JPS6230879A - Formation of thin film - Google Patents

Abstract

PURPOSE:To form a thin film while preventing the generation of wrinkles and breakage by detaching a belt-like body from a can between plural points where the belt-like body is subjected to a treatment and controlling tension separately before and after the detaching points. CONSTITUTION:The surface of the belt-like body 2 which travels along the circumferential side face of the can 1 is subjected to an electric discharge treatment by a heat radiation treatment means 5. A metallic material is then deposited by evaporation thereon with an evaporating means 6 in the position where the belt-like body faces said means. The thin film is thus formed. A detaching roller 7 such as parallel roll or expander roller is provided at approximately the middle of the electric discharge treatment means 5 and the evaporating means 6 to detach the belt-like body 2 temporarily from the can 1. The tension between a guide roller 3 and the roller 7 and the tension between the roller 7 and a guide roller 4 are separately controlled during the detachment. The transmission of the tension to each part is made easy and the generation of the wrinkles and the breakage is decreased by the above-mentioned method.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a method for forming a thin film using a vacuum evaporation method, an ion blating method, or the like.

(Prior Art) Conventionally, two or more treatments such as evaporation, sputtering, ion blasting, CVO1 ion beam sputtering, ion bombardment, etc. are carried out while a strip is run along one can in a vacuum atmosphere. A single film may be formed on the strip by performing the above in any combination.

(Problems to be Solved by the Invention) In this case, since there is only one can, the corners of the belt-shaped body become large, and the belt-shaped body tends to wrinkle, and the tension is difficult to be transmitted to necessary areas. In addition, since the can is usually heated, the strip tends to stretch and a large amount of tension must be applied, making it easy to break. Ta.

SUMMARY OF THE INVENTION The present invention seeks to improve upon one or more of the disadvantages and to provide a method for forming a thin film that reduces the occurrence of wrinkling in the strip, facilitates tension transmission, and reduces breakage.

(Measures for solving the problem ff1) In order to achieve the object of -F, the present invention runs a strip along the circumferential side of the can in a vacuum atmosphere,
In a thin film forming method in which a thin film can be formed by treating the strip at two or more locations along the way, the strip is separated from the chiton between the locations where the strip is treated, and the strip is separated from the chiton before the separated location. The present invention provides a method for forming a thin film in which the tension of the strip is controlled separately by (1).+Y'i.

(Function) According to the present invention, between the locations where the strip is processed, the strip is separated from the can, and the tension of the strip is separately controlled before and after the separated location. This makes it easier to transmit tension to the surface, reducing wrinkles and cuts.

(Example) Hereinafter, embodiments of the present invention will be described based on the drawings.

In FIG. 1, 1 is a cylindrical can placed in a vacuum atmosphere. Reference numeral 2 denotes a band-like material such as a polymer film, paper, cloth, etc., which is run along the circumferential side of the can 1.

3 and 4 are guide rollers for guiding the strip 2 to the can 1 and further sending it out. 5 is a discharge treatment means located near the point where the strip 2 starts traveling along the circumferential surface of the can 1; , an evaporation means provided at a position substantially facing the discharge treatment means 5 via the can 1,
``It evaporates one substance of five metals such as C, Go, Ni, Al, Zn, and Cu, and forms a thin film by vaporizing the evaporated substance on the surface of the discharge-treated strip 2. , 7 are parallel rollers or expanders provided along the circumferential side of the can 1 approximately midway between the discharge treatment means 5 and the vapor deposition means 6.
For separating rollers, etc.
It is temporarily separated by 1411 points from .

To describe a method of forming a thin film using the above-mentioned loading amount, the strip 2 is fed into the guide roller 3 into the recan 1 and run along its circumferential surface, and its surface is subjected to an electrical discharge treatment by the electrical discharge treatment means 5. After the discharge treatment, the strip 2 is used for separation [Cola 7
, and is temporarily separated from the circumferential side of can 1. After passing through the separation roller 7, a metal or the like is deposited on the discharge-treated surface of the strip 2 by the evaporation means 6 to form a thin film.

That is, according to the present invention, the strip 2 is coated with I! between the M electrode filling and the vapor deposition process. ! Since it is temporarily separated from the can 1 by the separation roller 7, the tension between the guide roller 3 and the separation roller 7 and between the separation roller 7 and the idle roller 4 can be controlled separately. It can reduce the occurrence of wrinkles, cuts, etc.

FIG. 2 also shows a device used in another embodiment of the invention, and the same parts as in FIG. 1 are designated by the same reference numerals. In this device, in particular, guide rollers 8 and 9 are provided on both sides of the roller 7 for one interval, so that the length of the strip 2 that is separated from the can 1 can be extended, and the heat treatment by the can 1 can be extended. etc. can be used more effectively than in the case shown in FIG.

In the above example, the strip 2 was subjected to discharge treatment and vapor deposition treatment, but it is not necessarily limited to these treatments, and other treatments such as liquid coating treatment and thin film oxidation treatment may also be performed. Alternatively, two or more vapor deposition treatments may be performed.

Furthermore, the strip may be separated from the chiton two or more times between the treatment locations.

Roughly speaking, when processing is carried out at three or more locations, as shown in FIG. The other processing means 11 and 15 do not necessarily have to be separated from each other.

(Effects of the Invention) As described above, according to the present invention, when a strip is subjected to two or more treatments, the strip is moved from can to f during the treatments.
Since the tension of the strip is controlled separately after the IJJ separation and the separation of the separated portion, a thin film forming method is provided in which wrinkles and cuts are less likely to occur and reliability can be improved.

[Brief explanation of the drawing]

FIG. 1 is a partial front view of a device used in an embodiment of the present invention;
2 and 3 show a portion of a front view of an apparatus used in another embodiment of the present invention. 1.14...Can, 2,13...Strip body, 5.
... h electric current processing means, 6... evaporation means, 7.12.
... Separation roller, 10.11.15... Processing means.

Claims (1)

[Claims] (1) A thin film forming method in which a strip is run along the circumferential surface of a can in a vacuum atmosphere, and the strip is treated at two or more locations along the way to form a thin film. A method for forming a thin film, characterized in that the strip is separated from the can between rubbing points, and the tension of the strip is separately controlled before and after the separated portion.