JPS6230406A - Waveguide device - Google Patents

Waveguide device

Info

Publication number
JPS6230406A
JPS6230406A JP60170515A JP17051585A JPS6230406A JP S6230406 A JPS6230406 A JP S6230406A JP 60170515 A JP60170515 A JP 60170515A JP 17051585 A JP17051585 A JP 17051585A JP S6230406 A JPS6230406 A JP S6230406A
Authority
JP
Japan
Prior art keywords
metal plate
waveguide
iris
plate
plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60170515A
Other languages
Japanese (ja)
Inventor
Toshiya Kai
俊也 甲斐
Tatsuhisa Masuda
増田 建寿
Satoru Hanai
哲 花井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP60170515A priority Critical patent/JPS6230406A/en
Publication of JPS6230406A publication Critical patent/JPS6230406A/en
Pending legal-status Critical Current

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  • Plasma Technology (AREA)
  • Waveguide Connection Structure (AREA)

Abstract

PURPOSE:To easily fit a metal plate to any position of a waveguide in any stage of production and to attain efficient electric contact by constituting a metal plate iris with a master metal plate and slave metal plates. CONSTITUTION:The metal plate iris 11 is constituted of one master metal plate 13 and two slave metal plates 14 in the rectangular waveguide 12. Both the side end surfaces 13c of the plate 13 are gradually approached to each other in the downward direction like inclined surfaces to form the plate 13 like an upside-down trapezoid and its lower end part is fixed on the waveguide 12 through a screw member 16 penetrated into a hole 15 perforated into the waveguide 12. On the other hand, the plates 14 are formed like trapezoids constituted so that respective outside end surfaces 14a form vertical surfaces and respective inside end surfaces 14b form inclined surfaces corresponding to the surfaces 13a of the plate 13 and soldered sheets 17 are formed on the surfaces 14a. Consequently, the metal plate can be easily fitted to any position in any stage of production even if soldering to the position is difficult, and electric contact between the metal plates and the waveguide can be improved.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は、マイクロ波を伝送する導波管装置に係り、特
に導波管内に設置される金属板アイリスの改良に関する
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a waveguide device for transmitting microwaves, and more particularly to an improvement in a metal plate iris installed in a waveguide.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

近年、マイクロ波の加熱作用を利用し、マイクロ波でプ
ラズマを加熱することを目的とした核融合実験装置の研
究が行なわれているが、この際、マイクロ波を効率よ(
プラズマに入射することが重要となる。このため、従来
からマイクロ波入射導波管において、金属板アイリスを
用いてマイクロ波の整合をよくすることが行なわれてい
る。
In recent years, research has been carried out on nuclear fusion experimental equipment that uses the heating effect of microwaves to heat plasma with microwaves.
Injection into the plasma is important. For this reason, a metal plate iris has been conventionally used in microwave input waveguides to improve microwave matching.

第5図(a)、(b)は、真空窓およびアイリスを備え
たマイクロ波入射尋波管装置を示すもので、第5図(a
)において、真空窓1より左側は導波管2の先端部がプ
ラズマとマツチングするとともに導波管2の内部が真空
に保たれ、また右側は、その端部がマイクロ波発振器に
接続されるとともに導波管2の内部がSF6ガス等の絶
縁耐力の高い気体で満たされている。
Figures 5(a) and 5(b) show a microwave incidence deep wave tube device equipped with a vacuum window and an iris;
), on the left side of the vacuum window 1, the tip of the waveguide 2 matches the plasma and the inside of the waveguide 2 is kept in a vacuum, and on the right side, the end is connected to the microwave oscillator and The inside of the waveguide 2 is filled with a gas having high dielectric strength such as SF6 gas.

ところでアイリスとは、例えば実公昭56−45204
号公報に示されているように窓のことであり、金属板3
と導波管2の内壁とにより形成される空間のことである
By the way, iris is, for example,
As shown in the publication, it is a window, and metal plate 3
This is the space formed by the waveguide 2 and the inner wall of the waveguide 2.

ここで、金属板3の間隔d、金属板3の厚さt、および
真空窓1と金属板3との距離1は、真空窓1の厚さり、
導波管2の内壁寸法a、b、および使用するマイクロ波
の周波数と密接な関係があり、間隔d1厚さt、距離1
の最適値を計算により決定する。
Here, the distance d between the metal plates 3, the thickness t of the metal plate 3, and the distance 1 between the vacuum window 1 and the metal plate 3 are the thickness of the vacuum window 1,
There is a close relationship with the inner wall dimensions a and b of the waveguide 2 and the frequency of the microwave used, and the distance d1, thickness t, and distance 1
The optimal value of is determined by calculation.

第6図および第7図は、この種の金属板3の導波管2へ
の従来の取付は方法をそれぞれ示すもので、第6図に示
すものは、導波管2の内面に溝4を切るとともに、その
中に外部に通じるスリット5を介して金属板3を差込ん
だものであり、また第7図に示すものは、銀ろう6等を
用いて金属板3を導波管2内壁に固定するようにしたも
のである。
6 and 7 respectively show conventional methods for attaching this type of metal plate 3 to the waveguide 2. The one shown in FIG. The metal plate 3 is inserted into the waveguide through a slit 5 leading to the outside, and in the case shown in FIG. It is designed to be fixed to the inner wall.

ところが、差込み方式を採る前者は、導波管2内壁と金
属板3との電気的接触を良好なものとすることが容易で
ないという問題があり、またろう付は方式を取る後者は
、計算上ろう付けの困難な位置に金属板3を取付ける必
要がある場合に支障きたすという問題がある。
However, the former method, which uses a plug-in method, has the problem that it is not easy to make good electrical contact between the inner wall of the waveguide 2 and the metal plate 3, and the latter method, which uses a brazing method, has a problem in terms of calculation. This poses a problem when it is necessary to attach the metal plate 3 to a position that is difficult to braze.

また、実際には真空窓1の誘導率に個々のバラ付きがあ
るため、金属板3の取付は位置を変更することが必要な
る場合が多いが、前記従来の取付1ノ方法では、いずれ
の場合も一旦取付けた後の金属板3の位置変更が容易で
ないため、例えば前記実公昭56−45204号公報に
示されている方法等により金属板3の形状を微調整する
必要があり、その作業が容易でないという問題もある。
In addition, in reality, since there are individual variations in the inductivity of the vacuum window 1, it is often necessary to change the position when mounting the metal plate 3, but in the conventional mounting method 1 described above, either In this case, it is not easy to change the position of the metal plate 3 once it has been installed, so it is necessary to fine-tune the shape of the metal plate 3 by, for example, the method shown in the above-mentioned Japanese Utility Model Publication No. 56-45204. There is also the problem that it is not easy.

〔発明の目的〕[Purpose of the invention]

本発明はかかる現況に鑑みなされたもので、導波管のど
のような箇所へも、また製作のどの段階においても金属
板を容易に導波管に取付けることができ、しかも金属板
と導波管との電気的接触を良好なものとすることができ
る導波管装置を提供することを目的とする。
The present invention was made in view of the current situation, and allows a metal plate to be easily attached to a waveguide at any location on the waveguide and at any stage of manufacturing, and furthermore, the metal plate and the waveguide can be easily attached to any part of the waveguide and at any stage of manufacturing. It is an object of the present invention to provide a waveguide device that can make good electrical contact with a pipe.

〔発明の概要〕[Summary of the invention]

本発明は、金属板アイリスを、端面が相互に接触する1
枚の主金属板と所要枚の従金属板とから構成するととも
に、前記主金属板を導波管外から押通したねじ部材によ
り締付は可能とし、かつ主金属板と従金属板との接触面
を、主金属板の締付は方向に対し傾斜する横面として従
金属板の固定を行ない、もって金属板の導波管への固定
を容易なものとするとともに、導波管と金属板との電気
的接触を良好なものとすることができるようにしたこと
を特徴とする。
The present invention provides a metal plate iris with one end surface in contact with the other.
It is composed of two main metal plates and a required number of slave metal plates, and can be tightened by a screw member pushed through the main metal plate from outside the waveguide, and the main metal plate and the slave metal plate are The secondary metal plate is fixed as a contact surface that is inclined with respect to the direction in which the main metal plate is tightened, thereby making it easy to fix the metal plate to the waveguide, and making it possible to connect the waveguide and the metal plate easily. It is characterized by being able to make good electrical contact with the plate.

〔発明の実施例〕[Embodiments of the invention]

以下本発明の一実施例を第1図および第2図を参照して
説明する。なお本発明は、金属板アイリス部分にのみ特
徴を有し、゛その他の部分は従来のものと全く同一構成
であるので、以下この特徴部分についてのみ図示説明す
る。
An embodiment of the present invention will be described below with reference to FIGS. 1 and 2. Note that the present invention has a feature only in the metal plate iris portion, and the other portions have the same structure as the conventional one, so only this feature will be illustrated and explained below.

第1図および第2図において、11は矩形導波イリスで
あり、この金属板アイリス11は、1枚の主金属板13
と2枚の従金属板14とから3枚構造となっている。
1 and 2, 11 is a rectangular waveguide iris, and this metal plate iris 11 is connected to one main metal plate 13.
and two subordinate metal plates 14, making up a three-plate structure.

前記主金属板13は、第1図に示すようにその内側端面
13a、13aが図中下端に向かって次第に接近する斜
面に形成されて逆台形状をなしており、その下端部には
、矩形導波管12に設けた孔15を貫通ずるねじ部材1
6が螺装され、このねじ部材16の締付けにより矩形導
波管12に固定されるようになっている。
As shown in FIG. 1, the main metal plate 13 has an inverted trapezoid shape with inner end surfaces 13a, 13a gradually approaching the lower end in the figure, and a rectangular shape at the lower end. A shear screw member 1 passes through a hole 15 provided in a waveguide 12.
6 is screwed on, and is fixed to the rectangular waveguide 12 by tightening this screw member 16.

一方前記従金属板14は、第1図に示すように外側端面
14aが垂直面をなし内側端面44bが前記主金属板1
3の側端面13aに対応する斜面をなす台形状に形成さ
れており、前記外側端面14aには、シート状の半田1
7が配されている。
On the other hand, as shown in FIG.
It is formed into a trapezoidal shape with an inclined surface corresponding to the side end surface 13a of No. 3, and a sheet of solder 1 is placed on the outside end surface 14a.
7 is placed.

そして各従金属板14は、前記主金属板13をねじ部材
16により締付けることにより、前記両側端面13a、
14bの楔作用で外方および下方に押圧されて矩形導波
管12内に固定されるとともし−平m1フルΔ11¥仝
開煽1Aべ柘π6通油眞12内面に密着して良好な電気
的接触が得られるようになっている。
By tightening the main metal plate 13 with a screw member 16, each secondary metal plate 14 is connected to the both end surfaces 13a,
If it is pressed outward and downward by the wedge action of 14b and fixed inside the rectangular waveguide 12, it will be in close contact with the inner surface of the rectangular waveguide 12. Electrical contact can be made.

次に本実施例の作用について説明する。Next, the operation of this embodiment will be explained.

金属板アイリス11の取付けに際しては、まず主金属板
13と従金属板14とを第1図および第2図に示す状態
に組合わせ、矩形導波管12の外側から孔15を介して
ねじ部材16を主金属板13に螺装する。そしてねじ部
材16を締付ける。
When installing the metal plate iris 11, first combine the main metal plate 13 and the secondary metal plate 14 in the state shown in FIGS. 1 and 2, and then insert the screw member from the outside of the rectangular waveguide 12 through the hole 15 16 is screwed onto the main metal plate 13. Then, tighten the screw member 16.

すると、主金属板13はねじ部材16の締付けにJ−り
次第に矩形導波管12の内面に接近することになる。主
金属板13が矩形導波管12の内面に接近すると、その
両側端面13a、13aに内側端面14bを介して接触
する各従金属板14は、両側端面13a、14bの楔作
用により外方および下方に押圧され、両側端面13a、
14bが相互に密着するとともに、各従金属板14の外
側端面14aおよび下端面が矩形導波管12の内面に密
着する。このため、両金属板13.14問おにび従金属
板14と矩形導波管12との間の電気的接触が良好とな
る。特に従金属板14の外側端面14aにはシー1〜状
の半田17が配されているので、矩形導波管12の内面
に多少の歪が生じていてもこれを吸収して電気的接触を
良好な乙のとすることができる。
Then, the main metal plate 13 gradually approaches the inner surface of the rectangular waveguide 12 as the screw member 16 is tightened. When the main metal plate 13 approaches the inner surface of the rectangular waveguide 12, each of the subordinate metal plates 14, which are in contact with both side end faces 13a, 13a via the inner end face 14b, are moved outwardly and Pressed downward, both end surfaces 13a,
14b are in close contact with each other, and the outer end surface 14a and lower end surface of each slave metal plate 14 are in close contact with the inner surface of the rectangular waveguide 12. Therefore, the electrical contact between the two metal plates 13 and 14, the slave metal plate 14, and the rectangular waveguide 12 becomes good. In particular, since the solder 17 in the shape of a sheet 1 is arranged on the outer end surface 14a of the subordinate metal plate 14, even if some distortion occurs on the inner surface of the rectangular waveguide 12, it will be absorbed and electrical contact will be established. It can be done in good condition.

また、金属板アイリス11は、矩形導波管12の外側か
ら孔15を穿けるだけで取付けることができるので、真
空窓を取付けた導波管装置を実際に製作し、その導波管
装置の真空窓によるマイクロ波の反射の割合等を測定し
た後でも、簡単に金属板アイリス11を取付けることが
できる。このため、導波管装置全体どしてのマイクロ波
の反射の割合が最小となるような間隔d、厚さt、距離
ρを求める計りを、導波管の製作誤差や真空窓の誘電率
等の特性を正確に加味して行なうことが可能となり、従
来の問題点となっていた既に導波管に取付けた後の金属
板アイリスの微調整について考慮する必要がなくなる。
In addition, since the metal plate iris 11 can be attached by simply drilling a hole 15 from the outside of the rectangular waveguide 12, it is possible to actually manufacture a waveguide device with a vacuum window attached, and to install the waveguide device. Even after measuring the rate of microwave reflection by the vacuum window, the metal plate iris 11 can be easily attached. For this reason, the distance d, thickness t, and distance ρ that minimize the microwave reflection rate for the entire waveguide device are determined by taking into consideration manufacturing errors in the waveguide and the permittivity of the vacuum window. It is now possible to accurately take into account characteristics such as, etc., and there is no need to consider fine adjustment of the metal plate iris after it has already been attached to the waveguide, which has been a problem in the past.

また、ろう何けが行なえないような場所にも簡単に金属
板アイリス11を取付けることができる。
Furthermore, the metal plate iris 11 can be easily installed in places where soldering is not possible.

また、矩形導波管12は軽母化を図るためAρで作られ
ることもあるが、この場合、八ρは融点が低いため電気
的接点として最も好適な銀ろう付けを行なうことができ
ない。本実施例の金属板アイリ、ス11は、このような
場合にも有効である。
Further, the rectangular waveguide 12 is sometimes made of Aρ in order to make it lighter in weight, but in this case, Aρ has a low melting point and cannot be soldered with silver, which is most suitable for electrical contacts. The metal plate iris 11 of this embodiment is also effective in such cases.

第3図は本発明の他の実施例を示すもので、前記実施例
における半田17に代え、例えばリン青銅等の弾性およ
び導電性に富んだ金属板27を従金属板14の外側端面
14aに配するようにしたものである。
FIG. 3 shows another embodiment of the present invention, in which instead of the solder 17 in the previous embodiment, a metal plate 27 having high elasticity and conductivity, such as phosphor bronze, is attached to the outer end surface 14a of the slave metal plate 14. It was designed to be arranged.

このように構成しても、前記実施例と同様の効果が期待
できる。
Even with this configuration, the same effects as in the embodiment described above can be expected.

第4図は本発明のさらに他の実施例を示すもので、金属
板アイリス11を、各1枚の主金属板23と従金属板2
4とから構成するとともに、各金属板23.24の内側
端面23b、24bを相互に対応する斜面として密着さ
せ、かつ矩形導波管12の外側から孔15を介して挿通
されるねじ部材16を、従金属板24に設けた貫通孔2
5を通して主金属板23に螺装するようにしたものでこ
のように構成しても、ねじ部材16の締付けにより各金
属板23.24の外側端面23a。
FIG. 4 shows still another embodiment of the present invention, in which the metal plate iris 11 is connected to one main metal plate 23 and one secondary metal plate 2.
4, the inner end surfaces 23b, 24b of each metal plate 23, 24 are brought into close contact with each other as corresponding slopes, and a screw member 16 is inserted from the outside of the rectangular waveguide 12 through the hole 15. , the through hole 2 provided in the secondary metal plate 24
Even with this configuration, the outer end surface 23a of each metal plate 23, 24 can be tightened by the screw member 16.

24 a Jjよび従金属板24の下端面が矩形導波管
12の内面に密着するとともに、両金属板23゜24の
内側端面23b、24bが相互に密着し、前記実施例と
同様の効果が得られる。そして本実施例の場合ら、両金
属板23.24の外側端面23a、24aに前記各実施
例における半田17あるいは金属板27を配することに
より、より良好な電気的接触が得られる。
24 a Jj and the lower end surfaces of the slave metal plate 24 are in close contact with the inner surface of the rectangular waveguide 12, and the inner end surfaces 23b and 24b of both metal plates 23 and 24 are in close contact with each other, and the same effect as in the previous embodiment is obtained. can get. In the case of this embodiment, better electrical contact can be obtained by disposing the solder 17 or the metal plate 27 in each of the embodiments described above on the outer end surfaces 23a, 24a of both metal plates 23, 24.

なお前記各実施例では特に説明しなかったが、矩形導波
管12の内部に、放電防止を目的どしてSF6ガス等を
大気圧あるいは加圧して封入し、矩形導波管12中を通
過し得るマイクロ波の電力を上げるようにする場合があ
る。そしてこの場合には、矩形導波管12の孔15がら
前記ガスが漏れるおそれがある。そこでこの場合には、
ねじ部材16と矩形導波管12との間をろう付は等によ
りシールすることが好ましい。
Although not specifically explained in the above embodiments, SF6 gas or the like is sealed inside the rectangular waveguide 12 at atmospheric pressure or pressurized for the purpose of preventing discharge, and the gas is then passed through the rectangular waveguide 12. In some cases, the power of the microwave may be increased. In this case, there is a risk that the gas may leak through the hole 15 of the rectangular waveguide 12. So in this case,
It is preferable to seal between the screw member 16 and the rectangular waveguide 12 by brazing or the like.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明は、金属板アイリスを、端面
が相互に接触する1枚の主金属板と所要枚の従金属板と
から構成するとともに、前記主金属板を導波管外から挿
通したねじ部材により締付は可能とし、かつ主金属板と
従金属板との接触面を、主金属板の締付は方向に対し傾
斜する楔面として従金属板の固定を行なうようにしてい
るので、ろう付けの困難な場所にも簡単に金属板を取付
けることができ、しかも良好な電気的接触が得られる。
As explained above, the present invention comprises a metal plate iris consisting of one main metal plate and a required number of secondary metal plates whose end surfaces are in contact with each other, and the main metal plate is inserted from outside the waveguide. Tightening is possible with a screw member, and the contact surface between the main metal plate and the subordinate metal plate is a wedge surface that is inclined with respect to the direction in which the main metal plate is tightened, and the subordinate metal plate is fixed. Therefore, the metal plate can be easily attached even in places where brazing is difficult, and good electrical contact can be obtained.

また取付けが簡単なため、マイクロ波の反射の割合等の
測定を実際に行なった後に、最適な金属板アイリスを取
付けることができ、一旦取イ」けた金属板の形状を微調
整する等の作業が不要である。
In addition, since it is easy to install, you can install the optimal metal plate iris after actually measuring the microwave reflection rate, etc., and you can perform tasks such as fine-tuning the shape of the metal plate once it has been removed. is not necessary.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す金属板アイリスの構成
図、第2図は金属板アイリスを第1図の上方から見た構
成図、第3図は本発明の他の実施例を示す第2図相当図
、第4図は本発明のさらに他の実膿例を示す第1図相当
図、第5図(a)は一般的な導波管装置の構成を示す断
面図、同図(b)は同図(a)の右側面図、第6図およ
び第7図は従来の金属板アイリスの取付は構造をそれぞ
れ示す部分破削斜視図である。 11・・・金属板アイリス、12・・・矩形導波管、1
3.23・・・生金ii、13 a ・・・側端面、1
4゜24・・・従金属板、14a、23a、24a・・
・外側端面、14b、23b、24b・・・内側端面、
15・・・孔、16・・・ねじ部材、17・・・半田、
25・・・貫通孔、27・・・金属板。 出願人代理人  佐  藤  −雄 第1 図 第3図 第4図 1PJ5図
Fig. 1 is a block diagram of a metal plate iris showing one embodiment of the present invention, Fig. 2 is a block diagram of the metal plate iris seen from above Fig. 1, and Fig. 3 is a block diagram showing another embodiment of the present invention. FIG. 4 is a diagram corresponding to FIG. 2, FIG. 4 is a diagram equivalent to FIG. 1 showing still another example of the present invention, and FIG. Figure (b) is a right side view of figure (a), and Figures 6 and 7 are partially cutaway perspective views showing the structure of the conventional metal plate iris installation. 11... Metal plate iris, 12... Rectangular waveguide, 1
3.23... Raw gold ii, 13 a... Side end surface, 1
4゜24...Slave metal plate, 14a, 23a, 24a...
・Outer end surface, 14b, 23b, 24b...inner end surface,
15... Hole, 16... Screw member, 17... Solder,
25... Through hole, 27... Metal plate. Applicant's representative Mr. Sato Figure 1 Figure 3 Figure 4 Figure 1 PJ5 Figure

Claims (1)

【特許請求の範囲】 1、導波管内に金属板アイリスを設置した導波管装置に
おいて、前記金属板アイリスを、端面が相互に接触する
1枚の主金属板と所要枚の従金属板とから構成するとと
もに、前記主金属板を導波管外から挿通したねじ部材に
より締付け可能とし、かつ主金属板と従金属板との接触
面を、主金属板の締付け方向に対し傾斜する楔面として
従金属板の固定を行なうことを特徴とする導波管装置。 2、各金属板の導波管内面との接触面には、弾性および
導波性に富む金属板シートが配されていることを特徴と
する特許請求の範囲第1項記載の導波管装置。
[Claims] 1. In a waveguide device in which a metal plate iris is installed in a waveguide, the metal plate iris is formed by one main metal plate and a required number of secondary metal plates whose end surfaces are in contact with each other. The main metal plate can be tightened by a screw member inserted from outside the waveguide, and the contact surface between the main metal plate and the secondary metal plate is a wedge surface that is inclined with respect to the tightening direction of the main metal plate. A waveguide device characterized in that a secondary metal plate is fixed as a secondary metal plate. 2. The waveguide device according to claim 1, wherein a metal plate sheet having high elasticity and waveguiding properties is disposed on the contact surface of each metal plate with the inner surface of the waveguide. .
JP60170515A 1985-08-01 1985-08-01 Waveguide device Pending JPS6230406A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60170515A JPS6230406A (en) 1985-08-01 1985-08-01 Waveguide device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60170515A JPS6230406A (en) 1985-08-01 1985-08-01 Waveguide device

Publications (1)

Publication Number Publication Date
JPS6230406A true JPS6230406A (en) 1987-02-09

Family

ID=15906371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60170515A Pending JPS6230406A (en) 1985-08-01 1985-08-01 Waveguide device

Country Status (1)

Country Link
JP (1) JPS6230406A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005310478A (en) * 2004-04-20 2005-11-04 Naohisa Goto Plasma treatment device and treatment method, and manufacturing method of flat panel display
US7098859B2 (en) 2003-10-30 2006-08-29 Mitsubishi Denki Kabushiki Kaisha Antenna unit
JP2008021465A (en) * 2006-07-11 2008-01-31 Tokyo Electron Ltd Plasma processing device and plasma processing method
US11972930B2 (en) 2015-10-29 2024-04-30 Applied Materials, Inc. Cylindrical cavity with impedance shifting by irises in a power-supplying waveguide

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7098859B2 (en) 2003-10-30 2006-08-29 Mitsubishi Denki Kabushiki Kaisha Antenna unit
JP2005310478A (en) * 2004-04-20 2005-11-04 Naohisa Goto Plasma treatment device and treatment method, and manufacturing method of flat panel display
JP2008021465A (en) * 2006-07-11 2008-01-31 Tokyo Electron Ltd Plasma processing device and plasma processing method
US11972930B2 (en) 2015-10-29 2024-04-30 Applied Materials, Inc. Cylindrical cavity with impedance shifting by irises in a power-supplying waveguide

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