JPS6232530U - - Google Patents
Info
- Publication number
- JPS6232530U JPS6232530U JP12328685U JP12328685U JPS6232530U JP S6232530 U JPS6232530 U JP S6232530U JP 12328685 U JP12328685 U JP 12328685U JP 12328685 U JP12328685 U JP 12328685U JP S6232530 U JPS6232530 U JP S6232530U
- Authority
- JP
- Japan
- Prior art keywords
- rotary table
- air intake
- outer cylinder
- drying chamber
- closing means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001035 drying Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985123286U JPH0513008Y2 (sh) | 1985-08-09 | 1985-08-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985123286U JPH0513008Y2 (sh) | 1985-08-09 | 1985-08-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6232530U true JPS6232530U (sh) | 1987-02-26 |
| JPH0513008Y2 JPH0513008Y2 (sh) | 1993-04-06 |
Family
ID=31014249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985123286U Expired - Lifetime JPH0513008Y2 (sh) | 1985-08-09 | 1985-08-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0513008Y2 (sh) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS548455A (en) * | 1977-06-22 | 1979-01-22 | Hitachi Ltd | Cleansing/drying device for products |
| JPS5936930A (ja) * | 1982-08-25 | 1984-02-29 | Toshiba Corp | ウエ−ハ乾燥装置 |
-
1985
- 1985-08-09 JP JP1985123286U patent/JPH0513008Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS548455A (en) * | 1977-06-22 | 1979-01-22 | Hitachi Ltd | Cleansing/drying device for products |
| JPS5936930A (ja) * | 1982-08-25 | 1984-02-29 | Toshiba Corp | ウエ−ハ乾燥装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0513008Y2 (sh) | 1993-04-06 |