発明の雰囲気ガス制
御方法は、炉から排出される雰囲気ガスの不純度濃度お
よび露点から、そのガスが再使用可能か否かを判断し、
再使用が可能になった時点より、そのガスの一部または
全部を雰囲気ガスとして再使用するものである。
(Function) When performing batch annealing using high-purity atmospheric gas,
The atmospheric gas discharged from the furnace contains a large amount of impurities at the beginning of annealing, but as the annealing progresses, the amount of impurities decreases and reaches a purity and quality that can be reused. Based on the impurity concentration and dew point of the exhausted atmospheric gas, it is determined whether the gas can be reused or not.
From the point at which reuse becomes possible, part or all of the gas is reused as atmospheric gas.

このとき、雰囲気ガスの露点を検出するのは、雰囲気中
の不純物の1つである水薫気の分圧を露点値に代用して
検出するためである。
At this time, the dew point of the atmospheric gas is detected by substituting the partial pressure of water smoke, which is one of the impurities in the atmosphere, for the dew point value.

本発明のガス制御方法では、雰囲気ガスの再使用により
ガス原単位の低減が可能になると共に、雰囲気ガスの再
使用に伴う焼鈍材の品質低下の懸念がない。また、炉か
ら排出される雰囲気ガスの不純物濃度が低下した段階で
は、雰囲気ガスの供給量を絞ることによってガス原単位
を改善できるが、その場合には、炉内圧力の低下が生し
、炉内に外気が吸収されて着色欠陥等を生しる0本発明
の雰囲気ガス制御方法では、ガスi!i減が実施された
以降も炉内圧力低下の懸念がないだけでなく、炉内への
雰囲気ガス供給量を増すことができ、炉内圧力確保によ
る品質保証も可能になる。
In the gas control method of the present invention, the gas consumption rate can be reduced by reusing the atmospheric gas, and there is no concern that the quality of the annealed material will deteriorate due to the reuse of the atmospheric gas. In addition, at the stage when the impurity concentration of the atmospheric gas discharged from the furnace has decreased, the gas consumption rate can be improved by reducing the supply amount of atmospheric gas, but in that case, the pressure inside the furnace will decrease and the In the atmospheric gas control method of the present invention, the gas i! Not only is there no concern that the pressure inside the furnace will drop even after the i-reduction is implemented, but the amount of atmospheric gas supplied to the inside of the furnace can be increased, and quality assurance can be achieved by ensuring the pressure inside the furnace.

〔実施例〕〔Example〕

以下に本発明の実施例を図面に基づいて説明する。 Embodiments of the present invention will be described below based on the drawings.

第1図は本発明法の実施に適した焼鈍設備のガス系統図
、第2図はその焼鈍設備における焼鈍炉の構造を示す断
面図である。
FIG. 1 is a gas system diagram of an annealing equipment suitable for implementing the method of the present invention, and FIG. 2 is a sectional view showing the structure of an annealing furnace in the annealing equipment.

焼鈍設備は純水素を使用したコイル焼鈍設備であって、
第1図に示すように10基のパンチ焼鈍炉lOを備えて
いる。各バッチ焼鈍炉10には、逆止弁20が介設され
た供給系路3oを通して雰囲気ガスが供給される。各バ
ッチ焼鈍炉lOに供給された雰囲気ガスは、排出系路4
0の支管および本管を通して大気放散される一方、排出
系路40の支管途中より分岐する回収系路50の支管と
、これに続く本管とを通して供給系路30へ送られるよ
うになっている。
The annealing equipment is a coil annealing equipment that uses pure hydrogen,
As shown in FIG. 1, ten punch annealing furnaces IO are provided. Atmospheric gas is supplied to each batch annealing furnace 10 through a supply line 3o in which a check valve 20 is provided. The atmospheric gas supplied to each batch annealing furnace IO is discharged through the exhaust system 4.
0 to the atmosphere through the branch pipe and the main pipe, while being sent to the supply system line 30 through the branch pipe of the recovery line 50 that branches from the middle of the branch line of the discharge line 40 and the main line following this. .

回収系路50が分岐する排出系路40支管上の分岐点よ
り上流側には、0□濃度計、N2濃度計、露点計等の計
器60が設けられ、下流側には放散弁70が介装されて
いる。また、回収系路50の各支管には回収弁80が介
装され、その本管には回収用昇圧機90が介装されてい
る。そして、放散弁70および回収弁80は、計器60
の出力に基づいて制御器100により開度制御される。
Instruments 60 such as a 0□ concentration meter, a N2 concentration meter, and a dew point meter are provided on the upstream side of the branch point on the discharge system path 40 branch pipe where the recovery system path 50 branches, and a discharge valve 70 is provided on the downstream side. equipped. Further, a recovery valve 80 is installed in each branch pipe of the recovery system 50, and a recovery booster 90 is installed in the main pipe. The discharge valve 70 and the recovery valve 80 are connected to the meter 60.
The opening degree is controlled by the controller 100 based on the output.

焼鈍設備における各バッチ炉焼鈍炉lOは、第2図に示
すように、いわゆるベル型の間接加熱方式炉であって、
ベース11上にコイルlを、コンベクターと呼ばれる通
気用の仕切り12を挟んで段積みし、その外側にインナ
ーカバー13と、更に加熱ベル14又は冷却ベル15を
かぶせ、コイル1を所定の温度パターンで加熱及び冷却
し、熱処理を行うようになっている。
Each batch furnace annealing furnace IO in the annealing equipment is a so-called bell-shaped indirect heating furnace, as shown in FIG.
Coils 1 are stacked on a base 11 with ventilation partitions 12 called convectors in between, and an inner cover 13 and a heating bell 14 or cooling bell 15 are placed on the outside of the coils 1 to keep the coils 1 in a predetermined temperature pattern. Heat treatment is performed by heating and cooling.

すなわち、加熱ベル14には周方向4本で上下方向3段
の計12本のバーナ16が設置されており、各バーナ1
6によりインナーカバー13を介してコイル1を加熱す
る。冷却ベル15の上部には空冷ファン17と水スプレ
ー18が設置されており、これらでインナーカバー13
を空冷または水冷することにより、インナーカバー13
内のコイルlを冷却する。インナーカバー13とベース
11のシール部は0リング13’にてインナーカバー1
3内を密閉する構造となっている。
That is, a total of 12 burners 16 are installed on the heating bell 14, four in the circumferential direction and three in the vertical direction.
6 heats the coil 1 via the inner cover 13. An air cooling fan 17 and a water spray 18 are installed on the top of the cooling bell 15, and these cool the inner cover 13.
The inner cover 13 is cooled by air or water cooling.
Cool the coil l inside. The sealing part between the inner cover 13 and the base 11 is attached to the inner cover 1 with an O ring 13'.
3 has a structure that seals the inside.

雰囲気ガスは、供給系路30の支管を通じてベース11
下部より、インナーカバー13内に導入され、ベース内
部に収められたRCファン19にてインナーカバー13
内を循環し、インナーカバー13(7)内圧を一定値(
400〜10 (1m+Hz O)に保ちながら、排出
系路40の支管および本管を通して大気放散される。1
9′はRCファンモータである。
Atmospheric gas is supplied to the base 11 through a branch pipe of the supply line 30.
The RC fan 19 is introduced into the inner cover 13 from the bottom and housed inside the base, and the inner cover 13 is
The internal pressure of the inner cover 13 (7) is maintained at a constant value (
400-10 (1 m+Hz O), and is vented to the atmosphere through the branch and main pipes of the exhaust line 40. 1
9' is an RC fan motor.

本発明の雰囲気ガス制御方法は、上記焼鈍設備において
次のように実施される。
The atmospheric gas control method of the present invention is carried out in the annealing equipment as follows.

焼鈍中に計器60において、ハツチ焼鈍炉lOより排出
される雰囲気ガスの0□濃度、N、fA度を高速ガスク
ロマトグラフィー等により検出する共に、その露点を1
段式酸化アルミ被膜検出方式等を用いた露点計により検
出する。
During annealing, the instrument 60 detects the 0□ concentration, N, and fA degrees of the atmospheric gas discharged from the Hatch annealing furnace lO by high-speed gas chromatography, etc., and also detects its dew point at 1
Detected using a dew point meter using a step-type aluminum oxide film detection method.

制御器100は、バッチ焼鈍炉lOより排出される雰囲
気ガスが再使用可能になる0!濃度、N。
The controller 100 allows the atmospheric gas discharged from the batch annealing furnace IO to be reused! Concentration, N.

濃度および露点を記憶しており、検出された各データの
いずれもがその記憶データ以下になった時点で放散弁7
0を全開から所定開度まで閉じ、回収弁80を全開から
所定開度まで開放する。こうすることにより、焼鈍の途
中より使用済の雰囲気ガスの一部又は全部がバッチ焼鈍
炉lOに再供給されるようになり、その再供給に見合う
量だけ新規供給量が節約される。
The concentration and dew point are memorized, and the release valve 7 is activated when each of the detected data becomes less than the stored data.
0 is closed from fully open to a predetermined opening degree, and the recovery valve 80 is opened from fully open to a predetermined opening degree. By doing this, part or all of the used atmospheric gas is re-supplied to the batch annealing furnace 10 during annealing, and the amount of new supply is saved by an amount commensurate with the re-supply.

挿入最大重量が1007on/ch、装入寸法が200
0m径X4300■高さのバッチ焼鈍炉lOで第3図に
示すパターンにより雰囲気ガス制御を実施したところ、
雰囲気ガスである純水素の原単位が従来1゜2Nr+(
/Tonであったものが、約0.6Nrrf/Tonに
半減できた。また、雰囲気ガスの再使用に伴う焼鈍品質
の低下は生しなかった。さらに、雰囲気ガスの再使用中
もインナーカバー内圧が所定値に維持されたために、大
気侵入による着色欠陥も生じなかった。
Maximum insertion weight is 1007 on/ch, charging size is 200
When atmospheric gas control was carried out in a batch annealing furnace IO with a diameter of 0 m and a height of 4300 m, according to the pattern shown in Fig. 3,
Conventionally, the basic unit of pure hydrogen, which is an atmospheric gas, was 1゜2Nr+(
/Ton was reduced by half to approximately 0.6Nrrf/Ton. Further, there was no deterioration in annealing quality due to reuse of atmospheric gas. Furthermore, since the inner cover internal pressure was maintained at a predetermined value even while the atmospheric gas was being reused, no coloring defects occurred due to atmospheric intrusion.

上記実施例は各炉にそれぞれ計器60を設けたが、各炉
間で計器を共用して切り替えにより、各炉より排出され
る雰囲気ガスの不純物濃度および露点を検出するように
してもよい。また、回収系路にフィルター、水素分離膜
等を介装することも可能である。
In the above embodiment, each furnace is provided with a meter 60, but the meter may be shared among the furnaces and switched to detect the impurity concentration and dew point of the atmospheric gas discharged from each furnace. It is also possible to interpose a filter, hydrogen separation membrane, etc. in the recovery line.

更に、雰囲気ガスが純水素以外のバッチ焼鈍に本発明を
適用することもでき、焼鈍対象材もコイルに限らない。
Furthermore, the present invention can also be applied to batch annealing in which the atmospheric gas is other than pure hydrogen, and the material to be annealed is not limited to coils.

(発明の効果〕 以上の説明から明らかなように、本発明の雰囲気ガス制
御方法は、焼鈍炉から排出される雰囲気ガスをそのまま
焼鈍炉に還流させるので、雰囲気ガスの種々を問わずガ
ス原単位の低減が可能になる。しかも、雰囲気ガスを大
量に還流させる場合にあっても、還流による焼鈍品質の
低下が阻止されると共に、供給ガス量の低下による品質
低下が阻止される。従って、優れた焼鈍品質を維持しつ
つ焼鈍コストの大幅節減が達成される。
(Effects of the Invention) As is clear from the above explanation, the atmospheric gas control method of the present invention allows the atmospheric gas discharged from the annealing furnace to flow back into the annealing furnace as it is, so regardless of the type of atmospheric gas, the gas consumption rate is Furthermore, even when a large amount of atmospheric gas is refluxed, deterioration in annealing quality due to reflux is prevented, and deterioration in quality due to a decrease in the amount of supplied gas is prevented. Significant reductions in annealing costs can be achieved while maintaining annealing quality.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明法の実施に適した焼鈍設備のガス系統図
、第2図はその焼鈍設備におけるバッチ炉焼鈍の断面図
、第3図は本発明法における雰囲気ガスの供給パターン
例を示すタイムチャートである。 10;バッチ焼鈍炉、30:供給系路、40:排出系路
、50:回収系路、60:計器、70:放散弁、80:
回収弁。
Fig. 1 shows a gas system diagram of an annealing equipment suitable for carrying out the method of the present invention, Fig. 2 shows a cross-sectional view of batch furnace annealing in the annealing equipment, and Fig. 3 shows an example of the atmospheric gas supply pattern in the method of the present invention. This is a time chart. 10: Batch annealing furnace, 30: Supply system path, 40: Discharge system path, 50: Recovery system path, 60: Instrument, 70: Diffusion valve, 80:
recovery valve.

Claims (1)

【特許請求の範囲】[Claims] (1)雰囲気調整を行うバッチ焼鈍炉において、雰囲気
ガスの排出系路で雰囲気ガスの不純物濃度および露点を
検出し、これらの検出値が予め設定した基準値以下にな
った時点で、雰囲気ガスの排出系路から供給系路へ雰囲
気ガスの一部または全部を還流させることを特徴とする
バッチ焼鈍炉における雰囲気ガス制御方法。
(1) In a batch annealing furnace that performs atmosphere adjustment, the impurity concentration and dew point of the atmospheric gas are detected in the atmospheric gas exhaust system, and when these detected values become below the preset reference value, the atmospheric gas is A method for controlling atmospheric gas in a batch annealing furnace, characterized in that part or all of atmospheric gas is refluxed from a discharge system to a supply system.
JP12232890A 1990-05-11 1990-05-11 Method for controlling atmosphere gas for batch annealing furnace Pending JPH0417626A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12232890A JPH0417626A (en) 1990-05-11 1990-05-11 Method for controlling atmosphere gas for batch annealing furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12232890A JPH0417626A (en) 1990-05-11 1990-05-11 Method for controlling atmosphere gas for batch annealing furnace

Publications (1)

Publication Number Publication Date
JPH0417626A true JPH0417626A (en) 1992-01-22

Family

ID=14833252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12232890A Pending JPH0417626A (en) 1990-05-11 1990-05-11 Method for controlling atmosphere gas for batch annealing furnace

Country Status (1)

Country Link
JP (1) JPH0417626A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008540833A (en) * 2005-05-12 2008-11-20 エープナー インドゥストリーオーフェンバウ ゲゼルシャフト ミット ベシュレンクテル ハフツング Method of heat-treating annealed parts in batch operation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008540833A (en) * 2005-05-12 2008-11-20 エープナー インドゥストリーオーフェンバウ ゲゼルシャフト ミット ベシュレンクテル ハフツング Method of heat-treating annealed parts in batch operation

Similar Documents

Publication Publication Date Title
CN101760606A (en) Control method of protective atmosphere of stainless steel cover type annealing furnace
KR100954164B1 (en) Atmosphere Control During Continuous Heat Treatment of Metal Strips
JPS6312336A (en) Method of supplying very high purity gas and its supplying system
US20110139265A1 (en) Method and Device for Controlling Process Gases for Heat Treatments of Metallic Materials/Workpieces in Industrial Furnaces
JPH0417626A (en) Method for controlling atmosphere gas for batch annealing furnace
JP2002206117A (en) Continuous annealing equipment and continuous annealing method
JP3988332B2 (en) Oxygen enrichment method for blast furnace
JP2001317878A (en) Sintering exhaust gas treatment system and method of operating the same
GB2082086A (en) Treatment of waste gases
KR101419880B1 (en) Apparatus for manufacturing wire rod having gas booster
KR20080048694A (en) Aparatus for controlling heat exhaust of semiconductor manufacture device
JP2008056972A (en) Continuous annealing furnace
JP2002220620A (en) Method for controlling pressure of heating furnace
JP2018204055A (en) High-temperature gas wiping device
JPS6173824A (en) Method and device for atmosphere heat treatment
KR20110120443A (en) Method for controlling shut down of furnace equipment
JPH11124634A (en) Heat treatment apparatus of steel strip in continuous annealing process and its heat treatment method
JPH0722125B2 (en) Hydrogen gas recovery device for CVD furnace
JPS6213536A (en) Device for sealing exit of atmospheric furnace
JPH0853712A (en) Control of distribution of dew point in continuous decarburize-annealing furnace
JPH10149996A (en) Semiconductor device manufacturing device
JP3516635B2 (en) Heat treatment equipment
JPH102681A (en) Air penetration preventing device for closure type atmosphere heat treatment furnace
JPS6024308A (en) Method for supplying continuously hot air to metallurgical furnace
JPH0332518Y2 (en)