JPS6231851Y2 - - Google Patents
Info
- Publication number
- JPS6231851Y2 JPS6231851Y2 JP1981024730U JP2473081U JPS6231851Y2 JP S6231851 Y2 JPS6231851 Y2 JP S6231851Y2 JP 1981024730 U JP1981024730 U JP 1981024730U JP 2473081 U JP2473081 U JP 2473081U JP S6231851 Y2 JPS6231851 Y2 JP S6231851Y2
- Authority
- JP
- Japan
- Prior art keywords
- detection
- pressure
- fluid
- chamber
- bellows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 56
- 239000012530 fluid Substances 0.000 claims description 29
- 239000007788 liquid Substances 0.000 claims description 7
- 238000005192 partition Methods 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Landscapes
- Measuring Arrangements Characterized By The Use Of Fluids (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1981024730U JPS6231851Y2 (da) | 1981-02-23 | 1981-02-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1981024730U JPS6231851Y2 (da) | 1981-02-23 | 1981-02-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57138025U JPS57138025U (da) | 1982-08-28 |
JPS6231851Y2 true JPS6231851Y2 (da) | 1987-08-15 |
Family
ID=29822441
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1981024730U Expired JPS6231851Y2 (da) | 1981-02-23 | 1981-02-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6231851Y2 (da) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4735094A (en) * | 1987-01-28 | 1988-04-05 | Universal Vortex, Inc. | Dual bluff body vortex flowmeter |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5296561A (en) * | 1976-02-10 | 1977-08-13 | Japan Atomic Energy Res Inst | Displacement measuring device |
-
1981
- 1981-02-23 JP JP1981024730U patent/JPS6231851Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5296561A (en) * | 1976-02-10 | 1977-08-13 | Japan Atomic Energy Res Inst | Displacement measuring device |
Also Published As
Publication number | Publication date |
---|---|
JPS57138025U (da) | 1982-08-28 |
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