JPS6230222A - Production of smectic liquid crystal device - Google Patents

Production of smectic liquid crystal device

Info

Publication number
JPS6230222A
JPS6230222A JP16997485A JP16997485A JPS6230222A JP S6230222 A JPS6230222 A JP S6230222A JP 16997485 A JP16997485 A JP 16997485A JP 16997485 A JP16997485 A JP 16997485A JP S6230222 A JPS6230222 A JP S6230222A
Authority
JP
Japan
Prior art keywords
liquid crystal
phase
smectic
panel
crystal material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16997485A
Other languages
Japanese (ja)
Other versions
JPH0785144B2 (en
Inventor
Takamasa Harada
隆正 原田
Masaaki Taguchi
田口 雅明
Sadayuki Shimoda
貞之 下田
Kokichi Ito
伊藤 耕吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP60169974A priority Critical patent/JPH0785144B2/en
Publication of JPS6230222A publication Critical patent/JPS6230222A/en
Publication of JPH0785144B2 publication Critical patent/JPH0785144B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Liquid Crystal (AREA)

Abstract

PURPOSE:To decrease the number of dislocations of the liquid crystal material packed in a panel as far as possible by injecting the liquid crystal material into the panel then reheating up the liquid crystal material up to the smectic A phase then subjecting the same to slow cooling. CONSTITUTION:The liquid crystal material in the cell takes the smectic C phase while forming domains in the process when the liquid crystal material changes from the liquid phase to the smectic A phase if the liquid crystal material is slowly cooled by natural cooling after the liquid crystal cell is constituted by filling said material into the cell. An injection port 3 is hermetically closed by a sealing material to com plete the liquid crystal panel upon thorough cooling of the liquid crystal material injected into the panel. Such liquid crystal panel is contained into a thermostatic chamber and is again heated until the liquid crystal material packed into the cell attains the smectic A phase. The heating of the liquid crystal panel is stopped at the point of the time when all the liquid crystal molecules are arrayed in the smectic A phase. If the crystal panel is gradually cooled to the temp. at which the smectic phase is attained in succession thereto, the liquid crystal molecules in the panel begin to simultaneously tilt so as to have an angle theta with the normal of the layer and the liquid crystal molecules in the liquid crystal panel change to the smectic C phase. The dislocations generated in the stage of injection are mostly annihilated.

Description

【発明の詳細な説明】 (技術分野) 本発明は、カイラルスメクティック液晶装置の製造方法
に関する。
DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to a method for manufacturing a chiral smectic liquid crystal device.

(従来技術) 近年、カイラルスメクティックC相を使用した液晶装置
は、高速応答性と記憶保持性を持つためディスプレイ装
置や、カメラ用、プリンタ用の光このカイラルスメクテ
ィックC相を持つ強誘電性液晶化合物としては、例えば
、P−デシルオキシベンジリデン−P−アミノ−2−メ
チブチルシンナメートが広く知られており、その液晶分
子は、第6図に示17たように一定の方位角θを持って
層L1.L2.L3.L4毎に捩れた螺旋構造を採って
配列している。
(Prior art) In recent years, liquid crystal devices using chiral smectic C phase have been developed to have high-speed response and memory retention properties, so they are used for display devices, cameras, and printers. For example, P-decyloxybenzylidene-P-amino-2-methybutylcinnamate is widely known, and its liquid crystal molecules have a constant azimuthal angle θ as shown in Figure 6. Layer L1. L2. L3. They are arranged in a twisted spiral structure for each L4.

ところで、このカイラルスメクティックC相を持つ液晶
化合物をその代旋問期(通常敷用m)よりも小さい間隙
(例えばl#Lm程度)を持つ2枚の基板A、Hの間に
注入して液晶セルを構成すると(第7図イ)、液晶分子
は、螺旋構造を消失して分子軸を基板A、Hに平行にし
て層の法線方向から時計回りに角度θ傾いたドメインと
、反時計回りにθつまり一〇傾いたドメインを混存した
状態を持つとともに(同図口)1分子軸に垂直な方向の
電気双極子を備えている。
By the way, a liquid crystal compound having this chiral smectic C phase is injected between two substrates A and H having a gap (for example, about l#Lm) that is smaller than the interpolation period (usually used) to form a liquid crystal compound. When a cell is constructed (Fig. 7A), the liquid crystal molecules lose their helical structure and form domains with molecular axes parallel to substrates A and H, tilted at an angle θ clockwise from the normal direction of the layers, and a domain counterclockwise. It has a mixture of domains tilted by θ, or 10 degrees, around it (as shown in the figure), and it also has an electric dipole in a direction perpendicular to the 1-molecule axis.

このため、一方のドメインが基板A、Hに対して−L向
きの電気双極子を持つと、他方のドメインは下向きの電
気双極子を持つことになり、したかって基板A、B間に
電界を印加すると、全ての液晶分子は、層の法線方向か
ら十〇もしくは一〇のいずれか一方に傾いた位置に揃い
、また逆向きの電界を印加すると、液晶分子も反転して
一〇もしくは十〇傾いた位置に一斉に揃った状態で配列
する。
Therefore, if one domain has an electric dipole pointing -L with respect to substrates A and H, the other domain will have an electric dipole pointing downward, thus creating an electric field between substrates A and B. When an electric field is applied, all the liquid crystal molecules are aligned at a position tilted either 10 or 10 from the normal direction of the layer, and when an opposite electric field is applied, the liquid crystal molecules are also reversed and tilted at 10 or 10. 〇 Arrange them in a tilted position all at once.

このセルの両面に偏光板を配設して電界を印加すると、
液晶分子の移動により明状態や暗状態が生じて表示パネ
ルや光シャッタとしての機能を持たせることができる(
第8図)、このように構成した液晶パネルは、マイクロ
秒台という非常に速い応答速度と、一旦表示したパター
ンを電界除去後も保持するという優れた特性を持ってい
る。
When polarizing plates are placed on both sides of this cell and an electric field is applied,
The movement of liquid crystal molecules creates bright and dark states, allowing it to function as a display panel or optical shutter (
(FIG. 8), the liquid crystal panel constructed in this manner has an extremely fast response speed of microseconds and an excellent property of retaining the pattern once displayed even after the electric field is removed.

このスメクチック液晶パネルは、強誘電性を持つ液晶物
質を液相にして基板間に注入した後、除冷しながらスメ
クチックA相においてモノドメインを形成させ、次いで
カイラルスメクチックC相まで冷却してドメインを成長
させて一様な表示特性を持たせるように構成されている
This smectic liquid crystal panel is made by injecting a ferroelectric liquid crystal material into a liquid phase between substrates, forming monodomains in the smectic A phase while slowly cooling, and then cooling to the chiral smectic C phase to form domains. It is configured to grow and have uniform display characteristics.

しかしながら、パネル基板の表面は、その処理過程に起
因して種々の異方性を持つためにモノドメイン形成時に
多数の転位が生じて液晶パネルの表示品質に低下を来た
すという問題があった。
However, since the surface of the panel substrate has various anisotropies due to its processing process, there is a problem in that a large number of dislocations occur during the formation of monodomains, which deteriorates the display quality of the liquid crystal panel.

(目的) 本発明は、このような問題に鑑み、パネルに充填されて
いる液晶物質の転位数を可及的に少なくすることができ
るスメクチック液晶装置の製造方法を提案することを目
的とする。
(Objective) In view of these problems, an object of the present invention is to propose a method for manufacturing a smectic liquid crystal device that can reduce as much as possible the number of dislocations in a liquid crystal material filled in a panel.

(問題を解決するための手段) すなわち、本発明が特徴とするところは、液晶物質注入
後、スメクチックA相まで再度昇温してから除冷するよ
うにした点にある。
(Means for Solving the Problem) That is, the present invention is characterized in that after the liquid crystal material is injected, the temperature is raised again to the smectic A phase, and then the temperature is slowly cooled.

(構成) そこで、以下に本発明の詳細を図示した実施例に基づい
て説明する。
(Structure) Therefore, details of the present invention will be described below based on illustrated embodiments.

第1図は、本発明に使用するスメクチック液晶パネルを
構成するセルの一実施例を示すものであって、図中符号
1は、液晶表示パネルを構成する一方の基板で、透明導
電性材料により、セグメント電極1a、1a、1a・・
・・が形成されたガラス等の電気絶縁性透明板1bの表
面に印刷やディッピングによってポリイミドの薄膜を設
けて基板1の面方向の全ての向きに均一な配向性を持つ
ランダム水平配向膜層ICを形成して構成されている。
FIG. 1 shows an embodiment of a cell constituting a smectic liquid crystal panel used in the present invention, and reference numeral 1 in the figure denotes one substrate constituting the liquid crystal display panel, which is made of a transparent conductive material. , segment electrodes 1a, 1a, 1a...
A thin film of polyimide is provided by printing or dipping on the surface of an electrically insulating transparent plate 1b such as glass on which... is formed to form a random horizontal alignment film layer IC having uniform orientation in all directions in the plane of the substrate 1. It is composed of

2は、液晶表示パネルを構成する他方の基板で、セグメ
ント電極1a、la、la・・・・と直交するようにコ
モン電極2a、2a、2a・・・・が形成された電気絶
縁性透明板2bの表面にポリイミドの薄膜を設け、この
薄膜の表面を一方向にラビング処理を行なって一方向だ
けの配向を付与した一軸配向膜層2cを形成して構成さ
れている。これら2枚の基板1.2は、液晶化合物の螺
旋ピッチよりも小さい間隙を持ってランダム水平配向膜
層ICと一軸配向膜層2cを対向させて平行に配置する
とともに、−側に液晶注入口3を設けるようにシール剤
4により接合してセルに構成されている。
Reference numeral 2 denotes the other substrate constituting the liquid crystal display panel, which is an electrically insulating transparent plate on which common electrodes 2a, 2a, 2a, . . . are formed orthogonally to the segment electrodes 1a, la, la, . A polyimide thin film is provided on the surface of the polyimide film 2b, and the surface of this thin film is rubbed in one direction to form a uniaxially oriented film layer 2c which is oriented in only one direction. These two substrates 1.2 are arranged in parallel with the random horizontal alignment film layer IC and the uniaxial alignment film layer 2c facing each other with a gap smaller than the helical pitch of the liquid crystal compound, and have a liquid crystal injection port on the negative side. 3 are bonded together with a sealant 4 to form a cell.

このように形成したセルに広く知られている手法を用い
て液晶物質を満たして液晶セルを構成した後、このセル
を自然冷却により除冷すると、セル6内の液晶物質は、
液体相からスメクチックA相になる過程においてドメイ
ンを形成しつつスメクチックC相となる(第2図り)、
注入された液晶物質が十分に冷却すると、注入口3をシ
ール材により密閉して液晶パネルに仕上げる。この時点
における液晶パネルは、ドメイン間に多数の転位を含ん
でいるため1表示品質が非常に低い(第5図)。
After forming a liquid crystal cell by filling the cell thus formed with a liquid crystal material using a widely known method, when this cell is gradually cooled by natural cooling, the liquid crystal material in the cell 6 becomes
In the process of changing from the liquid phase to the smectic A phase, it becomes the smectic C phase while forming domains (second diagram),
When the injected liquid crystal substance has sufficiently cooled, the injection port 3 is sealed with a sealing material to complete the liquid crystal panel. The liquid crystal panel at this point contains a large number of dislocations between domains, so the display quality is very low (FIG. 5).

この液晶パネルを恒温槽に収容してセル内部に充填され
た液晶物質がスメクチックA相に達するまで再び加熱す
ると(第2図■)、セル内の液晶物質は、前述のパネル
構成時に形成された層構造を保持したままで、転位部に
おける配列の乱れた液晶分子をドメインの分子配列に引
込みつつ全ての液晶分子が長袖を基板に対して平行とな
るように整列する(第3図■)、云うまでもなく、この
スメクチックA相においては、液晶分子の層は基板に垂
直な方向に揃っている。スメクチックA相において全て
の液晶分子が整列した時点で液晶パネルの加熱を中止し
、続いて液晶パネルをスメクチックC相になる温度まで
徐々に冷却していくと(第2図■)、パネル内の液晶分
子は、層の方線に対して角度θを持つように一斉に傾き
始める。
When this liquid crystal panel is placed in a constant temperature oven and heated again until the liquid crystal substance filled inside the cell reaches the smectic A phase (Fig. 2 ■), the liquid crystal substance in the cell is replaced by the liquid crystal substance formed during the panel construction described above. While maintaining the layered structure, all the liquid crystal molecules are aligned so that their long sleeves are parallel to the substrate while pulling the disordered liquid crystal molecules at the dislocation site into the molecular alignment of the domain (Fig. 3 ■). Needless to say, in this smectic A phase, the layers of liquid crystal molecules are aligned in the direction perpendicular to the substrate. When all the liquid crystal molecules are aligned in the smectic A phase, heating of the liquid crystal panel is stopped, and then the liquid crystal panel is gradually cooled down to the temperature at which it becomes the smectic C phase (Fig. 2 ■). The liquid crystal molecules all begin to tilt at an angle θ with respect to the layer normal.

云うまでもなく、この冷却過程における温度降下速度は
、液晶分子の運動速度に比較して極めて低いため、液晶
パネル内の液晶分子は、前述の工程における配列関係を
崩すことなくスメクチックC相となる(第3図I)、こ
れにより、注入時に発生していた転位は、スメクチック
C相に達した時点でほとんど消失してしまう。
Needless to say, the temperature drop rate during this cooling process is extremely low compared to the movement speed of the liquid crystal molecules, so the liquid crystal molecules in the liquid crystal panel enter the smectic C phase without disrupting the alignment relationship in the above-mentioned process. (FIG. 3I) As a result, most of the dislocations generated during implantation disappear when the smectic C phase is reached.

[実施例] 強誘導性液晶物質であるP−デシルオキシベンジリデン
−P−アミノ−2−メチブチルシンナメートを温度11
7℃まで加熱して液相状態としてセルに注入後、自然冷
却して製作した液晶パネルを偏光顕微鏡により観察した
ところ、第7図に示したようにパネル全面に転位が発生
しており、その密度は1mrn’当たり1200個にも
達した。
[Example] P-decyloxybenzylidene-P-amino-2-methybutylcinnamate, a strongly inductive liquid crystal substance, was heated to a temperature of 11
When we observed a liquid crystal panel produced by heating it to 7°C, injecting it into a liquid phase into a cell, and cooling it naturally using a polarizing microscope, we found that dislocations had occurred over the entire surface of the panel, as shown in Figure 7. The density reached as high as 1200 pieces per mrn'.

」−述の液晶パネルを恒温槽に収容して、2−メチルブ
チル−P(P−n−デシロキシベンジリブアミノ)がス
メクチックA相に変化する温度93℃まで再び昇温して
から除冷したところ、第5図に示したように、転位がほ
とんど消失しており、その密度は1mrn’当たり高々
250個程度にまで激減した。
The liquid crystal panel described above was placed in a constant temperature bath, and the temperature was raised again to 93°C, the temperature at which 2-methylbutyl-P (P-n-decyloxybenzylibuamino) changes to the smectic A phase, and then slowly cooled. However, as shown in FIG. 5, most of the dislocations have disappeared, and the density has drastically decreased to about 250 dislocations per mrn'.

なお、上述した実施例においては、P−デシルオキシベ
ンジリデン−P−アミノ−2−メチブチルシンナメート
について説明したが、 一般式 %式% により表わされるピリミジン系液晶化合物や5−4− 
(2−メチルブチルオキシーレゾルシリデン−4−アル
キルn−オクチルアニリンと P−n−才クチルフェニル−P’−6−メチルオクチル
オキシベンゾエート を等率混合してなる強誘電性カイラルスメクティック液
晶化合物を使用した場合においても、セルへの充填後、
各液晶物質がスメクチックA相となる温度まで加熱し、
ついで徐冷する工程を採ることにより転位を消失させる
ことができる。
In the above-mentioned examples, P-decyloxybenzylidene-P-amino-2-methybutylcinnamate was explained, but pyrimidine-based liquid crystal compounds represented by the general formula % and 5-4-
(A ferroelectric chiral smectic liquid crystal compound made by mixing equal proportions of 2-methylbutyloxyresolcylidene-4-alkyl n-octylaniline and Pn-cutylphenyl-P'-6-methyloctyloxybenzoate. Even when used, after filling the cell,
Heating to a temperature at which each liquid crystal substance becomes smectic A phase,
Dislocations can then be eliminated by a step of slow cooling.

また、上述の実施例においては基板として表面にポリイ
ミドにより一軸配向膜層、及びランダム水平配向膜層を
形成したものを用いたが、−軸配向膜をポリビニールア
ルコール、弗素樹脂、シラン等の有機膜やS i 02
斜方蒸着膜などにより形成した基板を、またランダム水
平配向膜をエポキシ、ポリビニールアルコール、弗素樹
脂、ポリウレタン、シラン、フェノール、尿素などの有
機膜、5i02やMgF2などを蒸着してなる無機膜な
どにより形成してなる基板を用いた場合にも同様の作用
を奏することを確認した。
In addition, in the above embodiment, a substrate having a uniaxially oriented film layer and a random horizontally oriented film layer formed of polyimide on the surface was used, but the -axis oriented film was made of an organic material such as polyvinyl alcohol, fluororesin, or silane. Membrane and S i 02
Substrates formed by oblique vapor deposition, random horizontal alignment films, organic films such as epoxy, polyvinyl alcohol, fluorine resin, polyurethane, silane, phenol, urea, etc., inorganic films formed by vapor deposition of 5i02, MgF2, etc. It has been confirmed that the same effect can be obtained when using a substrate formed by the following methods.

(効果) 以上、説明したように本発明においては、液晶物質をセ
ルに注入した後、この液晶物質を再度スメクチックA相
まで加熱してから徐々に冷却する工程を付加したので、
液晶物質の充填時に発生するディスロケーションを効果
的に除去して表示品質が高いスメクチック液晶装置を実
現することができる。
(Effects) As explained above, in the present invention, after the liquid crystal substance is injected into the cell, the process of heating the liquid crystal substance again to the smectic A phase and then gradually cooling it is added.
A smectic liquid crystal device with high display quality can be realized by effectively eliminating dislocation that occurs when filling a liquid crystal material.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(イ)(ロ)は、それぞれ本発明に使用する液晶
セルの一実施例を示す装置の斜視断面図及び断面図、第
2図は、本発明による製造方法における液晶物質の温度
サイクルを示す説明図、第3図は、再熱処理過程におけ
る相転移を示す基板の上側から分子配列状態を見た説明
図、第4図は、本発明に係る熱処理後における液晶パネ
ルの転位を示す説明図、第5図は、従来装置における転
位を示す説明図、第6図は、カイラルスメクティック液
晶の分子配列を示す模式図、第7図(イ)(ロ)は、そ
れぞれセル間隙を液晶分子の螺旋ピッチ以下にしたとき
の分子の配列を示す模式図、第8図は、スメクチックA
相のドメインと偏光の関係を示す説明図である。 1・・・・基板    1a・・・・電気絶縁性透明板
IC・・・・ランダム水平配向膜層 2・・・・基板    2a・・・・電気絶縁性透明板
2C・・・・−軸配向膜層 3・・・・注入口   4・・・・シール材第1図 (イ) ?b (ロ) 第2図 I           [■ 第3図 工■
FIGS. 1(a) and 1(b) are a perspective sectional view and a sectional view of an apparatus showing one embodiment of a liquid crystal cell used in the present invention, respectively, and FIG. 2 is a temperature cycle of a liquid crystal material in a manufacturing method according to the present invention. FIG. 3 is an explanatory diagram showing the state of molecular arrangement from above the substrate showing the phase transition during the reheat treatment process. FIG. 4 is an explanatory diagram showing the dislocation of the liquid crystal panel after the heat treatment according to the present invention. Figures 5 and 5 are explanatory diagrams showing dislocations in conventional devices, Figure 6 is a schematic diagram showing the molecular arrangement of chiral smectic liquid crystals, and Figures 7 (a) and (b) respectively define the cell gap between liquid crystal molecules. Figure 8 is a schematic diagram showing the arrangement of molecules when the helical pitch is lower than that of smectic A.
FIG. 2 is an explanatory diagram showing the relationship between phase domains and polarization. 1...Substrate 1a...Electrically insulating transparent plate IC...Random horizontal alignment film layer 2...Substrate 2a...Electrically insulating transparent plate 2C...-Axis alignment Membrane layer 3... Inlet 4... Seal material Figure 1 (a)? b (b) Fig. 2 I [■ Fig. 3 ■

Claims (1)

【特許請求の範囲】[Claims] 2枚の基板を対向させてなるセル構造体に、強誘電性カ
イラルスメクティック液晶化合物を封入してからスメク
チックC相に冷却する工程と、前記セル構造体に封入さ
れている液晶物質をスメクチックA相まで加熱した後、
スメクチック相まで冷却する工程とからなるスメクティ
ック液晶装置の製造方法。
A step of sealing a ferroelectric chiral smectic liquid crystal compound into a cell structure formed by opposing two substrates and cooling it to a smectic C phase, and converting the liquid crystal substance sealed in the cell structure into a smectic A phase. After heating to
A method for manufacturing a smectic liquid crystal device, which comprises a step of cooling to a smectic phase.
JP60169974A 1985-08-01 1985-08-01 Method for manufacturing smectic liquid crystal device Expired - Lifetime JPH0785144B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60169974A JPH0785144B2 (en) 1985-08-01 1985-08-01 Method for manufacturing smectic liquid crystal device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60169974A JPH0785144B2 (en) 1985-08-01 1985-08-01 Method for manufacturing smectic liquid crystal device

Publications (2)

Publication Number Publication Date
JPS6230222A true JPS6230222A (en) 1987-02-09
JPH0785144B2 JPH0785144B2 (en) 1995-09-13

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Application Number Title Priority Date Filing Date
JP60169974A Expired - Lifetime JPH0785144B2 (en) 1985-08-01 1985-08-01 Method for manufacturing smectic liquid crystal device

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6380226A (en) * 1986-09-24 1988-04-11 Seiko Epson Corp Liquid crystal electrooptic device
JPH01100514A (en) * 1987-10-13 1989-04-18 Semiconductor Energy Lab Co Ltd Manufacture of liquid crystal electrooptic device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59201021A (en) * 1983-04-28 1984-11-14 Canon Inc Optical modulation element and its manufacture
JPS59214824A (en) * 1983-05-20 1984-12-04 Seiko Epson Corp Liquid-crystal electrooptic device
JPS60114824A (en) * 1983-11-25 1985-06-21 Canon Inc Control method of orientation of liquid crystal and element used by said method
JPS60122919A (en) * 1983-12-07 1985-07-01 Canon Inc Liquid crystal element
JPS60156043A (en) * 1984-01-23 1985-08-16 Canon Inc Liquid crystal element

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59201021A (en) * 1983-04-28 1984-11-14 Canon Inc Optical modulation element and its manufacture
JPS59214824A (en) * 1983-05-20 1984-12-04 Seiko Epson Corp Liquid-crystal electrooptic device
JPS60114824A (en) * 1983-11-25 1985-06-21 Canon Inc Control method of orientation of liquid crystal and element used by said method
JPS60122919A (en) * 1983-12-07 1985-07-01 Canon Inc Liquid crystal element
JPS60156043A (en) * 1984-01-23 1985-08-16 Canon Inc Liquid crystal element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6380226A (en) * 1986-09-24 1988-04-11 Seiko Epson Corp Liquid crystal electrooptic device
JPH01100514A (en) * 1987-10-13 1989-04-18 Semiconductor Energy Lab Co Ltd Manufacture of liquid crystal electrooptic device

Also Published As

Publication number Publication date
JPH0785144B2 (en) 1995-09-13

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