JPS6232538U - - Google Patents
Info
- Publication number
- JPS6232538U JPS6232538U JP12256385U JP12256385U JPS6232538U JP S6232538 U JPS6232538 U JP S6232538U JP 12256385 U JP12256385 U JP 12256385U JP 12256385 U JP12256385 U JP 12256385U JP S6232538 U JPS6232538 U JP S6232538U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- probe card
- pin
- integrated circuit
- diode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の一実施例を示す平面図、第２
図は第１図のＡ―Ａ′断面図である。
１……プローブカード、２……プローブピン、
３……半導体集積回路素子、４……スクライブラ
イン、５……コンタクトピン、６……発光ダイオ
ード、７……半導体ウエハ、８……電池、９……
電気回路。
Figure 1 is a plan view showing one embodiment of the present invention;
The figure is a sectional view taken along the line AA' in FIG. 1... Probe card, 2... Probe pin,
3...Semiconductor integrated circuit element, 4...Scribe line, 5...Contact pin, 6...Light emitting diode, 7...Semiconductor wafer, 8...Battery, 9...
electric circuit.
Claims (1)
電気的特性を測定するのに用いるプローブカード
において、カード本体に、半導体ウエハとの接触
を検知するコンタクト検知用ピンと、該ピンの出
力を入力として発光ダイオードを点燈又は消燈さ
せる回路を有することを特徴とするプローブカー
ド。 A probe card used to measure the electrical characteristics of each integrated circuit element formed on a semiconductor wafer has a contact detection pin on the card body that detects contact with the semiconductor wafer, and a device that emits light using the output of the pin as input. A probe card characterized by having a circuit that turns on or off a diode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12256385U JPS6232538U (en) | 1985-08-09 | 1985-08-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12256385U JPS6232538U (en) | 1985-08-09 | 1985-08-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6232538U true JPS6232538U (en) | 1987-02-26 |
Family
ID=31012868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12256385U Pending JPS6232538U (en) | 1985-08-09 | 1985-08-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6232538U (en) |
-
1985
- 1985-08-09 JP JP12256385U patent/JPS6232538U/ja active Pending