JPS6228871U - - Google Patents
Info
- Publication number
- JPS6228871U JPS6228871U JP11846685U JP11846685U JPS6228871U JP S6228871 U JPS6228871 U JP S6228871U JP 11846685 U JP11846685 U JP 11846685U JP 11846685 U JP11846685 U JP 11846685U JP S6228871 U JPS6228871 U JP S6228871U
- Authority
- JP
- Japan
- Prior art keywords
- optical chamber
- laser irradiation
- irradiation source
- chamber connected
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11846685U JPS6228871U (no) | 1985-07-31 | 1985-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11846685U JPS6228871U (no) | 1985-07-31 | 1985-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6228871U true JPS6228871U (no) | 1987-02-21 |
Family
ID=31004943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11846685U Pending JPS6228871U (no) | 1985-07-31 | 1985-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6228871U (no) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59129774A (ja) * | 1983-01-12 | 1984-07-26 | Fuji Xerox Co Ltd | 選択的窒化膜の作製方法 |
| JPS609875A (ja) * | 1983-06-27 | 1985-01-18 | Nec Corp | 光化学反応装置 |
-
1985
- 1985-07-31 JP JP11846685U patent/JPS6228871U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59129774A (ja) * | 1983-01-12 | 1984-07-26 | Fuji Xerox Co Ltd | 選択的窒化膜の作製方法 |
| JPS609875A (ja) * | 1983-06-27 | 1985-01-18 | Nec Corp | 光化学反応装置 |