JPS6232384U - - Google Patents
Info
- Publication number
- JPS6232384U JPS6232384U JP12271485U JP12271485U JPS6232384U JP S6232384 U JPS6232384 U JP S6232384U JP 12271485 U JP12271485 U JP 12271485U JP 12271485 U JP12271485 U JP 12271485U JP S6232384 U JPS6232384 U JP S6232384U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- measured
- semiconductor
- magnetic field
- stand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000005259 measurement Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Magnetic Variables (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案半導体測定装置の一実施例の構
成図、第２図は従来の装置および本考案装置を用
いて測定した２インチ径ＧａＡｓ基板のキヤリア
濃度分布を示すグラフ、第３図は従来の装置の構
成図である。
１…電磁石を用いた電気回路、２…試料台、３
…電気回路、４…試料台、５…試料台移動機構、
６，６′…永久磁石、７…軟磁性板、８…磁気回
路移動機構、１０…台座、１１…支持部材、１２
…電線、１３…探針。
Fig. 1 is a block diagram of one embodiment of the semiconductor measuring device of the present invention, Fig. 2 is a graph showing carrier concentration distribution of a 2-inch diameter GaAs substrate measured using the conventional device and the device of the present invention, and Fig. 3 is a graph showing the carrier concentration distribution of a 2-inch diameter GaAs substrate measured using the conventional device and the device of the present invention. FIG. 1 is a configuration diagram of a conventional device. 1... Electric circuit using electromagnet, 2... Sample stage, 3
...electric circuit, 4...sample stand, 5...sample stand movement mechanism,
6, 6'... Permanent magnet, 7... Soft magnetic plate, 8... Magnetic circuit moving mechanism, 10... Pedestal, 11... Support member, 12
...Electric wire, 13... Probe.
Claims (1)
素子等に磁界を印加し、それによる当該被測定試
料における電気信号の変化を検出することにより
、前記被測定試料の半導体特性を測定する半導体
特性測定装置において、被測定試料を保持する試
料台と、永久磁石を含み、該永久磁石により前記
被測定試料および前記試料台の部分に限定して磁
界を印加可能なように構成された磁気回路と、前
記試料台を移動可能な移動部材と、前記被測定試
料に接触可能な探針とを具え、前記移動部材を移
動させることによつて、前記被測定試料における
複数個の測定点の特性を前記探針を介して測定す
るようにしたことを特徴とする半導体特性測定装
置。 In a semiconductor property measuring device that measures semiconductor characteristics of a sample to be measured by applying a magnetic field to a semiconductor material, a semiconductor element, etc. as the sample to be measured, and detecting a change in an electrical signal in the sample to be measured due to the magnetic field, A sample stand that holds a sample to be measured; a magnetic circuit including a permanent magnet configured to be able to apply a magnetic field only to the sample to be measured and a portion of the sample stand; and the sample stand. and a probe capable of contacting the sample to be measured, and by moving the movable member, the characteristics of a plurality of measurement points on the sample to be measured can be measured using the probe. 1. A semiconductor characteristic measuring device characterized in that measurement is performed through a semiconductor device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12271485U JPS6232384U (en) | 1985-08-12 | 1985-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12271485U JPS6232384U (en) | 1985-08-12 | 1985-08-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6232384U true JPS6232384U (en) | 1987-02-26 |
Family
ID=31013165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12271485U Pending JPS6232384U (en) | 1985-08-12 | 1985-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6232384U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015162642A (en) * | 2014-02-28 | 2015-09-07 | セイコーインスツル株式会社 | Magnetic characteristic measurement apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4974491A (en) * | 1972-11-17 | 1974-07-18 |
-
1985
- 1985-08-12 JP JP12271485U patent/JPS6232384U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4974491A (en) * | 1972-11-17 | 1974-07-18 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015162642A (en) * | 2014-02-28 | 2015-09-07 | セイコーインスツル株式会社 | Magnetic characteristic measurement apparatus |
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