JPS6228873U - - Google Patents

Info

Publication number
JPS6228873U
JPS6228873U JP11874685U JP11874685U JPS6228873U JP S6228873 U JPS6228873 U JP S6228873U JP 11874685 U JP11874685 U JP 11874685U JP 11874685 U JP11874685 U JP 11874685U JP S6228873 U JPS6228873 U JP S6228873U
Authority
JP
Japan
Prior art keywords
laser
chamber
gate valves
laser beam
substrate holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11874685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11874685U priority Critical patent/JPS6228873U/ja
Publication of JPS6228873U publication Critical patent/JPS6228873U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP11874685U 1985-07-31 1985-07-31 Pending JPS6228873U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11874685U JPS6228873U (enExample) 1985-07-31 1985-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11874685U JPS6228873U (enExample) 1985-07-31 1985-07-31

Publications (1)

Publication Number Publication Date
JPS6228873U true JPS6228873U (enExample) 1987-02-21

Family

ID=31005492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11874685U Pending JPS6228873U (enExample) 1985-07-31 1985-07-31

Country Status (1)

Country Link
JP (1) JPS6228873U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6480245A (en) * 1987-09-24 1989-03-27 Oshita Sangyo Kk Insecticidal tape device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6480245A (en) * 1987-09-24 1989-03-27 Oshita Sangyo Kk Insecticidal tape device

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