JPS62285443A - Master-slice integrated circuit device - Google Patents

Master-slice integrated circuit device

Info

Publication number
JPS62285443A
JPS62285443A JP12715186A JP12715186A JPS62285443A JP S62285443 A JPS62285443 A JP S62285443A JP 12715186 A JP12715186 A JP 12715186A JP 12715186 A JP12715186 A JP 12715186A JP S62285443 A JPS62285443 A JP S62285443A
Authority
JP
Japan
Prior art keywords
input
output
circuit
buffers
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12715186A
Other languages
Japanese (ja)
Inventor
Makoto Shizukuishi
誠 雫石
Ryuji Kondo
近藤 隆二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP12715186A priority Critical patent/JPS62285443A/en
Publication of JPS62285443A publication Critical patent/JPS62285443A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/04Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
    • H01L27/10Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
    • H01L27/118Masterslice integrated circuits
    • H01L27/11898Input and output buffer/driver structures

Abstract

PURPOSE:To predetermine input and output characteristics optionally by a method wherein respective peripheral I/O cells have a plurality of input buffers with required input and output characteristics and a plurality of output buffers with required input and output characteristics and both the buffers are interconnected by wirings optionally. CONSTITUTION: Pads 10 for input and output are provided on the circumference of a chip 9 and peripheral I/O cells 12 are provided between a reference cell 11 which is not wired yet and provided at the center and the pads 10. The respective cells 12 have output buffers 13 and input buffers 14. If a necessary number of buffers 13 are connected in parallel and the output terminals are connected to the pads 10 and the input terminals are connected to the reference cell 11, the required output can be obtained from the pad 10 and, on the other hand, if a suitable number of the buffers 14 are connected in parallel and the input terminals are connected to the pads 10 and the output terminals are connected to the reference cell 11, the pads 10 can be used for signal input. With this constitution, the output and input power can be arbitrarily set from small capacity to large capacity by wirings so that the degree of freedom of design can be improved.

Description

【発明の詳細な説明】 &発明の詳細な説明 (産業上の利用分野) 本発明は、半導体基板に予め標準となる単体の半導体素
子を複fli!形成したマスタウェーハ・を用意してお
き、後で仕様に合わせて該半導体素子間を配線するだけ
で所定の半導体集積回路装置を形成することができるよ
うにしたマスタスライス集積回路装置に関する。
[Detailed Description of the Invention] &Detailed Description of the Invention (Industrial Application Field) The present invention provides a method for attaching standard single semiconductor elements to a semiconductor substrate in advance! The present invention relates to a master slice integrated circuit device in which a predetermined semiconductor integrated circuit device can be formed simply by preparing a formed master wafer and later wiring the semiconductor elements according to specifications.

(従来例) 従来、このようなマスタスライス集積回路装置は、第3
図に示すものがある。
(Conventional example) Conventionally, such a master slice integrated circuit device has a third
There is one shown in the figure.

同図は、予め標準となる単体の半導体素子を規則正しく
形成した半導体チップ1の構造を示した構成説明図であ
シ、同一の構造の多数の半導体チップlが半導体基板に
一体に形成されて未だ個個に分離(スクライプ)されて
いない状態のものをマスタウェーハと呼んでいる。
This figure is a configuration explanatory diagram showing the structure of a semiconductor chip 1 in which standard single semiconductor elements are regularly formed. A wafer that has not been individually separated (scribed) is called a master wafer.

該マスタウェーハは周知の半導体集積回路技術の製造工
程で構造され、各半導体チップ1には第3図に示すよう
に、外周縁に電源供給用のボンディングパッド2及びグ
ランド用のボンディングパッド3、更に外部とで信号の
授受を行なうための入出力用のボンディングパッド4が
形成され、半導体チップ1の中央部分に基準セル5が形
成されている。
The master wafer is constructed using a well-known manufacturing process of semiconductor integrated circuit technology, and each semiconductor chip 1 has a bonding pad 2 for power supply and a bonding pad 3 for grounding on the outer periphery, as shown in FIG. Input/output bonding pads 4 for exchanging signals with the outside are formed, and a reference cell 5 is formed in the center of the semiconductor chip 1.

夫々のボンディングパラr2,3.4は、後述する組立
工程において接続されるボンディングワイヤーの直径よ
り若干大きく、例えば、縦と横の幅を/O0μ77LX
/O0μm程度に設計されている。又、該組立工程にお
いて隣シ合リボンディングワイヤーが相互に接触するの
を防止するため、一定の距離以上の間隔で離して設けら
れている。
Each bonding parameter r2, 3.4 is slightly larger than the diameter of the bonding wire to be connected in the assembly process described later, for example, the vertical and horizontal width is /O0μ77LX
/O0μm. Further, in order to prevent adjacent rebonding wires from coming into contact with each other during the assembly process, they are spaced apart by a certain distance or more.

夫々の基準セル5は大きさ及び形状等が予め決められた
複数の半導体素子例えばトランジスタやコンデンサー、
抵抗などが互いに配線されない単体の状態で形成されて
いる。
Each reference cell 5 includes a plurality of semiconductor elements whose size and shape are predetermined, such as transistors, capacitors, etc.
Resistors and other components are formed as a single unit without being wired together.

基準セル5と入出力用ボンディング/1ツド4間の領域
には、点線で示されるように、各ボンディングパッド4
の周辺に周辺1./Oセル6が形成され、各周辺力セル
6は、複数の出力バッファ回路7と、入カバソファ回路
8が形成されている。出力7777回路7は後述する配
線で基準セル5により形成される回路からの出力信号を
電力増幅して出力する回路でちゃ、入力バッファ回路8
は人出カボンデイングパッド4を介して外部よ)入力さ
れる入力信号を受信する回路である。
In the area between the reference cell 5 and the input/output bonding pad 4, each bonding pad 4 is provided as shown by the dotted line.
Surrounding around 1. /O cells 6 are formed, and each peripheral force cell 6 has a plurality of output buffer circuits 7 and an input buffer circuit 8 formed therein. The output 7777 circuit 7 is a circuit that amplifies the power of the output signal from the circuit formed by the reference cell 5 and outputs it by wiring to be described later, and the input buffer circuit 8
is a circuit that receives an input signal inputted from the outside via the attendance pad 4.

尚、マスタウェーハの段階では、出力7777回路7及
び入力バッファ回路8の入力端子及び出力端子はいずれ
にも配線されないで開放状態となっている。
At the master wafer stage, the input terminals and output terminals of the output 7777 circuit 7 and the input buffer circuit 8 are not wired and are in an open state.

このように相互に接続されていない出力バッファ回路7
、入力バッファ回路8及び基準セル5内の半導体素子間
の配線及びボンディングパッドとの配線は、後述するよ
うに顧客等の仕様に応じて形成され、配線パターンに応
じて任意の集積回路装置を形成することができるように
なっている。
Output buffer circuits 7 that are not connected to each other in this way
The wiring between the input buffer circuit 8 and the semiconductor elements in the reference cell 5 and the wiring with the bonding pads are formed according to the specifications of the customer, etc., as described later, and an arbitrary integrated circuit device can be formed according to the wiring pattern. It is now possible to do so.

次に、このように予め特定の回路を構成していないマス
タウェーハを用いて仕様に合わせた集積回路装置を形成
するには、半導体集積回路技術の製造工程でもって、基
準セル5内の半導体素子間をアルミニウム層の配線で接
続すると同時に、該基準セル5にて形成される回路と出
力バッファ回路7又は入力バッファ回路8の入出力端子
を該アルミニウム層の配線で接続する。このように後で
配線することをパーソナライズ配線と呼ぶ。ここで、入
カパツフア回路80入力端子に接続された入出力ボンデ
ィングパッド4は信号入力用のボンディングパッドとな
り、出力バッファ回路7の出力端子に配線が行なわれた
入出力ボンディングノ鷹ッド4は信号出力用のボンディ
ングパッドとして使用されることとなる。尚、図示して
いないが、入力バッファ回路8は外部からの高電圧の静
電気に対して内部等の回路を保護するための入力保護回
路を介して入力ボンディングパッド4に接続される。
Next, in order to form an integrated circuit device according to specifications using a master wafer that does not have a specific circuit configured in advance, the semiconductor elements in the reference cell 5 are At the same time, the circuit formed by the reference cell 5 and the input/output terminal of the output buffer circuit 7 or the input buffer circuit 8 are connected by the aluminum layer wiring. This later wiring is called personalized wiring. Here, the input/output bonding pad 4 connected to the input terminal of the input buffer circuit 80 serves as a bonding pad for signal input, and the input/output bonding pad 4 connected to the output terminal of the output buffer circuit 7 serves as a signal input bonding pad. It will be used as a bonding pad for output. Although not shown, the input buffer circuit 8 is connected to the input bonding pad 4 via an input protection circuit for protecting internal circuits from high-voltage static electricity from the outside.

そして、この・鷹−ソナライズ配線を完了し、マスタウ
ェーハを個々の半導体チップ1に分離(スクライブ)し
た後、組立工程において夫々の半導体チップ1をパッケ
ージに収容し、ボンディングパッド2,3.4を該パッ
ケージの所定のリード端子にボンディングワイヤーを介
して接続することにより、仕様に合わせた集積回路装置
を完成することができる。
After completing this hawk-sonization wiring and separating (scribing) the master wafer into individual semiconductor chips 1, each semiconductor chip 1 is housed in a package in the assembly process, and the bonding pads 2, 3.4 are By connecting to predetermined lead terminals of the package via bonding wires, an integrated circuit device that meets specifications can be completed.

このように、マスタスライス集積回路装置は、予めマス
タウェーハを用意しておき、仕様に応じて後で配線だけ
行なえば所望の集積回路装置を形成することができるの
で、仕様の決定から完成までが短時間で済み、又、配線
用のマスクツターンを設計するだけでよいので歩出りが
良い、あるいは設計から量産に至るまでのターン・アラ
ウントトタイム(turn around time 
)  が短い等の利点がある。
In this way, with a master slice integrated circuit device, the desired integrated circuit device can be formed by preparing a master wafer in advance and then wiring it according to the specifications, so that the entire process from specification determination to completion can be completed. It takes only a short time, and because it is only necessary to design the mask turn for wiring, the turn around time from design to mass production is shortened.
) has the advantage of being short.

(発明が解決しようとする問題点) しかしながらこのようなマスタスライス集積回路装置に
あっては、入出力ボンディングパッド毎に形成された1
対の入力バッファ回路及び出カッくソファ回路は画一化
された回路構成であるため電力増幅率が一定である。こ
のため、外部に接続される装置例えばモニタの駆動等を
直接性なうために大電力の出力バッファ回路が必要とな
っても変更することができない問題や、この問題を解決
するために複数の入出力ボンディングパット9及び出力
バッファ回路を並列に接続して大電力を得ようとすると
、実質的に入出力ボンディングパッドの数が減ってしま
う等の問題があった。
(Problems to be Solved by the Invention) However, in such a master slice integrated circuit device, one
Since the paired input buffer circuit and output sofa circuit have a uniform circuit configuration, the power amplification factor is constant. For this reason, even if a high-power output buffer circuit is required to directly drive an externally connected device such as a monitor, there are problems in which it cannot be changed, and in order to solve this problem, multiple output buffer circuits are required. If an attempt is made to obtain a large amount of power by connecting the input/output bonding pads 9 and the output buffer circuit in parallel, there is a problem that the number of input/output bonding pads is substantially reduced.

逆に、小電力の出力信号で十分の場合であっても出カバ
ソファ回路を小電力用に変更することができないので、
消費電力を減らすことができない問題があった。
Conversely, even if a low power output signal is sufficient, the output sofa circuit cannot be changed to a low power output signal.
There was a problem that power consumption could not be reduced.

更に、入カバン77回路についても同様の問題があった
Furthermore, there was a similar problem with the bag 77 circuit.

(問題点を解決するための手段) 本発明はこのような問題点に鑑みてなされたものであシ
、入カッ2ツファ回路及び又は出力バラフッ回路の入出
力特性をパーソナライズ配線によって設定することがで
きるマスタスライス集積回路装置を提供することを目的
とする。
(Means for Solving the Problems) The present invention has been made in view of the above problems, and it is possible to set the input/output characteristics of the input cutoff circuit and/or the output balance circuit by personalized wiring. The purpose of the present invention is to provide a master slice integrated circuit device that can be used as a master slice integrated circuit device.

この目的を達成するため本発明は、マスタウェーハの段
階で各半導体チップに形成されたボンディングパッドの
周辺に、所定の入出力特性を有する複数の入力バッファ
回路群及び又は所定の入出力特性を有する複数の出力バ
ッファ回路群を形成した周辺めセルを設け、ノーツナラ
イズ配線の際に適宜の数の入力バッファ回路及び又は出
力バラフッ回路を並列に接続することによって入出力特
性を適宜に設定することができるようにしたことを技術
的要点とする。
To achieve this objective, the present invention provides a plurality of input buffer circuit groups having predetermined input/output characteristics and/or a plurality of input buffer circuit groups having predetermined input/output characteristics around bonding pads formed on each semiconductor chip at the master wafer stage. Input/output characteristics can be set appropriately by providing peripheral cells forming a plurality of output buffer circuit groups and connecting an appropriate number of input buffer circuits and/or output balance circuits in parallel during normalization wiring. The technical point is that this was done.

(実施例) 以下、本発明によるマスタスライス集積回路装置の一実
施例を図面と共に説明する。第1図は本発明にかかわる
要部構造を示す。従来との相違点について構造を述べる
と、マスタウェーハの段階における個々の半導体チップ
9の外周縁に入出力用のボンディングパッド/Oが形成
され、半導体チップ9の中央部分に形成された未配線の
基準セル11とボンディングパッド/Oの間の領域には
、周辺めセル12が形成されている。
(Embodiment) Hereinafter, one embodiment of a master slice integrated circuit device according to the present invention will be described with reference to the drawings. FIG. 1 shows the main structure related to the present invention. Regarding the structure, the difference from the conventional one is that bonding pads/O for input/output are formed on the outer periphery of each semiconductor chip 9 at the master wafer stage, and unwired pads/O are formed in the center of the semiconductor chip 9. A peripheral cell 12 is formed in a region between the reference cell 11 and the bonding pad /O.

それぞれの周辺vOセル12には、複数の出力バッファ
回路13及び複数の入力バッファ回路14が形成されて
いる。各出力バッファ回路13は、第3図に示した従来
の出カバン77回路7の最大出力電流が約5mA程度で
あるのに対し約2mA程度の能力を有する小形の回路と
なってる。また、入力バッファ回路14についても同様
に従来の入力バッファ回路8に比べて小容量のものとな
っている。
A plurality of output buffer circuits 13 and a plurality of input buffer circuits 14 are formed in each peripheral vO cell 12. Each output buffer circuit 13 is a small circuit having a capacity of about 2 mA, whereas the maximum output current of the conventional output bag 77 circuit 7 shown in FIG. 3 is about 5 mA. Similarly, the input buffer circuit 14 has a smaller capacity than the conventional input buffer circuit 8.

そして、全ての出力バッファ回路13及び入力バッファ
回路14の入力端子及び出力端子は配線されないで開放
状態となっている。
The input terminals and output terminals of all the output buffer circuits 13 and input buffer circuits 14 are not wired and are in an open state.

次に、パーソナライズ配線を行なう場合、従来の半導体
集積回路技術による製造工程により、必要な出力電流に
応じて複数の出力バッファ回路13を並列に配線し、そ
れらの出力端子を入出力ボンディングパッド/Oに接続
し、入力端子を基準セル11の回路に接続することによ
り、入出力ボンデイン/パッド/Oを所定の電流出力が
得られる出力パッドとして使用できる。
Next, when performing personalized wiring, a plurality of output buffer circuits 13 are wired in parallel according to the required output current using a manufacturing process using conventional semiconductor integrated circuit technology, and their output terminals are connected to input/output bonding pads/O By connecting the input terminal to the circuit of the reference cell 11, the input/output bond/pad/O can be used as an output pad from which a predetermined current output can be obtained.

一方、入出力ボンディングパッド/Oを外部からの信号
入力用とする場合には、適宜に入力バッファ回路14を
並列接続し、それらの入力端子を入出力ボンディングパ
ッド/Oに、出力端子を基準セル11側へそれぞれ接続
する。
On the other hand, when the input/output bonding pad /O is used for inputting signals from the outside, input buffer circuits 14 are connected in parallel as appropriate, and their input terminals are connected to the input/output bonding pad /O, and the output terminal is connected to the reference cell. Connect each to the 11 side.

このように、予め小容量の人カバソファ回路14及び出
力バッファ回路13を入出力ボンディングパッド/Oの
周辺に形成しておくことで、ノーツナライズ配線によっ
て小容量から大容量の範囲にわたつて出力電力及び入力
電力を設定することができ、設計の自由度を向上するこ
とができ。
In this way, by forming the small-capacity human cover sofa circuit 14 and the output buffer circuit 13 in advance around the input/output bonding pad/O, the output power and Input power can be set, improving design freedom.

尚、この実施例では出カッ々ソファ回路13及び入力バ
ッファ回路14を備えたが、いずれか一方のバッファ回
路を形成するようにしてもよい。
Although this embodiment includes the output sofa circuit 13 and the input buffer circuit 14, either one of the buffer circuits may be formed.

第2図は更に他の実施例を示し、第1図に示した実施例
の周辺のセル12に設けられた出力バッファ回路13及
び入力バッファ回路14の配列を変えたものであり、出
力7777回路13の一群と、入力バッファ回路14の
一群を相互いに向かい合わせたように形成しである。
FIG. 2 shows still another embodiment, in which the arrangement of the output buffer circuit 13 and input buffer circuit 14 provided in the peripheral cells 12 of the embodiment shown in FIG. A group of input buffer circuits 13 and a group of input buffer circuits 14 are formed so as to face each other.

この実施例によれば、パーソナライズ配線により所望の
電力各号の出力7777回路14あるいは入力バッファ
回路13を並列接続にて形成する場合に、配線を容易に
行なうことができる等の効果が得られる。
According to this embodiment, when the output 7777 circuits 14 or the input buffer circuits 13 for each desired power type are formed in parallel by personalized wiring, the wiring can be easily performed.

尚、上記2実施例において、パーソナライズ配線を行な
う場合、入力バッファ回路14と入出力ボンディングパ
ッド1oとの間は、外部からの静電気等から内部の回路
を保護するための入力保護回路を介して接続されるもの
とする。該入力保護回路は、図示していないが、例えば
各入出力ボンディングパッド/Oの近傍に形成されてい
る。
In the above two embodiments, when performing personalized wiring, the input buffer circuit 14 and the input/output bonding pad 1o are connected via an input protection circuit to protect the internal circuit from external static electricity, etc. shall be carried out. Although not shown, the input protection circuit is formed near each input/output bonding pad /O, for example.

(発明の効果) 以上説明したように本発明によれば、マスタウェーハの
段階で各半導体チップに形成されたボンディング・ぐラ
ド毎に、所定の入出力特性を有する複数の入カパツファ
回路群及び又は所定の入出力特性を有する複数の出力バ
ッファ回路群を形成した周辺めセルを設け、ノく−ソナ
ライズ配線の際に適宜の数の入カパツフア回路及び又は
出力バッファ回路を並列に接続することによって入出力
特性を適宜に設定することができるようにしたので、設
計の融通性が増し、広い利用分野に対応したマスタスラ
イス集積回路装置を提供することができる。
(Effects of the Invention) As explained above, according to the present invention, for each bonding layer formed on each semiconductor chip at the master wafer stage, a plurality of input buffer circuit groups and/or By providing a peripheral cell in which a plurality of output buffer circuit groups having predetermined input/output characteristics are formed, and by connecting an appropriate number of input buffer circuits and/or output buffer circuits in parallel when wiring Since the output characteristics can be set appropriately, design flexibility is increased, and a master slice integrated circuit device that can be used in a wide range of fields can be provided.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明によるマスタスライス集積回路装置の一
実施例を示す要部構成図、第2図は他の実施例を示す要
部構成図、第3図は従来のマスクスライス集積回路装置
を示す構成図である。 9:半導体チップ /O:入出力用ボンディングパッド 11:基準セル 12:周辺力セル 13:出カバソファ回路 14:入力バッファ回路 (ほか2名) 第  1  図 1X2rl!J
FIG. 1 is a block diagram of main parts showing one embodiment of a master slice integrated circuit device according to the present invention, FIG. 2 is a block diagram of main parts showing another embodiment, and FIG. 3 is a block diagram of main parts of a conventional mask slice integrated circuit device. FIG. 9: Semiconductor chip/O: Input/output bonding pad 11: Reference cell 12: Peripheral force cell 13: Output cover sofa circuit 14: Input buffer circuit (and 2 others) 1st Figure 1X2rl! J

Claims (1)

【特許請求の範囲】[Claims]  入出力用のボンディングパッドと、複数の半導体素子
を有する基準セルと、該入出力のボンディングパッドと
基準セル間で信号の授受を行なうためのパーソナライズ
配線が施された周辺I/Oセルとを備えたマスタスライ
ス集積回路装置において、前記周辺I/Oセルは所定の
入出力特性を有する複数の入力バッファ回路群及び又は
所定の入出力特性を有する複数の出力バッファ回路群を
備え、パーソナライズ配線により該入力バッファ回路及
び又は出力バッファ回路を並列に接続する構成であるこ
とを特徴とするマスタスライス集積回路装置。
It is equipped with an input/output bonding pad, a reference cell having a plurality of semiconductor elements, and a peripheral I/O cell with personalized wiring for transmitting and receiving signals between the input/output bonding pad and the reference cell. In the master slice integrated circuit device, the peripheral I/O cells include a plurality of input buffer circuit groups having predetermined input/output characteristics and/or a plurality of output buffer circuit groups having predetermined input/output characteristics, and the peripheral I/O cells are provided with a plurality of input buffer circuit groups having predetermined input/output characteristics, and are connected to A master slice integrated circuit device characterized by having a configuration in which an input buffer circuit and/or an output buffer circuit are connected in parallel.
JP12715186A 1986-06-03 1986-06-03 Master-slice integrated circuit device Pending JPS62285443A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12715186A JPS62285443A (en) 1986-06-03 1986-06-03 Master-slice integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12715186A JPS62285443A (en) 1986-06-03 1986-06-03 Master-slice integrated circuit device

Publications (1)

Publication Number Publication Date
JPS62285443A true JPS62285443A (en) 1987-12-11

Family

ID=14952883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12715186A Pending JPS62285443A (en) 1986-06-03 1986-06-03 Master-slice integrated circuit device

Country Status (1)

Country Link
JP (1) JPS62285443A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01135038A (en) * 1987-11-20 1989-05-26 Hitachi Ltd Semiconductor device
JPH01289138A (en) * 1988-05-16 1989-11-21 Toshiba Corp Master slice type semiconductor integrated circuit
JPH02275653A (en) * 1989-04-17 1990-11-09 Nec Corp Semiconductor device
JPH03274765A (en) * 1990-03-23 1991-12-05 Mitsubishi Electric Corp Master slice type semiconductor device
JP2007195191A (en) * 2006-01-19 2007-08-02 Altera Corp Modular i/o bank architecture

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01135038A (en) * 1987-11-20 1989-05-26 Hitachi Ltd Semiconductor device
JPH01289138A (en) * 1988-05-16 1989-11-21 Toshiba Corp Master slice type semiconductor integrated circuit
JPH02275653A (en) * 1989-04-17 1990-11-09 Nec Corp Semiconductor device
JPH03274765A (en) * 1990-03-23 1991-12-05 Mitsubishi Electric Corp Master slice type semiconductor device
JP2007195191A (en) * 2006-01-19 2007-08-02 Altera Corp Modular i/o bank architecture

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