JPS62289722A - Magneto-resistance sensor for magnetic encoder - Google Patents
Magneto-resistance sensor for magnetic encoderInfo
- Publication number
- JPS62289722A JPS62289722A JP61134462A JP13446286A JPS62289722A JP S62289722 A JPS62289722 A JP S62289722A JP 61134462 A JP61134462 A JP 61134462A JP 13446286 A JP13446286 A JP 13446286A JP S62289722 A JPS62289722 A JP S62289722A
- Authority
- JP
- Japan
- Prior art keywords
- detection
- sine wave
- magneto
- wave detection
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 62
- 238000001514 detection method Methods 0.000 claims abstract description 94
- 239000000758 substrate Substances 0.000 abstract description 8
- 238000009413 insulation Methods 0.000 abstract 1
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 229910017709 Ni Co Inorganic materials 0.000 description 1
- 229910003267 Ni-Co Inorganic materials 0.000 description 1
- 229910003262 Ni‐Co Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 239000011295 pitch Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Abstract
Description
【発明の詳細な説明】
３、発明の詳細な説明
「産業上の利用分野」
この発明は、例えば磁気ロータリーエンコーダ等に適用
され、磁気記録媒体に記録された磁気情報を、固有抵抗
が磁界の強さに応じて変化する磁気抵抗素子を用いて検
出することにより、磁気記録媒体の相対的変位を検出す
る磁気エンコーダ用磁気低抗センザに関する。Detailed Description of the Invention 3. Detailed Description of the Invention "Field of Industrial Application" This invention is applied to, for example, a magnetic rotary encoder, etc., in which magnetic information recorded on a magnetic recording medium is The present invention relates to a magnetic low resistance sensor for a magnetic encoder that detects the relative displacement of a magnetic recording medium by detecting it using a magnetoresistive element that changes depending on the strength.
「従来の技術」
周知のように、磁気ロータリーエンコーダは、シャフト
に固定されｆ二円盤状の磁気記録媒体と、この磁気記録
媒体と所定のギャップを隔てて対向配置された磁気抵抗
でンサとから構成されているが、これらは、従来、一般
に第３図（イ）〜（ニ）に示すように構成されている。``Prior Art'' As is well known, a magnetic rotary encoder consists of a disk-shaped magnetic recording medium fixed to a shaft, and a magnetic resistor placed opposite the magnetic recording medium with a predetermined gap between the encoder and the encoder. Conventionally, these devices have generally been configured as shown in FIGS. 3(a) to (d).
これらの図において、ｌは磁気記録媒体、２は磁気抵抗
センサでうる。この磁気記録媒体１には、磁気抵抗セン
サ２と対向する円軌道に沿って波長λの正弦波を磁化記
録することにより、等間隔の磁化ピッチＩ ａ、 Ｉ
ａ、・からなる磁気情報（着磁パターン）か記録されて
いる。一方、磁気抵抗センサ２は、ガラス基板３と、こ
のガラス基板３上に蒸看された磁気抵抗素子・１とから
構成されている。In these figures, 1 is a magnetic recording medium and 2 is a magnetoresistive sensor. This magnetic recording medium 1 is magnetized and recorded with a sine wave of wavelength λ along a circular orbit facing the magnetoresistive sensor 2, thereby creating magnetization pitches I a, I at equal intervals.
Magnetic information (magnetization pattern) consisting of a, . is recorded. On the other hand, the magnetoresistive sensor 2 is composed of a glass substrate 3 and a magnetoresistive element 1 deposited on the glass substrate 3.
この磁気抵抗素子１：よ、磁界中に置かれた場合、その
磁界の強さに応じて固有抵抗か変化する現象、いわゆる
磁気抵抗効果が生じる素子材料によって構成されており
、この磁気抵抗効果を利用して、磁気記録媒体ｌが図に
示す矢印Ｍ方向に相対変位した場合に、磁気記録媒体１
上に記録された着磁パターンが読み取られ、これにより
、磁気記録媒体ｌと共に回転するンヤフトの回転量が検
出されるようになっている。This magnetoresistive element 1: When placed in a magnetic field, the element material produces a phenomenon in which the specific resistance changes depending on the strength of the magnetic field, the so-called magnetoresistive effect. When the magnetic recording medium 1 is relatively displaced in the direction of the arrow M shown in the figure, the magnetic recording medium 1
The magnetized pattern recorded on the magnetic recording medium 1 is read, and thereby the amount of rotation of the shaft rotating together with the magnetic recording medium 1 is detected.
この場合、磁気抵抗素子４は、磁気記録媒体ｌの変位方
向Ｍと直交する方向に延びる検出部８１〜Ｓｌ’ｌと、
これら各検出部５ｌ−８１，の間を各々接続し、変位方
向Ｍと平行に延びる接続部０１〜ＣＩ８とから構成され
、櫛形状に形成されている。In this case, the magnetoresistive element 4 includes detection parts 81 to Sl'l extending in a direction perpendicular to the displacement direction M of the magnetic recording medium l;
It is comprised of connection parts 01 to CI8 that connect between these detection parts 5l-81 and extend parallel to the displacement direction M, and is formed in a comb shape.
ここで、各検出部８１〜Ｓ ＋８の相対的位置関係につ
いて述べると、検出部Ｓ、〜Ｓ４は各々λずつ離間し、
検出部Ｓ、は検出部Ｓ４とλ／２離間し、検出部Ｓ、〜
Ｓ６は各々λずつ離間し、検出部Ｓ、は検出部Ｓ８と５
／４λ離間し、検出部Ｓ９〜Ｓａｔは各々λずつ離間し
、検出部λ、３は検出部λ１．とλ／２離間し、検出部
８１３〜Ｓ Ｉｌ＋は各々λずつ離間している。また、
検出部Ｓ１の端部は端子Ｔ１に、接続部Ｃ４は端子Ｔ、
に、接続部Ｃ８およびＣ８は端子Ｔ３に、接続部Ｃ＋３
は端子Ｔ４に、検出部５１８の端部は端子Ｔ、に各々接
続されている。Here, to describe the relative positional relationship of the detection units 81 to S+8, the detection units S and to S4 are spaced apart by λ, and
The detection unit S, is spaced apart from the detection unit S4 by λ/2, and the detection unit S, ~
S6 are spaced apart by λ, and the detection parts S and 5 are spaced apart from each other by λ.
/4λ apart, the detection units S9 to Sat are each separated by λ, and the detection units λ,3 are separated from the detection units λ1. and λ/2 apart, and the detection units 813 to S Il+ are each spaced apart by λ. Also,
The end of the detection part S1 is connected to the terminal T1, the connection part C4 is connected to the terminal T,
, connections C8 and C8 are connected to terminal T3 and connection C+3 is connected to terminal T3.
is connected to the terminal T4, and the end of the detection unit 518 is connected to the terminal T.
そして、端子Ｔ３を接地して、端子′ｒ１とＴ、に＋Ｖ
ｃｃを印加すると、磁気記録媒体ｌの変位に伴って、端
子１゛、から正弦波の検出信号Ｓ ｉｎｏ Ｕ Ｔが出
力されると共に、端子Ｔ４から余弦波の検出信号Ｃｏ５
０ＵＴが出力される。すなわち、検出部Ｓ、〜Ｓ８と接
続部Ｃ１〜Ｃ８かろなる正弦波検出用磁気抵抗素子Ａに
よって検出される検出信号Ｓ ｉｎ。Then, terminal T3 is grounded and +V is applied to terminal 'r1 and T.
When cc is applied, as the magnetic recording medium l is displaced, a sine wave detection signal S ino UT is output from terminal 1, and a cosine wave detection signal Co5 is output from terminal T4.
0UT is output. In other words, the detection signal S in is detected by the sine wave detection magnetoresistive element A consisting of the detection sections S, -S8 and the connection sections C1 - C8.
ＵＴは、検出部Ｓ、〜Ｓ１６と接続部Ｃ８〜Ｃ１６から
なる余弦波検出用磁気抵抗素子Ｂによって検出される検
出信号Ｃｏ５０ＵＴと、位相かえ／４（９０°）ずれて
いることになる。これにより、これらの検出信号Ｓ ｉ
ｎｏ Ｕ ＴとＣｏ５０ＵＴに基ついて、磁気記録媒体
ｌの変位方向および変位量が求められろ。UT is shifted by a phase shift of /4 (90 degrees) from the detection signal Co50UT detected by the cosine wave detection magnetoresistive element B consisting of the detection sections S, -S16 and the connection sections C8-C16. As a result, these detection signals S i
Based on no UT and Co50UT, determine the direction and amount of displacement of the magnetic recording medium l.
「発明が解決しようとする問題点」
ところで、上述した磁気抵抗センサ２の正弦波検出用磁
気抵抗素子への中心と余弦波検出用磁気抵抗素子Ｂの中
心間の距離は、約１ ｍｍ（約８λ分）前後に設定され
ている。この中心間の距離は微少ではあるが、このよう
な微少距離であっても、磁気記録媒体１側に物理的な歪
が発生している確率は高く、これが、高精度の検出信号
Ｓ ｉｎｏ Ｕ ＴおよびＣｏ５０ＵＴを得ることがで
きない原因となっていた。"Problems to be Solved by the Invention" By the way, the distance between the center of the magnetoresistive sensor 2 described above to the magnetoresistive element for sine wave detection and the center of the magnetoresistive element B for cosine wave detection is approximately 1 mm (approximately 8λ minutes). Although this distance between the centers is minute, there is a high probability that physical distortion has occurred on the magnetic recording medium 1 side even with such a minute distance, and this is the reason why the highly accurate detection signal S ino U This was the cause of not being able to obtain T and Co50UT.
例えば、第・１図（イ）に示すように、磁気記録媒体ｌ
に歪が生じている状態においては、同図（ロ）および（
ハ）に示すように、検出信号Ｓ ｉｎＯＬＩ Ｔおよび
Ｃｏ５０ＵＴの間に、逆相のうねりＵ、およびＵ、が発
生し、雨検出信号Ｓ ｉｐｏ ｌｊ ＴおよびＣｏ５０
ＵＴ間にレベルギャップが生じてしまう。そして、これ
らの検出信号５ｉｎＯＵＴおよびＣｏ５０ＵＴを、デン
タル処理するために、波形整形回路によ；フ所定のしき
い値より高いか否かによって“■じレベルと“Ｌ”レベ
ルの２短信号に変換した場合、こｎら２短信号のパルス
幅に広狭が生じ、この結果、検出誤差が生じてしまう。For example, as shown in Figure 1 (a), a magnetic recording medium l
When distortion occurs in the figure, (b) and (
As shown in c), anti-phase undulations U and U occur between the detection signals S inOLI T and Co50UT, and the rain detection signals S inOLI T and Co50
A level gap occurs between UTs. Then, in order to perform dental processing, these detection signals 5inOUT and Co50UT are converted into two short signals of "1" level and "L" level by a waveform shaping circuit depending on whether or not they are higher than a predetermined threshold. In this case, the pulse widths of these two short signals vary, resulting in a detection error.
この発明は上述した事情に濫みてなされたらのて、磁ス
記り媒体に微少な物理的歪が生している場合においても
、正弦波検出用磁気抵抗素子と奈弦波検出用磁気）氏抗
素子から各々出力される各検出信号のうねりを同相化す
ることができ、これにより検出誤差を低減することがで
きろ磁気エンコーダ用磁気抵抗センサを堤供することを
目的としている。This invention was made in view of the above-mentioned circumstances, and has been developed by Mr. It is an object of the present invention to provide a magnetoresistive sensor for a magnetic encoder, which can bring the undulations of each detection signal outputted from a resistance element into the same phase, thereby reducing detection errors.
「問題点を解決するための手段」
この発明は、所定の軌直に沿って正弦波の磁気情報が記
録されｆコ磁気記録媒体上から、前記磁気情報を、固宵
抵抗が磁界の強さに応じて変化する磁気抵抗素子を用い
て検出する磁気エンコーダ用磁気抵抗センサにおいて、
面記磁気記録媒体の変位に伴って、正弦波の検出信号を
出力する正弦波検出用磁気抵抗素子と、余弦波の検出信
号を出力する余弦波検出用磁気抵抗素子とを、絶縁層を
介して重畳的に配置しｆこことを特徴としている。``Means for Solving the Problems'' This invention provides a means for recording sinusoidal magnetic information along a predetermined trajectory, from a magnetic recording medium, and transmitting the magnetic information from a magnetic recording medium with a fixed resistance depending on the strength of the magnetic field. In a magnetoresistive sensor for a magnetic encoder that detects using a magnetoresistive element that changes depending on the
A sine wave detection magnetoresistive element that outputs a sine wave detection signal and a cosine wave detection magnetoresistive element that outputs a cosine wave detection signal are connected via an insulating layer as the surface magnetic recording medium is displaced. It is characterized by being arranged in a superimposed manner.
「作用」
正弦波検出用磁気抵抗素子と余弦波検出用磁気抵抗素子
が、絶縁属を介して重畳的に配置されているので、磁気
記り媒体７）軌道の同一部分から正弦波の磁気情報が検
出され、これにより、磁気記録媒体に微少な物理的歪か
生じている場合においても、正弦波検出用磁気抵抗素子
と余弦波検出用磁気抵抗素子から各々出力される雨検出
信号のうねりが同相化され、これにより検出誤差が低減
される。"Operation" Since the magnetoresistive element for detecting a sine wave and the magnetoresistive element for detecting a cosine wave are arranged in a superimposed manner with an insulator in between, magnetic information of the sine wave is transmitted from the same part of the magnetic recording medium 7) orbit. is detected, and as a result, even if there is slight physical distortion in the magnetic recording medium, the undulations of the rain detection signals output from the sine wave detection magnetoresistive element and the cosine wave detection magnetoresistive element, respectively, are The signals are brought into phase, thereby reducing detection errors.
「実施例」
以下、図面を参照し、この発明の実施例について説明す
る。"Embodiments" Hereinafter, embodiments of the present invention will be described with reference to the drawings.
第１図（イ）〜（ハ）はこの発明の一実施例の構成を示
す図である。なお、第１図（イ）においては、磁気抵抗
素子４のパターン以外の部分の図示が省略されている。FIGS. 1A to 1C are diagrams showing the configuration of an embodiment of the present invention. Note that in FIG. 1(A), illustration of portions other than the pattern of the magnetoresistive element 4 is omitted.
これらの図において、ＩＯは、例えばホウ酸ガラスから
なる絶縁性、平滑性の高い基板であり、この基板１０上
には検出部Ｓ、〜Ｓ８と接続部０１〜Ｃ８からなる正弦
波検出用磁気抵抗素子Ａが蒸着されている。また、正弦
波検出用磁気抵抗素子Ａが蒸着された基板ＩＯ上には、
厚さが数百人〜１０００ 人の非磁性の、例えばシリコ
ン酸化膜からなろ絶縁膜１２が形成されており、この絶
縁膜１２上には検出部Ｓ、〜Ｓ １８と接続部Ｃ３〜Ｃ
１６からなる余弦波検出用磁気抵抗素子Ｂが蒸着されて
いる。さるに、この余弦波検出用磁気抵抗素子Ｂが蒸着
された絶縁膜１２上には、例えばＰＳＧ膜（ｐｈｏｓｐ
ｈｏ−ｓｉｌｉｃａｔｅ−ｇｌａｓｓ；りんをドープし
タノリコン酸化膜）からなる保護膜１４が形成されてい
る。上記正弦波検出用磁気抵抗素子Ａおよび余弦波検出
用磁気抵抗素子Ｂからなる磁気抵抗素子４はＮ ｉ−Ｆ
ｅにッケルー鉄）、Ｎｉ−Ｃｏにソケルーコバルト）
などの強磁性材料、またはＩｎ５ｂ（アンチモン化イン
ジウム）などの半導体によって構成されている。In these figures, IO is a highly insulating and smooth substrate made of boric acid glass, for example, and on this substrate 10 is a magnetic field for sine wave detection consisting of detection parts S, ~S8 and connection parts 01~C8. A resistive element A is deposited. Moreover, on the substrate IO on which the magnetoresistive element A for sine wave detection is deposited,
A non-magnetic insulating film 12 having a thickness of several hundred to 1,000 layers is formed, for example, from a silicon oxide film, and on this insulating film 12 there are detecting parts S, -S18 and connection parts C3-C.
16 cosine wave detection magnetoresistive elements B are deposited. Furthermore, on the insulating film 12 on which the cosine wave detection magnetoresistive element B is deposited, for example, a PSG film (phosp
A protective film 14 made of ho-silicate-glass (phosphorous-doped tanolicon oxide film) is formed. The magnetoresistive element 4 consisting of the magnetoresistive element A for sine wave detection and the magnetoresistive element B for cosine wave detection is N i-F.
e (iron), Ni-Co (cobalt)
It is made of a ferromagnetic material such as, or a semiconductor such as In5b (indium antimonide).
ここで、各検出部Ｓ、〜ＳｌＢの相対的位置関係につい
て述べると、検出部Ｓ、−Ｓ、は各々λずつ離間し、検
出部Ｓ５は検出部Ｓ４とλ／２離間し、検出部８５〜Ｓ
８は各々λずつ離間して配置されている。また検出部ｓ
ｅｅ〜Ｓ＋３は各々λずつ離間し、検出部λ１．は検出
部λ１３とλ／２離間し、検出部Ｓ１、〜Ｓ９は各々λ
ずつ離間して配置され′ごいる。Here, to describe the relative positional relationship of the detection units S, -SlB, the detection units S, -S are spaced apart by λ, the detection unit S5 is spaced apart from the detection unit S4 by λ/2, and the detection unit 85 is spaced apart from the detection unit S4 by λ/2. ~S
8 are spaced apart from each other by λ. Also, the detection part s
ee to S+3 are spaced apart by λ, and the detection units λ1. is spaced apart from the detection part λ13 by λ/2, and the detection parts S1 and S9 are each λ/2 apart from the detection part λ13.
They are placed spaced apart from each other.
さらに、各検出部Ｓ、−Ｓ、は、各Ｓ １８〜Ｓ、に対
して各々λ／４ずつ離間して配置されている。Further, the detection units S and -S are spaced apart from each other by λ/4 with respect to each of S18 to S.
これにより、正弦波検出用磁気抵抗素子Ａと余弦波検出
用磁気抵抗素子Ｂが、絶縁＠１２を介して絶縁された状
態で、磁気記録媒体ｌ（第３図参照）に記録された正弦
波の波長λに対して位相が９０°ずれるように、重畳的
に配置されている。As a result, the sine wave detection magnetoresistive element A and the cosine wave detection magnetoresistive element B are insulated via the insulation @12, and a sine wave is recorded on the magnetic recording medium l (see Fig. 3). They are arranged in a superimposed manner so that their phases are shifted by 90° with respect to the wavelength λ.
次に、上述しｆこ一実施例による磁気抵抗センサを用い
て、第５図（イ）に示すような歪が生じている磁気記録
媒体ｌに記録され１こ正弦波の磁気情報を検出する場合
について説明する。Next, using the magnetoresistive sensor according to the above-described embodiment, magnetic information of one sine wave recorded on the magnetic recording medium l having distortion as shown in FIG. 5(a) is detected. Let me explain the case.
この場合、端子Ｔ３を接地して、端子Ｔ１とＴ。In this case, terminal T3 is grounded and terminals T1 and T are connected.
に＋Ｖｃｃを印加すると、磁気記録媒体ｌの変位に伴っ
て、端子Ｔ２およびＴ４から第２図（イ）および（ロ）
に示すような検出信号５ｉｎｆｕＴおよびＣｏ５０ＵＴ
が各々出力される。すなわち、正弦波検出用磁気抵抗素
子Ａと余弦波検出用磁気抵抗素子Ｂが、重１１Ｌ的に配
置されているので、磁気記録媒体ｌの軌道の同一部分か
る正弦波の磁気情報が検出さλ−７、これによｔつ、磁
気記録媒体１に微少な物Ｈｏｇ的歪が生じている場合に
おいてら、第２図（イ）および（ロ）に示すように、正
弦波検出用磁気抵抗素子Ａと余弦波検出用磁気抵抗素子
Ｂから各々出力される検出信号Ｓ ｉｎＯＵ ＴとＣｏ
５０１ＪＴのう（ａすＵｌおよびＵ、が同ト「］化され
る。し１こがって、上述した一実施例の磁気抵抗センナ
を用いることにより、検出誤差を低減することができる
。When +Vcc is applied to the magnetic recording medium l, the voltage from terminals T2 and T4 as shown in FIGS.
The detection signals 5infuT and Co50UT as shown in
are output respectively. That is, since the magnetoresistive element A for sine wave detection and the magnetoresistive element B for cosine wave detection are arranged in parallel with each other, the magnetic information of the sine wave that can be seen in the same part of the trajectory of the magnetic recording medium l is detected. -7. As a result, when a slight Hog-like distortion occurs in the magnetic recording medium 1, as shown in FIGS. Detection signals S inOUT and Co output from A and cosine wave detection magnetoresistive element B, respectively.
501JT's (a, U, and U) are converted into ``]''. Therefore, by using the magnetoresistive sensor of the above-described embodiment, the detection error can be reduced.
「発明の効用づ
以上説明したように、この発明によイーば、所定の軌道
に沿って正弦波・）磁気情報が記録された磁気記録媒体
上から、前記磁気情報を、回灯抵抗か磁界の強さに応Ｃ
て変化する磁気抵抗素子を用いて検出する磁気エンコー
ダ用磁気抵抗センザにｔｊいて、前記磁気記録媒体の変
位に伴って、正弦波の検出信号を出力する正弦波検出用
磁気抵抗素子と、余弦波の検出信号を出力する余弦波検
出用磁気抵抗素子とを、迎縁音を介して重畳的に配置し
ｆ二ので、磁気記録媒体り快適の同一部分から前記正弦
波の磁気情報か６１出され、これに３二・）、・ミ気二
己ｉ清１どシλ１、（こ、″４少１よｉ４−里％、４）
歪が生）−ている場〉（こ、Ｆ６いても、正弦波検出用
磁気抵抗素子と余弦波検出用磁気抵抗素子から各々出力
される各検出信号のうねりを同相化することができ、こ
れにより検出誤差を低減することができるという効果が
得られる。``Efficacy of the Invention'' As explained above, according to the present invention, the magnetic information can be transferred from a magnetic recording medium on which magnetic information (sine wave) is recorded along a predetermined trajectory using a turning resistor or a magnetic field. Depending on the strength of C
a sine wave detection magnetoresistive element that outputs a sine wave detection signal in accordance with the displacement of the magnetic recording medium; A cosine wave detection magnetoresistive element that outputs a detection signal of 61 is arranged in a superimposed manner via an interception sound, so that the magnetic information of the sine wave is output from the same part of the magnetic recording medium. , this is 32・), ・mi ki 2 k i Qing 1 doshi λ 1, (ko, ″4 small 1 yo i4-ri%, 4)
Even in the case where distortion is present) (F6), it is possible to bring the undulations of each detection signal output from the sine wave detection magnetoresistive element and the cosine wave detection magnetoresistive element into the same phase. This provides the effect of reducing detection errors.
第１図（イ）はこの発明の一実施例の構成を示す概略平
面図、第１図（ロ）は同図（イ）のＡ−Ａ線視断面図、
第１図（ハ）は同図（ロ）の部分拡大断面図、第２図（
イ）および（ロ）はこの発明の一実施例の動作を説明す
るための波形図、第３図（イ）〜（ニ）は従来の磁気ロ
ータリーエンコーダの磁気記録媒体ｌと磁気抵抗でンサ
２の構成を示す図、第・１図（イ）〜（ハ）は従来の磁
気抵抗センサ２を用いた場合の問題点を説明するための
図である。
Ａ・・・・・正弦波検出用磁気抵抗素子、Ｂ・・・・・
余弦波検出用磁気抵抗素子、Ｓ、〜Ｓ ＋８・・・・・
検出部、Ｃ，−Ｃ，、・・・・・・接続部、Ｔ１〜Ｔ、
・・・・・・端子、１・・・・・・磁気記録媒体、４
・・・・磁気抵抗素子、１０・・・・・基板、１２・・
・・・・絶縁膜（絶縁層）、１４・・・・・・保護膜。
出願人 日本楽器製造株式会社
１゜FIG. 1(A) is a schematic plan view showing the configuration of an embodiment of the present invention, FIG. 1(B) is a sectional view taken along the line A-A in FIG. 1(A),
Figure 1 (C) is a partially enlarged sectional view of Figure 1 (B), and Figure 2 (
A) and (B) are waveform diagrams for explaining the operation of an embodiment of the present invention, and FIGS. FIGS. 1A to 1C are diagrams illustrating the configuration of the conventional magnetoresistive sensor 2, and are diagrams for explaining problems when using the conventional magnetoresistive sensor 2. A... Magnetoresistive element for sine wave detection, B...
Magnetoresistive element for cosine wave detection, S, ~S +8...
Detection section, C, -C, ... Connection section, T1 to T,
...Terminal, 1...Magnetic recording medium, 4
... Magnetoresistive element, 10 ... Substrate, 12 ...
...Insulating film (insulating layer), 14... Protective film. Applicant: Nippon Musical Instruments Manufacturing Co., Ltd. 1゜
Claims (1)
記録媒体上から、前記磁気情報を、固有抵抗が磁界の強
さに応じて変化する磁気抵抗素子を用いて検出する磁気
エンコーダ用磁気抵抗センサにおいて、前記磁気記録媒
体の変位に伴って、正弦波の検出信号を出力する正弦波
検出用磁気抵抗素子と、余弦波の検出信号を出力する余
弦波検出用磁気抵抗素子とを、絶縁層を介して重畳的に
配置したことを特徴とする磁気エンコーダ用磁気抵抗セ
ンサ。A magnet for a magnetic encoder that detects magnetic information from a magnetic recording medium on which sinusoidal magnetic information is recorded along a predetermined trajectory using a magnetoresistive element whose specific resistance changes depending on the strength of the magnetic field. In the resistance sensor, a sine wave detection magnetoresistive element that outputs a sine wave detection signal and a cosine wave detection magnetoresistive element that outputs a cosine wave detection signal are insulated. A magnetoresistive sensor for a magnetic encoder, characterized in that the sensor is arranged in a superimposed manner through layers.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61134462A JPS62289722A (en) | 1986-06-10 | 1986-06-10 | Magneto-resistance sensor for magnetic encoder |
| GB8713364A GB2191589B (en) | 1986-06-10 | 1987-06-08 | Sensor |
| KR1019870005799A KR920008235B1 (en) | 1986-06-10 | 1987-06-08 | Magneto-resistance sensor for magnetic encoder |
| US07/059,941 US4806860A (en) | 1986-06-10 | 1987-06-09 | Overlapped magnetoresistive displacement detecting transducers having closely spaced longitudinal centers |
| DE19873719328 DE3719328A1 (en) | 1986-06-10 | 1987-06-10 | MAGNETORESISTIVE SENSOR FOR AN ENCODER |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61134462A JPS62289722A (en) | 1986-06-10 | 1986-06-10 | Magneto-resistance sensor for magnetic encoder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62289722A true JPS62289722A (en) | 1987-12-16 |
Family
ID=15128892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61134462A Pending JPS62289722A (en) | 1986-06-10 | 1986-06-10 | Magneto-resistance sensor for magnetic encoder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62289722A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59147213A (en) * | 1983-02-14 | 1984-08-23 | Hitachi Ltd | Magnetic rotary sensor |
| JPS59166812A (en) * | 1983-03-14 | 1984-09-20 | Fanuc Ltd | One rotation detecting system of motor |
| JPS59179321A (en) * | 1983-03-30 | 1984-10-11 | Nissan Motor Co Ltd | Product made of foamed plastic |
| JPS601514A (en) * | 1983-06-17 | 1985-01-07 | Copal Co Ltd | Displacement amount detector |
-
1986
- 1986-06-10 JP JP61134462A patent/JPS62289722A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59147213A (en) * | 1983-02-14 | 1984-08-23 | Hitachi Ltd | Magnetic rotary sensor |
| JPS59166812A (en) * | 1983-03-14 | 1984-09-20 | Fanuc Ltd | One rotation detecting system of motor |
| JPS59179321A (en) * | 1983-03-30 | 1984-10-11 | Nissan Motor Co Ltd | Product made of foamed plastic |
| JPS601514A (en) * | 1983-06-17 | 1985-01-07 | Copal Co Ltd | Displacement amount detector |
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