JPS6230484B2 - - Google Patents

Info

Publication number
JPS6230484B2
JPS6230484B2 JP55054927A JP5492780A JPS6230484B2 JP S6230484 B2 JPS6230484 B2 JP S6230484B2 JP 55054927 A JP55054927 A JP 55054927A JP 5492780 A JP5492780 A JP 5492780A JP S6230484 B2 JPS6230484 B2 JP S6230484B2
Authority
JP
Japan
Prior art keywords
humidity
sensing element
humidity sensing
manufacturing
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55054927A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56150816A (en
Inventor
Toshuki Yasufuku
Atsushi Nishino
Akihiko Yoshida
Akira Sadamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5492780A priority Critical patent/JPS56150816A/ja
Publication of JPS56150816A publication Critical patent/JPS56150816A/ja
Publication of JPS6230484B2 publication Critical patent/JPS6230484B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP5492780A 1980-04-24 1980-04-24 Method of manufacturing moisture detecting element Granted JPS56150816A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5492780A JPS56150816A (en) 1980-04-24 1980-04-24 Method of manufacturing moisture detecting element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5492780A JPS56150816A (en) 1980-04-24 1980-04-24 Method of manufacturing moisture detecting element

Publications (2)

Publication Number Publication Date
JPS56150816A JPS56150816A (en) 1981-11-21
JPS6230484B2 true JPS6230484B2 (en, 2012) 1987-07-02

Family

ID=12984243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5492780A Granted JPS56150816A (en) 1980-04-24 1980-04-24 Method of manufacturing moisture detecting element

Country Status (1)

Country Link
JP (1) JPS56150816A (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0346954U (en, 2012) * 1989-09-13 1991-04-30

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5843894B2 (ja) * 1978-03-15 1983-09-29 松下電器産業株式会社 湿度検知素子の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0346954U (en, 2012) * 1989-09-13 1991-04-30

Also Published As

Publication number Publication date
JPS56150816A (en) 1981-11-21

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