JPS62299710A - パタ−ン検査装置 - Google Patents

パタ−ン検査装置

Info

Publication number
JPS62299710A
JPS62299710A JP61142940A JP14294086A JPS62299710A JP S62299710 A JPS62299710 A JP S62299710A JP 61142940 A JP61142940 A JP 61142940A JP 14294086 A JP14294086 A JP 14294086A JP S62299710 A JPS62299710 A JP S62299710A
Authority
JP
Japan
Prior art keywords
length measurement
sensor
pattern
length
measurement sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61142940A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0435684B2 (enrdf_load_stackoverflow
Inventor
Satoshi Iwata
敏 岩田
Moritoshi Ando
護俊 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP61142940A priority Critical patent/JPS62299710A/ja
Priority to DE87401052T priority patent/DE3786699T2/de
Priority to EP87401052A priority patent/EP0246145B1/en
Priority to US07/047,480 priority patent/US4830497A/en
Publication of JPS62299710A publication Critical patent/JPS62299710A/ja
Publication of JPH0435684B2 publication Critical patent/JPH0435684B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/0006—Industrial image inspection using a design-rule based approach
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/60—Analysis of geometric attributes
    • G06T7/62—Analysis of geometric attributes of area, perimeter, diameter or volume
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G01N2021/95615—Inspecting patterns on the surface of objects using a comparative method with stored comparision signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30172—Centreline of tubular or elongated structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Quality & Reliability (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Geometry (AREA)
  • Image Processing (AREA)
  • Closed-Circuit Television Systems (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP61142940A 1986-05-10 1986-06-20 パタ−ン検査装置 Granted JPS62299710A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP61142940A JPS62299710A (ja) 1986-06-20 1986-06-20 パタ−ン検査装置
DE87401052T DE3786699T2 (de) 1986-05-10 1987-05-07 System zur Untersuchung von Mustern.
EP87401052A EP0246145B1 (en) 1986-05-10 1987-05-07 Pattern inspection system
US07/047,480 US4830497A (en) 1986-05-10 1987-05-11 Pattern inspection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61142940A JPS62299710A (ja) 1986-06-20 1986-06-20 パタ−ン検査装置

Publications (2)

Publication Number Publication Date
JPS62299710A true JPS62299710A (ja) 1987-12-26
JPH0435684B2 JPH0435684B2 (enrdf_load_stackoverflow) 1992-06-11

Family

ID=15327182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61142940A Granted JPS62299710A (ja) 1986-05-10 1986-06-20 パタ−ン検査装置

Country Status (1)

Country Link
JP (1) JPS62299710A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0435684B2 (enrdf_load_stackoverflow) 1992-06-11

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees