JPS6228870U - - Google Patents
Info
- Publication number
- JPS6228870U JPS6228870U JP11846585U JP11846585U JPS6228870U JP S6228870 U JPS6228870 U JP S6228870U JP 11846585 U JP11846585 U JP 11846585U JP 11846585 U JP11846585 U JP 11846585U JP S6228870 U JPS6228870 U JP S6228870U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- transmission window
- laser transmission
- protection member
- port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11846585U JPS6228870U (enExample) | 1985-07-31 | 1985-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11846585U JPS6228870U (enExample) | 1985-07-31 | 1985-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6228870U true JPS6228870U (enExample) | 1987-02-21 |
Family
ID=31004941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11846585U Pending JPS6228870U (enExample) | 1985-07-31 | 1985-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6228870U (enExample) |
-
1985
- 1985-07-31 JP JP11846585U patent/JPS6228870U/ja active Pending
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