JPS62292651A - Production of base material for quartz optical fiber - Google Patents

Production of base material for quartz optical fiber

Info

Publication number
JPS62292651A
JPS62292651A JP13348486A JP13348486A JPS62292651A JP S62292651 A JPS62292651 A JP S62292651A JP 13348486 A JP13348486 A JP 13348486A JP 13348486 A JP13348486 A JP 13348486A JP S62292651 A JPS62292651 A JP S62292651A
Authority
JP
Japan
Prior art keywords
optical fiber
sol
quartz tube
quartz
base material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13348486A
Other languages
Japanese (ja)
Inventor
Masanobu Motoki
元木 正信
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP13348486A priority Critical patent/JPS62292651A/en
Publication of JPS62292651A publication Critical patent/JPS62292651A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/016Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by a liquid phase reaction process, e.g. through a gel phase

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

PURPOSE:To produce the title base material for optical fiber inexpensively, easily, and in a short time by depositing a fine-particle sol contg. an appropriate amt. of an effective glass component on the inner surface of a quartz tube, gelating the sol, drying and then sintering the gel, and making the quartz tube solid. CONSTITUTION:A sol contg. >=0.1mg/ml effective glass component wherein 0-100% of the component has 0.01-0.1mum mean particle diameter is deposited thinly and uniformly on the inner surface of a quartz tube contg. a dopant of a Ge compd. etc., for changing the refractive index or without the dopant. The sol is gelated, and then the gel is dried at about 70 deg.C, heated at about 1,400 deg.C, sintered, and vitrified. The quartz tube is subsequently made solid, and a base material for quartz optical fiber is obtained.

Description

【発明の詳細な説明】 3、発明の詳細な説明 〔産業上の利用分野〕 本発明は、石英系光ファイバ用母材の製造方法に関する
Detailed Description of the Invention 3. Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a method of manufacturing a preform for a quartz-based optical fiber.

〔従来の技術〕[Conventional technology]

石英系の光ファイバは、将来のPCM通信などの伝送路
として、必要欠くべからざるものとして、最近特にその
生産が拡大しつつある。その製造方法としてVAD法、
MCVD法などが比較的よく知られているが、最近注目
されている技術としてブルーゲル法があり、比較的安価
に石英管、ファイバが作製されるようになった。また、
石英管の内面にゾルをスプレーしてシリカを堆積させ焼
結して光ファイバ用母材とする特許も報告されている(
UK patent GB2023571A) 。
The production of quartz-based optical fibers has been expanding recently, as they are indispensable as transmission lines for future PCM communications and the like. The manufacturing method is VAD method,
Although the MCVD method is relatively well known, the blue gel method is a technique that has recently attracted attention, and it has become possible to produce quartz tubes and fibers at relatively low cost. Also,
A patent has also been reported for spraying sol on the inner surface of a quartz tube to deposit silica and sintering it as a base material for optical fibers (
UK patent GB2023571A).

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかしながら、MCVD法やVAD法では、製造原価が
扁価でありそれらよりも安価にできるブルーゲル法では
現在のところ日数がかかりすぎるなどの欠点がある。ま
た、これらの方法は、ファイバを作製するために大がか
りな装置が必要とな本発明は、この様な問題点を解決す
るためのもので、その目的は、比較的安価でかつ容易に
短期間で石英系光ファイバを作製することにある。
However, the MCVD method and the VAD method have drawbacks such as low manufacturing costs, and the blue gel method, which is cheaper than them, currently takes too many days. In addition, these methods require large-scale equipment to fabricate the fiber.The present invention is intended to solve these problems, and its purpose is to fabricate fibers at relatively low cost and easily in a short period of time. The objective is to fabricate a silica-based optical fiber.

〔問題点を解決するための手段〕[Means for solving problems]

本発明の石英系光ファイバ用母材は、屈折率を変化させ
るためのドーパントを含む、あるいは含まない石英管の
内面に、有効シリカ分を0.1g/ m 1以上含みか
つそのうちの0〜100%が平均粒径0.01〜1μm
のシリカ微粒子であるゾルを、薄く、均一につけたのち
ゲル化させ乾燥・焼結を行ない、その後中実化し石英系
光ファイバを得ることを特徴とする。
The quartz-based optical fiber preform of the present invention contains an effective silica content of 0.1 g/m1 or more on the inner surface of the quartz tube, which may or may not contain a dopant for changing the refractive index, and has an effective silica content of 0 to 100%. % is average particle size 0.01-1μm
A silica-based optical fiber is obtained by applying a thin and uniform sol of silica particles, gelling it, drying and sintering it, and then solidifying it to obtain a silica-based optical fiber.

〔実施例1〕 エチルシリケート62.1gに0.2N塩酸8.0gを
加え、十分に攪拌しながら加水分解を行なった。
[Example 1] 8.0 g of 0.2N hydrochloric acid was added to 62.1 g of ethyl silicate, and hydrolysis was carried out with sufficient stirring.

次にテトラエトキシゲルマニウム(トリケミカル研究所
)7.5gを加えて十分に撹拌し反応させた後、水13
.4gを加え加水分解を終了させた。
Next, 7.5 g of tetraethoxygermanium (Trichemical Institute) was added and stirred sufficiently to react, and then 13 g of water was added.
.. 4 g was added to complete the hydrolysis.

エチルノリケート144.9g、無水エタノール244
.2g、29%アンモニア水6.2g、水50.0gを
混合し、2時間激しく攪拌した後、冷暗所にて熟成し、
シリカ微粒子を成長させた、この溶液を減圧濃縮した後
、乾燥工程の歩留りを上げるために濃縮液のアルコール
分を水と部分的に置換した。その後、加水分解溶液と混
合した際に急激なゲル化を起こさないようにp)(値を
2規定の塩酸を用いて4,0に調整し、さらに1.0μ
mのメンブランフィルタ−を用いて′fi過し平均粒系
0.28μmのシリカ微粒子の分散溶液を作り、前記加
水分解溶液と混合しゾルとした。
144.9 g of ethyl noricate, 244 g of absolute ethanol
.. 2g, 6.2g of 29% ammonia water, and 50.0g of water were mixed, stirred vigorously for 2 hours, and aged in a cool dark place.
After the solution in which the silica particles were grown was concentrated under reduced pressure, the alcohol content of the concentrated solution was partially replaced with water in order to increase the yield of the drying process. After that, the value was adjusted to 4.0 using 2N hydrochloric acid to prevent rapid gelation when mixed with the hydrolysis solution, and then 1.0μ
A dispersion solution of silica fine particles having an average particle size of 0.28 μm was prepared by filtering the dispersion solution using a membrane filter of 0.28 μm, and mixed with the hydrolyzed solution to form a sol.

ゾル−ゲル法により作成された直径20mm、内径10
m、長さ50cmの石英管の内面を十分に洗浄しよく乾
燥させて、両端に蓋をした。前記ゾルを0.2Nアンモ
ニア水と水を使用してpH(iを4.2にし、かつ体積
を20 Qmfに調整した後その4.3mlを石英キュ
ーブ中に入れ、蓋をしだ後2000rpmで回転しなが
らゲル化させた。
Diameter 20mm, inner diameter 10, created by sol-gel method
The inner surface of a 50 cm long quartz tube was thoroughly washed and dried, and both ends were capped. After adjusting the pH (i) of the sol to 4.2 and the volume to 20 Qmf using 0.2N ammonia water and water, 4.3 ml of the sol was placed in a quartz cube, and after the lid was closed, the mixture was heated at 2000 rpm. It was gelled while rotating.

これを70℃で4日間乾燥させた。つづいて1000℃
で加熱することでガラス化し、中実化することにより石
英系光ファイバ用母材を得た。同様の手順に従って50
本のファイバを作製したところ、歩留り80%で作製で
きた。
This was dried at 70°C for 4 days. Then 1000℃
The material was vitrified by heating and solidified to obtain a base material for a quartz-based optical fiber. 50 following similar steps
When we produced this fiber, we were able to produce it with a yield of 80%.

得られた光ファイバの赤外域での吸収スペクトルにより
OHiの含有量を測定したところ、2.7μmでの吸収
ピークが全く認められず、lppm以下であることが確
認された。また、得られたファイバを線引きしたところ
、ldB/kpm以下のt員失であることが確認された
。さらにクランド径125μmに対し4μmのコア径で
あり、比屈折率差は0.3%であることが1ifiされ
た。これらより本発明により得られた光ファイバはシン
グルモードファイバとしての条件を満たしており、従来
法で得られた光ファイバとなんら変わることがないこと
が確認された。
When the OHi content was measured by the absorption spectrum in the infrared region of the obtained optical fiber, no absorption peak at 2.7 μm was observed, and it was confirmed that the content was less than 1 ppm. Further, when the obtained fiber was drawn, it was confirmed that the fiber loss was less than 1 dB/kpm. Furthermore, it was determined that the core diameter was 4 μm with respect to the crund diameter of 125 μm, and the relative refractive index difference was 0.3%. From these results, it was confirmed that the optical fiber obtained by the present invention satisfies the conditions as a single mode fiber and is no different from the optical fiber obtained by the conventional method.

〔実施例2〕 実施例1と同様な方法で作製されたゾルを、0゜2Nア
ンモニア水と水を使用してpH(iを4.2にしかつ体
積を200m+j!に調整した後その3ml、直径20
fl、長さ50L3の石英管(東芝セラミンクス)の両
端に蓋をして流し込み800rpmで回転させながらゲ
ル化させた。これを60℃で5日間乾燥させ、1400
℃まで加熱し、ガラス化した後中実化することにより石
英系光ファイバを得た。同様の手順に従って50本のフ
ァイバを作製したところ、歩留り85%で作製できた。
[Example 2] A sol prepared in the same manner as in Example 1 was adjusted to pH (i to 4.2 and volume to 200 m+j! using 0°2N ammonia water and water, and then 3 ml of the sol was adjusted to 200 m+j!). Diameter 20
Both ends of a quartz tube (Toshiba Ceraminx) with a length of 50L3 were covered with lids, and the mixture was poured into a quartz tube and gelatinized while rotating at 800 rpm. This was dried at 60°C for 5 days and heated to 1400°C.
A quartz-based optical fiber was obtained by heating to ℃, vitrifying it, and solidifying it. When 50 fibers were manufactured according to the same procedure, the yield was 85%.

得られた光ファイバの赤外域での吸収スペクトルによる
OH基の含有量を測定したところ2.7μmでの吸収ピ
ークが全く認められず、lppm以下であることが確認
された。また損失値は10d m / km程度である
が、シングルモードのステップ構造となっていることが
%IL’2された。
When the OH group content of the obtained optical fiber was measured by absorption spectrum in the infrared region, no absorption peak at 2.7 μm was observed, and it was confirmed that the content was less than 1 ppm. Furthermore, although the loss value was about 10 d m / km, %IL'2 showed that it had a single mode step structure.

〔実施例3〕 エチルシリケート104.0gに0.2N塩酸36gを
加え十分に攪拌を行ない加水分解を完了させた。これに
平均粒径0,05μmのゲルマニア微粒子を1.7g加
えて十分に混合し0.4Nアンモニア水を使用して4.
7にp Hjll整を行なった後直径20、長さ50c
Mの石英管中に10m1入れ、両端にフタをして、15
00rpmで回転させながらゲル化させた。これを80
℃で2日間乾燥させて、1400℃まで加熱し、ガラス
化した後中実化を行ない石英系光ファイバ母材を得た。
[Example 3] 36 g of 0.2N hydrochloric acid was added to 104.0 g of ethyl silicate and sufficiently stirred to complete hydrolysis. 4. Add 1.7g of germania fine particles with an average particle size of 0.05μm to this, mix thoroughly, and use 0.4N ammonia water.
After adjusting pH to 7, the diameter is 20 and the length is 50 cm.
Pour 10ml into an M quartz tube, cover both ends, and add 15ml.
The gel was formed while rotating at 00 rpm. This is 80
It was dried for two days at .degree. C., heated to 1,400.degree. C., vitrified, and solidified to obtain a quartz-based optical fiber preform.

同様な手順に従って50本のファイバを作製したところ
、歩留り75%で作製できた0本ファイバは、シングル
モードのステップ構造を持っていることが確認された。
When 50 fibers were produced according to the same procedure, it was confirmed that 0 fibers produced with a yield of 75% had a single-mode step structure.

〔実施例4〕 エチルシリケート62.1gに0.5N塩酸21.5g
を加え加水分解を終了させた0次にエチルシリケート1
44.9g、無水エタノール183.3g、29%アン
モニア水5.6g、水50゜1gを混合し、2時間激し
く攪拌した後、冷暗所にて熟成し、シリカ微粒子を成長
させた、この溶液を減圧濃縮した後、乾燥工程の歩留り
を上げるために濃縮液のアルコール分を水と部分的に置
換した。その後、加水分解溶液を混合した際に急激なゲ
ル化を起こさないようにpH値を2規定の塩酸を用いて
4゜Oに調整し、さらに1.0μmのメンブランフィル
タ−を用いて濾過し平均粒系0゜28μmのシリカ微粒
子の分散溶液を作り、前記加水分解溶液と混合しゾルと
した。
[Example 4] 21.5 g of 0.5N hydrochloric acid to 62.1 g of ethyl silicate
The zero-order ethyl silicate 1 was added to complete the hydrolysis.
44.9 g, anhydrous ethanol 183.3 g, 29% ammonia water 5.6 g, and 50° 1 g of water were mixed, stirred vigorously for 2 hours, and then aged in a cool dark place to grow fine silica particles. After concentration, the alcohol content of the concentrate was partially replaced with water in order to increase the yield of the drying process. After that, the pH value was adjusted to 4°O using 2N hydrochloric acid to prevent rapid gelation when the hydrolyzed solution was mixed, and then filtered using a 1.0 μm membrane filter to obtain an average A dispersion solution of fine silica particles with a grain size of 0° and 28 μm was prepared and mixed with the hydrolyzed solution to form a sol.

ゾル−ゲル法によりホウ素がシリカに対して10%入っ
ている直径20n、内径10鵞1、長さ50口の石英管
を作製し、内部を十分に洗浄し乾燥させた。前記ゾルを
、0.2Nアンモニア水と水を使用してpH値を5.0
にし、かつ全量を200m1に調整した後その4rr+
j!をとり、石英管中に入れ11000rpで回転させ
ながら回転させた。これを40℃で6日間で乾燥させて
、1300℃まで加熱しガラス化させてから中実化を行
ない石英系光ファイバ母材を得た。同様の手順に従って
50本のファイバを作製したところ、歩留り80%で作
製できた。
A quartz tube containing 10% boron relative to silica and having a diameter of 20 nm, an inner diameter of 10 mm, and a length of 50 holes was prepared by the sol-gel method, and the inside was thoroughly cleaned and dried. The pH value of the sol was adjusted to 5.0 using 0.2N ammonia water and water.
and after adjusting the total volume to 200ml, the 4rr+
j! was placed in a quartz tube and rotated at 11,000 rpm. This was dried at 40° C. for 6 days, heated to 1300° C. to vitrify it, and then solidified to obtain a quartz-based optical fiber preform. When 50 fibers were manufactured according to the same procedure, the yield was 80%.

得られたファイバは、赤外域での吸収スペクトルの測定
から含有量はlppm以下であることが11!認された
。また得られたファイバを線引きしたところ1dB/−
以下の損失であることが確認された。
Measurement of the absorption spectrum in the infrared region showed that the content of the obtained fiber was less than lppm11! It has been certified. Also, when the obtained fiber was drawn, it was 1 dB/-
The following losses were confirmed.

〔実施例5〕 エチルシリケート207g、0.2N@酸26゜8gと
エタノール70gを加え、十分に攪拌しながら加水分解
を行なった0次にテトラエトキシゲルマニウム7.5g
を加え十分に攪拌し反応させた後、水44.7gを加え
加水分解を終了させ加水分解液を作製した。
[Example 5] 7.5 g of zero-order tetraethoxygermanium was obtained by adding 207 g of ethyl silicate, 26.8 g of 0.2N @ acid, and 70 g of ethanol, and hydrolyzing the mixture with thorough stirring.
After adding and sufficiently stirring to react, 44.7 g of water was added to complete the hydrolysis and a hydrolyzed solution was prepared.

ゾル−ゲル法により作製された直径20n、内径10m
、長さ50cImの石英管を十分に洗浄し、よく乾燥さ
せたものを前記加水分解液にひたした後ひきあげ外面に
ついたゾルをとり除いた1両端をサランラップでおおっ
て50℃の温度でゲル化させた。つづいて70℃で4日
間乾燥した後、1300℃まで加熱してガラス化したも
のを中実化することにより石英ガラス系光ファイバ用母
材を得た。
Diameter 20n, inner diameter 10m manufactured by sol-gel method
A quartz tube with a length of 50 cIm was thoroughly washed and dried, immersed in the hydrolysis solution, pulled up, the sol attached to the outer surface removed, and both ends covered with Saran wrap to gel at a temperature of 50°C. I let it happen. Subsequently, it was dried at 70° C. for 4 days, and then heated to 1300° C. to form a solid material, thereby obtaining a base material for a silica glass optical fiber.

同様の手順により50本のファイバを作製したところ、
歩留りは90%であった。
When 50 fibers were produced using the same procedure,
The yield was 90%.

含有OH基はlppm以下であり、損失値は1dB/−
以下であった。
The content of OH groups is less than 1 ppm, and the loss value is 1 dB/-
It was below.

〔実施例6〕 実施例1で作製されたゾルに、十分に洗浄された実施例
1の石英管をひたした後ひきあげ外面についたゾルをと
り除いた0両端をサランラップでおおった後40℃の温
度でゲル化させた。つづいて60℃で7日間乾燥を行な
い、1400℃まで加熱してガラス化したものを中実化
することにより石英ガラス系光ファイバ用母材を得た。
[Example 6] The quartz tube of Example 1, which had been thoroughly cleaned, was immersed in the sol prepared in Example 1, pulled up, the sol attached to the outer surface was removed, and both ends were covered with Saran wrap. gelatinized at temperature. Subsequently, it was dried at 60° C. for 7 days, heated to 1400° C., vitrified, and solidified to obtain a base material for a silica glass optical fiber.

同様の手順により50本のファイバを作製したところ、
歩留りは95%であった。
When 50 fibers were produced using the same procedure,
The yield was 95%.

含有OH基はlppm以下であり損失は1dB/−以下
であった。
The content of OH groups was 1 ppm or less, and the loss was 1 dB/- or less.

以上のように既存の石英管、あるいはゾル−ゲル法によ
り作製された石英管を使用することにより容易に石英系
光ファイバ用母材を作製できることが確認された。
As described above, it has been confirmed that a base material for a quartz-based optical fiber can be easily produced by using an existing quartz tube or a quartz tube produced by the sol-gel method.

〔発明の効果〕〔Effect of the invention〕

上述の如く、本発明の製造工程によれば、ガラス化され
た石英管の内面に薄いコアをゾル−ゲル法によりつくる
ことにより、高品質の光ファイバ用母材を比較的安価に
かつ容易に短期間で作製できるようになる、したがって
大量生産やコストダウンなどに多大な効果がある。
As described above, according to the manufacturing process of the present invention, by creating a thin core on the inner surface of a vitrified quartz tube using the sol-gel method, it is possible to easily produce a high-quality optical fiber base material at a relatively low cost. It can be manufactured in a short period of time, and therefore has a great effect on mass production and cost reduction.

以   上that's all

Claims (2)

【特許請求の範囲】[Claims] (1)屈折率を変化させるためのドーパントを含む、あ
るいは含まない石英管の内面に、有効ガラス成分を0.
1g/ml以上含み、かつそのうちの0〜100%が平
均粒径0.01〜0.1μmの範囲の微粒子であるゾル
を、薄く、均一につけたのちゲル化させ乾燥・焼結を行
ない、その後中実化することを特徴とする石英系光ファ
イバ用母材の製造方法。
(1) An effective glass component is added to the inner surface of a quartz tube with or without a dopant for changing the refractive index.
A sol containing 1 g/ml or more and of which 0 to 100% are fine particles with an average particle size of 0.01 to 0.1 μm is applied thinly and uniformly, then gelled, dried and sintered, and then A method for manufacturing a base material for a silica-based optical fiber, characterized by solidification.
(2)前記石英管にゾルをコーティング、あるいは乾燥
する際に、石英管の軸にそって回転することを特徴とす
る特許請求の範囲第1項記載の石英系光ファイバ用母材
の製造方法。
(2) The method for manufacturing a quartz-based optical fiber preform according to claim 1, characterized in that the quartz tube is rotated along the axis of the quartz tube when coating or drying the sol. .
JP13348486A 1986-06-09 1986-06-09 Production of base material for quartz optical fiber Pending JPS62292651A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13348486A JPS62292651A (en) 1986-06-09 1986-06-09 Production of base material for quartz optical fiber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13348486A JPS62292651A (en) 1986-06-09 1986-06-09 Production of base material for quartz optical fiber

Publications (1)

Publication Number Publication Date
JPS62292651A true JPS62292651A (en) 1987-12-19

Family

ID=15105848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13348486A Pending JPS62292651A (en) 1986-06-09 1986-06-09 Production of base material for quartz optical fiber

Country Status (1)

Country Link
JP (1) JPS62292651A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0520402A2 (en) * 1991-06-24 1992-12-30 Sumitomo Electric Industries, Ltd Method for producing glass preform for optical fiber

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0520402A2 (en) * 1991-06-24 1992-12-30 Sumitomo Electric Industries, Ltd Method for producing glass preform for optical fiber

Similar Documents

Publication Publication Date Title
US4680046A (en) Method of preparing preforms for optical fibers
FR2571356A1 (en) PROCESS FOR PREPARING DOPED SILICA GLASS
JPH06122530A (en) Refractive index gradient type glass and sol-gel method for manufacture thereof
JPS62292651A (en) Production of base material for quartz optical fiber
GB2100248A (en) Preparing porous bodies of doped silica gel
JPS6296339A (en) Production of optical fiber preform
JP2818707B2 (en) Method for producing quartz glass base material
JPS60226418A (en) Preparation of quartz glass mass
JPH09202652A (en) Production of refractive distribution type optical element
JPS62288117A (en) Production of doped silica glass
JPS62207723A (en) Production of glass
JPS60108325A (en) Production of glass
JPH0421526A (en) Production of quartz-based glass body having refractive index distribution
JPS62278139A (en) Production of optical fiber preform
JPS6217026A (en) Preparation of quartz base glass
JPH02199033A (en) Production of optical glass
JPS63144137A (en) Production of optical fiber preform
JPS62292627A (en) Production of glass
JPH02172835A (en) Production of base material for optical fiber
JPS61106433A (en) Production of optical fiber base material
JPH03285833A (en) Manufacture of porous glass
JPS62246835A (en) Production of base material for quartz glass optical fiber
JPS60215539A (en) Manufacture of optical fiber preform
JPS61186235A (en) Production of parent material for optical fiber
JPS62278138A (en) Production of glass tube