JPS6230336U - - Google Patents
Info
- Publication number
- JPS6230336U JPS6230336U JP12096085U JP12096085U JPS6230336U JP S6230336 U JPS6230336 U JP S6230336U JP 12096085 U JP12096085 U JP 12096085U JP 12096085 U JP12096085 U JP 12096085U JP S6230336 U JPS6230336 U JP S6230336U
- Authority
- JP
- Japan
- Prior art keywords
- developing device
- spin developing
- spin
- semiconductor wafer
- forth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12096085U JPS6230336U (el) | 1985-08-07 | 1985-08-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12096085U JPS6230336U (el) | 1985-08-07 | 1985-08-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6230336U true JPS6230336U (el) | 1987-02-24 |
Family
ID=31009772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12096085U Pending JPS6230336U (el) | 1985-08-07 | 1985-08-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6230336U (el) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009075182A (ja) * | 2007-09-19 | 2009-04-09 | Sumitomo Bakelite Co Ltd | ポジ型感光性樹脂組成物の硬化膜の形成方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54102123A (en) * | 1978-01-27 | 1979-08-11 | Matsushita Electric Ind Co Ltd | Developing method |
| JPS5632724A (en) * | 1979-08-24 | 1981-04-02 | Hitachi Ltd | Photoresist applying apparatus |
| JPS57192955A (en) * | 1981-05-25 | 1982-11-27 | Toppan Printing Co Ltd | Developing method |
| JPS5963726A (ja) * | 1982-10-05 | 1984-04-11 | Toshiba Corp | ホトレジスト現像装置 |
-
1985
- 1985-08-07 JP JP12096085U patent/JPS6230336U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54102123A (en) * | 1978-01-27 | 1979-08-11 | Matsushita Electric Ind Co Ltd | Developing method |
| JPS5632724A (en) * | 1979-08-24 | 1981-04-02 | Hitachi Ltd | Photoresist applying apparatus |
| JPS57192955A (en) * | 1981-05-25 | 1982-11-27 | Toppan Printing Co Ltd | Developing method |
| JPS5963726A (ja) * | 1982-10-05 | 1984-04-11 | Toshiba Corp | ホトレジスト現像装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009075182A (ja) * | 2007-09-19 | 2009-04-09 | Sumitomo Bakelite Co Ltd | ポジ型感光性樹脂組成物の硬化膜の形成方法 |